US6951709B2
Expired / Lapsed
US
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Method of fabricating a semiconductor multilevel interconnect structure
Assignee: Micron Technology Inc
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Filing: 2002-05-03
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Granted: 2005-10-04
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Expires: 2022-05-03
Abstract
Abstract A method of fabricating a semiconductor multilevel interconnect structure employs a dual hardmask technique in a dual damascene process. The method includes using amorphous carbon as a first hardmask layer capable of being etched by a second etch process, and a second hardmask layer capable of being etched by a first etch process, as a dual hardmask. By virtue of the selective etch chemistry employed with the dual hardmask, the method affords flexibility unattainable with conventional processes. The via is never in contact with the photoresist, thus eliminating residual photoresist at the trench/via edge and the potential “poisoning” of the intermetal dielectric layer. Since trench/via imaging is completed before further etching, any patterning misalignments can be easily reworked. Because the amorphous carbon layer and the second hardmask layer are used as the dual hardmask, the photoresist can be made thinner and thus optimized for the best imaging performance.
Inventors
- 👤 Weimin Li
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:00
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/73; H10P50/20; H10P50/28; H10P50/286; H10P50/71; H10P76/00; H10P76/40; H10P76/403; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/084; H10W20/087
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
241 words
A method of fabricating a semiconductor multilevel interconnect structure, said method comprising: forming a first layer comprising a first intermetal dielectric layer and a metal portion; depositing on said first layer a first protective layer; depositing on said first protective layer a second intermetal dielectric layer; depositing on said second intermetal dielectric layer a second protective layer; depositing on said second protective layer a layer of amorphous carbon as a first hardmask layer; depositing on said amorphous carbon layer a second hardmask layer; depositing on said second hardmask layer a first layer of photoresist; forming a first portion of a via by etching said second hardmask layer; forming a second portion of said via by etching the amorphous carbon layer and thereby removing the first layer of photoresist; depositing on said etched second hardmask layer a second layer of photoresist; forming a first portion of a trench by etching said etched second hardmask layer; forming a third portion of said via by etching the second protective layer and the second intermetal dielectric layer; forming a second portion of said trench by etching the etched amorphous carbon layer; forming a third portion of said trench by etching the etched second protective layer and the etched second intermetal dielectric layer and thereby removing all of the etched second hardmask layer; removing said etched amorphous carbon layer; and removing said etched second protective layer, and said first protective layer from above the metal portion.
Claim 2
Independent Claim
241 words
A method of fabricating a semiconductor multilevel interconnect structure, said method comprising: forming a first layer comprising a first intermetal dielectric layer and a metal portion; depositing on said first layer a first protective layer; depositing on said first protective layer a second intermetal dielectric layer; depositing on said second intermetal dielectric layer a second protective layer; depositing on said second protective layer a layer of amorphous carbon as a first hardmask layer; depositing on said amorphous carbon layer a second hardmask layer; depositing on said second hardmask layer a first layer of photoresist; forming a first portion of a via by etching said second hardmask layer; forming a second portion of said via by etching the amorphous carbon layer and thereby removing the first layer of photoresist; depositing on said etched second hardmask layer a second layer of photoresist; forming a first portion of a trench by etching said etched second hardmask layer; forming a third portion of said via by etching the second protective layer and the second intermetal dielectric layer; forming a second portion of said trench by etching the etched amorphous carbon layer; forming a third portion of said trench by etching the etched second protective layer and the etched second intermetal dielectric layer and thereby removing all of the etched second hardmask layer; removing said etched amorphous carbon layer; and removing said etched second protective layer, and said first protective layer from above the metal portion.
Claim 3
Dependent Claim
28 words
A method according to claim 1 , wherein said first protective layer comprises a material selected from the group consisting of silicon nitrides, silicon carbides, and silicon carbo-nitrides.
Claim 4
Dependent Claim
32 words
A method according to claim 1 , wherein said second protective layer comprises a material selected from the group consisting of silicon oxides, silicon nitrides, silicon carbo-nitrides, silicon carbides, and titanium nitrides.
Claim 5
Dependent Claim
32 words
A method according to claim 1 , wherein said second hardmask layer comprises a material selected from the group consisting of silicon oxides, silicon nitrides, silicon carbo-nitrides, silicon carbides, and titanium nitrides.
Claim 6
Dependent Claim
17 words
A method according to claim 1 , wherein said second protective layer is a dielectric antireflective coating.
Claim 7
Dependent Claim
17 words
A method according to claim 1 , wherein said second hardmask layer is a dielectric antireflective coating.
Claim 8
Dependent Claim
57 words
A method according to claim 1 , wherein said step of forming the second portion of the via by etching the amorphous carbon layer comprises etching with an etchant selected from the group consisting of O 2 plasma, N 2 and O 2 plasma, N 2 O plasma, NO plasma, H 2 plasma, and NH 3 plasma.
Claim 9
Dependent Claim
50 words
A method according to claim 1 , wherein said step of removing the etched amorphous carbon layer comprises etching with an etchant selected from the group consisting of O 2 plasma, N 2 and O 2 plasma, N 2 O plasma, NO plasma, H 2 plasma, and NH 3 plasma.
Claim 10
Dependent Claim
46 words
A method according to claim 1 , wherein said step of removing the etched amorphous carbon layer comprises hot etching with an etchant selected from the group consisting of O 2 , O 3 , N 2 O, NO, H 2 , and NH 3 .
Claim 11
Dependent Claim
32 words
A method according to claim 1 , wherein said step of removing the etched amorphous carbon layer comprises etching with an etchant having the formula C x F y H z .
Claim 12
Dependent Claim
27 words
A method according to claim 1 , wherein said second hardmask layer is etched with an etchant having the formula C x F y H z .
Claim 13
Dependent Claim
27 words
A method according to claim 1 , wherein said second protective layer is etched with an etchant having the formula C x F y H z .
Claim 14
Dependent Claim
28 words
A method according to claim 1 , wherein said second intermetal dielectric layer is etched with an etchant having the formula C x F y H z .
Claim 15
Dependent Claim
27 words
A method according to claim 1 , wherein said first protective layer is etched with an etchant having the formula C x F y H z .
Claim 16
Dependent Claim
13 words
A method according to claim 1 , wherein said metal portion is Cu.
Claim 17
Independent Claim
227 words
A method of fabricating a semiconductor multilevel interconnect structure, said method comprising: forming a first layer comprising a first intermetal dielectric layer and a metal portion; depositing on said first layer a first protective layer; depositing on said first protective layer a second intermetal dielectric layer; depositing on said second intermetal dielectric layer a second protective layer; depositing on said second protective layer a layer of amorphous carbon as a first hardmask layer; depositing on said amorphous carbon layer a second hardmask layer; depositing on said second hardmask layer a first layer of photoresist; forming a first portion of a trench by etching said second hardmask layer; depositing a second layer of photoresist on said etched second hardmask layer and on a portion of the amorphous carbon layer; forming a first portion of a via by etching said amorphous carbon layer; forming a second portion of said via by etching the second protective layer and the second intermetal dielectric layer; forming a second portion of said trench by etching the etched amorphous carbon layer; forming a third portion of said trench by etching the etched second protective layer and the etched second intermetal dielectric layer and thereby removing all of the etched second hardmask layer; removing said etched amorphous carbon layer; and removing said etched second protective layer, and said protective layer from above the metal portion.
Claim 18
Independent Claim
227 words
A method of fabricating a semiconductor multilevel interconnect structure, said method comprising: forming a first layer comprising a first intermetal dielectric layer and a metal portion; depositing on said first layer a first protective layer; depositing on said first protective layer a second intermetal dielectric layer; depositing on said second intermetal dielectric layer a second protective layer; depositing on said second protective layer a layer of amorphous carbon as a first hardmask layer; depositing on said amorphous carbon layer a second hardmask layer; depositing on said second hardmask layer a first layer of photoresist; forming a first portion of a trench by etching said second hardmask layer; depositing a second layer of photoresist on said etched second hardmask layer and on a portion of the amorphous carbon layer; forming a first portion of a via by etching said amorphous carbon layer; forming a second portion of said via by etching the second protective layer and the second intermetal dielectric layer; forming a second portion of said trench by etching the etched amorphous carbon layer; forming a third portion of said trench by etching the etched second protective layer and the etched second intermetal dielectric layer and thereby removing all of the etched second hardmask layer; removing said etched amorphous carbon layer; and removing said etched second protective layer, and said protective layer from above the metal portion.
Claim 19
Dependent Claim
28 words
A method according to claim 16 , wherein said first protective layer comprises a material selected from the group consisting of silicon nitrides, silicon carbides, and silicon carbo-nitrides.
Claim 20
Dependent Claim
32 words
A method according to claim 16 , wherein said second protective layer comprises a material selected from the group consisting of silicon oxides, silicon nitrides, silicon carbo-nitrides, silicon carbides, and titanium nitrides.
Claim 21
Dependent Claim
32 words
A method according to claim 16 , wherein said second hardmask layer comprises a material selected from the group consisting of silicon oxides, silicon nitrides, silicon carbo-nitrides, silicon carbides, and titanium nitrides.
Claim 22
Dependent Claim
17 words
A method according to claim 16 , wherein said second protective layer is a dielectric antireflective coating.
Claim 23
Dependent Claim
17 words
A method according to claim 16 , wherein said second hardmask layer is a dielectric antireflective coating.
Claim 24
Dependent Claim
57 words
A method according to claim 16 , wherein said step of forming the first portion of the via by etching the amorphous carbon layer comprises etching with an etchant selected from the group consisting of O 2 plasma, N 2 and O 2 plasma, N 2 O plasma, NO plasma, H 2 plasma, and NH 3 plasma.
Claim 25
Dependent Claim
50 words
A method according to claim 16 , wherein said step of removing the etched amorphous carbon layer comprises etching with an etchant selected from the group consisting of O 2 plasma, N 2 and O 2 plasma, N 2 O plasma, NO plasma, H 2 plasma, and NH 3 plasma.
Claim 26
Dependent Claim
46 words
A method according to claim 16 , wherein said step of removing the etched amorphous carbon layer comprises hot etching with an etchant selected from the group consisting of O 2 , O 3 , N 2 O, NO, H 2 , and NH 3 .
Claim 27
Dependent Claim
32 words
A method according to claim 16 , wherein said step of removing the etched amorphous carbon layer comprises etching with an etchant having the formula C x F y H z .
Claim 28
Dependent Claim
27 words
A method according to claim 16 , wherein said second hardmask layer is etched with an etchant having the formula C x F y H z .
Claim 29
Dependent Claim
27 words
A method according to claim 16 , wherein said second protective layer is etched with an etchant having the formula C x F y H z .
Claim 30
Dependent Claim
28 words
A method according to claim 16 , wherein said second intermetal dielectric layer is etched with an etchant having the formula C x F y H z .
Claim 31
Dependent Claim
27 words
A method according to claim 16 , wherein said first protective layer is etched with an etchant having the formula C x F y H z .
Claim 32
Dependent Claim
13 words
A method according to claim 16 , wherein said metal portion is Cu.
Claim 33
Independent Claim
178 words
A method of forming an integrated circuit interconnect comprising: forming a multilayer structure over a conductor fabricated as part of an integrated circuit, said multilayer structure comprising a first protective layer, an insulating layer, a second protective layer, a first hardmask layer etchable by a second etch process, and a second hardmask layer etchable by a first etch process different from said second etch process; forming an opening in said second hard mask layer using said first etch process; extending the length of said opening by etching said first hardmask layer using said second etch process; widening said opening in said first and second hardmask layers and said insulating layer such that said opening has a wider upper portion and a narrower lower portion; further extending the length of the narrower lower portion of said opening through said second protective layer, said insulating layer, and said first protective layer; and providing a conductor material in the wider portion of said opening in said insulating layer and in the narrower portion of said opening in said first protective layer.
Claim 34
Independent Claim
178 words
A method of forming an integrated circuit interconnect comprising: forming a multilayer structure over a conductor fabricated as part of an integrated circuit, said multilayer structure comprising a first protective layer, an insulating layer, a second protective layer, a first hardmask layer etchable by a second etch process, and a second hardmask layer etchable by a first etch process different from said second etch process; forming an opening in said second hard mask layer using said first etch process; extending the length of said opening by etching said first hardmask layer using said second etch process; widening said opening in said first and second hardmask layers and said insulating layer such that said opening has a wider upper portion and a narrower lower portion; further extending the length of the narrower lower portion of said opening through said second protective layer, said insulating layer, and said first protective layer; and providing a conductor material in the wider portion of said opening in said insulating layer and in the narrower portion of said opening in said first protective layer.
Claim 35
Dependent Claim
45 words
A method according to claim 31 , wherein said second etch process comprises etching with an etchant selected from the group consisting of O 2 plasma, N 2 and O 2 plasma, N 2 O plasma, NO plasma, H 2 plasma, and NH 3 plasma.
Claim 36
Dependent Claim
27 words
A method according to claim 31 , wherein said first etch process comprises etching with an etchant having the formula C x F y H z .
Claim 37
Independent Claim
213 words
A method of forming an integrated circuit interconnect comprising: forming a multilayer structure over a conductor fabricated as part of an integrated circuit, said multilayer structure comprising a first protective layer, an insulating layer, a second protective layer, a first hardmask layer etchable by a second etch process, and a second hardmask layer etchable by a first etch process different from said second etch process; forming an opening in said second hard mask layer using said first etch process; extending the length of said opening by etching said first hardmask layer using said second etch process such that said opening has a wider upper portion and a narrower lower portion; further extending the length of the narrower lower portion of said opening through said second protective layer, said insulating layer, and said first protective layer; extending the length of said wider upper portion of the opening through said first hardmask layer, said second protective layer, and said insulating layer; further extending the length of the narrower lower portion of said opening through said second protective layer, said insulating layer, and said first protective layer; and providing a conductor material in the wider portion of said opening in said insulating layer and in the narrower portion of said opening in said first protective layer.
Claim 38
Independent Claim
213 words
A method of forming an integrated circuit interconnect comprising: forming a multilayer structure over a conductor fabricated as part of an integrated circuit, said multilayer structure comprising a first protective layer, an insulating layer, a second protective layer, a first hardmask layer etchable by a second etch process, and a second hardmask layer etchable by a first etch process different from said second etch process; forming an opening in said second hard mask layer using said first etch process; extending the length of said opening by etching said first hardmask layer using said second etch process such that said opening has a wider upper portion and a narrower lower portion; further extending the length of the narrower lower portion of said opening through said second protective layer, said insulating layer, and said first protective layer; extending the length of said wider upper portion of the opening through said first hardmask layer, said second protective layer, and said insulating layer; further extending the length of the narrower lower portion of said opening through said second protective layer, said insulating layer, and said first protective layer; and providing a conductor material in the wider portion of said opening in said insulating layer and in the narrower portion of said opening in said first protective layer.
Claim 39
Dependent Claim
45 words
A method according to claim 34 , wherein said second etch process comprises etching with an etchant selected from the group consisting of O 2 plasma, N 2 and O 2 plasma, N 2 O plasma, NO plasma, H 2 plasma, and NH 3 plasma.
Claim 40
Dependent Claim
27 words
A method according to claim 34 , wherein said first etch process comprises etching with an etchant having the formula C x F y H z .
Claim 41
Independent Claim
107 words
A method of forming an opening for an interconnect comprising: forming a multilayer structure over a conductor, said multilayer structure comprising a first protective layer, an insulating layer, a second protective layer, a first mask layer etchable by a second etch process, and a second mask layer etchable by a first etch process different from said second etch process; and applying a plurality of etch processes to said multilayer structure to produce an opening extending through said insulating layer and said first protective layer which has a wider portion in at least a portion of said insulating layer and a narrower portion in said first protective layer.
Claim 42
Independent Claim
107 words
A method of forming an opening for an interconnect comprising: forming a multilayer structure over a conductor, said multilayer structure comprising a first protective layer, an insulating layer, a second protective layer, a first mask layer etchable by a second etch process, and a second mask layer etchable by a first etch process different from said second etch process; and applying a plurality of etch processes to said multilayer structure to produce an opening extending through said insulating layer and said first protective layer which has a wider portion in at least a portion of said insulating layer and a narrower portion in said first protective layer.
Claim 43
Dependent Claim
50 words
A method according to claim 37 , wherein at least one of said plurality of etch processes comprises etching with an etchant selected from the group consisting of O 2 plasma, N 2 and O 2 plasma, N 2 O plasma, NO plasma, H 2 plasma, and NH 3 plasma.
Claim 44
Dependent Claim
32 words
A method according to claim 37 , wherein at least one of said plurality of etch processes comprises etching with an etchant having the formula C x F y H z .
Claim 45
Independent Claim
87 words
A method of forming an opening for an interconnect comprising: forming a multilayer structure over a conductor, said multilayer structure comprising a first protective layer, an insulating layer, a second protective layer, a first mask layer etchable by a second etch process, and a second mask layer etchable by a first etch process different from said second etch process; and processing said multilayer structure using said first and second etch processes to produce a dual damascene opening extending through said insulating layer and said first protective layer.
Claim 46
Independent Claim
87 words
A method of forming an opening for an interconnect comprising: forming a multilayer structure over a conductor, said multilayer structure comprising a first protective layer, an insulating layer, a second protective layer, a first mask layer etchable by a second etch process, and a second mask layer etchable by a first etch process different from said second etch process; and processing said multilayer structure using said first and second etch processes to produce a dual damascene opening extending through said insulating layer and said first protective layer.
Claim 47
Dependent Claim
45 words
A method according to claim 40 , wherein said second etch process comprises etching with an etchant selected from the group consisting of O 2 plasma, N 2 and O 2 plasma, N 2 O plasma, NO plasma, H 2 plasma, and NH 3 plasma.
Claim 48
Dependent Claim
27 words
A method according to claim 40 , wherein said first etch process comprises etching with an etchant having the formula C x F y H z .
References Cited (Backward Citations)
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