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Structure and method of making strained semiconductor CMOS transistors having lattice-mismatched semiconductor regions underlying source and drain regions
Assignee: Semiconductor Manufacturing International Corp
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Filing: 2003-08-04
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Granted: 2005-05-10
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Expires: 2023-08-04
Abstract
Abstract A p-type field effect transistor (PFET) and an n-type field effect transistor (NFET) of an integrated circuit are provided. A first strain is applied to the channel region of the PFET but not the NFET via a lattice-mismatched semiconductor layer such as silicon germanium disposed in source and drain regions of only the PFET and not of the NFET. A process of making the PFET and NFET is provided. Trenches are etched in the areas to become the source and drain regions of the PFET and a lattice-mismatched silicon germanium layer is grown epitaxially therein to apply a strain to the channel region of the PFET adjacent thereto. A layer of silicon can be grown over the silicon germanium layer and a salicide formed from the layer of silicon to provide low-resistance source and drain regions.
Inventors
- 👤 Huajie Chen
- 👤 Dureseti Chidambarrao
- 👤 Oleg G. Gluschenkov
- 👤 An L. Steegen
- 👤 Haining S. Yang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 17:49
CPC Classifications
H; H10; H10D; H10D86/00; H10D86/01; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D30/00; H10D30/01; H10D30/021; H10D30/027; H10D30/0275; H10D30/60; H10D30/791; H10D30/797; H10D62/00; H10D62/01; H10D62/021; H10D84/0167; H10D84/017; H10D84/02; H10D84/03; H10D84/038; H10D84/80; H10D84/82; H10D84/83; H10D84/8312; H10D84/85; H10D84/856; H10D86/201; H10D62/80; H10D62/82; H10D62/822; H10D64/00; H10D64/01; H10D64/021; H10D84/8311; H10P; H10P14/00; H10P14/20; H10P14/27; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
112 words
An integrated circuit having complementary metal oxide semiconductor (CMOS) transistors including a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET), said PFET and said NFET each having a channel region and source and drain regions disposed in a first semiconductor region having a first composition, wherein a first strain is applied to said channel region of said PFET but not to said channel region of said NFET via second semiconductor regions having a second composition lattice-mismatched to said first semiconductor region, said second semiconductor regions underlying said source and drain regions of said PFET but not underlying said channel region of said PFET and not underlying said NFET.
Claim 2
Dependent Claim
112 words
An integrated circuit having complementary metal oxide semiconductor (CMOS) transistors including a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET), said PFET and said NFET each having a channel region and source and drain regions disposed in a first semiconductor region having a first composition, wherein a first strain is applied to said channel region of said PFET but not to said channel region of said NFET via second semiconductor regions having a second composition lattice-mismatched to said first semiconductor region, said second semiconductor regions underlying said source and drain regions of said PFET but not underlying said channel region of said PFET and not underlying said NFET.
Claim 3
Dependent Claim
43 words
The integrated circuit of claim 1 wherein said first semiconductor region has a main surface defined by a level of a gate dielectric of a gate stack of said PFET and said second semiconductor regions have top surfaces disposed beneath said main surface.
Claim 4
Dependent Claim
60 words
The integrated circuit of claim 1 wherein said first composition of said first semiconductor region is selected from the group consisting of silicon, silicon germanium and silicon carbide and said second composition of said second semiconductor regions is another composition different from said first composition, said another composition selected from the group consisting of silicon, silicon germanium and silicon carbide.
Claim 5
Dependent Claim
23 words
The integrated circuit of claim 1 wherein said first composition consists essentially of silicon and said second composition consists essentially of silicon germanium.
Claim 6
Dependent Claim
84 words
The integrated circuit of claim 1 wherein said first composition consists essentially of silicon germanium according to a first formula Si x1 Ge y1 , where x1 and y1 are percentages, x1+y1=100%, y1 being at least one percent and said second composition consists essentially of silicon germanium according to a second formula Si x2 Ge y2 , where x2 and y2 are percentages, x2+y2=100%, y2 being at least one percent, wherein x1 is not equal to x2 and y1 is not equal to y2.
Claim 7
Dependent Claim
14 words
The integrated circuit of claim 1 wherein said first strain is a compressive strain.
Claim 8
Dependent Claim
24 words
The integrated circuit of claim 4 wherein said second composition consists essentially of silicon germanium having a germanium content of at least one percent.
Claim 9
Dependent Claim
28 words
The integrated circuit of claim 1 , further comprising silicide regions contacting gate conductors and said source regions and said drain regions of said PFET and said NFET.
Claim 10
Dependent Claim
17 words
The integrated circuit of claim 8 wherein said silicide regions consist essentially of a silicide of cobalt.
Claim 11
Dependent Claim
26 words
The integrated circuit of claim 1 wherein the second semiconductor regions are thin epitaxial layers disposed in trenches adjacent to said channel region of said NFET.
Claim 12
Dependent Claim
142 words
An integrated circuit having complementary metal oxide semiconductor (CMOS) transistors including a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET), the NFET and the PFET each having a channel region and source and drain regions disposed in a first semiconductor region consisting essentially of silicon, wherein a first strain is applied to the channel region of the PFET but not to the channel region of the NFET via buried lattice-mismatched semiconductor regions consisting essentially of silicon germanium underlying the source and drain regions of the PFET but not underlying the channel region of the PFET and not underlying the NFET, said silicon germanium of said buried lattice-mismatched semiconductor regions having a composition according to the formula Si x Ge y where x and y are percentages each being at least one percent, x plus y equaling 100 percent.
Claim 13
Dependent Claim
142 words
An integrated circuit having complementary metal oxide semiconductor (CMOS) transistors including a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET), the NFET and the PFET each having a channel region and source and drain regions disposed in a first semiconductor region consisting essentially of silicon, wherein a first strain is applied to the channel region of the PFET but not to the channel region of the NFET via buried lattice-mismatched semiconductor regions consisting essentially of silicon germanium underlying the source and drain regions of the PFET but not underlying the channel region of the PFET and not underlying the NFET, said silicon germanium of said buried lattice-mismatched semiconductor regions having a composition according to the formula Si x Ge y where x and y are percentages each being at least one percent, x plus y equaling 100 percent.
References Cited (Backward Citations)
US20040065927A1
Cited
US6703648B1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2008-05-09 | 2008-11-08 | 2009-05-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-05-09 | 2012-11-08 | 2013-05-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-05-09 | 2016-11-08 | 2017-05-10 | $7700.00 | Window Closed / Lapsed |