US6792373B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Methods and apparatus for semiconductor testing
Assignee: In Depth Test LLC
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Filing: 2002-05-24
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Granted: 2004-09-14
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Expires: 2022-05-24
Abstract
Abstract A method and apparatus for testing semiconductors according to various aspects of the present invention comprises a test system comprising an outlier identification element configured to identify significant data in a set of test results. The test system may be configured to provide the data in an output report. The outlier identification element suitably performs the analysis at run time. The outlier identification element may also operate in conjunction with a smoothing system to smooth the data and identify trends and departures from test result norms.
Inventors
- 👤 Eric Paul Tabor
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:47
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/23
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
45 words
A test system, comprising: a tester configured to test a component and generate test data; and a computer connected to the tester and configured to receive the test data, identify an outlier in the test data, and generate an output report including the identified outlier.
Claim 2
Dependent Claim
45 words
A test system, comprising: a tester configured to test a component and generate test data; and a computer connected to the tester and configured to receive the test data, identify an outlier in the test data, and generate an output report including the identified outlier.
Claim 3
Dependent Claim
27 words
A test system according to claim 1 , wherein the computer is configured to operate in conjunction with a set of configuration data in a recipe file.
Claim 4
Dependent Claim
22 words
A test system according to claim 1 , wherein the test data corresponds to a section group of components on a wafer.
Claim 5
Dependent Claim
25 words
A test system according to claim 1 , wherein the computer is configured to automatically calibrate a sensitivity of the computer to the test data.
Claim 6
Dependent Claim
23 words
A test system according to claim 1 , wherein the computer further comprises a data correlation element configured to correlate the test data.
Claim 7
Dependent Claim
20 words
A test system according to claim 1 , wherein the computer is configured to identify the outlier at run time.
Claim 8
Dependent Claim
49 words
A test system according to claim 1 , wherein the computer further comprises a data smoothing element configured to receive the test data and smooth the test data, and wherein the computer is configured to receive the smoothed test data and identify the outlier in the smoothed test data.
Claim 9
Dependent Claim
48 words
A data analysis system for semiconductor test data, comprising a computer system, wherein the computer system is configured to operate: a supplementary data analysis element configured to identify outliers in the semiconductor test data; and an output element configured to generate an output report including the identified outliers.
Claim 10
Dependent Claim
48 words
A data analysis system for semiconductor test data, comprising a computer system, wherein the computer system is configured to operate: a supplementary data analysis element configured to identify outliers in the semiconductor test data; and an output element configured to generate an output report including the identified outliers.
Claim 11
Dependent Claim
31 words
A data analysis system according to claim 8 , wherein the supplementary data analysis element is configured to operate in conjunction with a set of configuration data in a recipe file.
Claim 12
Dependent Claim
23 words
A data analysis system according to claim 8 , wherein the test data corresponds to a section group of components on a wafer.
Claim 13
Dependent Claim
31 words
A data analysis system according to claim 8 , wherein the supplementary data analysis element is configured to automatically calibrate a sensitivity of the outlier identification element to the test data.
Claim 14
Dependent Claim
26 words
A data analysis system according to claim 8 , wherein the supplementary data analysis element includes a data correlation element configured to correlate the test data.
Claim 15
Dependent Claim
24 words
A data analysis system according to claim 8 , wherein the supplementary data analysis element is configured to identify the outliers at run time.
Claim 16
Dependent Claim
49 words
A data analysis system according to claim 8 , wherein the supplementary data analysis element includes a data smoothing element configured to receive the test data and smooth the test data, and wherein the supplementary data analysis element is configured to identify the outliers in the smoothed test data.
Claim 17
Independent Claim
28 words
A method for testing semiconductors, comprising: generating test data for multiple components; and automatically identifying an outlier in the test data at run time using a computer system.
Claim 18
Independent Claim
28 words
A method for testing semiconductors, comprising: generating test data for multiple components; and automatically identifying an outlier in the test data at run time using a computer system.
Claim 19
Dependent Claim
37 words
A method according to claim 15 , further comprising reading configuration data from a recipe file using the computer system, wherein identifying the outlier includes identifying the outlier according to the configuration data in the recipe file.
Claim 20
Dependent Claim
21 words
A method according to claim 15 , wherein the test data corresponds to a section group of components on a wafer.
Claim 21
Dependent Claim
24 words
A method according to claim 15 , further comprising calibrating a sensitivity for identifying the outlier in the test data using the computer system.
Claim 22
Dependent Claim
17 words
A method according to claim 15 , further comprising smoothing the test data using the computer system.
Claim 23
Dependent Claim
24 words
A method according to claim 15 , further comprising correlating the test data to identify similarities in the test data using the computer system.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-09-14 | 2008-03-15 | 2008-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-09-14 | 2012-03-15 | 2012-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-09-14 | 2016-03-15 | 2016-09-14 | $7700.00 | Window Closed / Lapsed |