US6680150B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Suppression of side-lobe printing by shape engineering
Assignee: Bell Semiconductor LLC
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Filing: 2001-05-25
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Granted: 2004-01-20
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Expires: 2021-05-25
Abstract
Abstract Sidelobe formation in photolithographic patterns is suppressed by non-rectangular, non-circular contact openings formed in attenuated phase shift photomasks. The contact openings may be diamond-shaped, star-shaped, cross-shaped, or various other shapes which include multiple vertices. The contact opening shapes may include only straight line segments or they may include rounded segments. The contact openings may be arranged in various relative configurations such as in arrays in which the contact openings are sized and spaced by sub-wavelength dimensions. A method for forming contact openings on a photosensitive film uses the attenuated phase shift photomask to form a contact pattern free of pattern defects. A computer readable medium includes instructions for causing a photomask manufacturing tool to generate the attenuated phase-shift photomask.
Inventors
- 👤 James W. Blatchford, Jr.
- 👤 Omkaram Nalamasu
- 👤 Stanley Pau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:49
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/26; G03F1/32; G03F1/36
Claims Analysis
Total Claims: 51
Claim 1
Independent Claim
48 words
An attenuated phase-shift photomask for suppressing side-lobe printing including contact structures being non-rectangular apertures for forming contact openings on a semiconductor substrate, said apertures each having a shape including a plurality of outwardly extending vertices which form angles less than 90 degrees, wherein said apertures suppress side-lobe printing.
Claim 2
Dependent Claim
48 words
An attenuated phase-shift photomask for suppressing side-lobe printing including contact structures being non-rectangular apertures for forming contact openings on a semiconductor substrate, said apertures each having a shape including a plurality of outwardly extending vertices which form angles less than 90 degrees, wherein said apertures suppress side-lobe printing.
Claim 3
Dependent Claim
15 words
The attenuated phase-shift photomask as in claim 1 , in which said apertures are diamond-shaped.
Claim 4
Dependent Claim
19 words
The attenuated phase-shift photomask as in claim 1 , in which said apertures are shaped as four pointed stars.
Claim 5
Dependent Claim
14 words
The attenuated phase-shift photomask as in claim 1 , wherein said apertures are cross-shaped.
Claim 6
Dependent Claim
22 words
The attenuated phase-shift photomask as in claim 1 , wherein said apertures each include an average diameter being less than 500 nanometers.
Claim 7
Dependent Claim
51 words
An attenuated phase-shift photomask for suppressing side-lobe printing having a plurality of non-rectangular contact structures, each being formed of a transmissive material, bounded by a partially transmissive area, and including a plurality of outwardly extending vertices which form angles less than 90 degrees, wherein said non-rectangular contact structures suppress side-lobe printing.
Claim 8
Dependent Claim
51 words
An attenuated phase-shift photomask for suppressing side-lobe printing having a plurality of non-rectangular contact structures, each being formed of a transmissive material, bounded by a partially transmissive area, and including a plurality of outwardly extending vertices which form angles less than 90 degrees, wherein said non-rectangular contact structures suppress side-lobe printing.
Claim 9
Dependent Claim
15 words
The attenuated phase-shift photomask as in claim 6 , wherein each contact structure is symmetrical.
Claim 10
Dependent Claim
19 words
The attenuated phase-shift photomask as in claim 6 , wherein said partially transmissive area allows 4-18% transmission of light.
Claim 11
Dependent Claim
45 words
The attenuated phase-shift photomask as in claim 6 , in which each said contact structure comprises an enclosed geometrical shape having four sides, each side being centrally bowed inwardly such that each of the four corresponding vertices forms an angle being less than 90 degrees.
Claim 12
Dependent Claim
22 words
The attenuated phase-shift photomask as in claim 6 , in which said plurality of contact structures includes four point star-shaped contact structures.
Claim 13
Dependent Claim
21 words
The attenuated phase-shift photomask as in claim 6 , in which said plurality of contact structures includes diamond shaped contact structures.
Claim 14
Dependent Claim
20 words
The attenuated phase-shift photomask as in claim 6 , in which said plurality of contact structures includes cross-shaped contact structures.
Claim 15
Dependent Claim
56 words
The attenuated phase-shift photomask as in claim 6 , in which said photomask includes a mask pattern including said contact structures, and is a photomask of 10× magnification, said photomask adapted for producing a corresponding photo-pattern in a photosensitive film, which is reduced in size by a factor of 10 with respect to said mask pattern.
Claim 16
Dependent Claim
34 words
The attenuated phase-shift photomask as in claim 6 , in which said plurality of contact structures includes contact structures which comprise an octagon defined by a repeating sequence of adjacent acute then obtuse angles.
Claim 17
Dependent Claim
37 words
The attenuated phase-shift photomask as in claim 6 , wherein said contact structures each yield a corresponding generally round contact structure in a photosensitive material, when light is transmitted through said photomask and onto said photosensitive material.
Claim 18
Dependent Claim
30 words
The attenuated phase-shift photomask as in claim 6 , wherein said contact structures are arranged in a two-dimensional array with adjacent contact structures spaced apart by 200 nanometers or less.
Claim 19
Dependent Claim
22 words
The attenuated phase-shift photomask as in claim 6 , wherein said contact structures include an average diameter of less than 180 nanometers.
Claim 20
Independent Claim
114 words
A method for forming contact openings on a semiconductor substrate while suppressing side-lobes comprising the steps of: forming a photosensitive film over a substrate; providing an attenuated phase-shift photomask being generally flat and having opposed surfaces, said photomask having a pattern including a plurality of non-rectangular transmissive figures, each including a plurality of outwardly extending vertices which form angles less than 90 degrees, wherein said non-rectangular transmissive figures suppress side-lobes; and exposing contact areas on said photosensitive film by positioning said photomask in fixed position with respect to said substrate and providing a light source opposite the surface of said photomask facing said substrate, each of said contact areas corresponding to a transmissive figure.
Claim 21
Independent Claim
114 words
A method for forming contact openings on a semiconductor substrate while suppressing side-lobes comprising the steps of: forming a photosensitive film over a substrate; providing an attenuated phase-shift photomask being generally flat and having opposed surfaces, said photomask having a pattern including a plurality of non-rectangular transmissive figures, each including a plurality of outwardly extending vertices which form angles less than 90 degrees, wherein said non-rectangular transmissive figures suppress side-lobes; and exposing contact areas on said photosensitive film by positioning said photomask in fixed position with respect to said substrate and providing a light source opposite the surface of said photomask facing said substrate, each of said contact areas corresponding to a transmissive figure.
Claim 22
Dependent Claim
53 words
The method as in claim 18 , in which said pattern is projected onto said photosensitive film to form a corresponding photo-pattern and in which said step of exposing includes positioning a lens between said photomask and said substrate, such that said corresponding photo-pattern is reduced in size with respect to said pattern.
Claim 23
Dependent Claim
21 words
The method as in claim 18 , in which said plurality of non-rectangular transmissive figures includes four point star-shaped contact structures.
Claim 24
Dependent Claim
19 words
The method as in claim 18 , in which said plurality of non-rectangular transmissive figures includes diamond-shaped contact structures.
Claim 25
Dependent Claim
19 words
The method as in claim 18 , in which said plurality of non-rectangular transmissive figures includes cross-shaped contact structures.
Claim 26
Dependent Claim
19 words
The method as in claim 18 , in which said plurality of non-rectangular transmissive figures includes a two-dimensional array.
Claim 27
Dependent Claim
35 words
The method as in claim 23 , wherein an average pitch of said non-rectangular transmissive figures in said two-dimensional array is not greater than two times the wavelength of light emitted from said light source.
Claim 28
Dependent Claim
59 words
The method as in claim 23 , wherein said light source emits light having a wavelength λ and which is delivered from said photomask to said photosensitive film, through a lens having a numerical aperture NA, and wherein said non-rectangular transmissive figures of said array are spaced apart by a dimension defined as being no greater than 0.75 λ/NA.
Claim 29
Dependent Claim
65 words
The method as in claim 18 , in which said step of exposing includes said light source emitting light having a wavelength λ and which is delivered from said photomask to said photosensitive film through a lens having a numerical aperture NA and in which said contact areas are generally round in shape and have an average diameter ranging from 0.3 λ/NA to 0.4 λ/NA.
Claim 30
Dependent Claim
59 words
The method as in claim 18 , in which said step of exposing includes said light source emitting light having a wavelength λ and which is delivered from said photomask to said photosensitive film through a lens having a numerical aperture NA and wherein the average area of said non-rectangular transmissive figures is less than π[0.375 λ/NA] 2 .
Claim 31
Dependent Claim
32 words
The method as in claim 18 , in which said attenuated phase-shift photomask includes said non-rectangular transmissive figures being bounded by partially transmissive areas which allow transmission of 4-18% of light therethrough.
Claim 32
Dependent Claim
30 words
The method as in claim 18 , in which said contact areas are generally round in shape and further comprising the step of developing said exposed generally round contact areas.
Claim 33
Dependent Claim
39 words
The method as in claim 29 , which said photosensitive film is formed on an insulating layer formed over said substrate and further comprising etching said generally round contact areas into said insulating layer thereby forming said contact openings.
Claim 34
Dependent Claim
24 words
The method as in claim 18 , which said light source emits light having a wavelength being one of 193 nanometers and 248 nanometers.
Claim 35
Dependent Claim
15 words
The method as in claim 18 , wherein said light source comprises an excimer laser.
Claim 36
Dependent Claim
66 words
A computer readable medium having stored thereon a set of instructions including instructions for generating an attenuated phase-shift photomask for suppressing side-lobe printing having a pattern including plurality of non-rectangular contact structures, each contact structure being formed of a transmissive material, bounded by a partially transmissive area, and including a plurality of outwardly extending vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes.
Claim 37
Dependent Claim
66 words
A computer readable medium having stored thereon a set of instructions including instructions for generating an attenuated phase-shift photomask for suppressing side-lobe printing having a pattern including plurality of non-rectangular contact structures, each contact structure being formed of a transmissive material, bounded by a partially transmissive area, and including a plurality of outwardly extending vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes.
Claim 38
Dependent Claim
60 words
A computer readable medium having stored thereon a set of instructions including instructions for generating a pattern generation tape for forming a pattern in an attenuated phase-shift photomask for suppressing side-lobe printing, said pattern including a plurality of nonrectangular contact structures, each including a plurality of outwardly extending vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes.
Claim 39
Dependent Claim
60 words
A computer readable medium having stored thereon a set of instructions including instructions for generating a pattern generation tape for forming a pattern in an attenuated phase-shift photomask for suppressing side-lobe printing, said pattern including a plurality of nonrectangular contact structures, each including a plurality of outwardly extending vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes.
Claim 40
Dependent Claim
46 words
A set of instructions as in claim 34 , in which said pattern includes said contact structures arranged in a two-dimensional array, with adjacent contact structure spaced apart by 200 nanometers or less and said contact structures including an average diameter no greater than 180 nanometers.
Claim 41
Dependent Claim
84 words
A computer readable medium having stored thereon a set of instructions including instructions for generating an attenuated phase-shift photomask for suppressing side-lobe printing having a pattern including plurality of non-rectangular contact structures, each contact structure being formed of a transmissive material, bounded by a partially transmissive area, and including a plurality of outwardly vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes, when said set of instructions are executed by at least one computer electronically connected to a photomask manufacturing system.
Claim 42
Dependent Claim
84 words
A computer readable medium having stored thereon a set of instructions including instructions for generating an attenuated phase-shift photomask for suppressing side-lobe printing having a pattern including plurality of non-rectangular contact structures, each contact structure being formed of a transmissive material, bounded by a partially transmissive area, and including a plurality of outwardly vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes, when said set of instructions are executed by at least one computer electronically connected to a photomask manufacturing system.
Claim 43
Independent Claim
124 words
A method for generating an attenuated phase-shift mask for suppressing side-lobe printing, comprising the steps of: providing a photomask manufacturing tool; providing a computer electronically connected to said photomask manufacturing tool; providing a computer readable medium having stored thereon a set of instructions including instructions for generating an attenuated phase-shift photomask having a plurality of non-rectangular contact structures, each including a plurality of outwardly extending vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes and formed of a transmissive material, and; engaging said computer readable medium with said computer, thereby causing said computer to read said computer readable medium and communicate with said photomask manufacturing tool; and said computer electronically instructing said photomask manufacturing tool to generate said attenuated phase-shift photomask.
Claim 44
Independent Claim
124 words
A method for generating an attenuated phase-shift mask for suppressing side-lobe printing, comprising the steps of: providing a photomask manufacturing tool; providing a computer electronically connected to said photomask manufacturing tool; providing a computer readable medium having stored thereon a set of instructions including instructions for generating an attenuated phase-shift photomask having a plurality of non-rectangular contact structures, each including a plurality of outwardly extending vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes and formed of a transmissive material, and; engaging said computer readable medium with said computer, thereby causing said computer to read said computer readable medium and communicate with said photomask manufacturing tool; and said computer electronically instructing said photomask manufacturing tool to generate said attenuated phase-shift photomask.
Claim 45
Independent Claim
132 words
A method for generating an attenuated phase-shift mask for suppressing side-lobe printing, comprising the steps of: providing a photomask manufacturing tool; providing a computer electronically connected to said photomask manufacturing tool; providing a pattern generation tape having stored thereon a set of instructions including instructions for generating a pattern on an attenuated phase-shift photomask, the pattern including a plurality of non-rectangular contact structures, each including a plurality of outwardly extending vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes and formed of a transmissive material, and engaging said pattern generation tape with said computer, thereby causing said computer to read said pattern generation tape and communicate with said photomask manufacturing tool; and said computer electronically instructing said photomask manufacturing tool to generate said attenuated phase-shift photomask including said pattern.
Claim 46
Independent Claim
132 words
A method for generating an attenuated phase-shift mask for suppressing side-lobe printing, comprising the steps of: providing a photomask manufacturing tool; providing a computer electronically connected to said photomask manufacturing tool; providing a pattern generation tape having stored thereon a set of instructions including instructions for generating a pattern on an attenuated phase-shift photomask, the pattern including a plurality of non-rectangular contact structures, each including a plurality of outwardly extending vertices which form acute angles, wherein said non-rectangular contact structures suppress side-lobes and formed of a transmissive material, and engaging said pattern generation tape with said computer, thereby causing said computer to read said pattern generation tape and communicate with said photomask manufacturing tool; and said computer electronically instructing said photomask manufacturing tool to generate said attenuated phase-shift photomask including said pattern.
Claim 47
Dependent Claim
52 words
The method as in claim 38 , in which said set of instructions include instruction for generating said pattern to include a two-dimensional array of said contact structures, in which said contact structures include an average diameter no greater than 180 nanometers and are spaced apart by no greater than 200 nanometers.
Claim 48
Independent Claim
85 words
A method for forming an attenuated phase shift mask using a single-layer pattern that suppresses side-lobes at the wafer level comprising: forming a contact opening aperture of light transmissive material in an attenuated phase shift mask wherein said contact opening is shape engineered to reduce side-lobe formation at the wafer level by including multiple outwardly-extending vertices which form acute angles; and surrounding the contact opening aperture with a partially light transmissive area, wherein the light transmitted through the partially light transmissive area is phase shifted.
Claim 49
Independent Claim
85 words
A method for forming an attenuated phase shift mask using a single-layer pattern that suppresses side-lobes at the wafer level comprising: forming a contact opening aperture of light transmissive material in an attenuated phase shift mask wherein said contact opening is shape engineered to reduce side-lobe formation at the wafer level by including multiple outwardly-extending vertices which form acute angles; and surrounding the contact opening aperture with a partially light transmissive area, wherein the light transmitted through the partially light transmissive area is phase shifted.
Claim 50
Dependent Claim
19 words
The method of claim 40 wherein said contact opening is shape engineered in the shape of a four-pointed star.
Claim 51
Dependent Claim
18 words
The method of claim 40 wherein said contact opening is shape engineered in the shape of a diamond.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-01-19 | 2007-07-21 | 2008-01-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-01-19 | 2011-07-21 | 2012-01-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-01-19 | 2015-07-21 | 2016-01-20 | $7700.00 | Window Closed / Lapsed |