US6512241B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Phase change material memory device
Assignee: Intel Corp
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Filing: 2001-12-31
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Granted: 2003-01-28
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Expires: 2021-12-31
Abstract
Abstract A phase change memory with a very limited area of contact between the lower electrode and the phase change material may be formed by defining a closed geometric structure for the lower electrode. The lower electrode may then be covered. The covering may then be opened in a very narrow strip extending across the closed geometric shape using phase shift masking. A phase change material may be formed in the opening. Because the opening effectively bisects the closed geometric structure of the lower electrode, two very small contact areas may be created for contacting the lower electrode to the phase change material.
Inventors
- 👤 Stefan K. Lai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:40
CPC Classifications
H; H10; H10D; H10D48/00; H10D48/30; H10D48/32; H10D48/366; H10N; H10N70/00; H10N70/011; H10N70/20; H10N70/231; H10N70/801; H10N70/821; H10N70/826; H10N70/841; H10N70/8418; H10N70/881; H10N70/882; H10N70/8828
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
48 words
A phase change memory comprising: an electrode on said substrate, said electrode having a substantially planer surface with a closed geometric shape; a layer covering substantially all of the closed geometric shape with the exception of an exposed portion; and a phase change material contacting said exposed portion.
Claim 2
Dependent Claim
48 words
A phase change memory comprising: an electrode on said substrate, said electrode having a substantially planer surface with a closed geometric shape; a layer covering substantially all of the closed geometric shape with the exception of an exposed portion; and a phase change material contacting said exposed portion.
Claim 3
Dependent Claim
13 words
The memory of claim 1 wherein said closed geometric shape is a circle.
Claim 4
Dependent Claim
21 words
The memory of claim 1 wherein said electrode includes a substantially planar bottom portion and at least one upstanding side wall.
Claim 5
Dependent Claim
11 words
The memory of claim 3 wherein said side wall is cylindrical.
Claim 6
Dependent Claim
17 words
The memory of claim 4 wherein said bottom portion is electrically coupled to a buried conductive layer.
Claim 7
Dependent Claim
15 words
The memory of claim 1 wherein said geometric shape is exposed at two separate locations.
Claim 8
Dependent Claim
15 words
The memory of claim 1 wherein said closed geometric shape is filled with an insulator.
Claim 9
Dependent Claim
13 words
The memory of claim 1 wherein said layer includes an adhesion promoting layer.
Claim 10
Dependent Claim
11 words
The memory of claim 9 including an insulator underneath said layer.
Claim 11
Dependent Claim
21 words
The memory of claim 9 including an opening through said adhesion promoting layer and said insulator to form said exposed portion.
Claim 12
Dependent Claim
60 words
A memory comprising: an electrode having a length; a layer over said electrode; an opening through said layer to expose only a portion of said electrode, said opening extending across the length of said electrode generally transverse to the length of said electrode; and a phase change material over said layer and extending through said opening to contact said electrode.
Claim 13
Dependent Claim
60 words
A memory comprising: an electrode having a length; a layer over said electrode; an opening through said layer to expose only a portion of said electrode, said opening extending across the length of said electrode generally transverse to the length of said electrode; and a phase change material over said layer and extending through said opening to contact said electrode.
Claim 14
Dependent Claim
13 words
The memory of claim 11 wherein said electrode has a closed geometric shape.
Claim 15
Dependent Claim
13 words
The memory of claim 12 wherein said closed geometric shape is a circle.
Claim 16
Dependent Claim
19 words
The memory of claim 13 wherein said electrode is can-shaped including an upper edge forming a closed geometric shape.
Claim 17
Dependent Claim
13 words
The memory of claim 11 wherein said layer includes an adhesion promoting material.
Claim 18
Dependent Claim
17 words
The memory of claim 15 wherein said layer includes an insulating material under said adhesion promoting material.
Claim 19
Dependent Claim
15 words
The memory of claim 11 wherein said opening exposes two opposed portions of said electrode.
Claim 20
Dependent Claim
17 words
The memory of claim 17 wherein said opposed portions of said electrode are portions of a cylinder.
Claim 21
Dependent Claim
57 words
A memory comprising: an electrode having a length; a layer over said electrode; an opening through said layer to expose only a portion of said electrode, said opening extending across the length of said electrode, said opening exposing two opposed portions of said electrode; and said exposed opposed portions of said electrode are portions of a cylinder.
Claim 22
Dependent Claim
57 words
A memory comprising: an electrode having a length; a layer over said electrode; an opening through said layer to expose only a portion of said electrode, said opening extending across the length of said electrode, said opening exposing two opposed portions of said electrode; and said exposed opposed portions of said electrode are portions of a cylinder.
Claim 23
Dependent Claim
13 words
The memory of claim 19 wherein said electrode has a closed geometric shape.
Claim 24
Dependent Claim
13 words
The memory of claim 20 wherein said closed geometric shape is a circle.
Claim 25
Dependent Claim
21 words
The memory of claim 21 wherein said electrode is can shaped and includes an upper edge forming a closed geometric shape.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-01-27 | 2006-07-29 | 2007-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-01-27 | 2010-07-29 | 2011-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-01-27 | 2014-07-29 | 2015-01-28 | $7700.00 | Window Closed / Lapsed |