US6482476B1
Expired / Lapsed
US
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Low temperature plasma enhanced CVD ceramic coating process for metal, alloy and ceramic materials
Assignee: Individual
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Filing: 1999-12-16
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Granted: 2002-11-19
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Expires: 2019-12-16
Abstract
Abstract A low temperature, high growth rate plasma enhanced chemical vapor deposition process is demonstrated for ceramic coatings on metal, alloy and ceramic substrates. The deposition process is carried out at low temperatures (<350-degC.) to prevent the bulk substrate properties from being adversely affected. The substrates are treated with gas surface hardening processes before deposition. Bonding strength (adhesion) between the coating and the substrate is improved by combining surface heat treating processes with the coating processes. Hard ceramic-solid lubricant composite coatings are used for fuel injector components, hydraulic valve components, and other wear parts. Metal-releasing agents are used to improve deposition efficiency. Electron cyclotron resonance mechanism and electromagnetic radiation are used to improve bonding strength, growth rate, coating uniformity, film smoothness and other film qualities.
Inventors
- 👤 Shengzhong Frank Liu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:18
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C23C16/02; C23C16/0209; C23C16/0218; C23C16/44; C23C16/50
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
102 words
Method of fabricating a CVD ceramic coating on metal, alloy and ceramic articles comprising: activating a surface of an article by using a plasma surface hardening technique; and CVD depositing, at less than 350 degrees Celsius, a ceramic coating on said freshly activated surface; wherein: the ceramic coating is a solid lubricant-containing coating and the solid lubricant is selected from the group consisting of tungsten disulfide, molybdenum disulfide, boron nitride, carbon, hydrogenated carbon and polymeric materials selected from the group consisting of polytetrafluoroethylene, polyphenylene, polyethylene, polyurethane, polycarbonate, ABS, polyimides, polyamides, polystyrene, poly-perfluoroalkoxy (PFA), poly-ethylene tetrafluoroethelene (ETFE), Fluorinated ethylene propylene (FEP), and fluoropolymers.
Claim 2
Dependent Claim
102 words
Method of fabricating a CVD ceramic coating on metal, alloy and ceramic articles comprising: activating a surface of an article by using a plasma surface hardening technique; and CVD depositing, at less than 350 degrees Celsius, a ceramic coating on said freshly activated surface; wherein: the ceramic coating is a solid lubricant-containing coating and the solid lubricant is selected from the group consisting of tungsten disulfide, molybdenum disulfide, boron nitride, carbon, hydrogenated carbon and polymeric materials selected from the group consisting of polytetrafluoroethylene, polyphenylene, polyethylene, polyurethane, polycarbonate, ABS, polyimides, polyamides, polystyrene, poly-perfluoroalkoxy (PFA), poly-ethylene tetrafluoroethelene (ETFE), Fluorinated ethylene propylene (FEP), and fluoropolymers.
Claim 3
Dependent Claim
38 words
Method, according to claim 1 , wherein: the article is selected from the group consisting of steel based article, fuel injector component, hydraulic valve component, machine tool insert, drill, die, punch, mill, saw, mold, pin, knife, and cutters.
Claim 4
Dependent Claim
27 words
Method, according to claim 1 , wherein: the plasma surface hardening technique is selected from the group consisting of nitriding, carburizing, carbonitriding, nitrocarburizing, boronising, siliconizing, and sulfidizing.
Claim 5
Dependent Claim
23 words
Method, according to claim 1 , further comprising: reducing stress at the ceramic coating-substrate interface by lowering deposition temperature using a metal-releasing agent.
Claim 6
Dependent Claim
22 words
Method, according to claim 4 , wherein: the metal-releasing agent is Ti(NR 2 ) 4 , where R is an organic group.
Claim 7
Dependent Claim
43 words
Method, according to claim 1 , further comprising: using electromagnetic radiation, selected from the group consisting of ultraviolet rays and infrared rays, to radiate the substrate surface during at least the CVD depositing step so as to promote ionization, activation, growth rate, bonding.
Claim 8
Dependent Claim
42 words
Method, according to claim 1 , wherein: the plasma surface hardening technique employs a power source selected from the group consisting of microwave power, radio-frequency, direct current electric power, alternating current electric power, electromagnetic radiation, electron beam, ion beam, and laser radiation.
Claim 9
Dependent Claim
42 words
Method, according to claim 1 , further comprising: placing the article between two electrodes; and applying an electric current between the two electrodes to cause gas dissociation and ionization to form energetic species which then react with surface to form the coating.
Claim 10
Dependent Claim
17 words
Method, according to claim 1 , further comprising: applying a magnetic field to enhance the deposition process.
References Cited (Backward Citations)
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