US6454912B1
Expired / Lapsed
US
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Method and apparatus for the fabrication of ferroelectric films
Assignee: Mosaid Technologies Inc
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Filing: 2001-03-15
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Granted: 2002-09-24
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Expires: 2021-03-15
Abstract
Abstract The present invention is related to methods and apparatus for processing weak ferroelectric films on semiconductor substrates, including relatively large substrates, e.g., with 300 millimeter diameter. A ferroelectric film of zinc oxide (ZnO) doped with lithium (Li) and/or magnesium (Mg) is deposited on a substrate in a plasma assisted chemical vapor deposition process such as an electron cyclotron resonance chemical vapor deposition (ECR CVD) process. Zinc is introduced to a chamber through a zinc precursor in a vaporizer. Microwave energy ionizes zinc and oxygen in the chamber to a plasma, which is directed to the substrate with a relatively strong field. Electrically biased control grids control a rate of deposition of the plasma. The control grids also provide Li and/or Mg dopants for the ZnO to create the ferroelectric film. A desired ferroelectric property of the ferroelectric film can be tailored by selecting an appropriate composition of the control grids.
Inventors
- 👤 Kie Y. Ahn
- 👤 Leonard Forbes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:22
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/407; C23C16/44; C23C16/50; C23C16/511; H01J37/32357; H01J37/32431; H01J37/3266; H01J37/32678; H01J37/32697
Claims Analysis
Total Claims: 47
Claim 1
Independent Claim
84 words
A plasma assisted chemical vapor deposition process, where a ferroelectric film is deposited on a substrate, the process comprising: ionizing zinc and oxygen precursors; directing plasma products towards the substrate, thereby depositing zinc oxide on the substrate in a thin film; controlling the deposition of zinc oxide with at least one control grid, where the control grid comprises a source material, and where the control grid is electrically biased; and sputtering the source material from the control grid as a dopant onto the substrate.
Claim 2
Dependent Claim
84 words
A plasma assisted chemical vapor deposition process, where a ferroelectric film is deposited on a substrate, the process comprising: ionizing zinc and oxygen precursors; directing plasma products towards the substrate, thereby depositing zinc oxide on the substrate in a thin film; controlling the deposition of zinc oxide with at least one control grid, where the control grid comprises a source material, and where the control grid is electrically biased; and sputtering the source material from the control grid as a dopant onto the substrate.
Claim 3
Dependent Claim
26 words
The process as defined in claim 1 , wherein the source material is selected from the group consisting of lithium, magnesium, and both lithium and magnesium.
Claim 4
Dependent Claim
25 words
The process as defined in claim 1 , wherein the plasma assisted chemical vapor deposition process is an electron cyclotron resonance chemical vapor deposition process.
Claim 5
Dependent Claim
20 words
The process as defined in claim 1 , wherein the plasma is directed towards the substrate with a magnetic field.
Claim 6
Dependent Claim
20 words
The process as defined in claim 1 , further comprising heating the substrate to approximately 350 to 650 degrees Celsius.
Claim 7
Dependent Claim
14 words
The process as defined in claim 1 , wherein ionizing comprises applying microwave power.
Claim 8
Dependent Claim
39 words
The process as defined in claim 1 , wherein the control grid source material comprises a combination of lithium and magnesium, where the ratio of lithium to magnesium approximately conforms to a desired doping ratio of lithium and magnesium.
Claim 9
Dependent Claim
28 words
The process as defined in claim 1 , further comprising varying the electrical bias applied to the control grid to vary a rate of deposition of zinc oxide.
Claim 10
Dependent Claim
28 words
The process as defined in claim 1 , further comprising vaporizing a zinc precursor at about 105 degrees Celsius and introducing the zinc with an argon carrier gas.
Claim 11
Dependent Claim
33 words
The process as defined in claim 1 , further comprising applying microwave power to ionize the zinc and the oxygen precursors, where the frequency of the microwave power is approximately 2.45 gigahertz (GHz).
Claim 12
Dependent Claim
28 words
The process as defined in claim 1 , further comprising electrically isolating the substrate and biasing the substrate in a voltage range of approximately 0 to −50 volts.
Claim 13
Dependent Claim
132 words
An electron cyclotron resonance chemical vapor deposition process, where a ferroelectric film is deposited on a substrate, the process comprising: heating the substrate to a first temperature; evacuating an atmosphere from an interior of a deposition chamber; maintaining zinc and oxygen in an interior of an electromagnetic excitation chamber; ionizing the zinc and the oxygen to a plasma with microwave power; propelling the plasma towards the substrate with a magnetic field, thereby depositing zinc oxide to the substrate in a thin film; controlling the deposition of zinc oxide with at least one control grid, where the control grid is further composed of a source material, and where the control grid is biased to a negative electric potential; and sputtering the source material from the control grid as a dopant onto the substrate.
Claim 14
Dependent Claim
132 words
An electron cyclotron resonance chemical vapor deposition process, where a ferroelectric film is deposited on a substrate, the process comprising: heating the substrate to a first temperature; evacuating an atmosphere from an interior of a deposition chamber; maintaining zinc and oxygen in an interior of an electromagnetic excitation chamber; ionizing the zinc and the oxygen to a plasma with microwave power; propelling the plasma towards the substrate with a magnetic field, thereby depositing zinc oxide to the substrate in a thin film; controlling the deposition of zinc oxide with at least one control grid, where the control grid is further composed of a source material, and where the control grid is biased to a negative electric potential; and sputtering the source material from the control grid as a dopant onto the substrate.
Claim 15
Dependent Claim
23 words
The process as defined in claim 12 , wherein the first temperature is in a range of approximately 350 to 650 degrees Celsius.
Claim 16
Dependent Claim
16 words
The process as defined in claim 12 , wherein the control grid source material comprises lithium.
Claim 17
Dependent Claim
16 words
The process as defined in claim 12 , wherein the control grid source material comprises magnesium.
Claim 18
Dependent Claim
39 words
The process as defined in claim 12 , wherein the control grid source material comprises a combination of lithium and magnesium, where the ratio of lithium to magnesium approximately conforms to a desired doping ratio of lithium and magnesium.
Claim 19
Dependent Claim
28 words
The process as defined in claim 12 , further comprising varying the negative bias applied to the control grid to vary a rate of deposition of zinc oxide.
Claim 20
Dependent Claim
28 words
The process as defined in claim 12 , further comprising vaporizing a zinc precursor at about 105 degrees Celsius and introducing the zinc with an argon carrier gas.
Claim 21
Dependent Claim
20 words
The process as defined in claim 12 , wherein the frequency of the microwave power is approximately 2.45 gigahertz (GHz).
Claim 22
Dependent Claim
28 words
The process as defined in claim 12 , further comprising electrically isolating the substrate and biasing the substrate in a voltage range of approximately 0 to −50 volts.
Claim 23
Dependent Claim
212 words
A plasma deposition system, which deposits a ferroelectric film on a substrate, the system comprising: a first chamber adapted to house the substrate; a second chamber coupled to the first chamber; a vacuum pump adapted to evacuate an atmosphere from the first and second chambers, and where the vacuum pump is further adapted to maintain the deposition at a relatively low vacuum during deposition; a zinc supply adapted to allow a carrier gas to transport zinc to the second chamber; an oxygen supply adapted to introduce oxygen to the second chamber; a microwave generator coupled to the second chamber, where the microwave generator is adapted to ionize the zinc particles and the oxygen to a plasma; an upper and a lower magnet assembly adapted to generate a relatively large magnetic field in the second chamber, where the relatively large magnetic field is adapted to generate and maintain an electron cyclotron resonance and direct the plasma towards the substrate; at least one control grid adapted to control a rate of deposition of zinc oxide on the substrate, where the at least one control grid is further composed of a source material that also deposits on the substrate as a dopant; and a heat source adapted to maintain the substrate at a first temperature.
Claim 24
Dependent Claim
212 words
A plasma deposition system, which deposits a ferroelectric film on a substrate, the system comprising: a first chamber adapted to house the substrate; a second chamber coupled to the first chamber; a vacuum pump adapted to evacuate an atmosphere from the first and second chambers, and where the vacuum pump is further adapted to maintain the deposition at a relatively low vacuum during deposition; a zinc supply adapted to allow a carrier gas to transport zinc to the second chamber; an oxygen supply adapted to introduce oxygen to the second chamber; a microwave generator coupled to the second chamber, where the microwave generator is adapted to ionize the zinc particles and the oxygen to a plasma; an upper and a lower magnet assembly adapted to generate a relatively large magnetic field in the second chamber, where the relatively large magnetic field is adapted to generate and maintain an electron cyclotron resonance and direct the plasma towards the substrate; at least one control grid adapted to control a rate of deposition of zinc oxide on the substrate, where the at least one control grid is further composed of a source material that also deposits on the substrate as a dopant; and a heat source adapted to maintain the substrate at a first temperature.
Claim 25
Dependent Claim
39 words
The system as defined in claim 21 , further comprising a power supply connected to the at least one control grid, such that varying a bias of the power supply controls a rate of deposition of the zinc oxide.
Claim 26
Dependent Claim
21 words
The system as defined in claim 21 , wherein the at least one control grid comprises two control grids spaced apart.
Claim 27
Dependent Claim
14 words
The system as defined in claim 21 , wherein the source material is lithium.
Claim 28
Dependent Claim
14 words
The system as defined in claim 21 , wherein the source material is magnesium.
Claim 29
Dependent Claim
19 words
The system as defined in claim 21 , wherein the source material is a combination of lithium and magnesium.
Claim 30
Dependent Claim
14 words
The system as defined in claim 21 , wherein the carrier gas is argon.
Claim 31
Dependent Claim
24 words
The system as defined in claim 21 , wherein the zinc supply comprises a vaporizer adapted to liberate zinc particles from a zinc precursor.
Claim 32
Dependent Claim
181 words
A plasma assisted chemical vapor deposition system, which deposits a ferroelectric film on a substrate, the system comprising: a first chamber adapted to house the substrate; a second chamber coupled to the first chamber; a precursor for zinc adapted to transport zinc to the second chamber; a source adapted to introduce a form of oxygen to the second chamber; an energy source coupled to the zinc and the oxygen such that the zinc and the oxygen are ionized to a plasma; an upper and a lower magnet assembly adapted to generate a magnetic field in the second chamber, where the magnetic field is adapted to generate and maintain an electron cyclotron resonance and propel plasma products towards the substrate; and at least one control grid adapted to control a rate of deposition of zinc oxide on the substrate, where the at least one control grid is further composed of a metal source material that also deposits on the substrate as a dopant, where the metal source material is selected from the group consisting of lithium, magnesium, and both lithium and magnesium.
Claim 33
Dependent Claim
181 words
A plasma assisted chemical vapor deposition system, which deposits a ferroelectric film on a substrate, the system comprising: a first chamber adapted to house the substrate; a second chamber coupled to the first chamber; a precursor for zinc adapted to transport zinc to the second chamber; a source adapted to introduce a form of oxygen to the second chamber; an energy source coupled to the zinc and the oxygen such that the zinc and the oxygen are ionized to a plasma; an upper and a lower magnet assembly adapted to generate a magnetic field in the second chamber, where the magnetic field is adapted to generate and maintain an electron cyclotron resonance and propel plasma products towards the substrate; and at least one control grid adapted to control a rate of deposition of zinc oxide on the substrate, where the at least one control grid is further composed of a metal source material that also deposits on the substrate as a dopant, where the metal source material is selected from the group consisting of lithium, magnesium, and both lithium and magnesium.
Claim 34
Dependent Claim
21 words
The system as defined in claim 29 , further comprising a heater adapted to maintain the substrate at a first temperature.
Claim 35
Dependent Claim
22 words
The system as defined in claim 29 , wherein the source that introduces a form of oxygen comprises a source for ozone.
Claim 36
Dependent Claim
66 words
A consumable control grid that supplies a dopant in a plasma deposition process for producing ferroelectric films, the control grid comprising: an electrical connection adapted to allow the control grid to sustain an electrical bias; substantially planar conductor wherein a material comprising the surface supplies the dopant, wherein the material includes lithium; and openings defined within the conductor adapted to allow the passage of plasma products.
Claim 37
Dependent Claim
66 words
A consumable control grid that supplies a dopant in a plasma deposition process for producing ferroelectric films, the control grid comprising: an electrical connection adapted to allow the control grid to sustain an electrical bias; substantially planar conductor wherein a material comprising the surface supplies the dopant, wherein the material includes lithium; and openings defined within the conductor adapted to allow the passage of plasma products.
Claim 38
Dependent Claim
67 words
A consumable control grid that supplies a dopant in a plasma deposition process for producing ferroelectric films, the control grid comprising: an electrical connection adapted to allow the control grid to sustain an electrical bias; a substantially planar conductor wherein a material comprising the surface supplies the dopant, wherein the material includes magnesium; and openings defined within the conductor adapted to allow the passage of plasma products.
Claim 39
Dependent Claim
67 words
A consumable control grid that supplies a dopant in a plasma deposition process for producing ferroelectric films, the control grid comprising: an electrical connection adapted to allow the control grid to sustain an electrical bias; a substantially planar conductor wherein a material comprising the surface supplies the dopant, wherein the material includes magnesium; and openings defined within the conductor adapted to allow the passage of plasma products.
Claim 40
Dependent Claim
69 words
A consumable control grid that supplies a dopant in a plasma deposition process for producing ferroelectric films, the control grid comprising: an electrical connection adapted to allow the control grid to sustain an electrical bias; a substantially planar conductor wherein a material comprising the surface supplies the dopant, wherein the material includes lithium and magnesium; and openings defined within the conductor adapted to allow the passage of plasma products.
Claim 41
Dependent Claim
69 words
A consumable control grid that supplies a dopant in a plasma deposition process for producing ferroelectric films, the control grid comprising: an electrical connection adapted to allow the control grid to sustain an electrical bias; a substantially planar conductor wherein a material comprising the surface supplies the dopant, wherein the material includes lithium and magnesium; and openings defined within the conductor adapted to allow the passage of plasma products.
Claim 42
Dependent Claim
131 words
A plasma assisted chemical vapor deposition system, which deposits a ferroelectric film on a substrate, the system comprising: a heater adapted to heat the substrate to a first temperature; a first mass flow controller for introducing zinc to an interior of an electromagnetic excitation chamber; a second mass flow controller for introducing oxygen to the interior of the electromagnetic excitation chamber; means for ionizing the zinc and the oxygen to form a plasma with microwave power; and at least one control grid positioned in proximity to the substrate, where the control grid is further composed of a source material, wherein the control grid source material comprises at least one material selected from the group consisting of lithium and magnesium, and where the control grid is biased to a negative electric potential.
Claim 43
Dependent Claim
131 words
A plasma assisted chemical vapor deposition system, which deposits a ferroelectric film on a substrate, the system comprising: a heater adapted to heat the substrate to a first temperature; a first mass flow controller for introducing zinc to an interior of an electromagnetic excitation chamber; a second mass flow controller for introducing oxygen to the interior of the electromagnetic excitation chamber; means for ionizing the zinc and the oxygen to form a plasma with microwave power; and at least one control grid positioned in proximity to the substrate, where the control grid is further composed of a source material, wherein the control grid source material comprises at least one material selected from the group consisting of lithium and magnesium, and where the control grid is biased to a negative electric potential.
Claim 44
Independent Claim
97 words
A method of tailoring a ferroelectric property of a deposited film in a plasma assisted chemical vapor deposition process, the method comprising: selecting a ratio of a first material to a second material in a control grid; and providing the first material and the second material from the control grid as a first dopant and a second dopant, respectively, to the deposited film on the substrate such that the selected ratio of the first material to the second material is reflected in a corresponding ratio of the first dopant to the second dopant in the deposited film.
Claim 45
Independent Claim
97 words
A method of tailoring a ferroelectric property of a deposited film in a plasma assisted chemical vapor deposition process, the method comprising: selecting a ratio of a first material to a second material in a control grid; and providing the first material and the second material from the control grid as a first dopant and a second dopant, respectively, to the deposited film on the substrate such that the selected ratio of the first material to the second material is reflected in a corresponding ratio of the first dopant to the second dopant in the deposited film.
Claim 46
Dependent Claim
20 words
The method as defined in claim 36 , wherein the first and the second materials comprise lithium and magnesium, respectively.
Claim 47
Dependent Claim
16 words
The method as defined in claim 36 , wherein the deposited film further comprises zinc oxide.
References Cited (Backward Citations)
US5965192A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-09-23 | 2006-03-25 | 2006-09-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-09-23 | 2010-03-25 | 2010-09-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-09-23 | 2014-03-25 | 2014-09-24 | $7700.00 | Window Closed / Lapsed |