US6437389B1
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Vertical gate transistors in pass transistor programmable logic arrays
Assignee: Micron Technology Inc
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Filing: 2000-08-22
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Granted: 2002-08-20
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Expires: 2020-08-22
Abstract
Abstract Systems and methods are provided for vertical gate transistors in static pass transistor programmable logic arrays. The vertical gate transistors have multiple vertical gates which are edge defined such that only a single transistor is required for multiple logic inputs. Thus, a minimal surface area is required for each logic input. The novel programmable logic array of the present invention includes a plurality of input lines for receiving an input signal, a plurality of output lines, and one or more arrays having a first logic plane and a second logic plane connected between the input lines and the output lines. The first logic plane and the second logic plane comprise a plurality of logic cells arranged in rows and columns for providing a sum-of-products term on the output lines responsive to the received input signal. According to the teachings of the present invention, each logic cell includes a source region and a drain region in a horizontal substrate. A depletion mode channel region separates the source and the drain regions. A number of vertical gates are located above different portions of the depletion mode channel region. At least one of the vertical gates is located above a first portion of the depletion mode channel region and is separated from the channel region by a first thickness insulator material. At least one of the vertical gates is located above a second portion of the channel region and is separated from the channel region by a second thickness insulator material. According to the present invention, there is no source nor drain region associated with each input and the gates have sub-lithographic horizontal dimensions by virtue of being edge defined vertical gates.
Inventors
- 👤 Leonard Forbes
- 👤 Kie Y. Ahn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:52
CPC Classifications
H; H10; H10B; H10B20/00; H10B20/27; H10B20/30; H10B20/36; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/023; H10D30/60; H10D30/611; H10D30/68; H10D30/6891; H10D64/00; H10D64/20; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/514; H10D64/516; H10D84/00; H10D84/90; H10D84/903
Claims Analysis
Total Claims: 51
Claim 1
Independent Claim
191 words
A programmable logic array, comprising: a plurality of input lines for receiving an input signal; a plurality of output lines; and one or more arrays having a first logic plane and a second logic plane connected between the input lines and the output lines, wherein the first logic plane and the second logic plane comprise a plurality of logic cells arranged in rows and columns for providing a sum-of-products term on the output lines responsive to the received input signal, wherein each logic cell includes: a source region in a horizontal substrate; a drain region in the horizontal substrate; a depletion mode channel region separating the source and the drain regions; a number of vertical gates located above different portions of the depletion mode channel region; wherein at least one of the vertical gates is located above a first portion of the depletion mode channel region and is separated from the channel region by a first thickness insulator material; and wherein at least one of the vertical gates is located above a second portion of the channel region and is separated from the channel region by a second thickness insulator material.
Claim 2
Dependent Claim
191 words
A programmable logic array, comprising: a plurality of input lines for receiving an input signal; a plurality of output lines; and one or more arrays having a first logic plane and a second logic plane connected between the input lines and the output lines, wherein the first logic plane and the second logic plane comprise a plurality of logic cells arranged in rows and columns for providing a sum-of-products term on the output lines responsive to the received input signal, wherein each logic cell includes: a source region in a horizontal substrate; a drain region in the horizontal substrate; a depletion mode channel region separating the source and the drain regions; a number of vertical gates located above different portions of the depletion mode channel region; wherein at least one of the vertical gates is located above a first portion of the depletion mode channel region and is separated from the channel region by a first thickness insulator material; and wherein at least one of the vertical gates is located above a second portion of the channel region and is separated from the channel region by a second thickness insulator material.
Claim 3
Dependent Claim
28 words
The programmable logic array of claim 1 , wherein the first logic plane is a NAND logic plane and the second logic plane is a NAND logic plane.
Claim 4
Dependent Claim
43 words
The programmable logic array of claim 1 , wherein the vertical gate located above a first portion of the channel region is parallel to the vertical gate located above a second portion of the channel region and separated therefrom by an intergate dielectric.
Claim 5
Dependent Claim
24 words
The programmable logic array of claim 1 , wherein the number of vertical gates each have a horizontal width of approximately 100 nanometers (nm).
Claim 6
Dependent Claim
31 words
The programmable logic array of claim 1 , wherein the first thickness insulator material is approximately 33 Angstroms (Å), and wherein the second thickness insulator material is approximately 330 Angstroms (Å).
Claim 7
Dependent Claim
29 words
The programmable logic array of claim 1 , wherein the first thickness insulator material, the second thickness insulator material, and the intergate dielectric include silicon dioxide (SiO 2 ).
Claim 8
Dependent Claim
23 words
The programmable logic array of claim 1 , wherein the number of vertical gates have a vertical height of approximately 500 nanometers (nm).
Claim 9
Dependent Claim
43 words
The programmable logic array of claim 1 , wherein the depletion mode channel region separating the source and the drain regions is controlled by a potential range of less than 0.5 Volts applied to at least one of the number of vertical gates.
Claim 10
Dependent Claim
167 words
A field programmable logic array, comprising: a first logic plane that receives a number of input signals, the first logic plane having a plurality of logic cells arranged in rows and columns that are interconnected to provide a number of logical outputs; a second logic plane having a number of logic cells arranged in rows and columns that receive the outputs of the first logic plane and that are interconnected to produce a number of logical outputs such that the programmable logic array implements a logical function; and wherein the number of logic cells have a source region, a drain region, and a horizontal depletion mode channel therebetween, and wherein each logic cell includes: a first vertical gate separated from a first portion of the depletion mode channel region by a first oxide thickness; and a second vertical gate separated from a second portion of the depletion mode channel region by a second oxide thickness, wherein the first vertical gate is formed opposing the second vertical gate.
Claim 11
Dependent Claim
167 words
A field programmable logic array, comprising: a first logic plane that receives a number of input signals, the first logic plane having a plurality of logic cells arranged in rows and columns that are interconnected to provide a number of logical outputs; a second logic plane having a number of logic cells arranged in rows and columns that receive the outputs of the first logic plane and that are interconnected to produce a number of logical outputs such that the programmable logic array implements a logical function; and wherein the number of logic cells have a source region, a drain region, and a horizontal depletion mode channel therebetween, and wherein each logic cell includes: a first vertical gate separated from a first portion of the depletion mode channel region by a first oxide thickness; and a second vertical gate separated from a second portion of the depletion mode channel region by a second oxide thickness, wherein the first vertical gate is formed opposing the second vertical gate.
Claim 12
Dependent Claim
28 words
The field programmable logic array of claim 9 , wherein the first vertical gate and the second vertical gate each have a horizontal width which has sub-lithographic dimensions.
Claim 13
Dependent Claim
36 words
The field programmable logic array of claim 9 , wherein the first vertical gate and the second vertical gate are logic inputs such that a minimal area in the transistor is used for each logic input.
Claim 14
Dependent Claim
33 words
The field programmable logic array of claim 9 , wherein the first vertical gate includes an active input for the transistor, and wherein the first oxide thickness is less than 50 Angstroms (Å).
Claim 15
Dependent Claim
31 words
The field programmable logic array of claim 9 , where in the second vertical gate includes a passing line, and wherein the second oxide thickness is less than 300 Angstroms (Å).
Claim 16
Dependent Claim
26 words
The field programmable logic array of claim 9 , wherein only the first vertical gate is able to control conduction in the depletion mode channel region.
Claim 17
Dependent Claim
39 words
The field programmable logic array of claim 9 , wherein each logic cell includes a NAND gate transistor, and wherein a both the first vertical gate and the second vertical gate control conduction in the depletion mode channel region.
Claim 18
Dependent Claim
204 words
A low voltage programmable logic array, comprising: a first logic plane that receives a number of input signals, the first logic plane having a plurality logic cells arranged in rows and columns that are interconnected to provide a number of logical outputs; a second logic plane having a plurality of logic cells arranged in rows and columns that receive the outputs of the first logic plane and that are interconnected to produce a number of logical outputs such that the programmable logic array implements a logical function; and wherein each logic cell includes: a horizontal substrate, wherein the substrate includes a source region, a drain region, and a depletion mode channel region separating the source and the drain region; a first vertical gate located above a first portion of the depletion mode channel region and separated from the depletion mode channel region by a first oxide thickness; a second vertical gate located above a second portion of the depletion mode channel region and separated from the depletion mode channel region by a second oxide thickness, and a third vertical gate located above a third portion of the depletion mode channel region and separated from the depletion mode channel region by the second oxide thickness.
Claim 19
Dependent Claim
204 words
A low voltage programmable logic array, comprising: a first logic plane that receives a number of input signals, the first logic plane having a plurality logic cells arranged in rows and columns that are interconnected to provide a number of logical outputs; a second logic plane having a plurality of logic cells arranged in rows and columns that receive the outputs of the first logic plane and that are interconnected to produce a number of logical outputs such that the programmable logic array implements a logical function; and wherein each logic cell includes: a horizontal substrate, wherein the substrate includes a source region, a drain region, and a depletion mode channel region separating the source and the drain region; a first vertical gate located above a first portion of the depletion mode channel region and separated from the depletion mode channel region by a first oxide thickness; a second vertical gate located above a second portion of the depletion mode channel region and separated from the depletion mode channel region by a second oxide thickness, and a third vertical gate located above a third portion of the depletion mode channel region and separated from the depletion mode channel region by the second oxide thickness.
Claim 20
Dependent Claim
27 words
The low voltage programmable logic array of claim 16 , wherein the second and the third vertical gates are on opposing sides of the first vertical gate.
Claim 21
Dependent Claim
30 words
The low voltage programmable logic array of claim 16 , wherein first vertical gate includes a passing line and wherein the second and the third vertical gates include active inputs.
Claim 22
Dependent Claim
51 words
The low voltage programmable logic array of claim 16 , wherein an operating voltage applied to the first vertical gate cannot control conduction in the depletion mode channel region, and wherein the operating voltage applied to the second and the third vertical gates controls conduction in the depletion mode channel region.
Claim 23
Dependent Claim
22 words
The low voltage programmable logic array of claim 16 , wherein the second oxide thickness is less than the first oxide thickness.
Claim 24
Dependent Claim
39 words
The low voltage programmable logic array of claim 16 , wherein the first vertical gate, the second vertical gate, and the third vertical gate include polysilicon gates which are separated from one another by silicon dioxide (SiO 2 ).
Claim 25
Dependent Claim
49 words
The low voltage programmable logic array of claim 16 , wherein the first vertical gate, the second vertical gate, and the third vertical gate each have a horizontal width which is sub-lithographic in dimension such that a minimal area of the logic gate transistor is needed for each gate.
Claim 26
Dependent Claim
45 words
The low voltage programmable logic array of claim 16 , wherein the first oxide thickness and the second oxide thickness are approximately the same thickness such that the first, the second, and the third vertical gate each control conduction in the depletion mode channel region.
Claim 27
Dependent Claim
176 words
A low voltage programmable logic array, comprising: a first logic plane that receives a number of input signals, the first logic plane having a number of static pass transistors arranged in rows and columns that are interconnected to provide a number of logical outputs; a second logic plane having a number of static pass transistors arranged in rows and columns that receive the outputs of the first logic plane and that are interconnected to produce a number of logical outputs such that the programmable logic array implements a logical function; and wherein each static pass transistor includes: a horizontal substrate, wherein the substrate includes a source region, a drain region, and a depletion mode channel region separating the source and the drain region; a first vertical gate separated from a first portion of the depletion mode channel region by a first oxide thickness; and a second vertical gate separated from a second portion of the depletion mode channel region by a second oxide thickness, wherein the second vertical gate is parallel to the first vertical gate.
Claim 28
Dependent Claim
176 words
A low voltage programmable logic array, comprising: a first logic plane that receives a number of input signals, the first logic plane having a number of static pass transistors arranged in rows and columns that are interconnected to provide a number of logical outputs; a second logic plane having a number of static pass transistors arranged in rows and columns that receive the outputs of the first logic plane and that are interconnected to produce a number of logical outputs such that the programmable logic array implements a logical function; and wherein each static pass transistor includes: a horizontal substrate, wherein the substrate includes a source region, a drain region, and a depletion mode channel region separating the source and the drain region; a first vertical gate separated from a first portion of the depletion mode channel region by a first oxide thickness; and a second vertical gate separated from a second portion of the depletion mode channel region by a second oxide thickness, wherein the second vertical gate is parallel to the first vertical gate.
Claim 29
Dependent Claim
43 words
The low voltage programmable logic array of claim 24 , wherein the vertical gates in each static pass transistor are multiple logic inputs such that the low voltage programmable logic array conserves surface space by having multiple logic inputs per static pass transistor.
Claim 30
Dependent Claim
20 words
The low voltage programmable logic array of claim 24 , wherein each static pass transistor includes a NAND logic cell.
Claim 31
Dependent Claim
22 words
The low voltage programmable logic array of claim 24 , wherein each static pass transistor includes an n-type depletion mode channel region.
Claim 32
Dependent Claim
37 words
The low voltage programmable logic array of claim 24 , wherein the first vertical gate in each logic cell includes an active input and wherein the second vertical gate in each logic cell includes a passing line.
Claim 33
Dependent Claim
37 words
The low voltage programmable logic array of claim 24 , wherein the first vertical gate and the second vertical gate are each edge defined such that each vertical gate has a horizontal width which has sub-lithographic dimensions.
Claim 34
Dependent Claim
33 words
The low voltage programmable logic array of claim 24 , wherein the first oxide thickness is less than 50 Angstroms (Å), and wherein the second oxide thickness is less than 350 Angstroms (Å).
Claim 35
Dependent Claim
174 words
An electronic system, the electronic system comprising a programmable logic array, the programmable logic array including: a plurality of input lines for receiving an input signal; a plurality of output lines; and one or more arrays having a first logic plane and a second logic plane connected between the input lines and the output lines, wherein the first logic plane and the second logic plane comprise a plurality of logic cells arranged in rows and columns for providing a sum-of-products term on the output lines responsive to the received input signal, wherein each logic cell includes: a horizontal substrate, wherein the substrate includes a source region, a drain region, and a depletion mode channel region separating the source and the drain region; a first vertical gate separated from a first portion of the depletion mode channel region by a first oxide thickness; and a second vertical gate separated from a second portion of the depletion mode channel region by a second oxide thickness, wherein the second vertical gate is opposing the first vertical gate.
Claim 36
Dependent Claim
174 words
An electronic system, the electronic system comprising a programmable logic array, the programmable logic array including: a plurality of input lines for receiving an input signal; a plurality of output lines; and one or more arrays having a first logic plane and a second logic plane connected between the input lines and the output lines, wherein the first logic plane and the second logic plane comprise a plurality of logic cells arranged in rows and columns for providing a sum-of-products term on the output lines responsive to the received input signal, wherein each logic cell includes: a horizontal substrate, wherein the substrate includes a source region, a drain region, and a depletion mode channel region separating the source and the drain region; a first vertical gate separated from a first portion of the depletion mode channel region by a first oxide thickness; and a second vertical gate separated from a second portion of the depletion mode channel region by a second oxide thickness, wherein the second vertical gate is opposing the first vertical gate.
Claim 37
Dependent Claim
38 words
The electronic system of claim 31 , wherein the first and the second vertical gates are separated by an intergate dielectric, and wherein the intergate dielectric has a thickness which is approximately equal to the first oxide thickness.
Claim 38
Dependent Claim
25 words
The electronic system of claim 31 , wherein the first vertical gate includes a passing line and the second vertical gate includes an active input.
Claim 39
Dependent Claim
36 words
The electronic system of claim 31 , wherein the first vertical gate and the second vertical gate include edge defined vertical gates such that each vertical gate has a horizontal width which is sub-lithographic in dimension.
Claim 40
Dependent Claim
33 words
The electronic system of claim 31 , wherein the second oxide thickness is less than the first oxide thickness such that the second vertical gate controls conduction in the depletion mode channel region.
Claim 41
Dependent Claim
24 words
The electronic system of claim 31 , wherein an independent operating voltage is applied to each of the first and the second vertical gates.
Claim 42
Dependent Claim
33 words
The electronic system of claim 31 , wherein an operating voltage range of approximately between 0.0 and −0.6 Volts applied the second vertical gate controls the conduction in the depletion mode channel region.
Claim 43
Dependent Claim
208 words
An electronic system, comprising: a memory; a processor coupled to the memory; and wherein the processor includes at least one programmable logic array including: a plurality of input lines for receiving an input signal; a plurality of output lines; and one or more arrays having a first logic plane and a second logic plane connected between the input lines and the output lines, wherein the first logic plane and the second logic plane comprise a plurality of logic cells arranged in rows and columns for providing a sum-of-products term on the output lines responsive to the received input signal, wherein each logic cell includes: a horizontal substrate, wherein the substrate includes a source region, a drain region, and a depletion mode channel region separating the source and the drain region; a number of vertical gates located above different portions of the depletion mode channel region; wherein at least one of the vertical gates is located above a first portion of the depletion mode channel region and is separated from the channel region by a first oxide thickness; and wherein at least one of the vertical gates is located above a second portion of the channel region and is separated from the channel region by a second oxide thickness.
Claim 44
Dependent Claim
208 words
An electronic system, comprising: a memory; a processor coupled to the memory; and wherein the processor includes at least one programmable logic array including: a plurality of input lines for receiving an input signal; a plurality of output lines; and one or more arrays having a first logic plane and a second logic plane connected between the input lines and the output lines, wherein the first logic plane and the second logic plane comprise a plurality of logic cells arranged in rows and columns for providing a sum-of-products term on the output lines responsive to the received input signal, wherein each logic cell includes: a horizontal substrate, wherein the substrate includes a source region, a drain region, and a depletion mode channel region separating the source and the drain region; a number of vertical gates located above different portions of the depletion mode channel region; wherein at least one of the vertical gates is located above a first portion of the depletion mode channel region and is separated from the channel region by a first oxide thickness; and wherein at least one of the vertical gates is located above a second portion of the channel region and is separated from the channel region by a second oxide thickness.
Claim 45
Dependent Claim
54 words
The electronic system of claim 38 , wherein the number of vertical gates located above different portions of the depletion mode channel region include parallel polysilicon vertical gates separated by a silicon dioxide (SiO2) intergate dielectric such that the number of vertical gates make up a number of logic inputs for each logic cell.
Claim 46
Dependent Claim
23 words
The electronic system of claim 39 , wherein the intergate dielectric has a thickness which is approximately equal to the first oxide thickness.
Claim 47
Dependent Claim
40 words
The electronic system of claim 38 , wherein at least one of the vertical gates includes a passing line for the logic cell and wherein at least one of the vertical gates includes an active input for the logic cell.
Claim 48
Dependent Claim
32 words
The electronic system of claim 38 , wherein the number of vertical gates include edge defined vertical gates such that each vertical gate has a horizontal width which is sub-lithographic in dimension.
Claim 49
Dependent Claim
19 words
The electronic system of claim 38 , wherein the first oxide thickness is less than the second oxide thickness.
Claim 50
Dependent Claim
22 words
The electronic system of claim 38 , wherein an independent operating voltage is applied to each of the number of vertical gates.
Claim 51
Dependent Claim
37 words
The electronic system of claim 38 , wherein an operating voltage range of approximately between 0.0 and −0.6 Volts applied to at least one of the vertical gates controls the conduction in the depletion mode channel region.
References Cited (Backward Citations)
US6219299B1
Cited
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2005-08-19 | 2006-02-18 | 2006-08-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-08-19 | 2010-02-18 | 2010-08-20 | $3760.00 | Window Closed / Lapsed |
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