US6424876B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Statistical process control system with normalized control charting
Assignee: GlobalFoundries Inc
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Filing: 1999-07-22
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Granted: 2002-07-23
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Expires: 2019-07-22
Abstract
Abstract A method for monitoring the performance of a manufacturing entity is provided. Metrology data indicating an output parameter of the manufacturing entity is retrieved. The output parameter has an associated target value. The metrology data is normalized based on the target value to generate normalized performance data points. A performance rule violation is determined based on the normalized performance data. A manufacturing system includes a metrology tool, a first database, and a processor. The metrology tool is adapted to measure an output parameter of a manufacturing entity to generate metrology data. The output parameter has an associated target value. The first database is adapted to receive the metrology data. The processor is adapted to retrieve the metrology data from the database, normalize the metrology data based on the target value to generate normalized performance data points, and determine a performance rule violation based on the normalized performance data.
Inventors
- 👤 Brian K. Cusson
- 👤 James Sharier
- 👤 Justin Giguere
- 👤 Anatasia Oshelski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:50
CPC Classifications
G; G06; G06Q; G06Q10/00; G06Q10/06; G06F; G06F17/00; G06F17/10; G06F17/18
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
82 words
A method for monitoring the performance of a manufacturing entity configured to operate in accordance with a plurality of manufacturing recipes, comprising: retrieving metrology data indicating output parameters of the manufacturing entity, each output parameter having an associated target value corresponding to a particular one of the manufacturing recipes used to operate the manufacturing entity; normalizing the metrology data based on the target value to generate normalized performance data points; and determining a performance rule violation based on the normalized performance data.
Claim 2
Independent Claim
82 words
A method for monitoring the performance of a manufacturing entity configured to operate in accordance with a plurality of manufacturing recipes, comprising: retrieving metrology data indicating output parameters of the manufacturing entity, each output parameter having an associated target value corresponding to a particular one of the manufacturing recipes used to operate the manufacturing entity; normalizing the metrology data based on the target value to generate normalized performance data points; and determining a performance rule violation based on the normalized performance data.
Claim 3
Dependent Claim
24 words
The method of claim 1 , wherein normalizing the metrology data includes determining a percent deviation between the metrology data and the target value.
Claim 4
Dependent Claim
33 words
The method of claim 1 , wherein determining the performance rule violation includes determining if one of the normalized performance data points has an associated standard deviation of about at least three sigma.
Claim 5
Dependent Claim
34 words
The method of claim 1 , wherein determining the performance rule violation includes determining if two out of three consecutive normalized performance data points have associated standard deviations of about at least two sigma.
Claim 6
Dependent Claim
34 words
The method of claim 1 , wherein determining the performance rule violation includes determining if four out of five consecutive normalized performance data points have associated standard deviations of about at least one sigma.
Claim 7
Dependent Claim
32 words
The method of claim 1 , wherein determining the performance rule violation includes determining if at least eight consecutive normalized performance data points have the same sign deviation from the target value.
Claim 8
Dependent Claim
63 words
The method of claim 1 , wherein the metrology data includes a first set of metrology data associated with a first target value and a second set of metrology data associated with a second target value, and normalizing the metrology data includes normalizing the first set based on the first target value and normalizing the second set based on the second target value.
Claim 9
Dependent Claim
23 words
The method of claim 1 , further comprising preventing further operation of the manufacturing entity in response to determining the performance rule violation.
Claim 10
Dependent Claim
27 words
The method of claim 8 , wherein preventing farther operation of the manufacturing entity includes sending a message to a work-in-process server indicating the performance rule violation.
Claim 11
Dependent Claim
29 words
The method of claim 1 , further comprising sending a rule violation message to a designated owner of the manufacturing entity in response to determining the performance rule violation.
Claim 12
Dependent Claim
24 words
The method of claim 1 , further comprising preventing collection of the metrology data pending a periodic review of the normalized performance data points.
Claim 13
Dependent Claim
33 words
The method of claim 11 , wherein preventing collection of the metrology data pending the periodic review includes preventing collection of the metrology data if the periodic review interval exceeds about eight weeks.
Claim 14
Dependent Claim
28 words
The method of claim 12 , further comprising providing a warning of the impending preventing of metrology data collection if the periodic review interval exceeds about six weeks.
Claim 15
Dependent Claim
102 words
A manufacturing system, comprising: a metrology tool adapted to measure output parameters of a manufacturing entity configured to operate in accordance with a plurality of manufacturing recipes to generate metrology data, each output parameter having an associated target value corresponding to a particular one of the manufacturing recipes used to operate the manufacturing entity; a first database adapted to receive the metrology data; and a processor adapted to retrieve the metrology data from the database, normalize the metrology data based on the target value to generate normalized performance data points, and determine a performance rule violation based on the normalized performance data.
Claim 16
Dependent Claim
102 words
A manufacturing system, comprising: a metrology tool adapted to measure output parameters of a manufacturing entity configured to operate in accordance with a plurality of manufacturing recipes to generate metrology data, each output parameter having an associated target value corresponding to a particular one of the manufacturing recipes used to operate the manufacturing entity; a first database adapted to receive the metrology data; and a processor adapted to retrieve the metrology data from the database, normalize the metrology data based on the target value to generate normalized performance data points, and determine a performance rule violation based on the normalized performance data.
Claim 17
Dependent Claim
19 words
The manufacturing system of claim 14 , further comprising a second database adapted to store the normalized performance data.
Claim 18
Dependent Claim
21 words
The manufacturing system of claim 14 , further comprising a bus coupling the metrology tool, the first database and the processor.
Claim 19
Dependent Claim
30 words
The manufacturing system of claim 14 , wherein the processor is adapted to normalize the metrology data by determining a percent deviation between the metrology data and the target value.
Claim 20
Dependent Claim
39 words
The manufacturing system of claim 14 , wherein the processor is adapted to determine the performance rule violation by determining if one of the normalized performance data points has an associated standard deviation of about at least three sigma.
Claim 21
Dependent Claim
40 words
The manufacturing system of claim 14 , wherein the processor is adapted to determine the performance rule violation by determining if two out of three consecutive normalized performance data points have associated standard deviations of about at least two sigma.
Claim 22
Dependent Claim
40 words
The manufacturing system of claim 14 , wherein the processor is adapted to determine the performance rule violation by determining if four out of five consecutive normalized performance data points have associated standard deviations of about at least one sigma.
Claim 23
Dependent Claim
38 words
The manufacturing system of claim 14 , wherein the processor is adapted to determine the performance rule violation by determining if at least eight consecutive normalized performance data points have the same sign deviation from the target value.
Claim 24
Dependent Claim
67 words
The manufacturing system of claim 14 , wherein the metrology data includes a first set of metrology data associated with a first target value and a second set of metrology data associated with a second target value, and the processor is adapted to normalize the first set of metrology data based on the first target value and normalize the second set based on the second target value.
Claim 25
Dependent Claim
28 words
The manufacturing system of claim 14 , wherein the processor is further adapted to prevent further operation of the manufacturing entity in response to the performance rule violation.
Claim 26
Dependent Claim
36 words
The manufacturing system of claim 23 , further comprising a work-in-process server adapted to control the manufacturing entity, wherein the processor is adapted to send a message to the work-in-process server indicating the performance rule violation.
Claim 27
Dependent Claim
33 words
The manufacturing system of claim 14 , wherein the processor is adapted to send a rule violation message to a designated owner of the manufacturing entity in response to the performance rule violation.
Claim 28
Dependent Claim
30 words
The manufacturing system of claim 14 , wherein the processor is further adapted to prevent collection of the metrology data pending a periodic review of the normalized performance data points.
Claim 29
Dependent Claim
18 words
The manufacturing system of claim 26 , wherein the periodic review has a frequency of about eight weeks.
Claim 30
Dependent Claim
34 words
The manufacturing system of claim 27 , wherein the processor is further adapted to provide a warning of the impending preventing of metrology data collection if the periodic review interval exceeds about six weeks.
Claim 31
Dependent Claim
103 words
A manufacturing system for monitoring the performance of a manufacturing entity configured to operate in accordance with a plurality of manufacturing recipes, comprising: a processor; and a program storage device encoded with instructions that, when executed by the processor, perform a method, comprising retrieving metrology data indicating output parameters of the manufacturing entity, each output parameter having an associated target value corresponding to a particular one of the manufacturing recipes used to operate the manufacturing entity; normalizing the metrology data based on the target value to generate normalized performance data points; and determining a performance rule violation based on the normalized performance data.
Claim 32
Dependent Claim
103 words
A manufacturing system for monitoring the performance of a manufacturing entity configured to operate in accordance with a plurality of manufacturing recipes, comprising: a processor; and a program storage device encoded with instructions that, when executed by the processor, perform a method, comprising retrieving metrology data indicating output parameters of the manufacturing entity, each output parameter having an associated target value corresponding to a particular one of the manufacturing recipes used to operate the manufacturing entity; normalizing the metrology data based on the target value to generate normalized performance data points; and determining a performance rule violation based on the normalized performance data.
Claim 33
Dependent Claim
28 words
The manufacturing system of claim 29 , wherein normalizing the metrology data in the method includes determining a percent deviation between the metrology data and the target value.
Claim 34
Dependent Claim
37 words
The manufacturing system of claim 29 , wherein determining the performance rule violation in the method includes determining if one of the normalized performance data points has an associated standard deviation of about at least three sigma.
Claim 35
Dependent Claim
38 words
The manufacturing system of claim 29 , wherein determining the performance rule violation in the method includes determining if two out of three consecutive normalized performance data points have associated standard deviations of about at least two sigma.
Claim 36
Dependent Claim
38 words
The manufacturing system of claim 29 , wherein determining the performance rule violation in the method includes determining if four out of five consecutive normalized performance data points have associated standard deviations of about at least one sigma.
Claim 37
Dependent Claim
36 words
The manufacturing system of claim 29 , wherein determining the performance rule violation in the method includes determining if at least eight consecutive normalized performance data points have the same sign deviation from the target value.
Claim 38
Dependent Claim
67 words
The manufacturing system of claim 29 , wherein the metrology data includes a first set of metrology data associated with a first target value and a second set of metrology data associated with a second target value, and normalizing the metrology data in the method includes normalizing the first set based on the first target value and normalizing the second set based on the second target value.
Claim 39
Dependent Claim
26 words
The manufacturing system of claim 29 , the method further comprising preventing further operation of the manufacturing entity in response to determining the performance rule violation.
Claim 40
Dependent Claim
31 words
The manufacturing system of claim 29 , wherein preventing further operation of the manufacturing entity in the method includes sending a message to a work-in-process server indicating the performance rule violation.
Claim 41
Dependent Claim
32 words
The manufacturing system of claim 29 , the method further comprising sending a rule violation message to a designated owner of the manufacturing entity in response to determining the performance rule violation.
Claim 42
Dependent Claim
27 words
The manufacturing system of claim 29 , the method further comprising preventing collection of the metrology data pending a periodic review of the normalized performance data points.
Claim 43
Dependent Claim
36 words
The manufacturing system of claim 39 , wherein preventing collection of the metrology data pending the periodic review in the method includes preventing collection of the metrology data if the periodic review interval exceeds eight weeks.
Claim 44
Dependent Claim
31 words
The manufacturing system of claim 40 , the method further comprising providing a warning of the impending preventing of metrology data collection if the periodic review interval exceeds about six weeks.
Claim 45
Dependent Claim
89 words
A manufacturing system for monitoring the performance of a manufacturing entity configured to operate in accordance with a plurality of manufacturing recipes, comprising: means for retrieving metrology data indicating output parameters of the manufacturing entity, each output parameter having an associated target value corresponding to a particular one of the manufacturing recipes used to operate the manufacturing entity; means for normalizing the metrology data based on the target value to generate normalized performance data points; and means for determining a performance rule violation based on the normalized performance data.
Claim 46
Dependent Claim
89 words
A manufacturing system for monitoring the performance of a manufacturing entity configured to operate in accordance with a plurality of manufacturing recipes, comprising: means for retrieving metrology data indicating output parameters of the manufacturing entity, each output parameter having an associated target value corresponding to a particular one of the manufacturing recipes used to operate the manufacturing entity; means for normalizing the metrology data based on the target value to generate normalized performance data points; and means for determining a performance rule violation based on the normalized performance data.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-07-22 | 2006-01-21 | 2006-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-07-22 | 2010-01-21 | 2010-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-07-22 | 2014-01-21 | 2014-07-23 | $7700.00 | Window Closed / Lapsed |