US6414477B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for optimizing probe card analysis and scrub mark analysis data
Assignee: Rudolph Technologies Inc
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Filing: 1999-06-07
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Granted: 2002-07-02
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Expires: 2019-06-07
Abstract
Abstract A method for quantitatively determining probe card errors relying on merging data sets from a probe card analysis machine and a scrub mark analysis machine. Minimizing error values related to the data sets provides an indication of probe card/probe machine combination tolerance.
Inventors
- 👤 John Strom
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 15:52
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/06794; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886; G01R31/2887; G01R31/2891; G01R35/00; G01R1/073; G01R1/07307; G01R1/07342; G01R3/00
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
242 words
A method for quantifying a representative misalignment of probe pin tips arranged in orthogonal rows and columns on a semiconductor probe card and prober machine combination, comprising the steps of: measuring a plurality of elongated scrub patterns of probe card pins on a probe card analyzer having a relatively hard, smooth measuring surface to obtain probe card analyzer touchdown and end travel positions for a plurality of probe pins on the probe card defining a probe card analyzer data set; impressing the probe card pins with a prober machine on a test wafer having a pin contact surface which closely models semiconductor bonding pads in hardness and surface friction, and measuring a plurality of elongated scrub marks produced on the contact surface with a scrub mark analyzer machine to obtain scrub mark analyzer touch down and end travel positions defining a scrub mark analyzer data set; merging the probe card analyzer and scrub mark analyzer data sets to generate a merged data set having touch down data from the probe card analyzer data set and end travel data from the scrub mark analyzer data set; assigning error values to differences between corresponding scrub mark analyzer and probe card analyzer data in the merged data set; and mathematically optimizing the merged data set with orthogonal and rotational offsets to minimize the error values, whereby the orthogonal and rotational offsets represent quantitative misalignments of probe pins in the probe card and prober machine combination.
Claim 2
Independent Claim
242 words
A method for quantifying a representative misalignment of probe pin tips arranged in orthogonal rows and columns on a semiconductor probe card and prober machine combination, comprising the steps of: measuring a plurality of elongated scrub patterns of probe card pins on a probe card analyzer having a relatively hard, smooth measuring surface to obtain probe card analyzer touchdown and end travel positions for a plurality of probe pins on the probe card defining a probe card analyzer data set; impressing the probe card pins with a prober machine on a test wafer having a pin contact surface which closely models semiconductor bonding pads in hardness and surface friction, and measuring a plurality of elongated scrub marks produced on the contact surface with a scrub mark analyzer machine to obtain scrub mark analyzer touch down and end travel positions defining a scrub mark analyzer data set; merging the probe card analyzer and scrub mark analyzer data sets to generate a merged data set having touch down data from the probe card analyzer data set and end travel data from the scrub mark analyzer data set; assigning error values to differences between corresponding scrub mark analyzer and probe card analyzer data in the merged data set; and mathematically optimizing the merged data set with orthogonal and rotational offsets to minimize the error values, whereby the orthogonal and rotational offsets represent quantitative misalignments of probe pins in the probe card and prober machine combination.
Claim 3
Dependent Claim
26 words
The method of claim 1 , wherein the error value is defined as the difference between probe card analyzer and scrub mark analyzer end travel positions.
Claim 4
Dependent Claim
26 words
The method of claim 1 , wherein the error value is defined as the difference between probe card analyzer and scrub mark analyzer touch down positions.
Claim 5
Dependent Claim
73 words
The method of claim 1 , wherein major axes between touch down and end travel positions define probe card scrub pattern paths and scrub mark analyzer scrub mark paths, wherein probe card scrub pattern paths and scrub mark analyzer scrub mark paths are mathematically determined from the merged data set, and wherein the error value is defined as differences between probe card analyzer scrub pattern paths and scrub mark analyzer scrub mark paths.
Claim 6
Dependent Claim
36 words
The method of claim 4 , wherein the test wafer pin contact surface has a plurality of contact pads arranged in orthogonal rows and columns generally corresponding to the orthogonal positions of the probe card pins.
Claim 7
Dependent Claim
33 words
The method of claim 1 , wherein the test wafer is heated approximately to the operating temperature of a semiconductor device of interest during the probe card impressing and scrub mark measuring steps.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-07-01 | 2005-12-31 | 2006-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-07-01 | 2009-12-31 | 2010-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-07-01 | 2013-12-31 | 2014-07-02 | $7700.00 | Window Closed / Lapsed |