US6407929B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electronic package having embedded capacitors and method of fabrication therefor
Assignee: Intel Corp
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Filing: 2000-06-29
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Granted: 2002-06-18
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Expires: 2020-06-29
Abstract
Abstract An electronic package ( 302 , FIG. 3 ) includes one or more capacitors ( 308 ) embedded within one or more layers ( 310 ) of the package. The embedded capacitors are discrete devices, such as integrated circuit capacitors (FIGS. 17-18 ) or ceramic capacitors. During the package build-up process, the capacitors are mounted ( 410 , FIG. 4 ) to a package layer, and a non-conductive layer is applied ( 412 ) over the capacitors. When the build-up process is completed, the capacitor's terminals ( 604, 608 , FIG. 6 ) are electrically connected to the top surface of the package. The embedded capacitor structure can be used in an integrated circuit package ( 1904 , FIG. 19 ), an interposer ( 1906 ), and/or a printed circuit board ( 1908 ).
Inventors
- 👤 Aaron Dean Hale
- 👤 Michael Walk
- 👤 David G. Figueroa
- 👤 Joan K. Vrtis
- 👤 Toshimi Kohmura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:42
CPC Classifications
H; H10; H10W; H10W72/00; H10W44/00; H10W44/601; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W70/685; H10W90/00; H10W90/701; H10W90/721; H10W90/724; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/4913
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
84 words
An electronic package comprising: a first layer of the electronic package having a top surface; at least one discrete capacitor mounted on the top surface, wherein each of the at least one discrete capacitor has a first terminal and a second terminal; a non-conductive layer applied on the top surface and over the at least one discrete capacitor; and electrical connections between the first terminal and the second terminal of the at least one discrete capacitor and a top surface of the non-conductive layer.
Claim 2
Dependent Claim
84 words
An electronic package comprising: a first layer of the electronic package having a top surface; at least one discrete capacitor mounted on the top surface, wherein each of the at least one discrete capacitor has a first terminal and a second terminal; a non-conductive layer applied on the top surface and over the at least one discrete capacitor; and electrical connections between the first terminal and the second terminal of the at least one discrete capacitor and a top surface of the non-conductive layer.
Claim 3
Dependent Claim
26 words
The electronic package as claimed in claim 1 , wherein the electronic package is an integrated circuit package that is electrically connectable to an integrated circuit.
Claim 4
Dependent Claim
25 words
The electronic package as claimed in claim 1 , wherein the electronic package is an interposer that is electrically connectable to an integrated circuit package.
Claim 5
Dependent Claim
27 words
The electronic package as claimed in claim 1 , wherein the electronic package is a printed circuit board that is electrically connectable to an integrated circuit package.
Claim 6
Dependent Claim
68 words
The electronic package as claimed in claim 1 , wherein each of the at least one capacitor comprises: a bottom electrode, which forms at least a part of the first terminal; a dielectric layer connected to the bottom electrode; and a top electrode, connected to the dielectric layer, which forms at least a part of the second terminal, wherein the bottom electrode is formed on a silicon substrate.
Claim 7
Dependent Claim
27 words
The electronic package as claimed in claim 1 , further comprising: one or more additional capacitors mounted on one or more additional layers of the electronic package.
Claim 8
Dependent Claim
131 words
A computer system positioned on a printed circuit board, the computer system comprising: a bus; a memory coupled to the bus; and an integrated circuit package coupled to the bus, including: an electronic package having a first layer with a top surface, at least one capacitor mounted on the top surface, wherein the capacitor has a first terminal and a second terminal, a non-conductive layer applied on the top surface and over the at least one capacitor, and electrical connections between the first terminal and the second terminal of the at least one capacitor and a top surface of the non-conductive layer, and a microprocessor located on a top surface of the electronic package, the microprocessor containing a circuit that is electrically connected to the first terminal and the second terminal.
Claim 9
Dependent Claim
131 words
A computer system positioned on a printed circuit board, the computer system comprising: a bus; a memory coupled to the bus; and an integrated circuit package coupled to the bus, including: an electronic package having a first layer with a top surface, at least one capacitor mounted on the top surface, wherein the capacitor has a first terminal and a second terminal, a non-conductive layer applied on the top surface and over the at least one capacitor, and electrical connections between the first terminal and the second terminal of the at least one capacitor and a top surface of the non-conductive layer, and a microprocessor located on a top surface of the electronic package, the microprocessor containing a circuit that is electrically connected to the first terminal and the second terminal.
Claim 10
Dependent Claim
27 words
The computer system as claimed in claim 7 , further comprising: one or more additional capacitors mounted on one or more additional layers of the electronic package.
Claim 11
Dependent Claim
68 words
The computer system as claimed in claim 7 , wherein each of the one or more capacitors comprises: a bottom electrode that forms at least a part of the first terminal; a dielectric layer connected to the bottom electrode; and a top electrode, connected to the dielectric layer, that forms at least a part of the second terminal, wherein the bottom electrode is formed on a silicon substrate.
Claim 12
Independent Claim
73 words
A method for fabricating an electronic package, the method comprising: mounting a discrete capacitor on a top surface of a first layer of the electronic package, wherein the discrete capacitor has a first terminal and a second terminal; applying a non-conductive layer on the top surface and over the discrete capacitor; and electrically connecting the first terminal and the second terminal of the discrete capacitor to a top surface of the non-conductive layer.
Claim 13
Independent Claim
73 words
A method for fabricating an electronic package, the method comprising: mounting a discrete capacitor on a top surface of a first layer of the electronic package, wherein the discrete capacitor has a first terminal and a second terminal; applying a non-conductive layer on the top surface and over the discrete capacitor; and electrically connecting the first terminal and the second terminal of the discrete capacitor to a top surface of the non-conductive layer.
Claim 14
Dependent Claim
24 words
The method as claimed in claim 1 , further comprising: mounting one or more additional capacitors on the top surface of the first layer.
Claim 15
Dependent Claim
26 words
The method as claimed in claim 10 , further comprising: mounting one or more additional capacitors on one or more other layers of the electronic package.
Claim 16
Dependent Claim
24 words
The method as claimed in claim 10 , wherein mounting the capacitor comprises: attaching the capacitor to the top surface with an adhesive film.
Claim 17
Dependent Claim
26 words
The method as claimed in claim 10 , wherein mounting the capacitor comprises: attaching the capacitor to the top surface with one or more solder connections.
Claim 18
Dependent Claim
36 words
The method as claimed in claim 10 , wherein applying the non-conductive layer comprises: laminating one or more sheets of non-conductive film on the top surface; and curing the one or more sheets of non-conductive film.
Claim 19
Dependent Claim
19 words
The method as claimed in claim 15 , further comprising: planarizing the one or more sheets of non-conductive film.
Claim 20
Dependent Claim
31 words
The method as claimed in claim 1 , wherein applying the non-conductive layer comprises: screen-printing a photoimagable liquid on the top surface; curing the photoimagable liquid; and photoimaging the photoimagable liquid.
Claim 21
Dependent Claim
30 words
The method as claimed in claim 1 , wherein applying the non-conductive layer comprises: applying a non-conductive layer having a thickness in a range of about 80 to 150 microns.
Claim 22
Dependent Claim
39 words
The method as claimed in claim 1 , wherein electrically connecting the second terminal comprises: forming contact holes through the top surface of the non-conductive layer to the second terminal; and depositing additional conductive material in the contact holes.
Claim 23
Dependent Claim
48 words
The method as claimed in claim 1 , further comprising: building up one or more additional package layers on the top surface of the electronic package; and electrically connecting the first terminal and the second terminal to a top surface of the one or more additional package layers.
Claim 24
Independent Claim
114 words
A method for fabricating an electronic package, the method comprising: mounting a capacitor on a top surface of a first layer of the electronic package, wherein the capacitor has a first terminal and a second terminal, and wherein the capacitor includes a bottom electrode that forms at least a part of the first terminal, a dielectric layer, and a top electrode that forms at least a part of the second terminal, wherein the bottom electrode is formed on a silicon substrate; applying a non-conductive layer on the top surface and over the capacitor; and electrically connecting the first terminal and the second terminal of the capacitor to a top surface of the non-conductive layer.
Claim 25
Independent Claim
114 words
A method for fabricating an electronic package, the method comprising: mounting a capacitor on a top surface of a first layer of the electronic package, wherein the capacitor has a first terminal and a second terminal, and wherein the capacitor includes a bottom electrode that forms at least a part of the first terminal, a dielectric layer, and a top electrode that forms at least a part of the second terminal, wherein the bottom electrode is formed on a silicon substrate; applying a non-conductive layer on the top surface and over the capacitor; and electrically connecting the first terminal and the second terminal of the capacitor to a top surface of the non-conductive layer.
Claim 26
Dependent Claim
55 words
The method as claimed in claim 21 , further comprising: depositing a barrier layer on a silicon substrate; depositing the bottom electrode on a top surface of the barrier layer; depositing a dielectric layer on a top surface of the bottom electrode; and depositing the top electrode on a top surface of the dielectric layer.
Claim 27
Dependent Claim
26 words
The method as claimed in claim 22 , further comprising: singulating the capacitor by separating the capacitor from multiple other capacitors deposited on the silicon substrate.
Claim 28
Dependent Claim
23 words
The method as claimed in claim 22 , further comprising: back grinding the silicon substrate to reduce a thickness of the silicon substrate.
Claim 29
Dependent Claim
30 words
The method as claimed in claim 22 , wherein depositing the barrier layer comprises: depositing a barrier layer having a thickness in a range of about 100 to 1000 Angstroms.
Claim 30
Dependent Claim
25 words
The method as claimed in claim 22 , wherein depositing the barrier layer comprises: depositing a barrier layer of a highly doped, conductive substrate material.
Claim 31
Dependent Claim
30 words
The method as claimed in claim 22 , wherein depositing the bottom electrode comprises: depositing a bottom electrode having a thickness in a range of about 1 to 10 microns.
Claim 32
Dependent Claim
30 words
The method as claimed in claim 22 , wherein depositing the dielectric layer comprises: depositing a dielectric layer having a thickness in a range of about 100 to 1000 Angstroms.
Claim 33
Dependent Claim
30 words
The method as claimed in claim 22 , wherein depositing the top electrode comprises: depositing a top electrode having a thickness in a range of about 1 to 10 microns.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-06-17 | 2005-12-17 | 2006-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-06-17 | 2009-12-17 | 2010-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-06-17 | 2013-12-17 | 2014-06-18 | $7700.00 | Window Closed / Lapsed |