US6404317B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Planar magnetic element
Assignee: Toshiba Corp
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Filing: 1996-08-23
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Granted: 2002-06-11
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Expires: 2016-08-23
Abstract
Abstract Disclosed herein is a planar magnetic element comprising a substrate, a first magnetic layer arranged over the substrate, a first insulation layer arranged over the first magnetic layer, a planer coil formed of a conductor, having a plurality of turns, arranged over the first insulation layer and having a gap aspect ratio of at least 1, the gap aspect ratio being the ratio of the thickness of the conductor to the gap between any adjacent two of the turns, a second insulation layer arranged over the planar coil, and a second magnetic layer arranged over the second insulation layer. When used as an inductor, the planar magnetic element has a great quality coefficient Q. When used as a transformer, it has a large gain and a high voltage ratio. Since the element is small and thin, it is suitable for use in an integrated circuit, and can greatly contribute to miniaturization of electronic devices.
Inventors
- 👤 Tetsuhiko Mizoguchi
- 👤 Toshiro Sato
- 👤 Masashi Sahashi
- 👤 Michio Hasegawa
- 👤 Hiroshi Tomita
- 👤 Atsuhito Sawabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:51
CPC Classifications
H; H01; H01F; H01F5/00; H01F17/00; H01F17/0006; H01F2017/0066; H01F2017/0086; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/4902
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
170 words
A semiconductor planar magnetic element for use in semiconductor fabrication comprising: a semiconductor substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said first predetermined area, wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on a same side of the substrate.
Claim 2
Dependent Claim
170 words
A semiconductor planar magnetic element for use in semiconductor fabrication comprising: a semiconductor substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said first predetermined area, wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on a same side of the substrate.
Claim 3
Dependent Claim
167 words
A DC-DC converter, comprising: a switching element; a semiconductor substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first end second outer terminals are located outside of said first predetermined area, and wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on a same side of the substrate.
Claim 4
Dependent Claim
167 words
A DC-DC converter, comprising: a switching element; a semiconductor substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first end second outer terminals are located outside of said first predetermined area, and wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on a same side of the substrate.
Claim 5
Dependent Claim
22 words
The semiconductor planar magnetic element according to claim 1 , wherein said first and second outer terminals are arranged in a straight-line.
Claim 6
Dependent Claim
20 words
The DC-DC converter according to claim 2 , wherein said first and second outer terminals are arranged in a straight-line.
Claim 7
Dependent Claim
23 words
The semiconductor planar magnetic element according to claim 1 , wherein said first and second outer terminals are arranged in a straight-line, respectively.
Claim 8
Dependent Claim
21 words
The DC-DC converter according to claim 2 , wherein said first and second outer terminals are arranged in a straight-line, respectively.
Claim 9
Dependent Claim
37 words
The semiconductor planar magnetic element according to claim 1 , wherein an inductance of one of said plurality of planar coils corresponds to a second predetermined area surrounded with said one of said plurality of planar coils.
Claim 10
Dependent Claim
35 words
The DC-DC converter according to claim 2 , wherein an inductance of one of said plurality of planar coils corresponds to a second predetermined area surrounded with said one of said plurality of planar coils.
Claim 11
Dependent Claim
21 words
The semiconductor planar magnetic element according to claim 1 , wherein said planar coil structure has at least three one-turn coils.
Claim 12
Dependent Claim
19 words
The DC-DC converter according co claim 2 , wherein said planar coil structure has at least three one-turn coils.
Claim 13
Dependent Claim
154 words
A semiconductor planar magnetic element comprising: a semiconductor substrate; and a planar coil structure fabricated on said substrate wherein said planar coil structure includes a plurality of planar coils covering a predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element wherein said first and second outer terminals are located outside of said predetermined area, wherein each of first an second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein said inductances of said plurality of planar coils are linearly changed.
Claim 14
Dependent Claim
154 words
A semiconductor planar magnetic element comprising: a semiconductor substrate; and a planar coil structure fabricated on said substrate wherein said planar coil structure includes a plurality of planar coils covering a predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element wherein said first and second outer terminals are located outside of said predetermined area, wherein each of first an second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein said inductances of said plurality of planar coils are linearly changed.
Claim 15
Dependent Claim
27 words
The DC-DC converter according to claim 2 , wherein said predetermined relationship by which inductances of said plurality of planar coils are different is a linear relationship.
Claim 16
Dependent Claim
166 words
A semiconductor planar magnetic element comprising: a semiconductor substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a predetermined area on said substrate said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said predetermined area, wherein each of first an second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein said plurality of planar coils and said first and second end portions connected to first and second outer terminals, respectively, have similar figures.
Claim 17
Dependent Claim
166 words
A semiconductor planar magnetic element comprising: a semiconductor substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a predetermined area on said substrate said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said predetermined area, wherein each of first an second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein said plurality of planar coils and said first and second end portions connected to first and second outer terminals, respectively, have similar figures.
Claim 18
Dependent Claim
32 words
The DC-DC converter according to claim 2 , wherein said plurality of planar coils and said first and second end portions connected to first and second outer terminals, respectively, have similar configurations.
Claim 19
Dependent Claim
150 words
A semiconductor planar magnetic element comprising: a semiconductor substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said predetermined area, wherein each of first an second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein said outer terminals have the same figures.
Claim 20
Dependent Claim
150 words
A semiconductor planar magnetic element comprising: a semiconductor substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first and second outer terminals are located outside of said predetermined area, wherein each of first an second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein said outer terminals have the same figures.
Claim 21
Dependent Claim
16 words
The DC-DC converter according to claim 2 , wherein said outer terminals have the same configuration.
Claim 22
Dependent Claim
32 words
The semiconductor planar magnetic element according to claim 1 , wherein each of said plurality of planar coils is a one-turn coil and two outer terminals are provided to said one-turn coil.
Claim 23
Dependent Claim
30 words
The DC-DC converter according to claim 2 , wherein each of said plurality of planar cois is a one-turn coil and two outer terminals are provided to said one-turn coil.
Claim 24
Dependent Claim
23 words
The semiconductor planar magnetic element according to claim 1 , wherein connection to said coils through said terminals is enhanced during semiconductor fabrication.
Claim 25
Dependent Claim
22 words
The DC-DC converter according to claim 2 , wherein, wherein connection to said coils through said terminals is enhanced during semiconductor fabrication.
Claim 26
Dependent Claim
163 words
A semiconductor planar magnetic element comprising: a substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first end second outer terminals are located outside of said predetermined area, wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on the same side of the substrate.
Claim 27
Dependent Claim
163 words
A semiconductor planar magnetic element comprising: a substrate; and a planar coil structure fabricated on said substrate, wherein said planar coil structure includes a plurality of planar coils covering a first predetermined area on said substrate, said plurality of planar coils each having first and second end portions wherein said first and second end portions are respectively connected to first and second outer terminals, and an inductance of each of said plurality of planar coils is different from others of said plurality of planar coils according to a predetermined relationship corresponding to a variable inductance range of said magnetic element, wherein said first end second outer terminals are located outside of said predetermined area, wherein each of first and second outer terminals, each of said first and second end portions and said plurality of planar coils are all arranged in the same plane, and wherein connections to and between the plurality of coils are all made on the same side of the substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-06-10 | 2005-12-10 | 2006-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-06-10 | 2009-12-10 | 2010-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-06-10 | 2013-12-10 | 2014-06-11 | $7700.00 | Window Closed / Lapsed |