US6344408B1
Expired / Lapsed
US
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Method for improving non-uniformity of chemical mechanical polishing by over coating
Assignee: United Microelectronics Corp
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Filing: 1999-04-22
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Granted: 2002-02-05
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Expires: 2019-04-22
Abstract
Abstract A method for improving non-uniformity of chemical mechanical polishing by over coating layer is disclosed. The essential point of the invention is that an over coating layer is formed over a surface before the surface is planarized by a chemical mechanical polishing process. Note that polishing rate of the over coating layer must be less than the polishing rate of the surface, where the ratio of polishing rate is called as selectivity. Because the topography of the surface is not uniform, the topography of the over coating layer also is non-uniform and then the polishing probability in different parts of the over coating layer is different. Obviously, when the over coating layer on the higher area part of the surface is totally consumed, these are residual over coating layer on the lower area part of the surface. Thus, over polishing in the lower area part is prevented by residual over coating layer. Before total over coating layer is polished, the polished account of the surface is higher in the high area part and is lower in the lower area part. Thus, uniformity of the surface is enhanced. Moreover, enhancement of uniformity is direct proportional to product of selectivity and depth of over coating layer.
Inventors
- 👤 Hsueh-Chung Chen
- 👤 Ming-Sheng Yang
- 👤 Juan-Yuan Wu
- 👤 Water Lur
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 11:50
CPC Classifications
H; H10; H10P; H10P52/00; H10P52/40; H10P52/403
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
65 words
A method for improving non-uniformity of chemical mechanical polishing by over coating layer, said method comprising: forming an over coating layer on a surface of a semiconductor wafer; and planarizing said surface of said semiconductor wafer by a chemical mechanical polishing process with a slurry, wherein polishing rate of said over coating layer is less than polishing rate of underlying said surface of semiconductor wafer.
Claim 2
Independent Claim
65 words
A method for improving non-uniformity of chemical mechanical polishing by over coating layer, said method comprising: forming an over coating layer on a surface of a semiconductor wafer; and planarizing said surface of said semiconductor wafer by a chemical mechanical polishing process with a slurry, wherein polishing rate of said over coating layer is less than polishing rate of underlying said surface of semiconductor wafer.
Claim 3
Dependent Claim
37 words
The method according claim 1 , wherein said surface of said semiconductor wafer comprises a plurality of semiconductor structures, and a coating layer is formed over said surface of said semiconductor wafer and covers said semiconductor structures.
Claim 4
Dependent Claim
21 words
The method according to claim 2 , wherein said semiconductor structures comprises gate, electrode of capacitor, isolation layer and metal plug.
Claim 5
Dependent Claim
17 words
The method according to claim 2 , wherein material of said coating layer comprises metal and dielectric.
Claim 6
Dependent Claim
33 words
The method according to claim 1 , wherein said chemical mechanical polishing process is modulated to let polishing rate of said over coating layer is higher than polishing rate of said coating layer.
Claim 7
Dependent Claim
25 words
The method according to claim 1 , wherein method of forming said over coating layer comprises chemical vapor deposition method and physical vapor deposition method.
Claim 8
Dependent Claim
28 words
The method according to claim 1 , wherein slurry of said chemical mechanical polishing process comprises slurry of said coating layer and slurry of said over coating layer.
Claim 9
Dependent Claim
35 words
The method according to claim 1 , wherein depth of said over coating layer is direct proportional to non-uniformity of said coating layer, and a typical depth range is about 100 angstroms to 1500 angstroms.
Claim 10
Independent Claim
108 words
A method for improving non-uniformity of metal damascene method by over coating layer, said method comprising: forming a metal structure on a surface of a wafer, wherein a plurality of trenches located in said metal structure; forming a metal barrier layer on a surface of said metal structure; forming a metal layer over said metal barrier layer, wherein said metal barrier layer filling said trenches; forming an over coating layer on said metal layer, wherein polishing rate of said over coating layer is lower than polishing rate of a underlying layer; and planarizing said surface of said metal layer by a chemical mechanical polishing process with a slurry.
Claim 11
Independent Claim
108 words
A method for improving non-uniformity of metal damascene method by over coating layer, said method comprising: forming a metal structure on a surface of a wafer, wherein a plurality of trenches located in said metal structure; forming a metal barrier layer on a surface of said metal structure; forming a metal layer over said metal barrier layer, wherein said metal barrier layer filling said trenches; forming an over coating layer on said metal layer, wherein polishing rate of said over coating layer is lower than polishing rate of a underlying layer; and planarizing said surface of said metal layer by a chemical mechanical polishing process with a slurry.
Claim 12
Dependent Claim
24 words
The method according to claim 9 , wherein said surface of said wafer comprises a prior metal line or a plurality of semiconductor structures.
Claim 13
Dependent Claim
16 words
The method according to claim 10 , wherein said other semiconductor structures comprises gate and interconnect.
Claim 14
Dependent Claim
21 words
The method according to claim 9 , wherein material of said over coating layer comprises material of said metal barrier layer.
Claim 15
Dependent Claim
21 words
The method according to claim 9 , wherein said material of said metal barrier layer comprises Ta, Ti, TaN and TiN.
Claim 16
Dependent Claim
26 words
The method according to claim 9 , wherein method of said forming an over coating layer comprises chemical vapor deposition method and physical vapor deposition method.
Claim 17
Dependent Claim
33 words
The method according to claim 9 , wherein depth of said over coating layer is dependent on non-uniformity of said metal layer, and a typical depth is about 100 angstroms to 1500 angstroms.
Claim 18
Dependent Claim
28 words
The method according to claim 9 , wherein slurry of said chemical mechanical polishing process comprises slurry of said metal layer and slurry of said over coating layer.
Claim 19
Independent Claim
101 words
A method for enhancing uniformity of copper chemical mechanical polishing by over coating layer, said method comprising: forming a semiconductor structure on a surface of a wafer, said semiconductor substrate comprises a trench; forming a copper barrier layer over a surface of said semiconductor structure; forming a copper layer on said copper barrier layer; forming an over coating layer over said copper layer, wherein said over coating layer having a polishing rate lower than a polishing rate of underlying said copper layer; and planarizing a surface of said copper layer by a chemical mechanical polishing process with the slurry of copper.
Claim 20
Independent Claim
101 words
A method for enhancing uniformity of copper chemical mechanical polishing by over coating layer, said method comprising: forming a semiconductor structure on a surface of a wafer, said semiconductor substrate comprises a trench; forming a copper barrier layer over a surface of said semiconductor structure; forming a copper layer on said copper barrier layer; forming an over coating layer over said copper layer, wherein said over coating layer having a polishing rate lower than a polishing rate of underlying said copper layer; and planarizing a surface of said copper layer by a chemical mechanical polishing process with the slurry of copper.
Claim 21
Dependent Claim
21 words
The method according to claim 17 , wherein said semiconductor structure is employed to define location and shape of said trench.
Claim 22
Dependent Claim
18 words
The method according to claim 17 , wherein material of said over coating layer comprises Ta and TaN.
Claim 23
Dependent Claim
37 words
The method according to claim 17 , wherein depth of said over coating layer is strongly depends on degree of non-uniformity of said copper layer, and a typical depth is vary from 100 angstroms to 1000 angstroms.
References Cited (Backward Citations)
US5618381A
Cited
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