US6316064B1
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Process of producing a ruthenium or ruthenium oxide thin film
Assignee: Adeka Corp
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Filing: 2000-01-20
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Granted: 2001-11-13
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Expires: 2020-01-20
Abstract
Abstract A ruthenium or ruthenium oxide thin film produced by CVD using as a ruthenium source a compound represented by formula (I): wherein R 1 and R 2 represent different alkyl groups having 1 to 4 carbon atoms.
Inventors
- 👤 Kazuhisa Onozawa
- 👤 Akifumi Masuko
- 👤 Toshiya Shingen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:25
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C23C16/22; C23C16/30; C23C16/40
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
48 words
A process for producing a ruthenium or ruthenium oxide thin film which comprises depositing ruthenium or ruthenium oxide on a substrate by chemical vapor growth using a compound represented by formula (I): wherein R 1 and R 2 represent different alkyl groups having 1 to 4 carbon atoms.
Claim 2
Dependent Claim
48 words
A process for producing a ruthenium or ruthenium oxide thin film which comprises depositing ruthenium or ruthenium oxide on a substrate by chemical vapor growth using a compound represented by formula (I): wherein R 1 and R 2 represent different alkyl groups having 1 to 4 carbon atoms.
Claim 3
Dependent Claim
31 words
A process according to claim 1 , wherein R 1 is a methyl group or a sec-butyl group, and R 2 is an alkyl group having 2 to 4 carbon atoms.
Claim 4
Dependent Claim
21 words
A process according to claim 1 , wherein R 1 is a methyl group, and R 2 is an n-butyl group.
Claim 5
Dependent Claim
21 words
A process according to claim 1 , wherein R 1 is a methyl group, and R 2 is an isobutyl group.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-11-12 | 2005-05-14 | 2005-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-11-12 | 2009-05-14 | 2009-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-11-12 | 2013-05-14 | 2013-11-13 | $7700.00 | Window Closed / Lapsed |