US6296990B1
Expired / Lapsed
US
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Gas bearing and lithographic apparatus including such a bearing
Assignee: ASML Netherlands BV
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Filing: 1999-04-30
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Granted: 2001-10-02
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Expires: 2019-04-30
Abstract
Abstract A gas (air) beating in a ceramic body is made using a separate restriction member to define the air restriction feature. The separate member may be a metal bushing in which an insert is fitted, the insert having an opening defining the actual restriction feature. Alternatively the separate member may be a ceramic plate with restriction features machined by laser or abrasion before or after attachment to the main body.
Inventors
- 👤 Yim Bun Patrick Kwan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 16:11
CPC Classifications
F; F16; F16C; F16C32/00; F16C32/06; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; F16C29/00; F16C29/02; F16C29/025; F16C32/0603; F16C32/0614; F16C32/0622; G03F7/70216; G03F7/70358
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
48 words
A gas bearing comprising a ceramic main body defining therein a gas supply channel, and at least one separate restriction member attached to the main body to cover an end of said gas supply channel and defining at least one gas restriction feature in the gas supply channel.
Claim 2
Dependent Claim
48 words
A gas bearing comprising a ceramic main body defining therein a gas supply channel, and at least one separate restriction member attached to the main body to cover an end of said gas supply channel and defining at least one gas restriction feature in the gas supply channel.
Claim 3
Dependent Claim
70 words
A gas bearing comprising: a ceramic main body defining therein a gas supply channel, and at least one separate restriction member attached to the main body to cover an end of said gas supply channel and defining at least one gas restriction feature in the gas supply channel, wherein the at least one separate restriction member comprises a metal bushing having fitted therein an insert defining the gas restriction feature.
Claim 4
Dependent Claim
70 words
A gas bearing comprising: a ceramic main body defining therein a gas supply channel, and at least one separate restriction member attached to the main body to cover an end of said gas supply channel and defining at least one gas restriction feature in the gas supply channel, wherein the at least one separate restriction member comprises a metal bushing having fitted therein an insert defining the gas restriction feature.
Claim 5
Dependent Claim
80 words
A gas bearing comprising: a ceramic main body defining therein a gas supply channel, and at least one separate restriction member attached to the main body to cover an end of said gas supply channel and defining at least one gas restriction feature in the gas supply channel, wherein the at least one separate restriction member comprises a ceramic plate bonded to an outer surface of said main body and having at least one opening defining the gas restriction feature.
Claim 6
Dependent Claim
80 words
A gas bearing comprising: a ceramic main body defining therein a gas supply channel, and at least one separate restriction member attached to the main body to cover an end of said gas supply channel and defining at least one gas restriction feature in the gas supply channel, wherein the at least one separate restriction member comprises a ceramic plate bonded to an outer surface of said main body and having at least one opening defining the gas restriction feature.
Claim 7
Dependent Claim
75 words
A gas bearing comprising: a ceramic main body defining therein a gas supply channel, and at least one separate restriction member attached to the main body to cover an end of said gas supply channel and defining at least one gas restriction feature in the gas supply channel, wherein said at least one separate restriction member comprises a jewel bearing directly fitted to said main body and having a through-hole defining said gas restriction feature.
Claim 8
Dependent Claim
75 words
A gas bearing comprising: a ceramic main body defining therein a gas supply channel, and at least one separate restriction member attached to the main body to cover an end of said gas supply channel and defining at least one gas restriction feature in the gas supply channel, wherein said at least one separate restriction member comprises a jewel bearing directly fitted to said main body and having a through-hole defining said gas restriction feature.
Claim 9
Dependent Claim
121 words
A lithographic projection apparatus, comprising: a radiation system constructed and arranged to supply a projection beam of radiation; a first object stage provided with a mask table; a second object stage provided with a substrate table; and a projection system constructed and arranged to image an irradiated portion of a mask held by said mask table onto a target portion of a substrate held by said substrate table with a magnification M; wherein at least one of said object stages comprises a ceramic main body with a gas bearing comprising at least one gas supply channel and at least one separate restriction member attached to said main body to define at least one gas restriction feature in the gas supply channel.
Claim 10
Dependent Claim
121 words
A lithographic projection apparatus, comprising: a radiation system constructed and arranged to supply a projection beam of radiation; a first object stage provided with a mask table; a second object stage provided with a substrate table; and a projection system constructed and arranged to image an irradiated portion of a mask held by said mask table onto a target portion of a substrate held by said substrate table with a magnification M; wherein at least one of said object stages comprises a ceramic main body with a gas bearing comprising at least one gas supply channel and at least one separate restriction member attached to said main body to define at least one gas restriction feature in the gas supply channel.
Claim 11
Independent Claim
49 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel.
Claim 12
Independent Claim
49 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel.
Claim 13
Independent Claim
74 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel, wherein the at least one separate restriction member comprises a metal bushing having mounted therein an insert having a through-hole defining said gas restriction feature.
Claim 14
Independent Claim
74 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel, wherein the at least one separate restriction member comprises a metal bushing having mounted therein an insert having a through-hole defining said gas restriction feature.
Claim 15
Dependent Claim
39 words
A method according to claim 7 , wherein said attaching comprises: mounting said metal bushing on said main body, machining an internal pocket in said metal bushing to fit said insert; and mounting said insert in said metal bushing.
Claim 16
Independent Claim
71 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel, wherein said at least one separate restriction member comprises a ceramic plate having at least one opening defining a gas restriction feature.
Claim 17
Independent Claim
71 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel, wherein said at least one separate restriction member comprises a ceramic plate having at least one opening defining a gas restriction feature.
Claim 18
Dependent Claim
15 words
A method according to claim 9 , wherein the opening is machined by a laser.
Claim 19
Dependent Claim
14 words
A method according to claim 9 , wherein the opening is machined by abrasion.
Claim 20
Dependent Claim
21 words
A method according to claim 9 , wherein the opening is machined in the ceramic plate prior to complete sintering thereof.
Claim 21
Dependent Claim
21 words
A method according to claim 9 , further comprising finishing a lower surface of said ceramic plate to a desired flatness.
Claim 22
Independent Claim
76 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel, wherein said at least one separate restriction member comprises a jewel bearing directly fitted to said main body and having a through-hole defining a gas restriction feature.
Claim 23
Independent Claim
76 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel, wherein said at least one separate restriction member comprises a jewel bearing directly fitted to said main body and having a through-hole defining a gas restriction feature.
Claim 24
Independent Claim
123 words
A device manufacturing method, comprising: providing a substrate which is at least partially covered by a layer of energy-sensitive material; providing a mask containing a pattern; projecting an image of at least part of the mask pattern onto a target area of the layer of energy-sensitive material with a magnification M using a projection beam of radiation, wherein at least one of the mask and the substrate is supported and positioned during projection by an object stage comprising a ceramic main body with a gas bearing comprising at least one gas supply channel formed in said main body and at least one separate restriction member attached to said main body to define at least one gas restriction feature in the gas supply channel.
Claim 25
Independent Claim
123 words
A device manufacturing method, comprising: providing a substrate which is at least partially covered by a layer of energy-sensitive material; providing a mask containing a pattern; projecting an image of at least part of the mask pattern onto a target area of the layer of energy-sensitive material with a magnification M using a projection beam of radiation, wherein at least one of the mask and the substrate is supported and positioned during projection by an object stage comprising a ceramic main body with a gas bearing comprising at least one gas supply channel formed in said main body and at least one separate restriction member attached to said main body to define at least one gas restriction feature in the gas supply channel.
Claim 26
Dependent Claim
12 words
A device manufactured in accordance with the method of claim 15 .
Claim 27
Independent Claim
72 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel, providing wherein said at least one separate restriction member comprises a ceramic plate having at least one opening defining the gas restriction feature.
Claim 28
Independent Claim
72 words
A method of manufacturing a gas bearing comprising: providing a main body made of ceramic and having therein at least one gas supply channel; and attaching to said main body at least one separate restriction member to define at least one gas restriction feature in the gas supply channel, providing wherein said at least one separate restriction member comprises a ceramic plate having at least one opening defining the gas restriction feature.
Claim 29
Dependent Claim
15 words
A method according to claim 17 , wherein the opening is machined by a laser.
Claim 30
Dependent Claim
14 words
A method according to claim 17 , wherein the opening is machined by abrasion.
Claim 31
Dependent Claim
21 words
A method according to claim 17 , wherein the opening is machined in the ceramic plate prior to complete sintering thereof.
Claim 32
Dependent Claim
21 words
A method according to claim 17 , further comprising finishing a lower surface of said ceramic plate to a desired flatness.
Claim 33
Dependent Claim
30 words
A method according to claim 17 , wherein said restriction member comprises a jewel bearing directly fitted to said main body and having a through-hole defining the gas restriction feature.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-10-01 | 2005-04-02 | 2005-10-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-10-01 | 2009-04-02 | 2009-10-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-10-01 | 2013-04-02 | 2013-10-02 | $7700.00 | Window Closed / Lapsed |