US6292389B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Magnetic element with improved field response and fabricating method thereof
Assignee: Everspin Technologies Inc
•
Filing: 1999-07-19
•
Granted: 2001-09-18
•
Expires: 2019-07-19
Abstract
Abstract An improved and novel fabrication method for a magnetic element, and more particularly a magnetic element ( 10 ) including a first electrode ( 14 ), a second electrode ( 18 ) and a spacer layer ( 16 ). The first electrode (14) includes a fixed ferromagnetic layer ( 26 ) having a thickness t 1 . A second electrode ( 18 ) is included and comprises a free ferromagnetic layer ( 28 ) having a thickness t 2 . A spacer layer ( 16 ) is located between the fixed ferromagnetic layer ( 26 ) and the free ferromagnetic ( 28 ) layer, the spacer layer ( 16 ) having a thickness t 3 , where 0.25t 3 <t 1 <2t 3 , thereby producing near zero magnetic field at the free ferromagnetic layer ( 28 ).
Inventors
- 👤 Eugene Youjun Chen
- 👤 Jon Michael Slaughter
- 👤 Jing Shi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 20:57
CPC Classifications
H; H01; H01F; H01F41/00; H01F41/14; H01F41/30; H01F41/302; H01F41/305; H01F41/307; B; B82; B82Y; B82Y10/00; B82Y25/00; B82Y40/00; H01F10/00; H01F10/32; H01F10/324; H01F10/3268; H01F10/3272; H10; H10N; H10N50/00; H10N50/10
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
173 words
A magnetic element comprising: a first electrode comprising a fixed ferromagnetic layer having a top surface and a bottom surface whose magnetization is fixed in a preferred direction in the presence of an applied magnetic field, the fixed ferromagnetic layer having a thickness t 1 ; a second electrode comprising a free ferromagnetic layer having a surface whose magnetization is free to rotate in the presence of an applied magnetic field, the free ferromagnetic layer having a thickness t 2 ; a spacer layer located between the fixed ferromagnetic layer of the first electrode and the free ferromagnetic layer of the second electrode, the spacer layer having a thickness t 3 ; wherein t 1 is chosen such that the magnetic fields produced by the topology of the top surface and the bottom surface of the fixed ferromagnetic layer cancel to produce near zero coupling energy between the free ferromagnetic layer and the fixed magnetic layer; and a substrate, the first and second electrodes, and the spacer layer, being formed on the substrate.
Claim 2
Dependent Claim
173 words
A magnetic element comprising: a first electrode comprising a fixed ferromagnetic layer having a top surface and a bottom surface whose magnetization is fixed in a preferred direction in the presence of an applied magnetic field, the fixed ferromagnetic layer having a thickness t 1 ; a second electrode comprising a free ferromagnetic layer having a surface whose magnetization is free to rotate in the presence of an applied magnetic field, the free ferromagnetic layer having a thickness t 2 ; a spacer layer located between the fixed ferromagnetic layer of the first electrode and the free ferromagnetic layer of the second electrode, the spacer layer having a thickness t 3 ; wherein t 1 is chosen such that the magnetic fields produced by the topology of the top surface and the bottom surface of the fixed ferromagnetic layer cancel to produce near zero coupling energy between the free ferromagnetic layer and the fixed magnetic layer; and a substrate, the first and second electrodes, and the spacer layer, being formed on the substrate.
Claim 3
Dependent Claim
67 words
A magnetic element as claimed in claim 1 wherein t 1 is chosen in the range, 0.25t 3 <t 1 <2t 3 , such that the magnetic fields produced by the topology of the surfaces of the fixed ferromagnetic layer cancel to produce the lowest coupling energy possible between the free ferromagnetic layer and the fixed ferromagnetic layers without degradation of the electrical properties of the device.
Claim 4
Dependent Claim
73 words
A magnetic element as claimed in claim 1 wherein the first electrode further comprises a pinned ferromagnetic layer and an antiferromagnetic pinning layer exchange coupled thereto, the pinned ferromagnetic layer and the antiferromagnetic pinning layer formed between the substrate and the fixed ferromagnetic layer, the pinned ferromagnetic layer having its magnetization fixed by antiferromagnetic exchange though a spacer layer, in a direction opposite the fixed ferromagnetic layer and thereby defining a SAF structure.
Claim 5
Dependent Claim
37 words
A magnetic element as claimed in claim 1 wherein the magnetization directions of the fixed and the free ferromagnetic layers are one of parallel or antiparallel to one another in the absence of an applied magnetic field.
Claim 6
Dependent Claim
28 words
A magnetic element as claimed in claim 1 wherein the free ferromagnetic layer and the fixed ferromagnetic layer include at least one of NiFe, NiFeCo, CoFe, or Co.
Claim 7
Dependent Claim
31 words
A magnetic element as claimed in claim 1 wherein the spacer layer includes one of a dielectric material defining a MTJ structure or a conductive material defining a spin valve structure.
Claim 8
Dependent Claim
27 words
A magnetic element as claimed in claim 1 further including a high moment material located at an interface of the fixed ferromagnetic layer and the spacer layer.
Claim 9
Dependent Claim
18 words
A magnetic element as claimed in claim 1 wherein the fixed ferromagnetic layer is a high moment material.
Claim 10
Dependent Claim
19 words
A magnetic element as claimed in claim 1 wherein the free ferromagnetic layer includes an Ru antiferromagnetically coupled tri-layer.
Claim 11
Dependent Claim
20 words
A magnetic element as claimed in claim 1 wherein the spacer layer has a thickness of less than 20 Å.
Claim 12
Dependent Claim
159 words
A magnetic element comprising: a fixed ferromagnetic layer including a top surface and a bottom surface whose magnetic moment is fixed in a preferred direction in the presence of an applied magnetic field, the fixed ferromagnetic layer having a thickness of t 1 ; a free ferromagnetic layer whose magnetic moment is oriented generally perpendicular to the moment of the magnetic field and is free to rotate away from said perpendicular orientation in the presence of an applied magnetic field, the free ferromagnetic layer having a thickness of t 2 ; and a spacer layer located between the fixed ferromagnetic layer and the free ferromagnetic, the spacer layer having a thickness of t 3 ; wherein t 1 is chosen such that the magnetic fields produced by the topology of the top surface and the bottom surface of the fixed ferromagnetic layer cancel to produce near zero coupling energy between the free ferromagnetic layer and the fixed ferromagnetic layer.
Claim 13
Dependent Claim
159 words
A magnetic element comprising: a fixed ferromagnetic layer including a top surface and a bottom surface whose magnetic moment is fixed in a preferred direction in the presence of an applied magnetic field, the fixed ferromagnetic layer having a thickness of t 1 ; a free ferromagnetic layer whose magnetic moment is oriented generally perpendicular to the moment of the magnetic field and is free to rotate away from said perpendicular orientation in the presence of an applied magnetic field, the free ferromagnetic layer having a thickness of t 2 ; and a spacer layer located between the fixed ferromagnetic layer and the free ferromagnetic, the spacer layer having a thickness of t 3 ; wherein t 1 is chosen such that the magnetic fields produced by the topology of the top surface and the bottom surface of the fixed ferromagnetic layer cancel to produce near zero coupling energy between the free ferromagnetic layer and the fixed ferromagnetic layer.
Claim 14
Dependent Claim
16 words
A magnetic element as claimed in claim 11 wherein 0.25t 3 <t 1 <2t 3 .
Claim 15
Dependent Claim
23 words
A magnetic element as claimed in claim 11 further including a high moment material located at an interface of the fixed ferromagnetic layer.
Claim 16
Dependent Claim
18 words
A magnetic element as claimed in claim 11 wherein the fixed ferromagnetic layer is a high moment material.
Claim 17
Dependent Claim
19 words
A magnetic element as claimed in claim 11 wherein the free ferromagnetic layer includes an Ru antiferromagnetically coupled tri-layer.
Claim 18
Dependent Claim
19 words
A magnetic element as claimed in claim 11 wherein t 3 has a thickness of less than 20 Å.
Claim 19
Dependent Claim
31 words
A magnetic element as claimed in claim 11 wherein the spacer layer includes one of a dielectric material defining a MTJ structure or a conductive material defining a spin valve structure.
Claim 20
Dependent Claim
56 words
A magnetic element as claimed in claim 11 including an AF pinning layer formed adjacent the fixed ferromagnetic layer, wherein the roughness of an interface h 3 of the AF pinning layer, is greater than the roughness of an interface h 2 of the fixed ferromagnetic layer, thereby decreasing the coupling field of the magnetic element.
References Cited (Backward Citations)
JPH10422A
Cited
US5764567A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-09-17 | 2005-03-19 | 2005-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-09-17 | 2009-03-19 | 2009-09-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-09-17 | 2013-03-19 | 2013-09-18 | $7700.00 | Window Closed / Lapsed |