US6200634B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thermal processing system with supplemental resistive heater and shielded optical pyrometry
Assignee: Mattson Technology Inc
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Filing: 1998-08-14
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Granted: 2001-03-13
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Expires: 2018-08-14
Abstract
Abstract System and method for determining thermal characteristics, such as temperature, temperature uniformity and emissivity, during thermal processing using shielded pyrometry. The surface of a semiconductor substrate is shielded to prevent interference from extrinsic light from radiant heating sources and to form an effective black-body cavity. An optical sensor is positioned to sense emitted light in the cavity for pyrometry. The effective emissivity of the cavity approaches unity independent of the semiconductor substrate material which simplifies temperature calculation. The shield may be used to prevent undesired backside deposition. Multiple sensors may be used to detect temperature differences across the substrate and in response heaters may be adjusted to enhance temperature uniformity.
Inventors
- 👤 Kristian E. Johnsgard
- 👤 James McDiarmid
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:16
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0602; C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/481; G; G01; G01J; G01J5/00; G01J5/0003; H10P72/04; H10P72/0431; H10P72/0436
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
150 words
A method for thermal processing of a semiconductor substrate in a processing chamber, the method comprising the steps of: heating the substrate; sampling light emitted from a first surface of the substrate within a given range of wavelengths; shielding the first surface of the substrate from substantially all extrinsic light from the processing chamber within the given range of wavelengths with a shield forming a cavity adjacent to the first surface of the substrate; heating the shield with thermal radiation emitted by the first surface of the substrate wherein the thermal radiation is absorbed by the shield; heating the cavity with thermal radiation emitted by the shield; substantially maintaining the temperature uniformity of the substrate with thermal insulation provided by the shield and the cavity; and controlling the heating to achieve a desired processing temperature as a function of the sampled light emitted from the first surface of the substrate.
Claim 2
Independent Claim
150 words
A method for thermal processing of a semiconductor substrate in a processing chamber, the method comprising the steps of: heating the substrate; sampling light emitted from a first surface of the substrate within a given range of wavelengths; shielding the first surface of the substrate from substantially all extrinsic light from the processing chamber within the given range of wavelengths with a shield forming a cavity adjacent to the first surface of the substrate; heating the shield with thermal radiation emitted by the first surface of the substrate wherein the thermal radiation is absorbed by the shield; heating the cavity with thermal radiation emitted by the shield; substantially maintaining the temperature uniformity of the substrate with thermal insulation provided by the shield and the cavity; and controlling the heating to achieve a desired processing temperature as a function of the sampled light emitted from the first surface of the substrate.
Claim 3
Dependent Claim
30 words
The method of claim 1 , wherein the step of heating the substrate to the desired processing temperature further comprises rapidly heating the substrate using a radiant energy heating source.
Claim 4
Dependent Claim
25 words
The method of claim 2 , wherein the radiant energy heating source radiates substantial light into the processing chamber within the given range of wavelengths.
Claim 5
Dependent Claim
41 words
The method of claim 1 , wherein the step of sampling light emitted from the first surface of the substrate further comprises the step of sampling light emitted from a plurality of different areas across the first surface of the substrate.
Claim 6
Dependent Claim
43 words
The method of claim 4 , further comprising the step of controlling the heating process to achieve a substantially uniform substrate temperature as a function of the sampled light emitted from the plurality of different areas across the first surface of the substrate.
Claim 7
Dependent Claim
45 words
The method of claim 1 , further comprising the steps of: depositing a material on a second surface of the substrate; and shielding the first surface of the substrate from the material to substantially prevent deposits from forming on the first surface of the substrate.
Claim 8
Dependent Claim
25 words
The method of claim 1 , further comprising the step of providing a calibration light source to determine the intrinsic emissivity of the semiconductor substrate.
Claim 9
Dependent Claim
17 words
The method of claim 1 further comprising the step of heating the shield with a peripheral heater.
Claim 10
Dependent Claim
28 words
The method of claim 1 , further comprising the step of providing a purge gas to the cavity from which extrinsic light from the processing chamber is shielded.
Claim 11
Dependent Claim
34 words
The method of claim 1 , further comprising the step of configuring the cavity to have an effective emissivity greater than the intrinsic emissivity of the wafer for a given wavelength and processing temperature.
Claim 12
Independent Claim
135 words
A method of thermally processing a semiconductor substrate in a processing chamber, the method comprising the steps of: heating the substrate; shielding a first surface of the substrate from substantially all extrinsic light from the processing chamber within a given range of wavelengths with a shield forming a cavity adjacent to the first surface of the substrate; rotating one portion of the shield relative to another portion of the shield; heating the shield with thermal radiation emitted by the first surface of the substrate; heating the cavity with thermal radiation emitted by the shield; sampling light emitted from the first surface of the substrate within the given range of wavelengths; and controlling the heating to achieve a desired processing temperature as a function of the sampled light emitted from the first surface of the substrate.
Claim 13
Independent Claim
135 words
A method of thermally processing a semiconductor substrate in a processing chamber, the method comprising the steps of: heating the substrate; shielding a first surface of the substrate from substantially all extrinsic light from the processing chamber within a given range of wavelengths with a shield forming a cavity adjacent to the first surface of the substrate; rotating one portion of the shield relative to another portion of the shield; heating the shield with thermal radiation emitted by the first surface of the substrate; heating the cavity with thermal radiation emitted by the shield; sampling light emitted from the first surface of the substrate within the given range of wavelengths; and controlling the heating to achieve a desired processing temperature as a function of the sampled light emitted from the first surface of the substrate.
Claim 14
Dependent Claim
41 words
The method of claim 11 , wherein the step of sampling light emitted from the first surface of the substrate further comprises the step of sampling light emitted from a plurality of different areas across the first surface of the substrate.
Claim 15
Dependent Claim
43 words
The method of claim 11 , further comprising the step of controlling the heating process to achieve a substantially uniform substrate temperature as a function of the sampled light emitted from the plurality of different areas across the first surface of the substrate.
Claim 16
Dependent Claim
45 words
The method of claim 11 , further comprising the steps of: depositing a material on a second surface of the substrate; and shielding the first surface of the substrate from the material to substantially prevent deposits from forming on the first surface of the substrate.
Claim 17
Dependent Claim
25 words
The method of claim 11 , further comprising the step of providing a calibration light source to determine the intrinsic emissivity of the semiconductor substrate.
Claim 18
Dependent Claim
18 words
The method of claim 11 , further comprising the step of heating the shield with a peripheral heater.
Claim 19
Dependent Claim
28 words
The method of claim 11 , further comprising the step of providing a purge gas to the cavity from which extrinsic light from the processing chamber is shielded.
Claim 20
Dependent Claim
34 words
The method of claim 11 , further comprising the step of configuring the cavity to have an effective emissivity greater than the intrinsic emissivity of the wafer for a given wavelength and processing temperature.
Claim 21
Independent Claim
213 words
A method of thermally processing a semiconductor substrate in a processing chamber, the method comprising the steps of: heating the substrate in a first temperature ramp-up step to a temperature of about 800 degrees Celsius or less; heating the substrate in a second temperature ramp-up step to a processing temperature of from about 800 degrees Celsius to about 1200 degrees Celsius; maintaining the temperature of the substrate in a processing step within the range 800 degrees Celsius to about 1200 degrees Celsius; cooling the substrate in a temperature ramp-down step; monitoring the temperature of the substrate during the first and second temperature ramp-up steps, the processing step, and the temperature ramp-down step, with an optical sensor configured to sample light emitted from a first surface of the substrate; shielding the first surface of the substrate from substantially all extrinsic light from the processing chamber within a given range of wavelengths with a shield forming a cavity adjacent to the first surface of the substrate; heating the shield with thermal radiation emitted by the first surface of the substrate; heating the cavity with thermal radiation emitted by the shield; and controlling the heating to achieve a desired processing temperature as a function of the sampled light emitted from the first surface of the substrate.
Claim 22
Independent Claim
213 words
A method of thermally processing a semiconductor substrate in a processing chamber, the method comprising the steps of: heating the substrate in a first temperature ramp-up step to a temperature of about 800 degrees Celsius or less; heating the substrate in a second temperature ramp-up step to a processing temperature of from about 800 degrees Celsius to about 1200 degrees Celsius; maintaining the temperature of the substrate in a processing step within the range 800 degrees Celsius to about 1200 degrees Celsius; cooling the substrate in a temperature ramp-down step; monitoring the temperature of the substrate during the first and second temperature ramp-up steps, the processing step, and the temperature ramp-down step, with an optical sensor configured to sample light emitted from a first surface of the substrate; shielding the first surface of the substrate from substantially all extrinsic light from the processing chamber within a given range of wavelengths with a shield forming a cavity adjacent to the first surface of the substrate; heating the shield with thermal radiation emitted by the first surface of the substrate; heating the cavity with thermal radiation emitted by the shield; and controlling the heating to achieve a desired processing temperature as a function of the sampled light emitted from the first surface of the substrate.
Claim 23
Dependent Claim
22 words
The method of claim 19 , wherein the first temperature ramp-up step occurs over a period of about 10 seconds or less.
Claim 24
Dependent Claim
20 words
The method of claim 19 , wherein the second temperature ramp-up step occurs over a period of about one minute.
Claim 25
Dependent Claim
19 words
The method of claim 19 , wherein the temperature ramp-down step occurs over a period of about 30 seconds.
Claim 26
Dependent Claim
24 words
The method of claim 19 , further including the step of rotating one portion of the shield relative to another portion of the shield.
Claim 27
Dependent Claim
41 words
The method of claim 19 , wherein the step of sampling light emitted from the first surface of the substrate further comprises the step of sampling light emitted from a plurality of different areas across the first surface of the substrate.
Claim 28
Dependent Claim
43 words
The method of claim 19 , further comprising the step of controlling the heating process to achieve a substantially uniform substrate temperature as a function of the sampled light emitted from the plurality of different areas across the first surface of the substrate.
Claim 29
Dependent Claim
45 words
The method of claim 19 , further comprising the steps of: depositing a material on a second surface of the substrate; and shielding the first surface of the substrate from the material to substantially prevent deposits from forming on the first surface of the substrate.
Claim 30
Dependent Claim
25 words
The method of claim 19 , further comprising the step of providing a calibration light source to determine the intrinsic emissivity of the semiconductor substrate.
Claim 31
Dependent Claim
18 words
The method of claim 19 , further comprising the step of heating the shield with a peripheral heater.
Claim 32
Dependent Claim
28 words
The method of claim 19 , further comprising the step of providing a purge gas to the cavity from which extrinsic light from the processing chamber is shielded.
Claim 33
Dependent Claim
34 words
The method of claim 19 , further comprising the step of configuring the cavity to have an effective emissivity greater than the intrinsic emissivity of the wafer for a given wavelength and processing temperature.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-03-12 | 2004-09-11 | 2005-03-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-03-12 | 2008-09-11 | 2009-03-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-03-12 | 2012-09-11 | 2013-03-13 | $7700.00 | Window Closed / Lapsed |