US6192064B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Narrow band laser with fine wavelength control
Assignee: Cymer LLC
•
Filing: 1999-12-22
•
Granted: 2001-02-20
•
Expires: 2019-12-22
Abstract
Abstract A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an R MAX mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the R MAX tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the R MAX mirror. In other preferred embodiments a separate laser beam reflected off the R MAX mirror on to a photodiode array is used to position the mirror.
Inventors
- 👤 John M. Algots
- 👤 Christopher A. Marchi
- 👤 Frederick G. Erie
- 👤 Jesse D. Buck
- 👤 Alexander I. Ershov
- 👤 Palash P. Das
- 👤 Igor V. Fomenkov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 03:38
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70025; G02; G02B; G02B5/00; G02B5/18; G02B5/1828; G03F7/70483; G03F7/7055; G03F7/70575; H; H01; H01S; H01S3/00; H01S3/05; H01S3/08; H01S3/08081; H01S3/10; H01S3/105; H01S3/1055; H01S3/13; H01S3/14; H01S3/22; H01S3/223; H01S3/225; H01S3/02; H01S3/03; H01S3/08004; H01S3/08009; H01S3/08059; H01S3/081; H01S3/0811; H01S3/0812; H01S3/086; H01S3/131; H01S3/134; H01S3/139; H01S3/1392; H01S3/2256
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
116 words
A narrow band electric discharge laser for producing an output laser beam, said laser comprising: A) a laser frame; B) a laser chamber adjustably mounted in said frame; C) a laser gas contained within said chamber; D) two elongated spaced apart electrodes contained within said chamber, said electrodes and laser gas between them defining a gain medium; E) a line narrowing module comprising a beam expander, a tuning mirror, and a grating, said line narrowing module and an output coupler defining a resonance cavity; F) a wavemeter for detecting laser output beam wavelength; G) a fine tuning means for adjusting said output wavelength with a precision of less than 0.1 pm; and H) a computer controller.
Claim 2
Dependent Claim
116 words
A narrow band electric discharge laser for producing an output laser beam, said laser comprising: A) a laser frame; B) a laser chamber adjustably mounted in said frame; C) a laser gas contained within said chamber; D) two elongated spaced apart electrodes contained within said chamber, said electrodes and laser gas between them defining a gain medium; E) a line narrowing module comprising a beam expander, a tuning mirror, and a grating, said line narrowing module and an output coupler defining a resonance cavity; F) a wavemeter for detecting laser output beam wavelength; G) a fine tuning means for adjusting said output wavelength with a precision of less than 0.1 pm; and H) a computer controller.
Claim 3
Dependent Claim
21 words
The laser as in claim 1 wherein said tuning means comprises at least one piezo-electric actuator for pivoting said tuning mirror.
Claim 4
Dependent Claim
26 words
The laser as in claim 1 wherein said tuning means comprises a pressure control means for increasing or decreasing gas pressure in said line narrowing module.
Claim 5
Dependent Claim
20 words
The laser as in claim 1 wherein said tuning means comprises a stepper motor and at least one piezo-electric actuator.
Claim 6
Dependent Claim
14 words
The laser as in claim 1 wherein said tuning mirror is a deformable mirror.
Claim 7
Dependent Claim
20 words
The laser as in claim 1 wherein said tuning mirror is a segmented mirror comprising a plurality of mirror segments.
Claim 8
Dependent Claim
22 words
The laser as in claim 1 and further comprising a mirror position detection system for detecting pivot positions of said tuning mirror.
Claim 9
Dependent Claim
32 words
The laser as in claim 7 wherein said mirror position detection system comprises a position detection light source directed at said mirror and a detector array for detecting reflection from said mirror.
Claim 10
Dependent Claim
14 words
The laser as in claim 8 wherein said light source comprises a diode laser.
Claim 11
Dependent Claim
14 words
The laser as in claim 8 wherein said light source comprises a mercury lamp.
Claim 12
Dependent Claim
21 words
The laser as in claim 6 and further comprising a mirror position detection system for detecting positions of each mirror segment.
Claim 13
Dependent Claim
37 words
The laser as in claim 1 and further comprising a chamber positioner unit for positioning said chamber in a horizontal direction so that said gain medium is in a desired position with respect to the resonance cavity.
Claim 14
Dependent Claim
29 words
The laser as in claim 12 wherein the computer controller is programmed to control said chamber positioner unit to position said chamber based on feedback information from said wavemeter.
Claim 15
Dependent Claim
34 words
The laser as in claim 1 wherein said prism beam expander comprises a plurality of prisms disposed on a prism plate, and further comprising a prism plate positioner unit for positioning said prism plate.
Claim 16
Dependent Claim
31 words
The laser as in claim 14 wherein said computer controller is programmed to control said prism plate positioner unit to position said prism plate based on feedback information from said wavemeter.
Claim 17
Dependent Claim
30 words
The laser as in claim 1 and further comprising an R MAX tilt positioner to tilt said R MAX mirror to control vertical spatial parameters of said output laser beam.
Claim 18
Dependent Claim
30 words
The laser as in claim 16 wherein said computer controller is programmed to control said tilt positioner to tilt said R MAX mirror based on beam information from said wavemeter.
Claim 19
Dependent Claim
107 words
The laser as in claim 1 wherein said beam expander comprises a plurality of prisms disposed on a movable prism plate and further comprising: A) a chamber positioner unit for positioning said chamber in a horizontal direction upon control signals from said computer controller; B) a prism plate positioning unit for positioning said prism plate upon control signals from said computer controller; C) an R MAX tilt positioner to tilt said mirror based upon control signals from said computer controller; and D) an R MAX pivot positioner to pivot said mirror to adjust nominal wavelength of said output beam based on control signals from said computer controller.
Claim 20
Dependent Claim
16 words
The laser as in claim 1 further comprising a grating curvature positioner comprises a stepper motor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-02-20 | 2004-08-21 | 2005-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-02-20 | 2008-08-21 | 2009-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-02-20 | 2012-08-21 | 2013-02-20 | $7700.00 | Window Closed / Lapsed |