Method for fabrication of a low resistivity MOSFET gate with thick metal silicide on polysilicon

Claim 1

A method for fabricating a gate of a MOSFET (Metal Oxide Semiconductor Field Effect Transistor) with said gate having low resistivity, said MOSFET having a drain region, a source region, and a channel region fabricated within a semiconductor substrate, and said MOSFET initially having a gate comprised of a first metal silicide on polysilicon disposed on a gate dielectric over said channel region, the method including steps of: A. depositing a first dielectric layer over said drain region, said source region, and said gate; B. etching away a portion of said first dielectric layer by patterning a photoresist layer deposited on said first dielectric layer to form additional peaks in said first dielectric layer from said etching away of said portion of said first dielectric layer near said gate, and then polishing down said first dielectric layer over said drain region and said source region, and polishing down said first dielectric layer over said gate until one of said first metal silicide on said polysilicon and said polysilicon of said gate is exposed; C. depositing a metal on said first metal silicide if said first metal silicide is exposed in said step B, and depositing said metal on said polysilicon if said polysilicon is exposed in said step B; D. performing a silicidation anneal to react said metal with said polysilicon to form a predetermined thickness of a second metal silicide over a remaining portion of said polysilicon, said predetermined thickness of said second metal silicide being greater than a thickness of said first metal silicide; and E. removing any portion of said metal that is not reacted during said silicidation anneal of said step D.

Claim 2

A method for fabricating a gate of a MOSFET (Metal Oxide Semiconductor Field Effect Transistor) with said gate having low resistivity, said MOSFET having a drain region, a source region, and a channel region fabricated within a semiconductor substrate, and said MOSFET initially having a gate comprised of a first metal silicide on polysilicon disposed on a gate dielectric over said channel region, the method including steps of: A. depositing a first dielectric layer over said drain region, said source region, and said gate; B. etching away a portion of said first dielectric layer by patterning a photoresist layer deposited on said first dielectric layer to form additional peaks in said first dielectric layer from said etching away of said portion of said first dielectric layer near said gate, and then polishing down said first dielectric layer over said drain region and said source region, and polishing down said first dielectric layer over said gate until one of said first metal silicide on said polysilicon and said polysilicon of said gate is exposed; C. depositing a metal on said first metal silicide if said first metal silicide is exposed in said step B, and depositing said metal on said polysilicon if said polysilicon is exposed in said step B; D. performing a silicidation anneal to react said metal with said polysilicon to form a predetermined thickness of a second metal silicide over a remaining portion of said polysilicon, said predetermined thickness of said second metal silicide being greater than a thickness of said first metal silicide; and E. removing any portion of said metal that is not reacted during said silicidation anneal of said step D.

Claim 10

A method for fabricating a gate of a MOSFET (Metal Oxide Semiconductor Field Effect Transistor) with said gate having low resistivity, said MOSFET having a drain region, a source region, and a channel region fabricated within a semiconductor substrate, and said MOSFET initially having a gate comprised of a first metal silicide on polysilicon disposed on a gate dielectric over said channel region, the method including steps of: A. depositing an etch stop layer over said drain region, said source region, and said gate; B. depositing a first dielectric layer over said etch stop layer; C. etching away a portion of said first dielectric layer by patterning a photoresist layer deposited on said first dielectric layer to form additional peaks in said first dielectric layer from said etching away of said portion of said first dielectric layer near said gate; D. polishing down said first dielectric layer over said drain region and said source region, and polishing down said first dielectric layer over said gate until one of said first metal silicide on said polysilicon and said polysilicon of said gate is exposed; E. implanting dopant into said polysilicon; F. depositing a metal on said first metal silicide if said first metal silicide is exposed in said step D, and depositing said metal on said polysilicon if said polysilicon is exposed in said step D; G. performing a silicidation anneal to react said metal with said polysilicon to form a predetermined thickness of a second metal silicide over a remaining portion of said polysilicon, said predetermined thickness of said second metal silicide being greater than a thickness of said first metal silicide; H. removing any portion of said metal that is not reacted during said silicidation anneal of said step G; I. performing a second silicidation anneal to convert said second metal silicide to a desired phase; J. depositing a second dielectric layer over said first dielectric layer and over said second metal silicide; and K. forming metal interconnect to said second metal silicide; and wherein said remaining portion of said polysilicon has a sufficient thickness such that a threshold voltage of said MOSFET is not substantially affected by said second metal silicide disposed on top of said remaining portion of said polysilicon.

Claim 11

A method for fabricating a gate of a MOSFET (Metal Oxide Semiconductor Field Effect Transistor) with said gate having low resistivity, said MOSFET having a drain region, a source region, and a channel region fabricated within a semiconductor substrate, and said MOSFET initially having a gate comprised of a first metal silicide on polysilicon disposed on a gate dielectric over said channel region, the method including steps of: A. depositing an etch stop layer over said drain region, said source region, and said gate; B. depositing a first dielectric layer over said etch stop layer; C. etching away a portion of said first dielectric layer by patterning a photoresist layer deposited on said first dielectric layer to form additional peaks in said first dielectric layer from said etching away of said portion of said first dielectric layer near said gate; D. polishing down said first dielectric layer over said drain region and said source region, and polishing down said first dielectric layer over said gate until one of said first metal silicide on said polysilicon and said polysilicon of said gate is exposed; E. implanting dopant into said polysilicon; F. depositing a metal on said first metal silicide if said first metal silicide is exposed in said step D, and depositing said metal on said polysilicon if said polysilicon is exposed in said step D; G. performing a silicidation anneal to react said metal with said polysilicon to form a predetermined thickness of a second metal silicide over a remaining portion of said polysilicon, said predetermined thickness of said second metal silicide being greater than a thickness of said first metal silicide; H. removing any portion of said metal that is not reacted during said silicidation anneal of said step G; I. performing a second silicidation anneal to convert said second metal silicide to a desired phase; J. depositing a second dielectric layer over said first dielectric layer and over said second metal silicide; and K. forming metal interconnect to said second metal silicide; and wherein said remaining portion of said polysilicon has a sufficient thickness such that a threshold voltage of said MOSFET is not substantially affected by said second metal silicide disposed on top of said remaining portion of said polysilicon.