US6187418B1
Expired / Lapsed
US
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Multilayer ceramic substrate with anchored pad
Assignee: GlobalFoundries Inc
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Filing: 1999-07-19
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Granted: 2001-02-13
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Expires: 2019-07-19
Abstract
Abstract Disclosed is a multilayer ceramic substrate having an outer pad, for example an I/O pad, which is anchored to an inner pad of the multilayer ceramic substrate by either a plurality of vias or one large via. The outer pad and vias are made of high metal material, preferably 100% metal, so they won't adhere very well to the ceramic substrate. The inner pad is a composite metal/ceramic material which will bond very well to the ceramic substrate.
Inventors
- 👤 Benjamin V. Fasano
- 👤 David H. Gabriels
- 👤 Richard F. Indyk
- 👤 Sundar M. Kamath
- 👤 Scott I. Langenthal
- 👤 Srinivasa S. N. Reddy
- 👤 Rao V. Vallabhaneni
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:28
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/40; H05K3/4092; H05K1/00; H05K1/02; H05K1/11; H05K1/111; H05K1/112; H05K1/113; H05K1/03; H05K1/0306; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/09654; H05K2201/09781; H05K2201/0979; H05K3/4038; H05K3/4053; H05K3/46; H05K3/4611; H05K3/4626; H05K3/4629; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
141 words
A multilayer ceramic substrate with an anchored pad comprising: a first ceramic layer having a plurality of filled vias and an outer surface; at least one outer pad adjacent to the outer surface of the first ceramic layer, the at least one outer pad adhered to the plurality of filled vias in the first ceramic layer; a second ceramic layer adjacent to the first ceramic layer having at least one filled via in contact with at least one filled via of the first ceramic layer; and at least one inner pad interposed between the first and second ceramic layers and in contact with the plurality of filled vias in the first ceramic layer with each of the plurality of filled vias in the first ceramic layer being in contact with a via in the second ceramic layer or the inner pad.
Claim 2
Dependent Claim
141 words
A multilayer ceramic substrate with an anchored pad comprising: a first ceramic layer having a plurality of filled vias and an outer surface; at least one outer pad adjacent to the outer surface of the first ceramic layer, the at least one outer pad adhered to the plurality of filled vias in the first ceramic layer; a second ceramic layer adjacent to the first ceramic layer having at least one filled via in contact with at least one filled via of the first ceramic layer; and at least one inner pad interposed between the first and second ceramic layers and in contact with the plurality of filled vias in the first ceramic layer with each of the plurality of filled vias in the first ceramic layer being in contact with a via in the second ceramic layer or the inner pad.
Claim 3
Dependent Claim
27 words
The multilayer ceramic substrate of claim 1 further comprising a ceramic covering layer covering the first ceramic layer and the periphery of the at least one pad.
Claim 4
Dependent Claim
32 words
The multilayer ceramic substrate of claim 1 wherein the plurality of filled vias in the first ceramic layer comprise at least 80 volume percent metallic material and the remainder being ceramic material.
Claim 5
Dependent Claim
26 words
The multilayer ceramic substrate of claim 3 wherein the metallic material is selected from the group consisting of copper and alloys of copper, nickel and silver.
Claim 6
Dependent Claim
27 words
The multilayer ceramic substrate of claim 1 wherein the at least one outer pad comprises at least 80 volume percent metallic material, the remainder being ceramic material.
Claim 7
Dependent Claim
26 words
The multilayer ceramic substrate of claim 5 wherein the metallic material is selected from the group consisting of copper and alloys of copper, nickel and silver.
Claim 8
Dependent Claim
31 words
The multilayer ceramic substrate of claim 1 wherein the at least one filled via in the second layer comprises 30 to 70 volume percent metallic material, the remainder being ceramic material.
Claim 9
Dependent Claim
24 words
The multilayer ceramic substrate of claim 1 wherein the inner pad comprises 30 to 70 volume percent metallic material, the remainder being ceramic material.
Claim 10
Dependent Claim
28 words
The multilayer ceramic substrate of claim 1 wherein there are a plurality of filled vias in the second layer in contact with the at least one inner pad.
Claim 11
Dependent Claim
19 words
The multilayer ceramic substrate of claim 1 wherein there are a plurality of inner pads for each outer pad.
Claim 12
Dependent Claim
35 words
The multilayer ceramic substrate of claim 10 wherein at least one of the plurality of vias in the first ceramic layer in contact with one of the plurality of inner pads performs no electrical function.
Claim 13
Dependent Claim
21 words
The multilayer ceramic substrate of claim 1 wherein the plurality of vias in the first ceramic layer perform an electrical function.
Claim 14
Dependent Claim
66 words
The multilayer ceramic substrate of claim 1 wherein the plurality of filled vias in the first ceramic layer and the at least one outer pad comprise at least 80 volume percent metallic material, the remainder being ceramic material; and the at least one filled via in the second layer and the inner pad comprise 30 to 70 volume percent metallic material, the remainder being ceramic material.
Claim 15
Dependent Claim
126 words
A multilayer ceramic substrate with an anchored pad comprising: a first ceramic layer having a filled via and an outer surface; an outer pad adjacent to the outer surface of the first ceramic layer, the outer pad adhered to the filled via; a second ceramic layer adjacent to the first ceramic layer having at least one filled via in contact with the filled via of the first ceramic layer; an inner pad interposed between the first and second ceramic layers and in contact with the filled vias of the first and second layers; wherein the via in the first ceramic layer is larger in cross section than the via in the second ceramic layer and the first ceramic layer is thicker than the second ceramic layer.
Claim 16
Dependent Claim
126 words
A multilayer ceramic substrate with an anchored pad comprising: a first ceramic layer having a filled via and an outer surface; an outer pad adjacent to the outer surface of the first ceramic layer, the outer pad adhered to the filled via; a second ceramic layer adjacent to the first ceramic layer having at least one filled via in contact with the filled via of the first ceramic layer; an inner pad interposed between the first and second ceramic layers and in contact with the filled vias of the first and second layers; wherein the via in the first ceramic layer is larger in cross section than the via in the second ceramic layer and the first ceramic layer is thicker than the second ceramic layer.
Claim 17
Dependent Claim
29 words
The multilayer ceramic substrate of claim 14 wherein the filled via in the first ceramic layer comprises at least 80 volume percent metallic material, the remainder being ceramic material.
Claim 18
Dependent Claim
26 words
The multilayer ceramic substrate of claim 15 wherein the metallic material is selected from the group consisting of copper and alloys of copper, nickel and silver.
Claim 19
Dependent Claim
24 words
The multilayer ceramic substrate of claim 14 wherein the outer pad comprises at least 80 volume percent metallic material, the remainder being ceramic material.
Claim 20
Dependent Claim
26 words
The multilayer ceramic substrate of claim 17 wherein the metallic material is selected from the group consisting of copper and alloys of copper, nickel and silver.
Claim 21
Dependent Claim
29 words
The multilayer ceramic substrate of claim 14 wherein there are a plurality of vias in the second ceramic layer in contact with the via in the first ceramic layer.
Claim 22
Dependent Claim
125 words
A multilayer ceramic substrate with an anchored pad comprising: a first ceramic layer having a plurality of filled vias and an outer surface; a second ceramic layer adjacent to the first ceramic layer and having at least one filled via; at least one inner pad interposed between the first and second ceramic layers and in contact with the plurality of filled vias in the first ceramic layer and the at least one filled via in the second ceramic layer; a plurality of via columns extending from the outer surface of the first ceramic layer, the plurality of via columns being in contact with the plurality of filled vias of the first ceramic layer; and at least one pad adhered to the plurality of via columns.
Claim 23
Dependent Claim
125 words
A multilayer ceramic substrate with an anchored pad comprising: a first ceramic layer having a plurality of filled vias and an outer surface; a second ceramic layer adjacent to the first ceramic layer and having at least one filled via; at least one inner pad interposed between the first and second ceramic layers and in contact with the plurality of filled vias in the first ceramic layer and the at least one filled via in the second ceramic layer; a plurality of via columns extending from the outer surface of the first ceramic layer, the plurality of via columns being in contact with the plurality of filled vias of the first ceramic layer; and at least one pad adhered to the plurality of via columns.
Claim 24
Dependent Claim
25 words
The multilayer ceramic substrate of claim 20 wherein the via columns comprise at least 80 volume percent metallic material with the remainder being ceramic material.
Claim 25
Dependent Claim
26 words
The multilayer ceramic substrate of claim 21 wherein the metallic material is selected from the group consisting of copper and alloys of copper, nickel and silver.
Claim 26
Dependent Claim
32 words
The multilayer ceramic substrate of claim 20 wherein the outer pad adhered to the plurality of via columns comprises at least 80 volume percent metallic material with the remainder being ceramic material.
Claim 27
Dependent Claim
26 words
The multilayer ceramic substrate of claim 20 wherein the filled plurality of vias comprise 30 to 70 volume percent metallic material, the remainder being ceramic material.
Claim 28
Dependent Claim
24 words
The multilayer ceramic substrate of claim 20 wherein the inner pad comprises 30 to 70 volume percent metallic material, the remainder being ceramic material.
Claim 29
Dependent Claim
34 words
The multilayer ceramic substrate of claim 20 wherein there is no ceramic material in the space between the first ceramic layer and the at least one pad adhered to the plurality of via columns.
Claim 30
Dependent Claim
59 words
The multilayer ceramic substrate of claim 20 wherein the via columns and the outer pad adhered to the plurality of via columns comprise at least 80 volume percent metallic material with the remainder being ceramic material; and the filled plurality of vias and the inner pad comprise 30 to 70 volume percent metallic material, the remainder being ceramic material.
Claim 31
Dependent Claim
70 words
A multilayer ceramic substrate with an anchored pad comprising: a ceramic layer having at least one filled via and an outer surface; an inner pad adhered to the outer surface of the ceramic layer and in contact with the at least one filled via in the first ceramic layer; a plurality of via columns extending from the inner pad; and an outer pad adhered to the plurality of via columns.
Claim 32
Dependent Claim
70 words
A multilayer ceramic substrate with an anchored pad comprising: a ceramic layer having at least one filled via and an outer surface; an inner pad adhered to the outer surface of the ceramic layer and in contact with the at least one filled via in the first ceramic layer; a plurality of via columns extending from the inner pad; and an outer pad adhered to the plurality of via columns.
Claim 33
Dependent Claim
25 words
The multilayer ceramic substrate of claim 28 wherein the via columns comprise at least 80 volume percent metallic material with the remainder being ceramic material.
Claim 34
Dependent Claim
26 words
The multilayer ceramic substrate of claim 29 wherein the metallic material is selected from the group consisting of copper and alloys of copper, nickel and silver.
Claim 35
Dependent Claim
25 words
The multilayer ceramic substrate of claim 28 wherein the outer pad comprises at least 80 volume percent metallic material with the remainder being ceramic material.
Claim 36
Dependent Claim
31 words
The multilayer ceramic substrate of claim 28 wherein the at least one filled via in the ceramic layer comprises 30 to 70 volume percent metallic material, the remainder being ceramic material.
Claim 37
Dependent Claim
24 words
The multilayer ceramic substrate of claim 28 wherein the inner pad comprises 30 to 70 volume percent metallic material, the remainder being ceramic material.
Claim 38
Dependent Claim
22 words
The multilayer ceramic substrate of claim 28 wherein there is no ceramic material in the space between the inner and outer pads.
Claim 39
Dependent Claim
57 words
The multilayer ceramic substrate of claim 28 wherein the via columns and the outer pad comprise at least 80 volume percent metallic material with the remainder being ceramic material; and the at least one filled via in the ceramic layer and the inner pad comprise 30 to 70 volume percent metallic material, the remainder being ceramic material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-02-13 | 2004-08-14 | 2005-02-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-02-13 | 2008-08-14 | 2009-02-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-02-13 | 2012-08-14 | 2013-02-13 | $7700.00 | Window Closed / Lapsed |