US6180937B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photoresponsive device for detection of long and short wavelength photons
Assignee: Delphi Technologies Inc
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Filing: 1999-05-03
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Granted: 2001-01-30
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Expires: 2019-05-03
Abstract
Abstract A photoresponsive device wherein a plurality of slots is formed in a continuous polycrystalline silicon film that forms a top electrode of the photoresponsive device structure. The resulting “picket fence-like” fingers are capable of generating a depletion region that extends beyond the physical extent of the fingers themselves. The shorter wavelengths of light can reach these unobstructed depletion areas of the substrate and be rapidly detected instead of being absorbed in the electrode. By appropriate spacing of the individual fingers, the individual depletion regions can be effectively merged into one continuous depletion region.
Inventors
- 👤 John Richard Troxell
- 👤 Charles Neil Stevenson
- 👤 Frank J. Schauerte
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 15:29
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/20; H10F77/206
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
99 words
A photoresponsive element for receiving and converting photons to an electronic signal, comprising: a substrate having a substrate contact coupled to a voltage bias; an electrode layer adjacent to said substrate, said electrode layer having an electrode layer contact coupled to said voltage bias, said electrode layer having at least two fingers defining a slot formed therein to allow photons to pass through said electrode layer, said slot having a slot width and each finger having a finger width and edges; and depletion regions in said substrate created under and extending a distance beyond the edges of said fingers.
Claim 2
Dependent Claim
99 words
A photoresponsive element for receiving and converting photons to an electronic signal, comprising: a substrate having a substrate contact coupled to a voltage bias; an electrode layer adjacent to said substrate, said electrode layer having an electrode layer contact coupled to said voltage bias, said electrode layer having at least two fingers defining a slot formed therein to allow photons to pass through said electrode layer, said slot having a slot width and each finger having a finger width and edges; and depletion regions in said substrate created under and extending a distance beyond the edges of said fingers.
Claim 3
Dependent Claim
20 words
A device as recited in claim 1 further comprising an insulation layer disposed between said substrate and said electrode layer.
Claim 4
Dependent Claim
20 words
A device as recited in claim 1 further comprising a photon to electron conversion layer adjacent to said electrode layer.
Claim 5
Dependent Claim
15 words
A device as recited in claim 1 wherein said slot width is twice said distance.
Claim 6
Dependent Claim
19 words
A device as recited in claim 1 wherein the thickness of said electrode layer is 300 nanometers or less.
Claim 7
Independent Claim
70 words
A method of detecting short wavelength photons using a photoresponsive element, comprising the steps of: passing a photon through a slot in an electrode layer of the photoresponsive element and to a depletion region of a substrate; promoting an electron from the valence band to the conduction band in response to the short wavelength photon; generating an electron-hole pair; and generating an electronic signal in response to said electron-hole pair.
Claim 8
Independent Claim
70 words
A method of detecting short wavelength photons using a photoresponsive element, comprising the steps of: passing a photon through a slot in an electrode layer of the photoresponsive element and to a depletion region of a substrate; promoting an electron from the valence band to the conduction band in response to the short wavelength photon; generating an electron-hole pair; and generating an electronic signal in response to said electron-hole pair.
Claim 9
Dependent Claim
35 words
A method as recited in claim 6 wherein the step of passing the photon comprises the step of passing the short wavelength photon through an insulation layer disposed between said substrate and said electrode layer.
Claim 10
Independent Claim
78 words
A method of detecting long wavelength photons using a photoresponsive element, comprising the steps of: passing a long wavelength photon through an electrode layer of the photoresponsive element and to a depletion region of a substrate to less than a depth of said depletion region; promoting an electron from the valence band to the conduction band in response to the long wavelength photon; generating an electron-hole pair; and generating an electronic signal in response to said electron-hole pair.
Claim 11
Independent Claim
78 words
A method of detecting long wavelength photons using a photoresponsive element, comprising the steps of: passing a long wavelength photon through an electrode layer of the photoresponsive element and to a depletion region of a substrate to less than a depth of said depletion region; promoting an electron from the valence band to the conduction band in response to the long wavelength photon; generating an electron-hole pair; and generating an electronic signal in response to said electron-hole pair.
Claim 12
Dependent Claim
37 words
A method as recited in claim 8 wherein the step of passing the long wavelength photon comprises the step of passing the long wavelength photon through an insulation layer disposed between said substrate and said electrode layer.
Claim 13
Dependent Claim
154 words
An imaging system for receiving an optical image and providing a function, comprising: a sensor array having a plurality of photoresponsive elements for receiving and converting photons to an electronic signal, each photoresponsive element, having; a substrate having a substrate contact coupled to a voltage bias; an electrode layer adjacent to said substrate, said electrode layer having an electrode layer contact coupled to said voltage bias, said electrode layer having at least two fingers defining a slot formed therein to allow photons to pass through said electrode layer, said slot having a slot width and each fingers having a finger width and edges; depletion regions in said substrate created under and extending a distance beyond the edges of said fingers; said plurality of photoresponsive elements arranged so as to form a matrix-addressable imaging plane; a controller coupled to said imaging system; and a function generated by said controller in response to said electronic signal.
Claim 14
Dependent Claim
154 words
An imaging system for receiving an optical image and providing a function, comprising: a sensor array having a plurality of photoresponsive elements for receiving and converting photons to an electronic signal, each photoresponsive element, having; a substrate having a substrate contact coupled to a voltage bias; an electrode layer adjacent to said substrate, said electrode layer having an electrode layer contact coupled to said voltage bias, said electrode layer having at least two fingers defining a slot formed therein to allow photons to pass through said electrode layer, said slot having a slot width and each fingers having a finger width and edges; depletion regions in said substrate created under and extending a distance beyond the edges of said fingers; said plurality of photoresponsive elements arranged so as to form a matrix-addressable imaging plane; a controller coupled to said imaging system; and a function generated by said controller in response to said electronic signal.
Claim 15
Dependent Claim
25 words
An imaging system as recited in claim 10 wherein said photoresponsive element further comprises an insulation layer disposed between said substrate and said electrode layer.
Claim 16
Dependent Claim
25 words
An imaging system is recited in claim 10 wherein said photoresponsive element further comprises a photon to electron conversion layers adjacent to said electrode layer.
Claim 17
Dependent Claim
20 words
An imaging system as recited in claim 10 wherein said slot width of said photoresponsive element is twice said distance.
Claim 18
Dependent Claim
22 words
An imaging system as recited in claim 10 wherein said electrode layer of said photoresponsive element is 300 nanometers thick or less.
Claim 19
Dependent Claim
25 words
An imaging system as recited in claim 10 wherein a spacing between said plurality of photoresponsive elements generates a continuous depletion region within said substrate.
References Cited (Backward Citations)
US3146352A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-01-30 | 2004-07-31 | 2005-01-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-01-30 | 2008-07-31 | 2009-01-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-01-30 | 2012-07-31 | 2013-01-30 | $7700.00 | Window Closed / Lapsed |