US6150209A
Expired / Lapsed
US
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Leakage current reduction of a tantalum oxide layer via a nitrous oxide high density annealing procedure
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1999-04-23
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Granted: 2000-11-21
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Expires: 2019-04-23
Abstract
Abstract A process of fabricating a capacitor structure, using a tantalum oxide capacitor dielectric layer, has been developed. The process features deposition of a thin, high dielectric constant tantalum oxide layer, followed by a high density plasma anneal procedure, used to reduce the leakage current in the as-deposited tantalum oxide layer, that can evolve during normal operating conditions of the capacitor structure. The high density plasma anneal procedure is performed in a nitrous oxide ambient, at a temperature of about 400° C.
Inventors
- 👤 Shi-Chung Sun
- 👤 Jiann-Shing Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:25
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69393; H10D; H10D1/00; H10D1/60; H10D1/68; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6329; H10P14/6334; H10P14/65; H10P14/6516; H10P14/6529; H10P14/6532; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
109 words
A method of fabricating a capacitor structure, on a semiconductor substrate, comprising the steps of: providing a planarized conductive plug structure, in a storage node contact hole, located in an insulator layer, with the conductive plug structure contacting a source/drain region of a transfer gate transistor; forming a storage node structure, overlying the top surface of said insulator layer, and overlying and contacting, the top surface of said conductive plug structure; forming a tantalum oxide capacitor dielectric layer directly on said storage node structure; performing a plasma anneal procedure, in an oxygen containing ambient, at a temperature between about 400 to 450° C.; and forming an upper electrode structure.
Claim 2
Independent Claim
109 words
A method of fabricating a capacitor structure, on a semiconductor substrate, comprising the steps of: providing a planarized conductive plug structure, in a storage node contact hole, located in an insulator layer, with the conductive plug structure contacting a source/drain region of a transfer gate transistor; forming a storage node structure, overlying the top surface of said insulator layer, and overlying and contacting, the top surface of said conductive plug structure; forming a tantalum oxide capacitor dielectric layer directly on said storage node structure; performing a plasma anneal procedure, in an oxygen containing ambient, at a temperature between about 400 to 450° C.; and forming an upper electrode structure.
Claim 3
Dependent Claim
17 words
The method of claim 1, wherein said conductive plug structure is formed from a doped polysilicon layer.
Claim 4
Dependent Claim
86 words
The method of claim 1, wherein said storage node structure is a flat polysilicon shape, obtained via deposition of a polysilicon layer, via an LPCVD procedure, at a thickness between about 1000 to 5000 Angstroms, with the polysilicon layer either doped in situ, during deposition, via the addition of arsine, or phosphine, to a silane ambient, or deposited intrinsically, then doped via ion implantation of arsenic, or phosphorous ions, followed by an anisotropic RIE patterning procedure, using Cl 2 as an etchant for the polysilicon layer.
Claim 5
Dependent Claim
23 words
The method of claim 1, wherein said storage node structure is a polysilicon shape, comprised with vertical polysilicon features, and horizontal polysilicon features.
Claim 6
Dependent Claim
28 words
The method of claim 1, wherein said storage node structure is a polysilicon shape, comprised with a roughened polysilicon surface, or comprised with a hemispherical grained silicon surface.
Claim 7
Dependent Claim
25 words
The method of claim 1, wherein said storage node structure is a metal shape, comprised of a metal such as tantalum, tungsten, or tungsten silicide.
Claim 8
Dependent Claim
48 words
The method of claim 1, wherein said capacitor dielectric layer is a tantalum oxide layer, with a dielectric constant between about 15 to 30, obtained using a chemical vapor deposition procedure, at a thickness about 80 to 110 Angstroms, at a temperature between about 400 to 450° C.
Claim 9
Dependent Claim
64 words
The method of claim 1, wherein said plasma anneal procedure, is performed in a nitrous oxide ambient, at a temperature between about 400 to 450° C., at a power between about 2000 to 4000 watts, at a pressure between about 5 to 10 torr, for a time between about 1 to 3 min., using a nitrous oxide flow between about 0.1 to 0.2 milliliters/min.
Claim 10
Dependent Claim
23 words
The method of claim 1, wherein said oxygen containing ambient is selected from a group consisting of oxygen, ozone, water, and nitric oxide.
Claim 11
Dependent Claim
45 words
The method of claim 1, wherein said upper electrode structure is comprised of polysilicon, obtained via deposition of a polysilicon layer, using LPCVD procedures, at a thickness between about 1000 to 5000 Angstroms, and patterned via a RIE procedure, using Cl 2 as an etchant.
Claim 12
Dependent Claim
17 words
The method of claim 1, wherein said upper electrode structure is comprised of aluminum, or of tungsten.
Claim 13
Independent Claim
171 words
A method of fabricating a capacitor structure for a dynamic random access memory, (DRAM), device, featuring a nitrous oxide anneal procedure, performed after deposition of a tantalum oxide capacitor dielectric layer, comprising the steps of: forming a storage node contact hole, in an insulator layer, exposing a portion of the top surface of a source/drain region, of a transfer gate transistor; forming a planarized polysilicon plug structure, in said storage node contact hole; forming a polysilicon storage node structure with a top surface of said polysilicon storage node structure comprised with hemispherical grain silicon, and with a portion of said polysilicon storage node structure, overlying and contacting said polysilicon plug structure; depositing said tantalum oxide capacitor dielectric layer directly on hemispherical grain silicon surface, of polysilicon storage node structure; performing said nitrous oxide anneal procedure, in a plasma, at a temperature between about 400 to 450° C., to create an annealed tantalum oxide capacitor dielectric layer; and forming a polysilicon upper electrode structure, on said annealed tantalum oxide capacitor dielectric layer.
Claim 14
Independent Claim
171 words
A method of fabricating a capacitor structure for a dynamic random access memory, (DRAM), device, featuring a nitrous oxide anneal procedure, performed after deposition of a tantalum oxide capacitor dielectric layer, comprising the steps of: forming a storage node contact hole, in an insulator layer, exposing a portion of the top surface of a source/drain region, of a transfer gate transistor; forming a planarized polysilicon plug structure, in said storage node contact hole; forming a polysilicon storage node structure with a top surface of said polysilicon storage node structure comprised with hemispherical grain silicon, and with a portion of said polysilicon storage node structure, overlying and contacting said polysilicon plug structure; depositing said tantalum oxide capacitor dielectric layer directly on hemispherical grain silicon surface, of polysilicon storage node structure; performing said nitrous oxide anneal procedure, in a plasma, at a temperature between about 400 to 450° C., to create an annealed tantalum oxide capacitor dielectric layer; and forming a polysilicon upper electrode structure, on said annealed tantalum oxide capacitor dielectric layer.
Claim 15
Dependent Claim
36 words
The method of claim 12, wherein said tantalum oxide capacitor dielectric layer is obtained via a CVD procedure, at a temperature between about 400 to 450° C., at a thickness between about 80 to 110 Angstroms.
Claim 16
Dependent Claim
30 words
The method of claim 12, wherein said tantalum oxide layer is obtained via plasma vapor deposition procedures, or via R.F. sputtering, at a thickness between about 80 to 110 Angstroms.
Claim 17
Dependent Claim
73 words
The method of claim 12, wherein said annealed tantalum oxide capacitor dielectric layer is obtained via a plasma anneal procedure, performed in an nitrous oxide ambient, at a temperature between about 400 to 450° C., at a power between about 2000 to 4000 watts, at a pressure between about 5 to 10 torr, for a time between about 1 to 3 min., using a nitrous oxide flow between about 0.1 to 0.2 milliliters/min.
Claim 18
Dependent Claim
70 words
The method of claim 12, wherein said polysilicon upper electrode structure is formed from a polysilicon layer, obtained via an LPCVD procedure, at a thickness between about 1000 to 5000 Angstroms, with the polysilicon layer either doped in situ, during deposition, via the addition of arsine, or phosphine, to a silane ambient, or via an ion implantation procedure, applied to an intrinsically deposited polysilicon layer, using arsenic or phosphorous ions.
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| 3.5 Years (Year 4) | 2003-11-21 | 2004-05-22 | 2004-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-11-21 | 2008-05-22 | 2008-11-21 | $3760.00 | Window Closed / Lapsed |
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