US6148239A
Expired / Lapsed
US
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Process control system using feed forward control threads based on material groups
Assignee: Advanced Micro Devices Inc
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Filing: 1997-12-12
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Granted: 2000-11-14
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Expires: 2017-12-12
Abstract
Abstract A process control system using feed forward control threads based on material groups performs material tracking to account and adjust for variability of processing in a process flow that includes multiple machines, machine configurations, and machine setups. The process control system using feed forward control threads based on material groups distinguishes variations in processing parameters and characteristics for processed material samples and modifies processing at subsequent steps in response to the variations. The process control system using feed forward control threads based on material groups controls materials groups so that material samples with a like processing history are processed with a similar machine configuration or setup for subsequent processing steps. The tagging of material groups permits management of material having different process characteristics in a process flow to improve the efficiency of material scheduling by supplying information to assist sorting of materials based on a manufacturing signature.
Inventors
- 👤 Merritt L. Funk
- 👤 Lori A. Peters
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:52
CPC Classifications
G; G05; G05B; G05B19/00; G05B19/02; G05B19/418; G05B19/41865; Y; Y02; Y02P; Y02P90/00; Y02P90/02; Y02P90/80
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
127 words
A method of tracking materials in a process control system comprising: selecting a plurality of process control variables that are known to cause a variability in results of processing; associating the plurality of process control variables with the processing of a material sample; processing the material sample; applying a set of rules to update the plurality of process control variables, the rules being defined by the material sample processing, the rules determining a tag identifying the processed material sample; updating process control variables for subsequent processing operations based on results of completed processing operations to predict future characteristics of processed material samples, modify process controls, and adjust material characteristics in a feed-forward control operation; and repeating the processing and applying operations for a plurality of processing operations.
Claim 2
Independent Claim
127 words
A method of tracking materials in a process control system comprising: selecting a plurality of process control variables that are known to cause a variability in results of processing; associating the plurality of process control variables with the processing of a material sample; processing the material sample; applying a set of rules to update the plurality of process control variables, the rules being defined by the material sample processing, the rules determining a tag identifying the processed material sample; updating process control variables for subsequent processing operations based on results of completed processing operations to predict future characteristics of processed material samples, modify process controls, and adjust material characteristics in a feed-forward control operation; and repeating the processing and applying operations for a plurality of processing operations.
Claim 3
Dependent Claim
26 words
A method according to claim 1 further wherein: the plurality of process control variables include entity variables relating to a machine state of a process tool.
Claim 4
Dependent Claim
22 words
A method according to claim 1 further wherein: the plurality of process control variables include material variables relating to the processed material.
Claim 5
Dependent Claim
26 words
A method according to claim 1 further wherein: the plurality of process control variables include process variables relating to the processing characteristics for processing the material.
Claim 6
Dependent Claim
20 words
A method according to claim 1 further wherein: the tag is an identification associating a material to a material group.
Claim 7
Dependent Claim
29 words
A method according to claim 1 further wherein: a material sample is processed on a process entity having an associated set of entity variables, process variables, and material variables.
Claim 8
Dependent Claim
66 words
A method according to claim 1, wherein: processing the material sample includes selectively processing the material sample using a plurality of process tools including: a plurality of photolithographic units; and a plurality of etch chambers, the photolithographic units and the etch chambers having different characteristics so that separate material groups are generated for process flow threads that pass through different photographic units and different etch chambers.
Claim 9
Dependent Claim
62 words
A process control system comprising: a plurality of process tool entities for processing the material sample; a database coupled to the plurality of process tool entities; a processor coupled to the plurality of process tool entities and coupled to the database; and a software system including an executable program code for executing a software program performing the method according to claim 1.
Claim 10
Dependent Claim
23 words
A computer program product comprising: a computer usable medium having computable readable code embodied therein including the software system according to claim 8.
Claim 11
Dependent Claim
185 words
A process control system comprising: a plurality of process tools linked in a process flow; a database coupled to the plurality of process tools; a processor operatively coupled to the plurality of process tools and to the database, the processor including a program storage; a software control program for loading into the program storage and executing the processor, the software control program including: a configuration routine defining a plurality of process control variables that are known to cause a variability in results of processing and associating the plurality of process control variables with processing of a material sample; a processing control routine controlling ones of the plurality of process tools during processing of the material sample; a feed-forward routine that updates process control variables for subsequent processing operations based on results of completed processing operations to predict future characteristics of processed material samples, modify process controls, and adjust material characteristics; and a tagging routine applying a set of rules to the plurality of process control variables, the rules being associated with the material sample processing, the rules determining a tag identifying the processed material sample.
Claim 12
Dependent Claim
185 words
A process control system comprising: a plurality of process tools linked in a process flow; a database coupled to the plurality of process tools; a processor operatively coupled to the plurality of process tools and to the database, the processor including a program storage; a software control program for loading into the program storage and executing the processor, the software control program including: a configuration routine defining a plurality of process control variables that are known to cause a variability in results of processing and associating the plurality of process control variables with processing of a material sample; a processing control routine controlling ones of the plurality of process tools during processing of the material sample; a feed-forward routine that updates process control variables for subsequent processing operations based on results of completed processing operations to predict future characteristics of processed material samples, modify process controls, and adjust material characteristics; and a tagging routine applying a set of rules to the plurality of process control variables, the rules being associated with the material sample processing, the rules determining a tag identifying the processed material sample.
Claim 13
Dependent Claim
18 words
A process control system according to claim 10, wherein: the plurality of process tools includes: a photolithographic unit.
Claim 14
Dependent Claim
18 words
A process control system according to claim 10, wherein: the plurality of process tools includes: a photolithographic stepper.
Claim 15
Dependent Claim
18 words
A process control system according to claim 10, wherein: the plurality of process tools includes: an etch chamber.
Claim 16
Dependent Claim
57 words
A process control system according to claim 10, wherein: the plurality of process tools includes: a plurality of photolithographic units; and a plurality of etch chambers, the photolithographic units and the etch chambers having different characteristics so that separate material groups are generated for process flow threads that pass through different photographic units and different etch chambers.
Claim 17
Dependent Claim
30 words
A process control system according to claim 10, wherein: the software control program further includes: a looping program repeating the processing and applying operations for a plurality of processing operations.
Claim 18
Dependent Claim
24 words
A computer program product comprising: a computer usable medium having computable readable code embodied therein including the software control program according to claim 10.
Claim 19
Dependent Claim
154 words
A process control system comprising: a tag process that issues an identification associating a material to a material group; a lookup setup parameters process coupled to the tag process, the lookup setup parameters process that determines setup parameters for the material group; an accumulator coupled to the lookup setup parameters process, the accumulator that updates parameters of the material group and generates an additional material group when the updated parameters are substantially changed; a material process coupled to the accumulator, the material process that processes the material according to the updated parameters; a material results process coupled to the material process, the material results process that measures changes in the material resulting from application of the material process; and a feed-forward process that updates the parameters for subsequent material process operations based on material results of completed process operations to predict future characteristics of processed material samples, modify process controls, and adjust material characteristics.
Claim 20
Dependent Claim
154 words
A process control system comprising: a tag process that issues an identification associating a material to a material group; a lookup setup parameters process coupled to the tag process, the lookup setup parameters process that determines setup parameters for the material group; an accumulator coupled to the lookup setup parameters process, the accumulator that updates parameters of the material group and generates an additional material group when the updated parameters are substantially changed; a material process coupled to the accumulator, the material process that processes the material according to the updated parameters; a material results process coupled to the material process, the material results process that measures changes in the material resulting from application of the material process; and a feed-forward process that updates the parameters for subsequent material process operations based on material results of completed process operations to predict future characteristics of processed material samples, modify process controls, and adjust material characteristics.
Claim 21
Dependent Claim
25 words
A process control system according to claim 17, wherein: the material process further includes: a plurality of process tool entities for processing the material sample.
Claim 22
Dependent Claim
61 words
A process control system according to claim 17, wherein: the material process is a plurality of process tools including: a plurality of photolithographic units; and a plurality of etch chambers, the photolithographic units and the etch chambers having different characteristics so that separate material groups are generated for process flow threads that pass through different photographic units and different etch chambers.
Claim 23
Dependent Claim
83 words
A process control system according to claim 17, further comprising: a plurality of process tools; a database coupled to the plurality of process tools; a processor operatively coupled to the plurality of process tools and to the database, the processor including a program storage; a software control program for loading into the program storage and executing one the processor, the software control program including: the tag process; the lookup setup parameters process; the material results process; the feedback parameters process; and the accumulator.
Claim 24
Dependent Claim
30 words
A process control system according to claim 20, wherein: the software control program further includes: a looping program repeating the processing and applying operations for a plurality of processing operations.
Claim 25
Dependent Claim
24 words
A computer program product comprising: a computer usable medium having computable readable code embodied therein including the software control program according to claim 20.
Claim 26
Dependent Claim
112 words
A process control system comprising: a plurality of feed-forward control threads that account and adjust for variability of processing in a process flow including a plurality of machines, machine configurations, and machine setups; a routine that initializes processing parameters of the plurality of feed-forward control threads for a specified material group; a routine that determines results of processing of a step in the process flow; a routine that updates processing parameters for subsequent steps in the process flow based on the results; and a routine that feeds the updated processing parameters forward to the plurality of machines, machine configurations, and machine setups for usage in the subsequent steps in the process flow.
Claim 27
Dependent Claim
112 words
A process control system comprising: a plurality of feed-forward control threads that account and adjust for variability of processing in a process flow including a plurality of machines, machine configurations, and machine setups; a routine that initializes processing parameters of the plurality of feed-forward control threads for a specified material group; a routine that determines results of processing of a step in the process flow; a routine that updates processing parameters for subsequent steps in the process flow based on the results; and a routine that feeds the updated processing parameters forward to the plurality of machines, machine configurations, and machine setups for usage in the subsequent steps in the process flow.
Claim 28
Dependent Claim
142 words
A process control system comprising: a plurality of feed-forward control threads that account and adjust for variability of processing in a process flow including a plurality of machines, machine configurations, and machine setups; a routine that initializes processing parameters of the plurality of feed-forward control threads for the material groups; a routine that tags the material groups; a routine that determines results of processing of a step in the process flow; a routine that updates processing parameters for subsequent steps in the process flow based on the results to manage materials having different process characteristics in the process flow by supplying information to assist sorting of materials based on a manufacturing signature; and a routine that feeds the updated processing parameters forward to the plurality of machines, machine configurations, and machine setups for usage in the subsequent steps in the process flow.
Claim 29
Dependent Claim
142 words
A process control system comprising: a plurality of feed-forward control threads that account and adjust for variability of processing in a process flow including a plurality of machines, machine configurations, and machine setups; a routine that initializes processing parameters of the plurality of feed-forward control threads for the material groups; a routine that tags the material groups; a routine that determines results of processing of a step in the process flow; a routine that updates processing parameters for subsequent steps in the process flow based on the results to manage materials having different process characteristics in the process flow by supplying information to assist sorting of materials based on a manufacturing signature; and a routine that feeds the updated processing parameters forward to the plurality of machines, machine configurations, and machine setups for usage in the subsequent steps in the process flow.
References Cited (Backward Citations)
US5631825A
Cited
US5786114A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-11-14 | 2004-05-15 | 2004-11-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-11-14 | 2008-05-15 | 2008-11-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-11-14 | 2012-05-15 | 2012-11-14 | $7700.00 | Window Closed / Lapsed |