US6144795A
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US
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Hybrid organic-inorganic planar optical waveguide device
Assignee: Corning Inc
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Filing: 1997-12-12
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Granted: 2000-11-07
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Expires: 2017-12-12
Abstract
Abstract A planar optical device is formed on a substrate (12) and comprising an array of waveguide cores (14) and a cladding layer (16) formed contiguously with the cores. At least one of the array of waveguide cores (14) and the cladding layer (16) is an inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon being directly bonded to substituted or unsubstituted hydrocarbon atoms. In accordance with other embodiments of the invention, a method of forming an array of cores comprises the steps of preparing a core composition precursor material; partially hydrolyzing and polymerizing the material; forming an array of waveguide cores under conditions effective to form an inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon being directly bonded to substituted or unsubstituted hydrocarbon atoms.
Inventors
- 👤 Steven B. Dawes
- 👤 Ronald E. Johnson
- 👤 Richard O. Maschmeyer
- 👤 Robert D. Shoup
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 08:41
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/006; C03C17/007; C03B; C03B19/00; C03B19/12; C03C17/008; C03C17/009; C03C17/34; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/1221; G02B6/13; G02B6/132; G02B6/138; C03C2217/00; C03C2217/40
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
85 words
A planar optical waveguide formed on a substrate and comprising: a waveguide core having a first index of refraction, and a cladding layer formed contiguously with said core and having a second index of refraction smaller than said first index of refraction at least one of said core and said cladding layer being an inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon atoms being directly bonded to substituted or unsubstituted hydrocarbon moieties.
Claim 2
Dependent Claim
85 words
A planar optical waveguide formed on a substrate and comprising: a waveguide core having a first index of refraction, and a cladding layer formed contiguously with said core and having a second index of refraction smaller than said first index of refraction at least one of said core and said cladding layer being an inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon atoms being directly bonded to substituted or unsubstituted hydrocarbon moieties.
Claim 3
Dependent Claim
31 words
The planar optical waveguide of claim 1, wherein the first index of refraction is within a range of 1.4-1.55, and the second index of refraction is within a range of 1.3-1.6.
Claim 4
Dependent Claim
31 words
The planar optical waveguide of claim 1, wherein the inorganic-organic hybrid material has high transmission and an absorbance of less than 0.2 AU for wavelengths in a range between 1200-1600 nm.
Claim 5
Dependent Claim
31 words
The planar optical waveguide of claim 3, wherein the inorganic-organic hybrid material has high transmission and an absorbance of less than 0.05 AU for wavelengths in a range between 1525-1570 nm.
Claim 6
Dependent Claim
31 words
The planar optical waveguide of claim 3, wherein the inorganic-organic hybrid material has high transmission and an absorbance of less than 0.05 AU for wavelengths in a range between 1270-1330 nm.
Claim 7
Dependent Claim
21 words
The planar optical waveguide of claim 4, wherein the absorbance within the range between 1525-1570 nm is less than 0.4 db/cm.
Claim 8
Dependent Claim
24 words
The planar optical waveguide of claim 5, wherein the absorbance within the range between 1270 and 1330 nm is less than about 0.2 db/cm.
Claim 9
Dependent Claim
32 words
The planar optical waveguide of claim 1, wherein the inorganic-organic hybrid material has a mass loss less than 6% of original mass when the material changes from a non-solid to a solid.
Claim 10
Dependent Claim
33 words
The planar optical waveguide of claim 1, wherein the inorganic-organic hybrid material has a mass loss no greater than 4% of original mass when the material changes from a non-solid to a solid.
Claim 11
Dependent Claim
25 words
The planar optical waveguide of claim 1, wherein the inorganic-organic hybrid material loses about 50% of its original mass prior to curing into a solid.
Claim 12
Dependent Claim
14 words
The planar optical waveguide of claim 1, wherein the inorganic-organic hybrid material is deuterated.
Claim 13
Dependent Claim
32 words
The planar waveguide of claim 1, wherein said second cladding layer is formed over said core and wherein said waveguide includes an additional cladding layer formed between said substrate and said core.
Claim 14
Dependent Claim
19 words
The planar optical waveguide of claim 1, wherein the inorganic-organic hybrid material comprises methyl-siloxane groups, phenyl-siloxane groups, and fluorine.
Claim 15
Dependent Claim
28 words
The planar optical waveguide of claim 1, wherein the inorganic-organic hybrid material is provided by curing precursors comprised of polydimethyl siloxane, methyl trialkoxy silane, and phenyl trialkoxy silane.
Claim 16
Dependent Claim
24 words
The planar optical waveguide of claim 1, wherein the inorganic-organic hybrid material is provided by curing precursors comprised of PDMS, MTES, PTES, and PTFS.
Claim 17
Dependent Claim
88 words
A planar optical device formed on a substrate and comprising: an array of waveguide cores which guide optical radiation, and a cladding layer formed contiguously with said array of waveguide cores for confining said optical radiation to said array of waveguide cores, at least one of said array of waveguide cores arid said cladding layer being an inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon atoms being directly bonded to substituted or unsubstituted hydrocarbon moieties.
Claim 18
Dependent Claim
88 words
A planar optical device formed on a substrate and comprising: an array of waveguide cores which guide optical radiation, and a cladding layer formed contiguously with said array of waveguide cores for confining said optical radiation to said array of waveguide cores, at least one of said array of waveguide cores arid said cladding layer being an inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon atoms being directly bonded to substituted or unsubstituted hydrocarbon moieties.
Claim 19
Dependent Claim
12 words
The optical device of claim 16, wherein said device is a splitter.
Claim 20
Dependent Claim
12 words
The optical device of claim 16, wherein said device is a coupler.
Claim 21
Dependent Claim
14 words
The optical device of claim 16, wherein said device is a wavelength division multiplexer.
Claim 22
Dependent Claim
31 words
The optical device of claim 16, wherein one of said cores and said cladding layer comprises a hydrolyzed and polymerized silane selected from the group consisting of tetraalkoxysilanes, alkyltrialkoxysilanes, and aryltrialkoxysilanes.
Claim 23
Dependent Claim
19 words
The optical device of claim 20, wherein the content of the hydrolyzed and polymerized silane is at least 50%.
Claim 24
Dependent Claim
39 words
The optical device of claim 16, wherein the hydrocarbon moieties are hydrolyzed products of a modifier selected from the group consisting of inert network modifiers, active network modifiers, organic network forming modifiers, reactive polymeric modifiers and reactive polymerizable modifiers.
Claim 25
Dependent Claim
18 words
The optical device of claim 16, wherein the hydrocarbon moieties are unsubstituted or substituted alkyls or aryl moieties.
Claim 26
Dependent Claim
30 words
The optical device of claim 23, wherein the substituted alkyl or aryl moieties are selected from the group consisting of an amino alkyl, a hydroxyalkyl, a carboxyalkyl, and a mercaptoalkyl.
Claim 27
Dependent Claim
27 words
The device of claim 16, wherein said one of said array of cores and said cladding layer comprises the hydrolysis product of an interpenetrating organic polymeric matrix.
Claim 28
Dependent Claim
23 words
The device of claim 25, wherein there are substantially no covalent bonds between the interpenetrating organic polymeric matrix and the extended silicon-oxygen matrix.
Claim 29
Dependent Claim
26 words
The device of claim 22, wherein the hydrolyzed and polymerized product of the modifier forms an organic network that is covalently bonded via an Si--C bond.
Claim 30
Dependent Claim
19 words
The device of claim 16, wherein said one of said array of cores and said cladding layer contains fluorine.
Claim 31
Dependent Claim
24 words
The device of claim 16, wherein said one of said array of cores and said cladding layer contains an element for regulating refractive index.
Claim 32
Dependent Claim
12 words
The device of claim 29, wherein said element is Ge or Ti.
Claim 33
Dependent Claim
122 words
A planar optical waveguide formed on a substrate and comprising: an array of waveguide cores in which optical radiation propagates, a cladding layer for confining said optical radiation to said array of waveguide cores, said array of cores comprising a first inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon atoms being directly bonded to substituted or unsubstituted hydrocarbon moieties, said cladding layer comprising a second inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon atoms being directly bonded to substituted or unsubstituted hydrocarbon moieties, said second material having a lower index of refraction than said first material.
Claim 34
Dependent Claim
122 words
A planar optical waveguide formed on a substrate and comprising: an array of waveguide cores in which optical radiation propagates, a cladding layer for confining said optical radiation to said array of waveguide cores, said array of cores comprising a first inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon atoms being directly bonded to substituted or unsubstituted hydrocarbon moieties, said cladding layer comprising a second inorganic-organic hybrid material that comprises an extended matrix containing silicon and oxygen atoms with at least a fraction of the silicon atoms being directly bonded to substituted or unsubstituted hydrocarbon moieties, said second material having a lower index of refraction than said first material.
References Cited (Backward Citations)
US5080962A
Cited
US5480687A
Cited
US5548051A
Cited
US5481633A
Cited
US5527871A
Cited
US5686548A
Cited
US5907023A
Cited
US5649045A
Cited
US5721802A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-11-07 | 2004-05-08 | 2004-11-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-11-07 | 2008-05-08 | 2008-11-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-11-07 | 2012-05-08 | 2012-11-07 | $7700.00 | Window Closed / Lapsed |