US6130689A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and actuator for injecting a recording solution of a print head and method for producing the apparatus
Assignee: Samsung Electronics Co Ltd
•
Filing: 1997-11-19
•
Granted: 2000-10-10
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Expires: 2017-11-19
Abstract
Abstract In an apparatus and method for injecting a recording solution of a print head, a second thin film capable of regulating deforming quantity and buckling force of a vibration plate is coupled to a thin film shape memory alloy by using a semiconductor thin film fabricating process to increase the buckling force when the thin film shape memory alloy is cooled down to be buckled to its initial bending-deformed state. Thus, the time taken for buckling to the bending-deformed state of the vibration plate after injecting the recording solution is reduced and the operating frequency is increased to heighten printing speed, and rigidity of the vibration plate is heightened to reduce a concern about a damage by an external shock. The apparatus includes vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed by a temperature variation and at least one second thin film coupled to the thin film shape memory alloy for regulating the phase transforming quantity, an electric power supply section for inciting the temperature variation of the thin film shape memory alloy, a passage plate is installed over the thin film shape memory alloy while being formed with liquid chambers for retaining the recording solution and a feed path in one sides of wall planes surrounding the liquid chambers for introducing the recording solution, and a nozzle plate installed over the passage plate and formed with nozzles smaller than the liquid chambers of the passage plate for injecting the recording solution in the form of droplet when the phase of the vibration plate is transformed.
Inventors
- 👤 Hae Yong Choi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 17:19
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/14; B41J2002/14346
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
188 words
An apparatus for injecting recording solution of a print head, comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and further comprising a substrate installed under said vibration plate and having a space portion for allowing said vibration plate to phase-transform.
Claim 2
Independent Claim
188 words
An apparatus for injecting recording solution of a print head, comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and further comprising a substrate installed under said vibration plate and having a space portion for allowing said vibration plate to phase-transform.
Claim 3
Dependent Claim
39 words
An apparatus for injecting a recording solution of a print head as claimed in claim 1, wherein said thin film shape memory alloy is comprised of said shape memory alloy, using titanium (Ti) and nickel (Ni) as main substances.
Claim 4
Dependent Claim
33 words
An apparatus for injecting a recording solution of a print head as claimed in claim 1, wherein said thin film shape memory alloy has a thickness of about 0.3 μm to 5 μm.
Claim 5
Dependent Claim
31 words
An apparatus for injecting a recording solution of a print head as claimed in claim 1, wherein said second thin film has a thickness of about 0.1 μm to 3 μm.
Claim 6
Dependent Claim
31 words
An apparatus for injecting a recording solution of a print head as claimed in claim 1, wherein said second thin film is comprised of a thermally-grown silicon dioxide (SiO 2 ).
Claim 7
Dependent Claim
26 words
An apparatus for injecting a recording solution of a print head as claimed in claim 1, wherein said second thin film is comprised of a polysilicon.
Claim 8
Dependent Claim
47 words
An apparatus for injecting a recording solution of a print head as claimed in claim 1, wherein said electric power supply section comprises a heater formed to one side of said vibration plate for heating said thin film shape memory alloy by using the supplied electric power.
Claim 9
Dependent Claim
45 words
An apparatus for injecting a recording solution of a print head as claimed in claim 1, further comprising a radiating plate formed to one side of said vibration plate for radiating heat when said thin film shape memory alloy is cooled down after being heated.
Claim 10
Dependent Claim
31 words
An apparatus for injecting a recording solution of a print head as claimed in claim 8, wherein said radiating plate is comprised of a nickel (Ni) having an excellent thermal conductivity.
Claim 11
Dependent Claim
52 words
An apparatus for injecting a recording solution of a print head as claimed in claim 1, wherein an area of said vibration plate substantially phase-transformed by being exposed to said space portion has a width ranging from 100 μm to 500 μm and a length ranging from 100 μm to 300 μm.
Claim 12
Dependent Claim
83 words
An apparatus for injecting a recording solution of a print head as claimed in claim 1, wherein said vibration plate is straightened in the form of a flat plate when said thin film shape memory alloy is heated by an austenite finishing temperature to be transformed into an austenite and is bending-deformed by said residual compressive stress of said second thin film when said thin film shape memory alloy is cooled down by a martensite finishing temperature to be transformed into a martensite.
Claim 13
Dependent Claim
47 words
An apparatus for injecting a recording solution of a print head as claimed in claim 11, wherein said austenite finishing temperature of said thin film shape memory alloy is approximately 50° C. to 90° C., and said martensite finishing temperature is approximately 40° C. to 70° C.
Claim 14
Dependent Claim
52 words
An apparatus for injecting a recording solution of a print head as claimed in claim 11, wherein a time required for cooling down said thin film shape memory alloy to be said martensite after heating said austenite is shorter than approximately 200 μsec and said operating frequency is 5 kHz and higher.
Claim 15
Independent Claim
221 words
An apparatus for injecting recording solution of a print head, comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; wherein said thin shape memory alloy is comprised of said shape memory alloy, using titanium (Ti) and nickel (Ni) as main substances; wherein said thin film is comprised of said shape memory alloy and copper (Cu) added to said alloy for heightening an operating frequency by reducing a temperature difference which incites the phase transformation.
Claim 16
Independent Claim
221 words
An apparatus for injecting recording solution of a print head, comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; wherein said thin shape memory alloy is comprised of said shape memory alloy, using titanium (Ti) and nickel (Ni) as main substances; wherein said thin film is comprised of said shape memory alloy and copper (Cu) added to said alloy for heightening an operating frequency by reducing a temperature difference which incites the phase transformation.
Claim 17
Independent Claim
204 words
An apparatus for injecting recording solution of a print head, comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; wherein said electric power supply section comprises electrodes connected to ends of said thin film shape memory alloy for permitting said thin film shape memory alloy to generate heat as a result of the resistance of said alloy.
Claim 18
Independent Claim
204 words
An apparatus for injecting recording solution of a print head, comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; wherein said electric power supply section comprises electrodes connected to ends of said thin film shape memory alloy for permitting said thin film shape memory alloy to generate heat as a result of the resistance of said alloy.
Claim 19
Independent Claim
209 words
An apparatus for injecting recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; further comprising a radiating plate formed to one side of said vibration plate for radiating heat when said thin film shape memory alloy is cooled down after being heated; wherein said radiating plate has a thickness of about 0.5 μm to 3 μm.
Claim 20
Independent Claim
209 words
An apparatus for injecting recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; further comprising a radiating plate formed to one side of said vibration plate for radiating heat when said thin film shape memory alloy is cooled down after being heated; wherein said radiating plate has a thickness of about 0.5 μm to 3 μm.
Claim 21
Independent Claim
156 words
A method for producing injecting apparatus of recording solution of a print head comprising: forming a second thin film on a substrate to provide a residual compressive stress; depositing a thin film shape memory alloy onto said second thin film to form a vibration plate; performing annealing upon said thin film shape memory alloy to making a flat plate memorize as an austenite; partially etching said substrate to expose a portion of said vibration plate; and bending-deforming the exposed portion of said vibration plate be said residual compressive stress of said second thin film; whereby said steps, injecting said recording solution while said thin shape memory alloy is heated to be changed into said flat plate form; refilling the inside of a liquid chamber with said recording solution while said thin film shape memory alloy is bending-deformed by said residual compressive stress of said second thin film when being cooled to be changed into said martensite.
Claim 22
Independent Claim
156 words
A method for producing injecting apparatus of recording solution of a print head comprising: forming a second thin film on a substrate to provide a residual compressive stress; depositing a thin film shape memory alloy onto said second thin film to form a vibration plate; performing annealing upon said thin film shape memory alloy to making a flat plate memorize as an austenite; partially etching said substrate to expose a portion of said vibration plate; and bending-deforming the exposed portion of said vibration plate be said residual compressive stress of said second thin film; whereby said steps, injecting said recording solution while said thin shape memory alloy is heated to be changed into said flat plate form; refilling the inside of a liquid chamber with said recording solution while said thin film shape memory alloy is bending-deformed by said residual compressive stress of said second thin film when being cooled to be changed into said martensite.
Claim 23
Dependent Claim
191 words
An actuator of an apparatus for injecting a recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said thin film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and a substrate installed under said vibration plate and having said space portion for allowing said vibration plate to phase-transform.
Claim 24
Dependent Claim
191 words
An actuator of an apparatus for injecting a recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said thin film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and a substrate installed under said vibration plate and having said space portion for allowing said vibration plate to phase-transform.
Claim 25
Dependent Claim
42 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18, wherein said thin film shape memory alloy is comprised of said shape memory alloy, using titanium (Ti) and nickel (Ni) as main substances.
Claim 26
Dependent Claim
33 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18 wherein said thin film shape memory alloy has a thickness of about 0.5 μm.
Claim 27
Dependent Claim
34 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18, wherein said second thin film has a thickness of about 0.1 μm to 3 μm.
Claim 28
Dependent Claim
34 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18, wherein said second thin film is comprised of a thermally-grown silicon dioxide (SiO 2 ).
Claim 29
Dependent Claim
29 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18, wherein said second thin film is comprised of a polysilicon.
Claim 30
Dependent Claim
50 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18, wherein said electric power supply section comprises a heater formed to one side of said vibration plate for heating said thin film shape memory alloy by using the supplied electric power.
Claim 31
Dependent Claim
48 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18, further comprising a radiating plate formed to one side of said vibration plate for radiating heat when said thin film shape memory alloy is cooled down after being heated.
Claim 32
Dependent Claim
34 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 25, wherein said radiating plate is comprised of a nickel (Ni) having an excellent thermal conductivity.
Claim 33
Dependent Claim
55 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18, wherein an area of said vibration plate substantially phase-transformed by being exposed to said space portion has a width ranging from 100 μm to 500 μm and a length ranging from 100 μm to 300 μm.
Claim 34
Dependent Claim
29 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18, wherein said substrate is comprised of a single-crystalline silicon substance.
Claim 35
Dependent Claim
86 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 18, wherein said vibration plate is straightened in the form of a flat plate when said thin film shape memory alloy is heated by an austenite finishing temperature to be transformed into an austenite and is bending-deformed by said residual compressive stress of said second thin film when said thin film shape memory alloy is cooled down by a martensite finishing temperature to be transformed into a martensite.
Claim 36
Dependent Claim
50 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 29, wherein said austenite finishing temperature of said thin film shape memory alloy is approximately 50° C. to 90° C., and said martensite finishing temperature is approximately 40° C. to 70° C.
Claim 37
Dependent Claim
55 words
An actuator of an apparatus for injecting a recording solution of a print head as claimed in claim 29, wherein a time required for cooling down said thin film shape memory alloy to be said martensite after heating said austenite is shorter than approximately 200 μsec and said operating frequency is 5 kHz and higher.
Claim 38
Dependent Claim
224 words
An actuator of an apparatus for injecting a recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said thin film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and a substrate installed under said vibration plate and having a space portion for allowing said vibration plate to phase-transform; wherein said thin film is comprised of said shape memory alloy and copper (Cu) added to said alloy for heightening an operating frequency by reducing a temperature difference which incites the phase transformation.
Claim 39
Dependent Claim
224 words
An actuator of an apparatus for injecting a recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said thin film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and a substrate installed under said vibration plate and having a space portion for allowing said vibration plate to phase-transform; wherein said thin film is comprised of said shape memory alloy and copper (Cu) added to said alloy for heightening an operating frequency by reducing a temperature difference which incites the phase transformation.
Claim 40
Dependent Claim
229 words
An actuator of an apparatus for injecting a recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory, alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said thin film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and a substrate installed under said vibration plate and having a space portion for allowing said vibration plate to phase-transform; wherein said electric power supply section comprises electrodes connected to ends of said thin film shape memory alloy for permitting said thin film shape memory alloy to generate heat as a result of the resistance of said alloy.
Claim 41
Dependent Claim
229 words
An actuator of an apparatus for injecting a recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory, alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said thin film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and a substrate installed under said vibration plate and having a space portion for allowing said vibration plate to phase-transform; wherein said electric power supply section comprises electrodes connected to ends of said thin film shape memory alloy for permitting said thin film shape memory alloy to generate heat as a result of the resistance of said alloy.
Claim 42
Dependent Claim
234 words
An actuator of an apparatus for injecting a recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said thin film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and a substrate installed under said vibration plate and having said space portion for allowing said vibration plate to phase-transform; further comprising a radiating plate formed to one side of said vibration plate for radiating heat when said thin film shape memory alloy is cooled down after being heated; wherein said radiating plate has a thickness of about 0.5 μm to 3 μm.
Claim 43
Dependent Claim
234 words
An actuator of an apparatus for injecting a recording solution of a print head comprising: vibration plates having a thin film shape memory alloy of a shape memory alloy phase-transformed in accordance with a temperature variation and at least one second thin film coupled to said thin film shape memory alloy for regulating the phase transforming quantity; an electric power supply section for inciting said temperature variation of said thin film shape memory alloy; a passage plate installed over said thin film shape memory alloy, and being formed with liquid chambers for retaining said recording solution and formed with a feed path in at least one side of at least one wall plane surrounding each of said liquid chambers for introducing said recording solution; a nozzle plate installed over said passage plate and formed with nozzles having dimensions smaller than those of said liquid chambers of said passage plate for enabling said recording solution to be injected in the form of droplet when said phase of said vibration plate is transformed; and a substrate installed under said vibration plate and having said space portion for allowing said vibration plate to phase-transform; further comprising a radiating plate formed to one side of said vibration plate for radiating heat when said thin film shape memory alloy is cooled down after being heated; wherein said radiating plate has a thickness of about 0.5 μm to 3 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-10-10 | 2004-04-10 | 2004-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-10 | 2008-04-10 | 2008-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-10-10 | 2012-04-10 | 2012-10-10 | $7700.00 | Window Closed / Lapsed |