US6115401A
Expired / Lapsed
US
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External cavity semiconductor laser with monolithic prism assembly
Assignee: Oclaro North America Inc
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Filing: 1998-01-15
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Granted: 2000-09-05
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Expires: 2018-01-15
Abstract
Abstract An external cavity, single mode laser has a semiconductor gain medium, such as a diode laser, and a monolithic prism assembly positioned in an external resonant cavity having a length of 10 mm or less. The monolithic prism assembly includes a transparent substrate carrying a thin film Fabry-Perot interference filter on a face which is tilted to the path of travel of the laser light in the external cavity. Translation of the monolithic prism assembly including transversely to the optical axis provides continuous mode-hop-free tuning of the laser output wavelength. The Such optical devices can be economically mass produced in advantageously small size, having reproducible spectral performance properties held within tight tolerances. Significantly advantageous applications include dense wavelength division multiplexing systems requiring tightly spaced wavelength subranges for each of multiple channels. High wavelength stability against temperature and humidity changes, etc., can be achieved.
Inventors
- 👤 Michael A. Scobey
- 👤 Xinxiong Zhang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:16
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/05; H01S3/08; H01S3/08018; H01S3/08022; H01S3/08027; H01S3/08031; H01S3/08036; H01S5/00; H01S5/02; H01S5/026; H01S5/0265; H01S5/06; H01S5/062; H01S5/0625; H01S5/06255; H01S5/06258; H01S5/10; H01S5/14; H01S5/141; H01S3/08004; H01S3/081; H01S3/082; H01S5/1021; H01S5/40; H01S5/4025; H01S5/42; H01S5/423; H01S5/426
Claims Analysis
Total Claims: 52
Claim 1
Independent Claim
69 words
An external cavity laser comprising, in combination, a gain medium optically coupled to an external resonant cavity, and a monolithic prism assembly in the external resonant cavity optically coupled to the gain medium, comprising a transparent substrate incorporating a thin film Fabry-Perot narrowband interference filter manufacture thereof at an acute angle to a transverse plane of the external resonant cavity wherein the laser operates in a single longitudinal mode.
Claim 2
Dependent Claim
69 words
An external cavity laser comprising, in combination, a gain medium optically coupled to an external resonant cavity, and a monolithic prism assembly in the external resonant cavity optically coupled to the gain medium, comprising a transparent substrate incorporating a thin film Fabry-Perot narrowband interference filter manufacture thereof at an acute angle to a transverse plane of the external resonant cavity wherein the laser operates in a single longitudinal mode.
Claim 3
Dependent Claim
43 words
The external cavity laser in accordance with claim 1 wherein the acute angle of the thin film Fabry-Perot interference filter of the monolithic prism assembly to a transverse plane of the external resonant cavity is greater than zero degrees and less than 45°.
Claim 4
Dependent Claim
32 words
The external cavity laser in accordance with claim 1 wherein the thin film Fabry-Perot interference filter comprises multiple thin film reflector layers sandwiching between them at least one thin film cavity layer.
Claim 5
Dependent Claim
74 words
The external cavity laser in accordance with claim 3 wherein each cavity layer is formed of one to four dielectric films of alternating high and low refractive index, each having an optical thickness equal to an integral number of half wavelengths, and the reflector layers each is formed of two to twelve dielectric films of alternating high and low refractive index, each having an optical thickness equal to an odd number of quarter wavelengths.
Claim 6
Dependent Claim
23 words
The external cavity laser in accordance with claim 1 wherein the external resonant cavity has a physical length of less than 10 mm.
Claim 7
Dependent Claim
18 words
The external cavity laser in accordance with claim 1 wherein the Fabry-Perot interference filter is a multi-cavity filter.
Claim 8
Dependent Claim
26 words
The ECL of claim 1 wherein the substrate incorporates a coating on an extended face of the substrate defining an end of the external resonant cavity.
Claim 9
Dependent Claim
132 words
An optical device comprising, in combination, a single mode external cavity laser, including an anti-reflection coating on a first emitter facet of a semiconductor diode laser optically coupled to an external resonant cavity having an optical axis, an output coupler coating on a second emitter facet of the diode laser, a monolithic prism assembly in the external resonant cavity comprising a transparent optical substrate carrying a cavity-end reflective coating on one face of the substrate and a thin film Fabry-Perot interference filter on an opposing face of the substrate between the cavity-end reflective coating and the first emitter facet at an acute angle to a plane transverse of the optical axis, the thin film Fabry-Perot interference filter comprising multiple thin film reflectors sandwiching between them at least one thin film cavity layer.
Claim 10
Dependent Claim
132 words
An optical device comprising, in combination, a single mode external cavity laser, including an anti-reflection coating on a first emitter facet of a semiconductor diode laser optically coupled to an external resonant cavity having an optical axis, an output coupler coating on a second emitter facet of the diode laser, a monolithic prism assembly in the external resonant cavity comprising a transparent optical substrate carrying a cavity-end reflective coating on one face of the substrate and a thin film Fabry-Perot interference filter on an opposing face of the substrate between the cavity-end reflective coating and the first emitter facet at an acute angle to a plane transverse of the optical axis, the thin film Fabry-Perot interference filter comprising multiple thin film reflectors sandwiching between them at least one thin film cavity layer.
Claim 11
Dependent Claim
26 words
The optical device in accordance with claim 8 wherein the cavity-end reflective coating is partially transparent and optically couples the diode laser to an output element.
Claim 12
Dependent Claim
21 words
The optical device in accordance with claim 9 wherein the output element is a diode sensor of a power feedback loop.
Claim 13
Dependent Claim
25 words
The optical device in accordance with claim 8 wherein the output coupler coating is optically coupled through a second collimating means to a fiber-optic pigtail.
Claim 14
Dependent Claim
140 words
An optical device comprising, in combination: a single mode external cavity laser comprising first and second semiconductor diode lasers at opposite ends of a common external resonant cavity, the first diode laser having a first coating on a first facet defining a first end of the external resonant cavity, and the second diode laser having an output coupler reflective coating on a second facet defining a second end of the external resonant cavity and optically coupling the second diode laser to an output element; a monolithic prism assembly in the external resonant cavity between the first and second diode lasers, comprising a transparent optical substrate carrying a thin film Fabry-Perot interference filter on a face of the substrate, having at least one thin film cavity sandwiched between thin film reflectors; and a collimating element between the first and second lasers.
Claim 15
Dependent Claim
140 words
An optical device comprising, in combination: a single mode external cavity laser comprising first and second semiconductor diode lasers at opposite ends of a common external resonant cavity, the first diode laser having a first coating on a first facet defining a first end of the external resonant cavity, and the second diode laser having an output coupler reflective coating on a second facet defining a second end of the external resonant cavity and optically coupling the second diode laser to an output element; a monolithic prism assembly in the external resonant cavity between the first and second diode lasers, comprising a transparent optical substrate carrying a thin film Fabry-Perot interference filter on a face of the substrate, having at least one thin film cavity sandwiched between thin film reflectors; and a collimating element between the first and second lasers.
Claim 16
Dependent Claim
46 words
The optical device in accordance with claim 12 wherein the monolithic prism assembly has first and second anti-reflection coatings on parallel external surfaces, the thin film Fabry-Perot interference filter being on an internal face of the monolithic prism assembly between the first and second anti-reflection coatings.
Claim 17
Dependent Claim
23 words
The optical device in accordance with claim 12 wherein the output element is a second collimating element optically coupled to a fiber-optic pigtail.
Claim 18
Dependent Claim
23 words
The optical device in accordance with claim 12 wherein the first coating optically couples the first diode laser to a second output element.
Claim 19
Dependent Claim
79 words
A dense wavelength division multiplexing fiber-optic communication system comprising, in combination, a semiconductor diode laser optically coupled to a monolithic prism assembly in an external resonant cavity of overall length less than 10 mm, the monolithic prism assembly comprising a transparent optical substrate carrying on an internal surface a multi-cavity thin film Fabry-Perot interference angled to reflect out-of-band wavelengths away from the diode laser and comprising multiple thin film reflectors sandwiching between them at least one thin film cavity.
Claim 20
Dependent Claim
79 words
A dense wavelength division multiplexing fiber-optic communication system comprising, in combination, a semiconductor diode laser optically coupled to a monolithic prism assembly in an external resonant cavity of overall length less than 10 mm, the monolithic prism assembly comprising a transparent optical substrate carrying on an internal surface a multi-cavity thin film Fabry-Perot interference angled to reflect out-of-band wavelengths away from the diode laser and comprising multiple thin film reflectors sandwiching between them at least one thin film cavity.
Claim 21
Dependent Claim
123 words
An external cavity laser, comprising: an external resonant laser cavity having an optical axis, comprising a cavity end coating at one end of the cavity and another cavity end coating at another end of the cavity; an optical gain medium optically coupled to disposed in, and the external laser cavity; and a monolithic prism assembly disposed in, and optically coupled to, the external laser cavity, comprising a transparent substrate having a first external face and a second face opposed to the first face and inclined at an acute angle to the first face and to a transverse plane of the external cavity, wherein the substrate incorporates a thin film Fabry-Perot type interference filter further wherein the laser operates in a single longitudinal mode.
Claim 22
Dependent Claim
123 words
An external cavity laser, comprising: an external resonant laser cavity having an optical axis, comprising a cavity end coating at one end of the cavity and another cavity end coating at another end of the cavity; an optical gain medium optically coupled to disposed in, and the external laser cavity; and a monolithic prism assembly disposed in, and optically coupled to, the external laser cavity, comprising a transparent substrate having a first external face and a second face opposed to the first face and inclined at an acute angle to the first face and to a transverse plane of the external cavity, wherein the substrate incorporates a thin film Fabry-Perot type interference filter further wherein the laser operates in a single longitudinal mode.
Claim 23
Dependent Claim
38 words
The laser of claim 17 wherein the angle of the thin film Fabry-Perot interference filter of the monolithic prism assembly to a transverse plane of the external resonant cavity is greater than zero degrees and less than 45°.
Claim 24
Dependent Claim
13 words
The laser of claim 18 wherein the angle is less than 1 degree.
Claim 25
Dependent Claim
17 words
The laser of claim 17 wherein the external cavity has a physical length, L o <10 mm.
Claim 26
Dependent Claim
13 words
The laser of claim 17 having a packaged volume ≦6 cm 3 .
Claim 27
Dependent Claim
54 words
The laser of claim 17 wherein the substrate further comprises a second, external face that is substantially parallel to the first external face, one of the first and the second external faces incorporating one of the cavity end coatings, further wherein the second face incorporating the filter is an internal face of the substrate.
Claim 28
Dependent Claim
24 words
The laser of claim 17 wherein the gain medium is a semiconductor laser diode having an emitter fact incorporating the other cavity end coating.
Claim 29
Dependent Claim
27 words
The laser of claim 17 further comprising a collimating element disposed in the cavity along the optical axis intermediate the monolithic prism assembly and the gain medium.
Claim 30
Dependent Claim
14 words
The laser of claim 24 wherein the cavity has a physical length <10 mm.
Claim 31
Dependent Claim
47 words
The laser of claim 17 wherein the interference filter has a transmission peak substantially centered on one of a plurality of longitudinal modes of the cavity, and a bandwidth at FWHM that is less than twice the spacing between two adjacent longitudinal modes of the laser cavity.
Claim 32
Dependent Claim
62 words
The laser of claim 17 wherein the interference filter has a transmission peak substantially centered on one of a plurality of longitudinal modes of the cavity, and a bandwidth at FWHM that is≧twice the spacing between two adjacent longitudinal modes, further wherein the filter has a loss difference at FWHM sufficient to prevent oscillation of the longitudinal modes adjacent the center mode.
Claim 33
Dependent Claim
28 words
The laser of claim 17 having a gain medium dependent emission spectrum between about 600-2000 nm, further including means for tilt tuning the emission wavelength of the laser.
Claim 34
Dependent Claim
15 words
The laser of claim 17 wherein the interference filter has a substantially uniform optical thickness.
Claim 35
Dependent Claim
34 words
The laser of claim 17 wherein the filter is a linear variable filter incorporated on the second face of the substrate, further wherein the first external face incorporates one of the cavity end coatings.
Claim 36
Dependent Claim
73 words
The laser of claim 30 further comprising means for translating the monolithic prism assembly in an X-Y plane of an X-Y-Z coordinate system, wherein the angle is such that the value of M in the expression M=2L/λ is constant as λ changes due to the prism assembly and filter translation, where M is an integer, L is the total optical length of the cavity and λ is the operational wavelength of the laser.
Claim 37
Dependent Claim
12 words
The laser of claim 30 wherein the filter is continuously linearly variable.
Claim 38
Dependent Claim
15 words
The laser of claim 30 having a physical external cavity length less than 10 mm.
Claim 39
Dependent Claim
54 words
The laser of claim 17 wherein the first external face is disposed in an X-Y plane of an X-Y-Z- coordinate system, further wherein a portion of the optical axis external to the monolithic prism assembly is inclined at an angle with respect to a normal to the second face of the monolithic prism assembly.
Claim 40
Dependent Claim
155 words
A single mode external cavity laser, comprising: an external resonant laser cavity having an optical axis, comprising a cavity end coating at one end of the cavity and another cavity end coating at another end of the cavity; an optical gain medium disposed in and optically coupled to the external laser cavity; a monolithic prism assembly disposed in and optically coupled to the external laser cavity comprising a transparent substrate having substantially parallel opposing faces wherein one of the faces incorporates a linearly variable thin film F-P interference filter, further wherein the substrate has a gradient index of refraction; and means for translating the monolithic prism assembly in X-Y plane of an X-Y-Z coordinate system, wherein M in the expression M=2L/λ remains constant as the prism assembly is translated to change λ, where M is an integer, L is the total optical length of the cavity and λ is the operational wavelength of the laser.
Claim 41
Dependent Claim
155 words
A single mode external cavity laser, comprising: an external resonant laser cavity having an optical axis, comprising a cavity end coating at one end of the cavity and another cavity end coating at another end of the cavity; an optical gain medium disposed in and optically coupled to the external laser cavity; a monolithic prism assembly disposed in and optically coupled to the external laser cavity comprising a transparent substrate having substantially parallel opposing faces wherein one of the faces incorporates a linearly variable thin film F-P interference filter, further wherein the substrate has a gradient index of refraction; and means for translating the monolithic prism assembly in X-Y plane of an X-Y-Z coordinate system, wherein M in the expression M=2L/λ remains constant as the prism assembly is translated to change λ, where M is an integer, L is the total optical length of the cavity and λ is the operational wavelength of the laser.
Claim 42
Dependent Claim
18 words
The laser of claim 35 wherein the opposing face of the substrate incorporate one of the cavity-end coatings.
Claim 43
Dependent Claim
16 words
The laser of claim 35 wherein the cavity has a physical length less than 10 mm.
Claim 44
Dependent Claim
127 words
In an improved external cavity device including a semiconductor diode laser optically coupled to an external resonant laser cavity, having an optical axis and an optical interference filter in the cavity for locking and/or tuning the operation wavelength, λ, of the device, the improvement comprising a monolithic prism assembly including a transparent substrate having at least two opposing external faces, one of which incorporates the interference filter; and means for translating the monolithic prism assembly transversely to the optical axis, such that upon translation the operating wavelength changes, further wherein the value of M in the expression M=2L/λ remains constant as λ changes, where M is an integer and L is the total optical length of the cavity wherein the device operates in a single longitudinal mode.
Claim 45
Dependent Claim
127 words
In an improved external cavity device including a semiconductor diode laser optically coupled to an external resonant laser cavity, having an optical axis and an optical interference filter in the cavity for locking and/or tuning the operation wavelength, λ, of the device, the improvement comprising a monolithic prism assembly including a transparent substrate having at least two opposing external faces, one of which incorporates the interference filter; and means for translating the monolithic prism assembly transversely to the optical axis, such that upon translation the operating wavelength changes, further wherein the value of M in the expression M=2L/λ remains constant as λ changes, where M is an integer and L is the total optical length of the cavity wherein the device operates in a single longitudinal mode.
Claim 46
Dependent Claim
13 words
The device of claim 38 wherein the filter is a linear variable filter.
Claim 47
Dependent Claim
25 words
The device of claim 38 wherein the opposing substrate external faces are inclined at an angle, α, with respect to each other of between 0-1°.
Claim 48
Dependent Claim
23 words
The device of claim 38 wherein the opposing substrate external faces are substantially parallel, and the substrate has a gradient index of refraction.
Claim 49
Dependent Claim
94 words
An external cavity laser, comprising: an external resonant laser cavity having a length less than 10 mm; an optical gain medium disposed in and optically coupled to the external laser cavity; a monolithic prism assembly disposed in and optically coupled to the external laser cavity, including a transparent substrate, a thin film F-P interference filter incorporated on a face of the substrate and inclined at an angle to another face of the substrate, wherein the filter transmission bandwidth and the cavity length in combination are sufficient to provide single mode operation of the laser.
Claim 50
Dependent Claim
94 words
An external cavity laser, comprising: an external resonant laser cavity having a length less than 10 mm; an optical gain medium disposed in and optically coupled to the external laser cavity; a monolithic prism assembly disposed in and optically coupled to the external laser cavity, including a transparent substrate, a thin film F-P interference filter incorporated on a face of the substrate and inclined at an angle to another face of the substrate, wherein the filter transmission bandwidth and the cavity length in combination are sufficient to provide single mode operation of the laser.
Claim 51
Dependent Claim
49 words
The laser of claim 42 wherein the filter is a linear variable filter providing a varying transmission wavelength as a function of position of the filter, further wherein the angle of the substrate faces and the filter wavelength variation are sufficient to provide continuous mode-hop-free tuning of the laser.
Claim 52
Dependent Claim
13 words
The laser of claim 42 wherein the angle is less than 1 degree.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-09-05 | 2004-03-06 | 2004-09-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-05 | 2008-03-06 | 2008-09-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-05 | 2012-03-06 | 2012-09-05 | $7700.00 | Window Closed / Lapsed |