US6110795A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabricating shallow trench isolation
Assignee: United Microelectronics Corp
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Filing: 1998-06-24
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Granted: 2000-08-29
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Expires: 2018-06-24
Abstract
Abstract An method of fabricating a shallow trench isolation. A semiconductor substrate having pad oxide layer and a hard mask layer is provided. The pad oxide layer and the hard mask layer are defined to expose a part of the substrate. The exposed substrate is etched to form a trench therewithin. An isolation layer is formed to fill the trench. The isolation layer is planarized by chemical mechanical polishing with the hard mask layer as an stop layer, so that a micro-scratch is formed on a surface of the isolation within the trench. A sacrificial layer is formed on the isolation layer and the hard mask layer. The micro-scratch is thus filled with the sacrificial layer. Using the hard mask as an etch stop, the sacrificial layer is etched back. Since the etching rate of the sacrificial layer is the same as or lower than the isolation layer within the trench, the formation of the micro-scratch is suppressed during the etching back process.
Inventors
- 👤 Kuan-Yang Liao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 00:14
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/10; H10W10/17
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
140 words
A method of fabricating a shallow trench isolation, wherein a semiconductor having a hard mask layer formed thereon is provided, the method comprising: defining the hard mask layer to expose a part of the substrate; etching the exposed part of the substrate to form a trench; forming an isolation layer on the hard mask layer and to fill the trench; planarizing the isolation layer using chemical mechanical polishing with the hard mask layer as a stop layer, so that a micro-scratch is formed within the remaining isolation layer; forming a sacrificial layer to cover the hard mask layer and the isolation layer and fill the micro-scratch; and etching back the sacrificial layer by time or with the hard mask layer as an etch stop, wherein the sacrificial layer has an etching rate slower than or equal to the isolation layer.
Claim 2
Independent Claim
140 words
A method of fabricating a shallow trench isolation, wherein a semiconductor having a hard mask layer formed thereon is provided, the method comprising: defining the hard mask layer to expose a part of the substrate; etching the exposed part of the substrate to form a trench; forming an isolation layer on the hard mask layer and to fill the trench; planarizing the isolation layer using chemical mechanical polishing with the hard mask layer as a stop layer, so that a micro-scratch is formed within the remaining isolation layer; forming a sacrificial layer to cover the hard mask layer and the isolation layer and fill the micro-scratch; and etching back the sacrificial layer by time or with the hard mask layer as an etch stop, wherein the sacrificial layer has an etching rate slower than or equal to the isolation layer.
Claim 3
Dependent Claim
22 words
The method according to claim 1, wherein a pad oxide layer is further comprised between the substrate and the hard mask layer.
Claim 4
Dependent Claim
24 words
The method according to claim 1, wherein the sacrificial layer comprises a thin and dense layer formed by high density plasma chemical vapor deposition.
Claim 5
Dependent Claim
16 words
The method according to claim 1, wherein the sacrificial layer is etched back by wet etching.
Claim 6
Dependent Claim
16 words
The method according to claim 1, wherein the sacrificial layer is etched back by plasma etching.
Claim 7
Independent Claim
145 words
A method of fabricating a shallow trench isolation, wherein a semiconductor having a hard mask layer formed thereon is provided, the method comprising: defining the hard mask layer to expose a part of the substrate; etching the exposed part of the substrate to form a trench after the step of defining the hard mask layer; forming an isolation layer on the hard mask layer and to fill the trench; planarizing the isolation layer using chemical mechanical polishing with the hard mask layer as an etch stop, so that a micro-scratch is formed within the remaining isolation layer; forming a sacrificial layer to cover the hard mask layer and the isolation layer; and etching back the sacrificial layer by time or with the hard mask layer as an etch stop, wherein the sacrificial layer has an etching rate slower than or equal to the isolation layer.
Claim 8
Independent Claim
145 words
A method of fabricating a shallow trench isolation, wherein a semiconductor having a hard mask layer formed thereon is provided, the method comprising: defining the hard mask layer to expose a part of the substrate; etching the exposed part of the substrate to form a trench after the step of defining the hard mask layer; forming an isolation layer on the hard mask layer and to fill the trench; planarizing the isolation layer using chemical mechanical polishing with the hard mask layer as an etch stop, so that a micro-scratch is formed within the remaining isolation layer; forming a sacrificial layer to cover the hard mask layer and the isolation layer; and etching back the sacrificial layer by time or with the hard mask layer as an etch stop, wherein the sacrificial layer has an etching rate slower than or equal to the isolation layer.
Claim 9
Dependent Claim
58 words
The method according to claim 6, further comprising the step of forming a patterned pad oxide layer between the substrate and the hard mask layer before the step of etching the exposed part of the substrate to form a trench, so that the part of the substrate is exposed after the step of defining the hard mask layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-08-29 | 2004-02-28 | 2004-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-29 | 2008-02-28 | 2008-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-29 | 2012-02-28 | 2012-08-29 | $7700.00 | Window Closed / Lapsed |