US6090632A
Expired / Lapsed
US
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Method for controlling semiconductor processing equipment in real time
Assignee: Samsung Electronics Co Ltd
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Filing: 1998-09-04
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Granted: 2000-07-18
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Expires: 2018-09-04
Abstract
Abstract A method for controlling semiconductor processing equipment in real time, includes measuring a characteristic value of a product of a first process performed by a first piece of equipment. Then it is determined whether the characteristic value of the product is within a predetermined acceptable product range stored in a host computer. A second process is stopped from operating on the product when the product is not within the range. Otherwise, when the product is within range, the process is tested using a main test that includes computing a main statistic using the characteristic value of the product and determining whether the main statistic is within a predetermined control limit range. Then, if the main test is not passed, the process is interrupted, including stopping the first piece of equipment and postponing the second process from operating on the product.
Inventors
- 👤 Heui-sik Jeon
- 👤 Jong-hwan Weon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:56
CPC Classifications
G; G05; G05B; G05B19/00; G05B19/02; G05B19/04; H; H10; H10P; H10P74/00; H10P74/23; Y; Y02; Y02P; Y02P90/00; Y02P90/02
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
232 words
A method for controlling semiconductor processing equipment in real time, the equipment sequentially performing first and second semiconductor fabrication processes on a product and including a first piece of equipment for performing the first fabrication process, said method comprising: measuring a characteristic of a product of the first fabrication process performed by the first piece of semiconductor fabrication equipment, and ascribing a value to the measured characteristic, whereby said value is a characteristic value of the product; determining whether the characteristic value is within a predetermined acceptable range stored in a host computer, and if so, designating the product a passed product, otherwise designating the product a failed product; if the product is designated a failed product, stopping the semiconductor processing equipment from performing the second fabrication process on the failed product; if the product is designated a passed product, conducting a main test on the first fabrication process, the main test including computing a statistic using the characteristic value ascribed to the measured characteristic of the product and determining whether the statistic is within a predetermined control limit range, and if so, designating the first fabrication process a normal process, otherwise designating the first fabrication process an abnormal process; and if the first fabrication process is designated an abnormal process, stopping the first piece of semiconductor processing equipment and postponing the performing of the second fabrication process on the passed product.
Claim 2
Independent Claim
232 words
A method for controlling semiconductor processing equipment in real time, the equipment sequentially performing first and second semiconductor fabrication processes on a product and including a first piece of equipment for performing the first fabrication process, said method comprising: measuring a characteristic of a product of the first fabrication process performed by the first piece of semiconductor fabrication equipment, and ascribing a value to the measured characteristic, whereby said value is a characteristic value of the product; determining whether the characteristic value is within a predetermined acceptable range stored in a host computer, and if so, designating the product a passed product, otherwise designating the product a failed product; if the product is designated a failed product, stopping the semiconductor processing equipment from performing the second fabrication process on the failed product; if the product is designated a passed product, conducting a main test on the first fabrication process, the main test including computing a statistic using the characteristic value ascribed to the measured characteristic of the product and determining whether the statistic is within a predetermined control limit range, and if so, designating the first fabrication process a normal process, otherwise designating the first fabrication process an abnormal process; and if the first fabrication process is designated an abnormal process, stopping the first piece of semiconductor processing equipment and postponing the performing of the second fabrication process on the passed product.
Claim 3
Dependent Claim
64 words
The method of claim 1, wherein if the product is the failed product, further comprising: conducting the main test on the first process; if the statistic is within the predetermined control limit range, designating the first process a normal process, otherwise designating the first process a defective process; and if a defective process, halting the defective process, including stopping the first piece of equipment.
Claim 4
Dependent Claim
33 words
The method of claim 1, wherein if the first process is a normal process, executing the second process on the passed product and operating the first piece of equipment to produce another product.
Claim 5
Dependent Claim
24 words
The method of claim 2, wherein if the first process is a normal process, operating the first piece of equipment to produce another product.
Claim 6
Dependent Claim
39 words
The method of claim 1, wherein, during said main testing, the statistic is a maximal control limit of a statistical process control; and the predetermined control limit range extends from a lower control limit to an upper control limit.
Claim 7
Dependent Claim
41 words
The method of claim 1, wherein, if the product is a passed product and the first process is a normal process, further comprising subtesting of the normal process, and re-designating the normal process an abnormal process if the subtesting is failed.
Claim 8
Dependent Claim
41 words
The method of claim 2, wherein, if the product is a failed product and the first process is a normal process, further comprising subtesting of the normal process and re-designating the normal process a defective process if the subtesting is failed.
Claim 9
Dependent Claim
22 words
The method of claim 6, the subtesting comprising determining whether or not the characteristic value satisfies a statistical process control 2/3 rule.
Claim 10
Dependent Claim
22 words
The method of claim 6, the subtesting comprising determining whether or not the characteristic value satisfies a statistical process control 4/5 rule.
Claim 11
Dependent Claim
22 words
The method of claim 6, the subtesting comprising determining whether or not the characteristic value satisfies a statistical process control 5-trend rule.
Claim 12
Dependent Claim
32 words
The method of claim 8, wherein if the characteristic value satisfies the 2/3 rule, the subtesting further comprising determining whether or not the characteristic value satisfies the statistical process control 4/5 rule.
Claim 13
Dependent Claim
32 words
The method of claim 8, wherein if the characteristic value satisfies the 2/3 rule, the subtesting further comprising determining whether or not the characteristic value satisfies the statistical process control 5-trend rule.
Claim 14
Dependent Claim
32 words
The method of claim 9, wherein if the characteristic value satisfies the 4/5 rule, the subtesting further comprising determining whether or not the characteristic value satisfies the statistical process control 5-trend rule.
Claim 15
Dependent Claim
32 words
The method of claim 11, wherein if the characteristic value satisfies the 4/5 rule, the subtesting further comprising determining whether or not the characteristic value satisfies the statistical process control 5-trend rule.
Claim 16
Dependent Claim
22 words
The method of claim 7, the subtesting comprising determining whether or not the characteristic value satisfies a statistical process control 2/3 rule.
Claim 17
Dependent Claim
22 words
The method of claim 7, the subtesting comprising determining whether or not the characteristic value satisfies a statistical process control 4/5 rule.
Claim 18
Dependent Claim
22 words
The method of claim 7, the subtesting comprising determining whether or not the characteristic value satisfies a statistical process control 5-trend rule.
Claim 19
Dependent Claim
32 words
The method of claim 15, wherein if the characteristic value satisfies the 2/3 rule, the subtesting further comprising determining whether or not the characteristic value satisfies the statistical process control 4/5 rule.
Claim 20
Dependent Claim
32 words
The method of claim 15, wherein if the characteristic value satisfies the 2/3 rule, the subtesting further comprising determining whether or not the characteristic value satisfies the statistical process control 5-trend rule.
Claim 21
Dependent Claim
32 words
The method of claim 16, wherein if the characteristic value satisfies the 4/5 rule, the subtesting further comprising determining whether or not the characteristic value satisfies the statistical process control 5-trend rule.
Claim 22
Dependent Claim
32 words
The method of claim 18, wherein if the characteristic value satisfies the 4/5 rule, the subtesting further comprising determining whether or not the characteristic value satisfies the statistical process control 5-trend rule.
Claim 23
Dependent Claim
35 words
The method of claim 6, the subtesting comprising determining whether or not the characteristic value satisfies a statistical process control 2/3 rule, a statistical process control 4/5 rule, and a statistical process control 5-trend rule.
Claim 24
Dependent Claim
35 words
The method of claim 7, the subtesting comprising determining whether or not the characteristic value satisfies a statistical process control 2/3 rule, a statistical process control 4/5 rule, and a statistical process control 5-trend rule.
Claim 25
Dependent Claim
84 words
The method of claim 6, the subtesting comprising: determining whether or not the characteristic value satisfies one rule of a rule group, wherein the rule group consists of a statistical process control 2/3 rule, a statistical process control 4/5 rule, and a statistical process control 5-trend rule; selecting another different rule of the rule group, if the characteristic value satisfies said one rule of the rule group; and determining whether or not the characteristic value satisfies said another different rule of the rule group.
Claim 26
Dependent Claim
84 words
The method of claim 7, the subtesting comprising: determining whether or not the characteristic value satisfies one rule of a rule group, wherein the rule group consists of a statistical process control 2/3 rule, a statistical process control 4/5 rule, and a statistical process control 5-trend rule; selecting another different rule of the rule group, if the characteristic value satisfies said one rule of the rule group; and determining whether or not the characteristic value satisfies said another different rule of the rule group.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-07-18 | 2004-01-17 | 2004-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-07-18 | 2008-01-17 | 2008-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-07-18 | 2012-01-17 | 2012-07-18 | $7700.00 | Window Closed / Lapsed |