US6071789A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for simultaneously fabricating a DRAM capacitor and metal interconnections
Assignee: Vanguard International Semiconductor Corp
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Filing: 1998-11-10
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Granted: 2000-06-06
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Expires: 2018-11-10
Abstract
Abstract A method for simultaneously forming a storage node and a plurality of interconnection in fabricating a semiconductor device on a substrate. The method comprises the steps of: forming a first dielectric layer over said cell array area and said periphery; forming a plurality of first contact holes through said first dielectric layer in said cell array area and said periphery area, said periphery area including a bitline and a word line, said word line and said bitline being used for addressing said memory cell; forming a first conductive layer in said plurality of first contact holes and on said first dielectric layer; patterning and etching said first conductive layer to form said storage node and said plurality of interconnections simultaneously; forming a second dielectric layer and a second conductive layer subsequently on said first dielectric layer, said storage node and said plurality of interconnections; and patterning and etching said second dielectric layer and said second conductive layer to form a charge storage means and a plurality of contact plugs.
Inventors
- 👤 Fu-Liang Yang
- 👤 Erik S. Jeng
- 👤 Bih-Tiao Lin
- 👤 I-Ping Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 11:44
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/09; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/692; H10B12/02; H10B12/03; H10B12/033; H10B12/05; H10B12/30; H10B12/31; H10B12/315; H10B12/50; H10D1/682; H10W; H10W20/00; H10W20/01; H10W20/031
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
224 words
A method for simultaneously forming a capacitor storage node and a plurality of interconnections in fabricating a memory cell on a substrate, said substrate comprising a cell array area and a periphery area, said method comprising: forming a first dielectric layer over said cell array area and said periphery; planarizing said first dielectric layer; simultaneously forming a plurality of first contact holes through said first dielectric layer in said cell array area and said periphery area, said periphery area including a bitline and a word line, said word line and said bitline being used for addressing said memory cell, wherein a storage node contact hole of said plurality of first contact holes has a depth different from that of an interconnection contact hole of said plurality of first contact holes; forming a first conductive layer in said plurality of first contact holes and on said first dielectric layer; patterning and etching said first conductive layer to form said storage node and said plurality of interconnections simultaneously; forming a second dielectric layer and a second conductive layer subsequently on said first dielectric layer, said storage node and said plurality of interconnections; and patterning and etching said second dielectric layer and said second conductive layer to form a charge storage means in said cell array area and a plurality of contact plugs in said periphery area.
Claim 2
Independent Claim
224 words
A method for simultaneously forming a capacitor storage node and a plurality of interconnections in fabricating a memory cell on a substrate, said substrate comprising a cell array area and a periphery area, said method comprising: forming a first dielectric layer over said cell array area and said periphery; planarizing said first dielectric layer; simultaneously forming a plurality of first contact holes through said first dielectric layer in said cell array area and said periphery area, said periphery area including a bitline and a word line, said word line and said bitline being used for addressing said memory cell, wherein a storage node contact hole of said plurality of first contact holes has a depth different from that of an interconnection contact hole of said plurality of first contact holes; forming a first conductive layer in said plurality of first contact holes and on said first dielectric layer; patterning and etching said first conductive layer to form said storage node and said plurality of interconnections simultaneously; forming a second dielectric layer and a second conductive layer subsequently on said first dielectric layer, said storage node and said plurality of interconnections; and patterning and etching said second dielectric layer and said second conductive layer to form a charge storage means in said cell array area and a plurality of contact plugs in said periphery area.
Claim 3
Dependent Claim
226 words
The method of claim 1, further comprising: forming a third dielectric layer on said second conductive layer, said storage means and said plurality of contact plugs; etching said third dielectric layer to form a plurality of second contact holes exposing said second conductive layer and said plurality of contact plugs; forming a third conductive layer in said plurality of second contact holes and oil said third dielectric layer; patterning and etching said third conductive layer to form a first via plug, a second via plug, a third via plug and a fourth via plug, said first via plug being electrically coupled to said second conductive layer, said second via plug being electrically coupled to said bitline, said third via plug being electrically coupled to said word line, said fourth via plug being electrically coupled to said substrate; forming a fourth dielectric layer on said third conductive layer, said third dielectric layer, said first via plug, said second via plug, said third via plug, and said fourth via plug; patterning and etching said fourth dielectric layer to form a third contact hole exposing said second via plug; forming a fourth conductive layer on said fourth dielectric layer and in said third contact hole; and patterning said fourth conductive layer to form a conducting line of said memory cell, said conducting line being electrically coupled to said bitline.
Claim 4
Dependent Claim
60 words
The method of claim 1, wherein said plurality of contact plugs comprise a first contact plug, a second contact plug, and a third contact plug, said first contact plug being electrically coupled to said bitline, said second contact plug being electrically coupled to said word line, said third contact plug being electrically coupled to said substrate of said periphery area.
Claim 5
Dependent Claim
24 words
The method of claim 1, wherein said first conductive layer is formed of a group consisting of: doped poly silicon, Al, W, and Ta.
Claim 6
Dependent Claim
25 words
The method of claim 1, wherein said second dielectric layer is formed of a group consisting of: Ta 2 O 5 , BST, and PZT.
Claim 7
Dependent Claim
24 words
The method of claim 1, wherein said second conductive layer is formed of a group consisting of: doped poly silicon, Al, W, and Ta.
Claim 8
Dependent Claim
35 words
The method of claim 1, wherein said first dielectric layer, said third dielectric layer and said fourth dielectric layer are formed of a group consisting of: an O 3 TEOS based interlayer oxide or BPSG.
Claim 9
Dependent Claim
15 words
The method of claim 1, wherein said third conductive layer is formed of aluminum (Al).
Claim 10
Dependent Claim
15 words
The method of claim 1, wherein said fourth conductive layer is formed of aluminum (Al).
Claim 11
Dependent Claim
13 words
The method of claim 1, wherein said charge storage means is a capacitor.
Claim 12
Independent Claim
262 words
A method for simultaneously forming a storage node and a plurality of interconnection in fabricating a semiconductor device on a substrate, said substrate comprising a cell array and a periphery area, said method comprising: forming a first dielectric layer over said cell array area and said periphery; planarizing said first dielectric layer; simultaneously forming a plurality of first contact holes through said first dielectric layer in said cell array area and said periphery area, said periphery area including a bitline and a word line, said word line and said bitline being used for addressing said memory cell, wherein a storage node contact hole of said plurality of first contact holes has a depth different from that of an interconnect contact hole of said plurality of first contact holes; forming a first conductive layer in said plurality of first contact holes and on said fist dielectric layer; patterning and etching said first conductive layer to form said storage node and said plurality of interconnections simultaneously; forming a second dielectric layer and a second conductive layer subsequently on said first dielectric layer, said storage node and said plurality of interconnections; and patterning said second dielectric layer and said second conductive layer to form a storage means in said cell array area, a first contact plug, a second contact plug, and a third contact plug in said periphery area, said first contact plug being electrically coupled to said bitline, said second contact plug being electrically coupled to said word line, and said third contact plug being electrically coupled to said substrate of said periphery area.
Claim 13
Independent Claim
262 words
A method for simultaneously forming a storage node and a plurality of interconnection in fabricating a semiconductor device on a substrate, said substrate comprising a cell array and a periphery area, said method comprising: forming a first dielectric layer over said cell array area and said periphery; planarizing said first dielectric layer; simultaneously forming a plurality of first contact holes through said first dielectric layer in said cell array area and said periphery area, said periphery area including a bitline and a word line, said word line and said bitline being used for addressing said memory cell, wherein a storage node contact hole of said plurality of first contact holes has a depth different from that of an interconnect contact hole of said plurality of first contact holes; forming a first conductive layer in said plurality of first contact holes and on said fist dielectric layer; patterning and etching said first conductive layer to form said storage node and said plurality of interconnections simultaneously; forming a second dielectric layer and a second conductive layer subsequently on said first dielectric layer, said storage node and said plurality of interconnections; and patterning said second dielectric layer and said second conductive layer to form a storage means in said cell array area, a first contact plug, a second contact plug, and a third contact plug in said periphery area, said first contact plug being electrically coupled to said bitline, said second contact plug being electrically coupled to said word line, and said third contact plug being electrically coupled to said substrate of said periphery area.
Claim 14
Dependent Claim
242 words
The method of claim 11, wherein said method further comprises: forming a third dielectric layer on said second conductive layer, said storage means, said first contact plug, said second contact plug, and said third contact plug; patterning and etching said third dielectric layer to form a plurality of second contact exposing said second conductive layer, said first contact plug, said second contact plug and said third contact plug; forming a third conductive layer in said plurality of second contacts and on said third dielectric layer; patterning and etching said third conductive layer to form a first via plug, a second via plug, a third via plug and a fourth via plug, said first via plug being electrically coupled to said second conductive layer, said second via plug being electrically coupled to said bitline, said third via plug being electrically coupled to said word line, said fourth via plug being electrically coupled to said substrate; forming a fourth dielectric layer on said third conductive layer, said third dielectric layer, said first via plug, said second via plug, said third via plug, and said fourth via plug; etching said fourth dielectric layer to form a third contact hole exposing said second via plug; forming a fourth conductive layer on said fourth dielectric layer and in said third contact hole; and patterning said fourth conductive layer to form a conducting line of said semiconductor device, said conducting line being electrically coupled to said bit line.
Claim 15
Dependent Claim
24 words
The method of claim 11, wherein said first conductive layer is formed of a group consisting of: doped poly silicon, Al, W, and Ta.
Claim 16
Dependent Claim
24 words
The method of claim 11, wherein said second dielectric layer is formed of a group consisting of: Ta 2 O 5 BST, and PZT.
Claim 17
Dependent Claim
24 words
The method of claim 11, wherein said second conductive layer is formed of a group consisting of: doped poly silicon, Al, W, and Ta.
Claim 18
Dependent Claim
37 words
The method of claim 11, wherein said first dielectric layer, said third dielectric layer and said fourth dielectric layer are formed of a group consisting of: an O 3 TEOS based interlayer oxide or BPSG (Borophosphosilicate glass).
Claim 19
Dependent Claim
15 words
The method of claim 11, wherein said third conductive layer is formed of aluminum (Al).
Claim 20
Dependent Claim
15 words
The method of claim 11, wherein said fourth conductive layer is formed of aluminum (Al).
Claim 21
Dependent Claim
13 words
The method of claim 1, wherein said charge storage means is a capacitor.
References Cited (Backward Citations)
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