US6068954A
Expired / Lapsed
US
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Semiconductor wafer alignment methods
Assignee: Micron Technology Inc
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Filing: 1998-09-01
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Granted: 2000-05-30
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Expires: 2018-09-01
Abstract
Abstract In one embodiment, a photomask is provided having a set of alignment pattern openings and circuitry openings formed therethrough. With the photomask, the substrate is first photoexposed through one of the set of alignment pattern openings and the circuitry openings and not the other. After the first exposing, the substrate is second exposed through the other of the openings on the photomask. In another embodiment, a latent image of an alignment pattern is formed and received by a masking layer over a substrate. The position of the latent image of the alignment pattern is inspected relative to an underlying layer of material over the substrate. Alignment is ascertained through inspection of the latent image relative to the underlying layer of material. In another embodiment, an undeveloped photoresist layer is formed over a substrate. The undeveloped photoresist is exposed to processing conditions effective to form an image of an alignment pattern received over the undeveloped photoresist over a wafer scribe area. The image of the alignment pattern received by the undeveloped photoresist is inspected relative to an underlying substrate structure over the scribe area and alignment information is ascertained therefrom. In a preferred embodiment, if an alignment error is detected, the error can be corrected in real time, and the substrate further processed without reapplication of a masking layer or photoresist layer.
Inventors
- 👤 Doug David
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:03
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633; G03F7/70653; G03F7/70675; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 61
Claim 1
Independent Claim
77 words
A semiconductor processing method comprising: providing a photomask having a set of alignment pattern openings and having circuitry openings formed therethrough over a substrate, the set of alignment pattern openings and circuitry openings being adjacent one another; with the photomask, first photoexposing the substrate through one of the set of alignment pattern openings and the circuitry openings and not the other; and after the first exposing, second photoexposing the substrate through said other openings on the photomask.
Claim 2
Dependent Claim
77 words
A semiconductor processing method comprising: providing a photomask having a set of alignment pattern openings and having circuitry openings formed therethrough over a substrate, the set of alignment pattern openings and circuitry openings being adjacent one another; with the photomask, first photoexposing the substrate through one of the set of alignment pattern openings and the circuitry openings and not the other; and after the first exposing, second photoexposing the substrate through said other openings on the photomask.
Claim 3
Dependent Claim
18 words
The semiconductor processing method of claim 1, wherein said one set of openings is said alignment pattern openings.
Claim 4
Dependent Claim
23 words
The semiconductor processing method of claim 1 further comprising not moving the mask relative to the substrate between the first and second photoexposings.
Claim 5
Dependent Claim
42 words
The semiconductor processing method of claim 1, wherein said one set of openings is said alignment pattern openings, and further comprising analyzing the position of an alignment pattern formed on the substrate by the first photoexposing intermediate the first and second photoexposings.
Claim 6
Dependent Claim
64 words
A semiconductor processing method comprising: providing a photomask having a set of alignment pattern openings and having a circuitry opening formed therethrough over a substrate, the set of alignment pattern openings and the circuitry opening being adjacent one another; and with the photomask, initially photoexposing the substrate through one of the set of alignment pattern openings and the circuitry opening and not the other.
Claim 7
Dependent Claim
64 words
A semiconductor processing method comprising: providing a photomask having a set of alignment pattern openings and having a circuitry opening formed therethrough over a substrate, the set of alignment pattern openings and the circuitry opening being adjacent one another; and with the photomask, initially photoexposing the substrate through one of the set of alignment pattern openings and the circuitry opening and not the other.
Claim 8
Dependent Claim
61 words
A semiconductor wafer alignment method comprising: forming a latent image of an alignment pattern received by a masking layer over a substrate; and inspecting the position of the latent image of the alignment pattern relative to an underlying layer of material over the substrate, and ascertaining therefrom whether the latent image of the alignment pattern is aligned within desired alignment tolerances.
Claim 9
Dependent Claim
61 words
A semiconductor wafer alignment method comprising: forming a latent image of an alignment pattern received by a masking layer over a substrate; and inspecting the position of the latent image of the alignment pattern relative to an underlying layer of material over the substrate, and ascertaining therefrom whether the latent image of the alignment pattern is aligned within desired alignment tolerances.
Claim 10
Dependent Claim
77 words
The semiconductor alignment method of claim 6, wherein the forming of the latent image comprises providing a mask having an alignment pattern and integrated circuitry patterns thereon and exposing the substrate to lithographic processing conditions effective to form the latent image, and further comprising if the latent image is within said desired alignment tolerances, using said mask and further exposing the substrate to lithographic processing conditions effective to transfer the integrated circuitry patterns onto the masking layer.
Claim 11
Dependent Claim
89 words
The semiconductor alignment method of claim 6, wherein the forming of the latent image comprises providing a mask having an alignment pattern and integrated circuitry patterns thereon and exposing the substrate to lithographic processing conditions effective to form the latent image, and further comprising if the latent image is not within said desired alignment tolerances, correcting the relative alignment between the mask and the substrate; and using said mask and further exposing the substrate to lithographic processing conditions effective to transfer the integrated circuitry patterns onto the masking layer.
Claim 12
Dependent Claim
29 words
The semiconductor alignment method of claim 8, wherein the exposing to form the latent image does not expose any openings on the mask associated with the integrated circuitry patterns.
Claim 13
Dependent Claim
45 words
The semiconductor alignment method of claim 6 further comprising prior to the forming of the latent image, forming an underlying alignment pattern received by the underlying layer, and wherein the inspecting comprises inspecting the position of the latent image relative to the underlying alignment pattern.
Claim 14
Dependent Claim
60 words
The semiconductor alignment method of claim 6 further comprising prior to the forming of the latent image, forming an underlying alignment pattern received by the underlying layer, and wherein the inspecting comprises inspecting the position of the latent image relative to the underlying alignment pattern, wherein the latent image alignment pattern and the underlying alignment pattern comprise box-in-box alignment patterns.
Claim 15
Dependent Claim
45 words
The semiconductor alignment method of claim 6, wherein the forming of the latent image comprises forming at least two latent images of alignment patterns, and wherein the inspecting comprises ascertaining whether the latent images of the alignment patterns are aligned in X and Y directions.
Claim 16
Dependent Claim
23 words
The semiconductor alignment method of claim 6 further comprising forming the latent image and inspecting the position thereof on one wafer per lot.
Claim 17
Dependent Claim
23 words
The semiconductor alignment method of claim 6 further comprising forming the latent image and inspecting the position thereof on multiple wafers per lot.
Claim 18
Dependent Claim
24 words
The semiconductor alignment method of claim 6 further comprising forming the latent image and inspecting the position thereof on every wafer in a lot.
Claim 19
Dependent Claim
25 words
The semiconductor alignment method of claim 6 further comprising forming the latent image and inspecting the position thereof on every masking field on a wafer.
Claim 20
Dependent Claim
42 words
A semiconductor wafer alignment method comprising using a latent image of an alignment pattern received by an undeveloped masking material layer to ascertain whether the latent image of the alignment pattern is aligned relative to a substrate over which it is received.
Claim 21
Dependent Claim
42 words
A semiconductor wafer alignment method comprising using a latent image of an alignment pattern received by an undeveloped masking material layer to ascertain whether the latent image of the alignment pattern is aligned relative to a substrate over which it is received.
Claim 22
Dependent Claim
25 words
The semiconductor wafer alignment method of claim 17, wherein said using comprises inspecting the position of the latent image relative to an underlying substrate layer.
Claim 23
Dependent Claim
25 words
The semiconductor wafer alignment method of claim 17, wherein said using comprises inspecting the position of the latent image relative to an underlying alignment pattern.
Claim 24
Dependent Claim
21 words
The semiconductor wafer alignment method of claim 17 further comprising calculating an alignment correction if the latent image is not aligned.
Claim 25
Dependent Claim
20 words
A computer-readable medium on which are stored instructions which, when executed by a computer, implement the method of claim 17.
Claim 26
Dependent Claim
48 words
A semiconductor wafer alignment method comprising: inspecting a latent image of an alignment pattern which is received by a masking material layer over an underlying alignment pattern; and ascertaining from said inspecting whether the latent image of the alignment pattern is aligned relative to the underlying alignment pattern.
Claim 27
Dependent Claim
48 words
A semiconductor wafer alignment method comprising: inspecting a latent image of an alignment pattern which is received by a masking material layer over an underlying alignment pattern; and ascertaining from said inspecting whether the latent image of the alignment pattern is aligned relative to the underlying alignment pattern.
Claim 28
Dependent Claim
21 words
The semiconductor wafer alignment method of claim 22 further comprising if the latent image is not aligned, calculating an alignment correction.
Claim 29
Dependent Claim
20 words
A computer-readable medium on which are stored instructions which, when executed by a computer implement the method of claim 23.
Claim 30
Dependent Claim
29 words
The semiconductor wafer alignment method of claim 22, wherein the alignment pattern and the underlying alignment pattern comprise box-in-box alignment patterns, and the inspecting comprises checking for box-in-box alignment.
Claim 31
Dependent Claim
44 words
The semiconductor wafer alignment method of claim 22, wherein the inspecting comprises inspecting at least two latent images of alignment patterns relative to respective underlying alignment patterns, and wherein the ascertaining comprises ascertaining whether the alignment patterns are aligned in X and Y directions.
Claim 32
Dependent Claim
20 words
A computer-readable medium on which are stored instructions which, when executed by a computer implement the method of claim 26.
Claim 33
Dependent Claim
57 words
The semiconductor wafer alignment method of claim 22, wherein the alignment pattern and the underlying alignment pattern comprises box-in-box alignment patterns, and the inspecting comprises inspecting at least two latent images of alignment patterns relative to respective underlying alignment patterns, and wherein the ascertaining comprises ascertaining whether the alignment patterns are aligned in X and Y directions.
Claim 34
Dependent Claim
81 words
A semiconductor wafer alignment method comprising: forming a layer of undeveloped photoresist over a substrate; exposing the undeveloped photoresist to processing conditions effective to form an image of an alignment pattern received by the undeveloped photoresist over a wafer scribe area; and inspecting the image of the alignment pattern received by the undeveloped photoresist relative to an underlying substrate structure over the scribe area, and ascertaining therefrom whether the image of the alignment pattern is aligned with the underlying substrate structure.
Claim 35
Dependent Claim
81 words
A semiconductor wafer alignment method comprising: forming a layer of undeveloped photoresist over a substrate; exposing the undeveloped photoresist to processing conditions effective to form an image of an alignment pattern received by the undeveloped photoresist over a wafer scribe area; and inspecting the image of the alignment pattern received by the undeveloped photoresist relative to an underlying substrate structure over the scribe area, and ascertaining therefrom whether the image of the alignment pattern is aligned with the underlying substrate structure.
Claim 36
Dependent Claim
27 words
The semiconductor wafer alignment method of claim 29 further comprising correcting the relative alignment between the substrate and a mask on which the alignment pattern is disposed.
Claim 37
Dependent Claim
21 words
The semiconductor wafer alignment method of claim 30, wherein said correcting comprises moving the substrate to correct for a relative misalignment.
Claim 38
Dependent Claim
58 words
The semiconductor wafer alignment method of claim 29, wherein the alignment pattern is defined within a mask and further comprising if the alignment pattern is aligned within desired tolerances, using the same mask in exposing remaining undeveloped photoresist portions on the substrate to processing conditions effective to form integrated circuitry patterns received by the photoresist over the wafer.
Claim 39
Dependent Claim
65 words
The semiconductor wafer alignment method of claim 29 further comprising if the alignment pattern is not aligned within the desired tolerances, calculating an alignment correction, implementing the alignment correction relative to the substrate and a mask which carries the alignment pattern, and re-exposing the photoresist to processing conditions through the mask effective to form images defined by the mask which are received over the wafer.
Claim 40
Dependent Claim
36 words
The semiconductor wafer alignment method of claim 29, wherein the exposing of the photoresist comprises forming a plurality of images of alignment patterns, and wherein the inspecting comprises inspecting for alignment in X and Y directions.
Claim 41
Dependent Claim
68 words
The semiconductor wafer alignment method of claim 29, wherein the exposing of the photoresist comprises forming a plurality of images of alignment patterns, and wherein the inspecting comprises inspecting for alignment in X and Y directions, and further comprising correcting the relative alignment between the substrate and a mask on which the alignment pattern is disposed responsive to a misalignment in either of the X or Y directions.
Claim 42
Dependent Claim
94 words
The semiconductor wafer alignment method of claim 29, wherein the exposing of the photoresist comprises exposing only a portion of the photoresist to form a plurality of images of alignment patterns from a mask having a plurality of alignment patterns thereon, and wherein the inspecting comprises inspecting for alignment in X and Y directions, and further comprising if the alignment patterns are aligned in the X and Y directions, using the same mask and exposing remaining photoresist portions to processing conditions effective to form integrated circuitry patterns received by the photoresist over the wafer.
Claim 43
Dependent Claim
120 words
A semiconductor wafer alignment method comprising: forming a layer of masking material over a substrate; exposing the layer of masking material to processing conditions through a partially obscured mask effective to form a latent image of an alignment pattern received by the masking material; inspecting the position of the latent image of the alignment pattern relative to another substrate feature and ascertaining therefrom whether the latent image of the alignment pattern is aligned within desired alignment tolerances; if the latent image of the alignment pattern is aligned within desired alignment tolerances, then exposing the masking material to processing conditions through a less obscured mask effective to transfer an integrated circuitry pattern onto the masking material; and developing the masking material.
Claim 44
Dependent Claim
120 words
A semiconductor wafer alignment method comprising: forming a layer of masking material over a substrate; exposing the layer of masking material to processing conditions through a partially obscured mask effective to form a latent image of an alignment pattern received by the masking material; inspecting the position of the latent image of the alignment pattern relative to another substrate feature and ascertaining therefrom whether the latent image of the alignment pattern is aligned within desired alignment tolerances; if the latent image of the alignment pattern is aligned within desired alignment tolerances, then exposing the masking material to processing conditions through a less obscured mask effective to transfer an integrated circuitry pattern onto the masking material; and developing the masking material.
Claim 45
Dependent Claim
26 words
The semiconductor wafer alignment method of claim 37, wherein the forming of the layer of masking material comprises forming a layer of photoresist over the substrate.
Claim 46
Dependent Claim
40 words
The semiconductor wafer alignment method of claim 37, wherein the exposing of the layer of masking material comprises forming one or more latent images of only alignment patterns over the substrate and not any integrated circuitry patterns over the substrate.
Claim 47
Dependent Claim
56 words
The semiconductor wafer alignment method of claim 37, wherein the exposing of the layer of masking material comprises forming at least two latent images of alignment patterns, and wherein the inspecting comprises inspecting the positions of the at least two latent images and ascertaining therefrom whether the latent images are aligned in X and Y directions.
Claim 48
Dependent Claim
22 words
The semiconductor wafer alignment method of claim 37, wherein said partially obscured mask and said less obscured mask comprise the same mask.
Claim 49
Dependent Claim
84 words
A semiconductor wafer alignment method comprising: blocking portions of a mask having both integrated circuitry patterns and alignment patterns disposed thereon; exposing a substrate to processing conditions effective to form a latent image of unblocked portions of the mask over the substrate; inspecting the latent image and ascertaining therefrom whether the latent image is aligned over the substrate within desired alignment tolerances; unblocking the blocked mask portions; and re-exposing the substrate to processing conditions effective to transfer the integrated circuitry patterns onto the substrate.
Claim 50
Dependent Claim
84 words
A semiconductor wafer alignment method comprising: blocking portions of a mask having both integrated circuitry patterns and alignment patterns disposed thereon; exposing a substrate to processing conditions effective to form a latent image of unblocked portions of the mask over the substrate; inspecting the latent image and ascertaining therefrom whether the latent image is aligned over the substrate within desired alignment tolerances; unblocking the blocked mask portions; and re-exposing the substrate to processing conditions effective to transfer the integrated circuitry patterns onto the substrate.
Claim 51
Dependent Claim
25 words
The semiconductor wafer alignment method of claim 42, wherein the blocking of the mask portions comprises blocking at least portions of the integrated circuitry patterns.
Claim 52
Dependent Claim
23 words
The semiconductor wafer alignment method of claim 42, wherein the blocking of the mask portions comprises blocking all of the integrated circuitry patterns.
Claim 53
Dependent Claim
28 words
The semiconductor wafer alignment method of claim 42, wherein the exposing of the substrate comprises forming a latent image of at least one alignment pattern over the substrate.
Claim 54
Dependent Claim
28 words
The semiconductor wafer alignment method of claim 42, wherein the exposing of the substrate comprises forming a latent image of at least two alignment patterns over the substrate.
Claim 55
Dependent Claim
41 words
The semiconductor wafer alignment method of claim 42, wherein the exposing of the substrate comprises forming a latent image of at least two alignment patterns over the substrate, and wherein the inspecting comprises inspecting for alignment in X and Y directions.
Claim 56
Dependent Claim
28 words
The semiconductor wafer alignment method of claim 42 further comprising after the inspecting, if the latent image is not aligned within desired alignment tolerances, calculating an alignment correction.
Claim 57
Dependent Claim
46 words
The semiconductor wafer alignment method of claim 42 further comprising after the inspecting, if the latent image is not aligned within desired alignment tolerances, calculating an alignment correction and correcting the relative positioning between the mask and the substrate prior to the re-exposing of the substrate.
Claim 58
Dependent Claim
23 words
The semiconductor wafer alignment method of claim 49, wherein said correcting of the relative positioning comprises moving the substrate relative to the mask.
Claim 59
Dependent Claim
85 words
A semiconductor wafer alignment method comprising: providing a wafer having a die area within which active devices are to be disposed and a dedicated alignment area displaced from the die area and containing alignment reference marks; forming photoresist over the wafer; initially modifying development properties of the photoresist over the alignment reference marks and not any of the photoresist over the die area; and inspecting the photoresist over the alignment marks to ascertain whether the development-modified photoresist is aligned relative to the alignment reference marks.
Claim 60
Dependent Claim
85 words
A semiconductor wafer alignment method comprising: providing a wafer having a die area within which active devices are to be disposed and a dedicated alignment area displaced from the die area and containing alignment reference marks; forming photoresist over the wafer; initially modifying development properties of the photoresist over the alignment reference marks and not any of the photoresist over the die area; and inspecting the photoresist over the alignment marks to ascertain whether the development-modified photoresist is aligned relative to the alignment reference marks.
Claim 61
Dependent Claim
21 words
The semiconductor wafer alignment method of claim 51 further comprising if the development-modified photoresist is not aligned, calculating an alignment correction.
References Cited (Backward Citations)
US5656182A
Cited
US5879842A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-05-30 | 2003-11-29 | 2004-05-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-05-30 | 2007-11-29 | 2008-05-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-05-30 | 2011-11-29 | 2012-05-30 | $7700.00 | Window Closed / Lapsed |