US6053791A
Expired / Lapsed
US
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Method of fabricating electron source and image forming apparatus
Assignee: Canon Inc
•
Filing: 1999-04-28
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Granted: 2000-04-25
•
Expires: 2019-04-28
Abstract
Abstract A method of fabricating an electron source constituted by a plurality of x-direction wirings arranged on a substrate, a plurality of y-direction wirings crossing the x-direction wirings, an insulating layer for electrically insulating the x- and y-direction wirings, and a plurality of conductive films each of which is electrically connected to the x- and y-direction wirings and has a gap, comprises a conductive film formation step of forming a plurality of conductive films to be connected to the pluralities of x- and y-direction wirings, a grouping step of dividing all the x-direction wirings into a plurality of groups, and a forming step of sequentially performing, for all the groups, a step of simultaneously applying a voltage to all wirings assigned to the same group, thereby forming gaps in the plurality of conductive films. The grouping step includes the steps of assigning a plurality of wirings to each group, and arranging wirings constituting a group between wirings constituting other groups.
Inventors
- 👤 Akira Fujii
- 👤 Fumio Kishi
- 👤 Hisaaki Kawade
- 👤 Yoichi Ando
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:06
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J9/00; H01J9/02; H01J9/022; H01J9/027; H01J2329/00
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
158 words
A method of fabricating an electron source constituted by a plurality of x-direction wirings arranged on a substrate, a plurality of y-direction wirings crossing the x-direction wirings, an insulating layer for electrically insulating the x- and y-direction wirings, and a plurality of conductive films each of which is electrically connected to the x- and y-direction wirings and has a gap, comprising: a conductive film formation step of forming a plurality of conductive films to be connected to the pluralities of x- and y-direction wirings; a grouping step of assigning said x-direction wirings into a plurality of groups; and an energization forming step of sequentially performing, for all the groups, a step of simultaneously applying a voltage to all wirings assigned to the same group, thereby forming gaps in said conductive films, wherein in the grouping step: a plurality of wirings are assigned to each group, so that between wirings constituting a group, wirings constituting other groups are exist.
Claim 2
Independent Claim
158 words
A method of fabricating an electron source constituted by a plurality of x-direction wirings arranged on a substrate, a plurality of y-direction wirings crossing the x-direction wirings, an insulating layer for electrically insulating the x- and y-direction wirings, and a plurality of conductive films each of which is electrically connected to the x- and y-direction wirings and has a gap, comprising: a conductive film formation step of forming a plurality of conductive films to be connected to the pluralities of x- and y-direction wirings; a grouping step of assigning said x-direction wirings into a plurality of groups; and an energization forming step of sequentially performing, for all the groups, a step of simultaneously applying a voltage to all wirings assigned to the same group, thereby forming gaps in said conductive films, wherein in the grouping step: a plurality of wirings are assigned to each group, so that between wirings constituting a group, wirings constituting other groups are exist.
Claim 3
Dependent Claim
19 words
A method according to claim 1, wherein the voltage is applied not to overlap successive application periods between groups.
Claim 4
Dependent Claim
25 words
A method according to claim 2, wherein the voltage is applied to one group a plurality of the number of times at a predetermined interval.
Claim 5
Dependent Claim
25 words
A method according to claim 3, wherein the voltage is applied to remaining groups during the interval of application of the voltage to one group.
Claim 6
Dependent Claim
16 words
A method according to claim 3, wherein the application voltage includes at least two voltage values.
Claim 7
Dependent Claim
12 words
A method according to claim 5, wherein the voltage value gradually increases.
Claim 8
Dependent Claim
14 words
A method according to claim 3, wherein the application voltage has a constant value.
Claim 9
Dependent Claim
35 words
A method according to claim 1, wherein the conductive film is formed from an oxide, and the forming step is performed while bringing a gas for reducing the oxide into contact with the conductive film.
Claim 10
Dependent Claim
12 words
A method according to claim 8, wherein the reducing gas contains hydrogen.
Claim 11
Dependent Claim
43 words
A method according to claim 1, further comprising the activation step of applying the voltage to each conductive film while bringing a gas containing an organic substance close to the gap, thereby forming a carbon film on the conductive film near the gap.
Claim 12
Dependent Claim
23 words
A method according to claim 10, wherein the voltage applied to the conductive film in the activation step includes voltages of two polarities.
Claim 13
Dependent Claim
19 words
A method according to claim 1, wherein the voltage is applied not to overlap successive application periods between groups.
Claim 14
Dependent Claim
25 words
A method according to claim 12, wherein the voltage is applied to one group a plurality of the number of times at a predetermined interval.
Claim 15
Dependent Claim
25 words
A method according to claim 13, wherein the voltage is applied to remaining groups during the interval of application of the voltage to one group.
Claim 16
Independent Claim
177 words
A method of fabricating an image forming apparatus constituted by an electron source constituted by a plurality of x-direction wirings arranged on a substrate, a plurality of y-direction wirings crossing the x-direction wirings, an insulating layer for electrically insulating the x- and y-direction wirings, and a plurality of conductive films each of which is electrically connected to the x- and y-direction wirings and has a gap, and a substrate having an image forming member arranged to face the electron source, comprising: a conductive film formation step of forming a plurality of conductive films to be connected to the pluralities of x- and y-direction wirings; a grouping step of assigning said x-direction wirings into a plurality of groups; and an energization forming step of sequentially performing, for all the groups, the step of simultaneously applying a voltage to all wirings assigned to the same group, thereby forming gaps in said conductive films, in the grouping step: a plurality of wirings are assigned to each group, so that between wirings constituting a group, wirings constituting other groups are exist.
Claim 17
Independent Claim
177 words
A method of fabricating an image forming apparatus constituted by an electron source constituted by a plurality of x-direction wirings arranged on a substrate, a plurality of y-direction wirings crossing the x-direction wirings, an insulating layer for electrically insulating the x- and y-direction wirings, and a plurality of conductive films each of which is electrically connected to the x- and y-direction wirings and has a gap, and a substrate having an image forming member arranged to face the electron source, comprising: a conductive film formation step of forming a plurality of conductive films to be connected to the pluralities of x- and y-direction wirings; a grouping step of assigning said x-direction wirings into a plurality of groups; and an energization forming step of sequentially performing, for all the groups, the step of simultaneously applying a voltage to all wirings assigned to the same group, thereby forming gaps in said conductive films, in the grouping step: a plurality of wirings are assigned to each group, so that between wirings constituting a group, wirings constituting other groups are exist.
Claim 18
Dependent Claim
19 words
A method according to claim 15, wherein the voltage is applied not to overlap successive application periods between groups.
Claim 19
Dependent Claim
25 words
A method according to claim 15, wherein the voltage is applied to one group a plurality of the number of times at a predetermined interval.
Claim 20
Dependent Claim
25 words
A method according to claim 17, wherein the voltage is applied to remaining groups during the interval of application of the voltage to one group.
Claim 21
Dependent Claim
16 words
A method according to claim 17, wherein the application voltage includes at least two voltage values.
Claim 22
Dependent Claim
12 words
A method according to claim 19, wherein the voltage value gradually increases.
Claim 23
Dependent Claim
14 words
A method according to claim 17, wherein the application voltage has a constant value.
Claim 24
Dependent Claim
35 words
A method according to claim 15, wherein the conductive film is formed from an oxide, and the forming step is performed while bringing a gas for reducing the oxide into contact with the conductive film.
Claim 25
Dependent Claim
12 words
A method according to claim 22, wherein the reducing gas contains hydrogen.
Claim 26
Dependent Claim
43 words
A method according to claim 15, further comprising the activation step of applying the voltage to each conductive film while bringing a gas containing an organic substance close to the gap, thereby forming a carbon film on the conductive film near the gap.
Claim 27
Dependent Claim
23 words
A method according to claim 24, wherein the voltage applied to the conductive film in the activation step includes voltages of two polarities.
Claim 28
Dependent Claim
19 words
A method according to claim 15, wherein the voltage is applied not to overlap successive application periods between groups.
Claim 29
Dependent Claim
25 words
A method according to claim 26, wherein the voltage is applied to one group a plurality of the number of times at a predetermined interval.
Claim 30
Dependent Claim
25 words
A method according to claim 27, wherein the voltage is applied to remaining groups during the interval of application of the voltage to one group.
References Cited (Backward Citations)
JPH0612997A
Cited
JPH07176265A
Cited
EP0660357A1
Cited
JPH07235255A
Cited
JPH07320631A
Cited
JPH09134666A
Cited
JPH09298029A
Cited
JPH0973859A
Cited
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-04-25 | 2003-10-25 | 2004-04-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-04-25 | 2007-10-25 | 2008-04-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-04-25 | 2011-10-25 | 2012-04-25 | $7700.00 | Window Closed / Lapsed |