Barium strontium β-diketonates, processes for producing the same and processes for producing barium strontium-containing oxide dielectric films with the use of the same
Abstract
Abstract Novel one-source compounds for producing (Ba,Sr)TiO 3 films having high dielectric constants and ferroelectric (Sr,Ba)Nb 2 O 6 films by the CVD method, which are in the form of a liquid at the source temperature and contain Ba and Sr at a specified ratio; processes for producing these novel compounds; and processes for producing films by using the same. Because of having a melting point of 160° C., being in the form of a liquid and having enough vapor pressure at 200° C., the novel compounds barium strontium β-diketonate [Ba 2 Sr(dpm) 6 and BaSr 2 (dpm) 6 ] can be quantitatively supplied by gas bubbling as a feedstock in the CVD method while maintaining the Ba/Sr ratio at a constant ratio. Thus, barium strontium-containing oxide dielectric films can be produced at a high reproducibility by thermal decomposition on a substrate in an oxidative atmosphere. These compounds can be produced by reacting dpmh with Ba and Sr, Ba(dpm) 2 with Sr(dpm) 2 , or dpmH with Ba and Sr(dpm) 2 and then subjecting either of the reaction products thus obtained to high-vacuum distillation.
Inventors
- 👤 Hidekimi Kadokura
- 👤 Yumie Okuhara
Bibliographic Details
Claims Analysis
Total Claims: 10References Cited (Backward Citations)
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