US6035805A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for vacuum deposition of highly ionized media in an electromagnetic controlled environment
Assignee: Depositech Inc
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Filing: 1998-11-23
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Granted: 2000-03-14
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Expires: 2018-11-23
Abstract
Abstract A method and apparatus for vacuum depositing a coating onto a substrate are provided. The method includes the steps of: introducing an evaporant into a magnetically defined deposition region of a vacuum process chamber, ionizing the evaporant to form a plasma; generating a "magnetic bottle" magnetic field configuration to define the deposition region and to confine the plasma to the deposition region, further increasing the percentage ionization of the plasma to form a highly ionized media; creating a static dc electric field that is generally perpendicular to the magnetic field in the deposition region and parallel to the plane of the substrate; and then moving the substrate through the highly ionized media with the plane of the substrate and its direction of motion generally parallel to the magnetic field lines. The method of the invention is particularly suited to deposition of any atomistic evaporant onto intermediate-sized substrates.
Inventors
- 👤 Ray Dean Rust
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:07
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32422; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/56; H01J37/32431; H01J37/3266; H01J37/32697; H01J37/32706; H01J37/32733; H01J37/32752; H01J37/32761
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
60 words
A method for depositing a substance on a workpiece comprising: ionizing a substance using a power source to form a plasma; generating a magnetic field to contain the plasma; and, moving the workpiece into the ionized substance along a direction of motion generally parallel to the primary axis of the magnetic field to thereby deposit the substance on the workpiece.
Claim 2
Independent Claim
60 words
A method for depositing a substance on a workpiece comprising: ionizing a substance using a power source to form a plasma; generating a magnetic field to contain the plasma; and, moving the workpiece into the ionized substance along a direction of motion generally parallel to the primary axis of the magnetic field to thereby deposit the substance on the workpiece.
Claim 3
Dependent Claim
31 words
The method as recited in claim 1 further comprising subjecting the plasma to a DC electric field having field vectors oriented generally perpendicular to the primary axis of the magnetic field.
Claim 4
Dependent Claim
13 words
The method as recited in claim 1 wherein the substance is a metal.
Claim 5
Dependent Claim
16 words
The method as recited in claim 1 wherein the workpiece comprises a generally rectangular circuit board.
Claim 6
Dependent Claim
30 words
The method as recited in claim 1 wherein moving the workpiece comprises attaching the workpiece to an electrically biasable carrier and moving the carrier and the workpiece through the plasma.
Claim 7
Dependent Claim
18 words
The method as recited in claim 1 wherein ionizing is performed using electrodes carrying a radio frequency signal.
Claim 8
Dependent Claim
23 words
The method as recited in claim 6 wherein the electrodes are generally parallel to one another and to a face of the workpiece.
Claim 9
Independent Claim
84 words
A method of containing charged particles formed from a material comprising: generating a magnetic field; said magnetic field configured to form field lines defining a general interior area, said magnetic field further configured to contain charged particles within said interior area; generating an electric field having electric field lines generally perpendicular to said field lines of said magnetic field; providing a material within said interior area of said magnetic field; and, heating or bombarding with an electron beam said material to form charged particles.
Claim 10
Independent Claim
84 words
A method of containing charged particles formed from a material comprising: generating a magnetic field; said magnetic field configured to form field lines defining a general interior area, said magnetic field further configured to contain charged particles within said interior area; generating an electric field having electric field lines generally perpendicular to said field lines of said magnetic field; providing a material within said interior area of said magnetic field; and, heating or bombarding with an electron beam said material to form charged particles.
Claim 11
Dependent Claim
16 words
The method of claim 8 wherein said energizing comprises exposing said material to radio frequency energy.
Claim 12
Dependent Claim
21 words
The method of claim 8 wherein providing a material comprises heating said material to form an evaporant in said interior area.
Claim 13
Independent Claim
70 words
A method for depositing a coating on a surface, comprising: ionizing an evaporant to form a volume of ionized evaporant; generating a magnetic field to effectuate containment of the ionized evaporant relative to the surface wherein said magnetic field has magnetic field lines; and, exposing the surface to the ionized evaporant to thereby deposit the coating on the surface wherein said surface is generally parallel to said magnetic field lines.
Claim 14
Independent Claim
70 words
A method for depositing a coating on a surface, comprising: ionizing an evaporant to form a volume of ionized evaporant; generating a magnetic field to effectuate containment of the ionized evaporant relative to the surface wherein said magnetic field has magnetic field lines; and, exposing the surface to the ionized evaporant to thereby deposit the coating on the surface wherein said surface is generally parallel to said magnetic field lines.
Claim 15
Dependent Claim
23 words
The method of claim 11 wherein ionizing an evaporant comprises exposing the evaporant to collisions with charged particles excited by radio frequency energy.
Claim 16
Dependent Claim
21 words
The method of claim 11 wherein ionizing an evaporant comprises exposing the evaporant to collisions with electrons and previously ionized evaporant.
Claim 17
Dependent Claim
17 words
The method of claim 11 wherein the volume of ionized evaporant is contained within a vacuum chamber.
Claim 18
Dependent Claim
23 words
The method of claim 11 further comprising generating an electric field to further effectuate containment of the ionized evaporant relative to the surface.
Claim 19
Dependent Claim
20 words
The method of claim 15 wherein the electric field has electric field lines generally perpendicular to the magnetic field lines.
Claim 20
Dependent Claim
18 words
The method of claim 16 wherein the electric field has electric field lines generally perpendicular to the surface.
Claim 21
Dependent Claim
18 words
The method of claim 15 wherein the electric field has electric field lines generally parallel to the surface.
Claim 22
Dependent Claim
21 words
The method of claim 11 wherein generating a magnetic field comprises passing electric current through conductors to form a magnetic field.
Claim 23
Dependent Claim
73 words
A deposition apparatus for depositing a substance on a workpiece comprising; a process chamber; a magnetic field generation system configured to form a magnetic field having magnetic field lines within the process chamber; a substance delivery system configured to provide a substance for ionization; an ionizing system configured to ionize the substance; and, a carrier for moving the workpiece within the process chamber in a direction generally parallel with the magnetic field lines.
Claim 24
Dependent Claim
73 words
A deposition apparatus for depositing a substance on a workpiece comprising; a process chamber; a magnetic field generation system configured to form a magnetic field having magnetic field lines within the process chamber; a substance delivery system configured to provide a substance for ionization; an ionizing system configured to ionize the substance; and, a carrier for moving the workpiece within the process chamber in a direction generally parallel with the magnetic field lines.
Claim 25
Dependent Claim
18 words
The apparatus of claim 20, wherein the carrier disposes the workpiece generally parallel to the magnetic field lines.
Claim 26
Dependent Claim
40 words
The apparatus of claim 20 wherein the magnetic field generation system comprises coils configured to carry an electric current, the ionizing system comprises electrodes configured to carry electric current and the substance delivery system comprises one or more heating devices.
Claim 27
Dependent Claim
18 words
The apparatus of claim 20 further including one or more electric field generating systems within the process chamber.
Claim 28
Dependent Claim
37 words
The apparatus of claim 23 wherein said electric field generating systems comprises electrodes configured to carry electric current and generate electric field lines generally perpendicular to the magnetic field lines generated by the magnetic field generation system.
Claim 29
Dependent Claim
32 words
The apparatus of claim 23 wherein said one or more electric field generating systems comprise one or more electric field generating systems configured to establish an electrical bias to the workpiece carrier.
Claim 30
Dependent Claim
14 words
The apparatus of claim 24, wherein the workpiece is generally parallel to the electrodes.
Claim 31
Dependent Claim
21 words
The apparatus of claim 20 wherein said ionizing system comprises one or more electrodes that are not connected to said carrier.
Claim 32
Independent Claim
103 words
An apparatus for depositing a substance on a surface comprising: magnetic field coils configured to form a magnetic containment field having magnetic field lines capable of generally containing charged particles: a vapor generation system configured to generate a vapor of the substance to be deposited; at least one energy source configured to ionize the vapor to form charged particles; and, means for moving or holding the surface such that charged particles within the magnetic containment field contact the surface to thereby deposit the substance on the surface, wherein said at least one energy source is separate from said means for moving or holding.
Claim 33
Independent Claim
103 words
An apparatus for depositing a substance on a surface comprising: magnetic field coils configured to form a magnetic containment field having magnetic field lines capable of generally containing charged particles: a vapor generation system configured to generate a vapor of the substance to be deposited; at least one energy source configured to ionize the vapor to form charged particles; and, means for moving or holding the surface such that charged particles within the magnetic containment field contact the surface to thereby deposit the substance on the surface, wherein said at least one energy source is separate from said means for moving or holding.
Claim 34
Dependent Claim
16 words
The apparatus of claim 28 wherein the means for moving or holding comprises a workpiece carrier.
Claim 35
Dependent Claim
22 words
The apparatus of claim 28 further including a conductor configured to generate an electric field, the electric field operating to control deposition.
Claim 36
Independent Claim
85 words
A method for reducing heating of a workpiece during deposition of a substance onto the workpiece wherein the workpiece has two primary surfaces, the method comprising: ionizing a substance using a power source to form a plasma; generating a magnetic field to contain the plasma; moving the workpiece into the ionized substance along a direction of motion generally parallel to the primary axis of the magnetic field to thereby deposit the substance on the workpiece; and, introducing unionized atoms of the substance into the plasma.
Claim 37
Independent Claim
85 words
A method for reducing heating of a workpiece during deposition of a substance onto the workpiece wherein the workpiece has two primary surfaces, the method comprising: ionizing a substance using a power source to form a plasma; generating a magnetic field to contain the plasma; moving the workpiece into the ionized substance along a direction of motion generally parallel to the primary axis of the magnetic field to thereby deposit the substance on the workpiece; and, introducing unionized atoms of the substance into the plasma.
Claim 38
Independent Claim
34 words
The method of claims 31 wherein said introducing comprises introducing unionized atoms of the substance into the plasma, wherein the unionized atoms are introduced with motion parallel to the primary surfaces of the workpiece.
Claim 39
Dependent Claim
43 words
The method of claim 31 wherein said introducing unionized atoms of the substance into the plasma causes the unionized atoms to contact the ionized substance thereby reducing the charge of the ionized substance prior to the ionized substance being deposited on the workpiece.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-14 | 2003-09-13 | 2004-03-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-14 | 2007-09-13 | 2008-03-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-14 | 2011-09-13 | 2012-03-14 | $7700.00 | Window Closed / Lapsed |