Differential interference microscope

Claim 2

A differential interference microscope capable of forming an interference image of an object, comprising along an optical path defined by an optical axis: a) a source of polarized light; b) a first birefringent optical member, adjacent said source of polarized light, having a first ray-separating plane which intersects the optical axis at a first intersection point and which is oriented at a first angle β with respect to a first plane oriented perpendicular to the optical axis, said first birefringement optical member designed so as to separate said light into two light rays having mutually orthogonal polarization components and designed so as to be movable at an second angle γ with respect to said first plane in a manner that maintains said first intersection point at a fixed position on the optical axis; and c) a first lens, adjacent said birefringent optical member, having a focal point substantially coincident with said intersection point so as to make said two light rays substantially parallel with a predetermined amount of shear therebetween and to direct said two light rays to the object such that the object imparts a phase difference between said two light rays.

Claim 3

A differential interference microscope capable of forming an interference image of an object, comprising along an optical path defined by an optical axis: a) a source of polarized light; b) a first birefringent optical member, adjacent said source of polarized light, having a first ray-separating plane which intersects the optical axis at a first intersection point and which is oriented at a first angle β with respect to a first plane oriented perpendicular to the optical axis, said first birefringement optical member designed so as to separate said light into two light rays having mutually orthogonal polarization components; c) a first lens, adjacent said birefringent optical member, having a focal point substantially coincident with said intersection point so as to make said two light rays substantially parallel with a predetermined amount of shear therebetween and to direct said two light rays to the object such that the object imparts a phase difference between said two light rays; d) a second lens, adjacent the object, designed so as to converge said light rays; e) a second birefringent optical member having a second ray-separating plane which intersects the optical axis at a second intersection point, said second birefringement optical member designed so as to synthesize said two light rays into a single light beam; f) an analyzer, adjacent said second birefringent optical member, designed so as to pass a single polarization component of said single light beam to create the interference image; and g) wherein at least one of said first birefringent optical element and said second birefringent optical element is designed so as to be movable at first and second angles, respectively, relative to said first plane, in a manner that maintains said first and second intersection points at respective fixed positions on the optical axis.

Claim 4

A differential interference microscope capable of forming an interference image of an object, comprising along an optical path defined by an optical axis: a) a source of polarized light; b) a first birefringent optical member, adjacent said source of polarized light, having a first ray-separating plane which intersects the optical axis at a first intersection point and which is oriented at a first angle β with respect to a first plane oriented perpendicular to the optical axis, said first birefringement optical member designed so as to separate said light into two light rays having mutually orthogonal polarization components; c) a first lens, adjacent said birefringent optical member, having a focal point substantially coincident with said intersection point so as to make said two light rays substantially parallel with a predetermined amount of shear therebetween and to direct said two light rays to the object such that the object imparts a phase difference between said two light rays; d) a second lens, adjacent the object, designed so as to converge said light rays; e) a second birefringent optical member having a second ray-separating plane which intersects the optical axis at a second intersection point, said second birefringement optical member designed so as to synthesize said two light rays into a single light beam; f) an analyzer, adjacent said second birefringent optical member, designed so as to pass a single polarization component of said single light beam to create the interference image; and g) wherein at least one of said first birefringent optical element and said second birefringent optical element is designed so as to be movable at first and second angles, respectively, relative to said first plane, in a manner that maintains said first and second intersection points at respective fixed positions on the optical axis.

Claim 5

A microscope according to claim 1, wherein the object is light-reflective, further comprising: a) an analyzer adjacent said birefringent optical member and opposite the object, designed so as to pass a single polarization component of said single light beam to create the interference image.

Claim 6

A microscope according to claim 1, wherein said source of polarized light comprises a light source and a polarizer.

Claim 7

A microscope according to claim 1, wherein said first birefringent optical member comprises at least two wedge prisms.

Claim 8

A microscope according to claim 2 wherein at least one of said first and second birefringent optical member comprises at least two wedge prisms.

Claim 9

A microscope according to claim 5, wherein said first birefringent optical member is a Nomarski-type prism.

Claim 10

A microscope according to claim 6, wherein at least one of said first and second birefringent optical members is a Nomarski-type prism.

Claim 11

A microscope according to claim 1, wherein said first angle β equals said second angle γ.

Claim 12

A microscope according to claim 1, wherein said first birefringent optical member has an entrance surface with a normal line oriented at an inclination angle η with respect to the optical axis, and wherein said first angle β equals said inclination angle η.

Claim 13

A microscope according to claim 2, wherein at least one of said first and second birefringent optical members has an entrance surface with a normal line oriented at an inclination angle η with respect to the optical axis, and wherein said first angle β equals said inclination angle η.

Claim 14

A differential interference microscope according to claim 1, wherein said first birefringent optical member has an entrance surface parallel to said ray-separating plane.

Claim 15

A differential interference microscope according to claim 2, wherein said at least one of said first and second birefringent optical members has an entrance surface parallel to said ray-separating plane.

Claim 16

A differential interference microscope capable of forming an interference image of an object, comprising in order along an optical path defined by an optical axis: a) a source of polarized light; b) a plurality of first birefringent optical members each with an entrance surface having a first normal line forming a unique inclination angle with the optical axis, and each with a first ray-separating plane which intersects the optical axis at a first intersection point and which is oriented at a first angle β with respect to a first plane perpendicular to the optical axis, each of said first birefringent optical members designed so as to separate said light into two light rays having mutually orthogonal polarization components; and c) a holder designed to hold each first birefringent optical member of said plurality of first birefringent optical members at said unique inclination angle, said holder designed to be movable at a second angle γ relative to said first plane, and capable of arranging one first birefringent optical member of said plurality of first birefringent optical members in the optical path, said unique inclination angle being such that when said holder is moved at said second angle γ, said intersection point of said one first birefringent optical member remains at a fixed position on the optical axis.

Claim 17

A differential interference microscope capable of forming an interference image of an object, comprising in order along an optical path defined by an optical axis: a) a source of polarized light; b) a plurality of first birefringent optical members each with an entrance surface having a first normal line forming a unique inclination angle with the optical axis, and each with a first ray-separating plane which intersects the optical axis at a first intersection point and which is oriented at a first angle β with respect to a first plane perpendicular to the optical axis, each of said first birefringent optical members designed so as to separate said light into two light rays having mutually orthogonal polarization components; and c) a holder designed to hold each first birefringent optical member of said plurality of first birefringent optical members at said unique inclination angle, said holder designed to be movable at a second angle γ relative to said first plane, and capable of arranging one first birefringent optical member of said plurality of first birefringent optical members in the optical path, said unique inclination angle being such that when said holder is moved at said second angle γ, said intersection point of said one first birefringent optical member remains at a fixed position on the optical axis.

Claim 18

A microscope according to claim 14, wherein the object is light-transmissive, further comprising: a) a first lens, adjacent said one first birefringement optical member, said lens having a focal point substantially coincident with said intersection point so as to make said two light rays substantially parallel with a predetermined amount of shear therebetween and to direct said two light rays to the object such that the object imparts a phase difference between said two light rays; b) a second lens, adjacent the object, arranged so as to converge said light rays; c) a second birefringent optical member designed so as to synthesize said two light rays into a single light beam at a second intersection point on the optical axis; and d) an analyzer, adjacent said second birefringent optical member, designed so as to pass a single polarization component of said single light beam to create the interference image.

Claim 19

A microscope according to claim 15, wherein second birefringent optical member is movable at a second angle relative to the optical axis in a manner that maintains said second intersection point at a fixed position on the optical axis.

Claim 20

A microscope according to claim 14, wherein the object is light-reflective, further comprising: a) a lens, adjacent said one birefringent optical member, said lens having a focal point substantially coincident with said intersection point so as to make said two light rays substantially parallel with a predetermined amount of shear therebetween and to direct said two light rays to the object such that the object imparts a phase difference between said two light rays and passes said two light rays back through said one birefringent optical element form a single light beam from said two light rays; and b) an analyzer, disposed adjacent said plurality of birefringent optical members and opposite the object, designed so as to pass a single polarization component of said single light beam to create the interference image.

Claim 23

A method according to claim 18, wherein in said step b), said movement direction is along a line parallel to said ray-separating plane.

Claim 24

A method according to claim 18, wherein said step b) includes inclining said birefringent optical member at an angle with respect to the optical axis.

Claim 25

A method according to claim 19, wherein said step b) includes inclining said birefringent optical member at an angle with respect to the optical axis.

Claim 26

A method according to claim 18, wherein said step d) is accomplished by passing said two light rays through a second lens and a second birefringent optical element.

Claim 27

A method according to claim 21, wherein said step d) is accomplished by passing said two light rays through a second lens and a second birefringent optical element.