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US6034430A Expired / Lapsed US ⏱️ 0.0 years remaining

Integrated thermal coupling for a heat generating device

Assignee: Samsung Electronics Co Ltd
•
Filing: 1997-11-14
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Granted: 2000-03-07
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Expires: 2017-11-14
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Abstract

Abstract In order to provide a thermal coupling between a heat source and a heat sink, an integrated interleaved-fin connector is provided. A first substrate includes a first side surface and a second side surface. A plurality of heat generating devices are formed in the first side surface. A plurality of first channels are etched in the second side surface to form a plurality of first fins. A second substrate has a plurality of second channels etched therein to form a plurality of second fins and a base. The base is for thermally engaging with a heat sink. The first and second fins providing a thermally conductive path from the heat generating devices to the heat sink when interleaved with each other.

Inventors

  • 👤 William R. Hamburgen
  • 👤 John S. Fitch

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 03:23
CPC Classifications
H; H10; H10W; H10W40/00; H10W40/20; H10W40/25; H10W40/253; B; B81; B81B; B81B7/00; B81B7/0083; B81B7/009; B81B7/0093; H10D; H10D62/00; H10D62/10; H10D62/117; H10W40/22; Y; Y10; Y10T; Y10T436/00; Y10T436/18; Y10T436/186

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 109 words
An apparatus for thermally coupling a heat source to a heat sink, comprising: a first substrate including a first side surface and a second side surface, a plurality of heat generating devices formed in the first side surface, and a plurality of first channels formed in the second side surface to form a plurality of first fins; a second substrate having a plurality of second channels formed therein to form a plurality of second fins and a base for thermally engaging with a heat sink, the first and second fins providing a thermally conductive path from the heat generating device to the heat sink when interleaved with each other.
Claim 2
Independent Claim 109 words
An apparatus for thermally coupling a heat source to a heat sink, comprising: a first substrate including a first side surface and a second side surface, a plurality of heat generating devices formed in the first side surface, and a plurality of first channels formed in the second side surface to form a plurality of first fins; a second substrate having a plurality of second channels formed therein to form a plurality of second fins and a base for thermally engaging with a heat sink, the first and second fins providing a thermally conductive path from the heat generating device to the heat sink when interleaved with each other.
Claim 3
Dependent Claim 17 words
The apparatus of claim 1 wherein the first and second substrates are made of a silicon crystal.
Claim 4
Dependent Claim 22 words
The apparatus of claim 2 wherein the first and second channels are formed along planes perpendicular to the first and second surfaces.
Claim 5
Dependent Claim 16 words
The apparatus of claim 4 wherein the first and second substrates are made of a polycrystal.
Claim 6
Dependent Claim 11 words
The apparatus of claim 4 wherein the dry etching uses plasma.
Claim 7
Dependent Claim 18 words
The apparatus of claim 1 wherein the first and second fins are planar and parallel to each other.
Claim 8
Dependent Claim 61 words
The apparatus of claim 1 wherein the first substrate further comprises: a first part made of a silicon crystal having a lattice orientation to form the plurality of heat generating devices; a second part made of a silicon crystal having a lattice orientation to form the plurality of fins, said first and second part joined to each other by a bond.
Claim 9
Dependent Claim 18 words
The apparatus as of claim 7 wherein the bond is one of a silicon dioxide and diffusion bond.
Claim 10
Dependent Claim 13 words
The apparatus of claim 1 wherein the heat generating devices are electrically powered.
Claim 11
Dependent Claim 25 words
The apparatus of claim 1, wherein at least one of the first and the second channels is one of etched, anisotropically etched and wet etched.
Claim 12
Dependent Claim 19 words
The apparatus of claim 1, wherein at least one of the first and the second channels is dry etched.
Claim 13
Dependent Claim 14 words
The apparatus of claim 11, wherein the dry etching is performed using reactive ions.

References Cited (Backward Citations)

US4800956A Cited
US5083373A Cited
US5838065A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-03-07 2003-09-06 2004-03-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-03-07 2007-09-06 2008-03-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-03-07 2011-09-06 2012-03-07 $7700.00 Window Closed / Lapsed

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