US6028879A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Narrow band laser with etalon based output coupler
Assignee: Cymer LLC
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Filing: 1998-12-02
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Granted: 2000-02-22
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Expires: 2018-12-02
Abstract
Abstract A line narrowed laser having a grating based line narrowing module, etalon-based line narrowing output coupler and a technique for tuning the laser. The etalon based output coupler is adjusted to preferentially reflect light at or near the spectral maximum produced by the grating. Substantial improvement in line narrowing results from the amplification in the laser resonance chamber of light at or near the grating spectral maximum which is preferentially reflected by the etalon based output coupler. Several preferred methods are disclosed for tuning the etalon based output coupler to match the wavelength selected by the grating based line narrowing module.
Inventors
- 👤 Alexander I. Ershov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 10:48
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70008; G03F7/70025; G03F7/7055; G03F7/70575; H; H01; H01S; H01S3/00; H01S3/05; H01S3/08; H01S3/08081; H01S3/10; H01S3/13; H01S3/136; H01S3/137; H01S3/08004; H01S3/08009; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
115 words
A process for tuning a narrow band gas discharge laser defining a gain medium and equipped with tunable grating based line narrowing module and a tunable etalon based output coupler, said process comprising the steps of: A. operating the laser; B. adjusting said tunable grating to reflect back into said gain medium light at a first narrow range of wavelength; C. adjusting said tunable etalon based output coupler to reflect back into said gain medium light at a second narrow range of wavelengths; D. measuring the spectral characteristics of a beam produced by a laser; E. tuning said tunable grating based line narrowing module and said tunable output coupler to produce desired beam spectral characteristics.
Claim 2
Dependent Claim
115 words
A process for tuning a narrow band gas discharge laser defining a gain medium and equipped with tunable grating based line narrowing module and a tunable etalon based output coupler, said process comprising the steps of: A. operating the laser; B. adjusting said tunable grating to reflect back into said gain medium light at a first narrow range of wavelength; C. adjusting said tunable etalon based output coupler to reflect back into said gain medium light at a second narrow range of wavelengths; D. measuring the spectral characteristics of a beam produced by a laser; E. tuning said tunable grating based line narrowing module and said tunable output coupler to produce desired beam spectral characteristics.
Claim 3
Dependent Claim
17 words
A process as in claim 1 wherein said beam is a beam transmitted by said output coupler.
Claim 4
Dependent Claim
17 words
A process as in claim 1 wherein steps of measuring is performed with an etalon based spectrometer.
Claim 5
Dependent Claim
40 words
A process as in claim 3 wherein said desired spectral characteristics is a beam spectrum having a single peak with minimum distortion due to mismatch of said tunable grating based line narrowing module and said tunable etalon based output coupler.
Claim 6
Dependent Claim
20 words
A process as in claim 1 wherein said beam is a beam reflected by said tunable etalon based output coupler.
Claim 7
Dependent Claim
40 words
A process as in claim 5 wherein said desired spectral characteristics is a beam spectrum having a single peak with minimum distortion due to mismatch of said tunable grating based line narrowing module and said tunable etalon based output coupler.
Claim 8
Dependent Claim
93 words
A process as in claim 1 wherein said laser comprises an automatic wavelength control wherein said tuning step comprises the substeps of: A) tuning said tunable grating based line narrowing module to provide maximum reflection at a desired wavelength, B) providing feedback control for said tunable etalon based output coupler to automatically adjust said output coupler to provide maximum reflection at the maximum reflection of said tunable grating based line narrowing module, C) automatically tuning said tunable etalon based output coupler to provide maximum reflection at said desired wavelength utilizing said feedback control.
Claim 9
Dependent Claim
15 words
A process as in claim 7 wherein said desired wavelength is selected by an operator.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-02-21 | 2003-08-23 | 2004-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-02-21 | 2007-08-23 | 2008-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-02-21 | 2011-08-23 | 2012-02-22 | $7700.00 | Window Closed / Lapsed |