US6016325A
Expired / Lapsed
US
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Magnetic modulator voltage and temperature timing compensation circuit
Assignee: Cymer LLC
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Filing: 1998-04-27
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Granted: 2000-01-18
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Expires: 2018-04-27
Abstract
Abstract An improvement over prior art voltage timing compensation circuits is achieved by incorporating a function generator to provide a more accurate non-linear compensation to pulse timing delay, which is typically a non-linear function of voltage. An improvement over prior art temperature timing compensation circuits is achieved by providing for actual temperature measurements to be made and used to drive the timing compensation circuitry for a more accurate temperature timing compensation than provided by prior art temperature synthesis, while still using a relatively simple compensating circuit. In some embodiments a timing compensation circuit combines both voltage and temperature timing compensation.
Inventors
- 👤 Richard M. Ness
- 👤 William N. Partlo
- 👤 Richard L. Sandstrom
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 08:11
CPC Classifications
H; H03; H03K; H03K5/00; H03K5/13; H03K5/131; H01; H01S; H01S3/00; H01S3/02; H01S3/03; H01S3/038
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
201 words
A pulse delay timing compensation circuit of a magnetic modulator of a gas discharge laser to provide timing compensation for voltage variations in an initial operating stage capacitor, said timing compensation circuit comprising: a first monitor having a first monitor input terminal connected to a voltage probe interconnected with a terminal of said initial operating stage capacitor of said magnetic modulator and having a first monitor output terminal; a digitizer having a digitizer input terminal interconnected with said first monitor output terminal and having a digitizer output terminal; a function generator for generating a signal representing delay in response to a voltage signal from said first monitor, said function generator being interconnected between said first monitor output terminal and said digitizer input terminal; and a digital timing delay generator having distinct first terminal, second terminal, and third terminal, said first terminal being connected to said digitizer output terminal, said second terminal being interconnected with a trigger input circuit, and said third terminal being interconnected with a triggered switch of said magnetic modulator; wherein said timing circuit compensates for voltage variations in said initial operating stage capacitor to produce approximately constant delay between signals to operate said trigger switch and pulse discharges.
Claim 2
Dependent Claim
201 words
A pulse delay timing compensation circuit of a magnetic modulator of a gas discharge laser to provide timing compensation for voltage variations in an initial operating stage capacitor, said timing compensation circuit comprising: a first monitor having a first monitor input terminal connected to a voltage probe interconnected with a terminal of said initial operating stage capacitor of said magnetic modulator and having a first monitor output terminal; a digitizer having a digitizer input terminal interconnected with said first monitor output terminal and having a digitizer output terminal; a function generator for generating a signal representing delay in response to a voltage signal from said first monitor, said function generator being interconnected between said first monitor output terminal and said digitizer input terminal; and a digital timing delay generator having distinct first terminal, second terminal, and third terminal, said first terminal being connected to said digitizer output terminal, said second terminal being interconnected with a trigger input circuit, and said third terminal being interconnected with a triggered switch of said magnetic modulator; wherein said timing circuit compensates for voltage variations in said initial operating stage capacitor to produce approximately constant delay between signals to operate said trigger switch and pulse discharges.
Claim 3
Dependent Claim
103 words
The circuit according to claim 1, further comprising: at least one second monitor different from said first monitor, said at least one second monitor having a second monitor input terminal connected to an input device and having a second monitor output terminal; and at least one adder circuit having an adder output terminal, a first adder input terminal, and a second adder input terminal different from said first adder input terminal, said first and second adder input terminals being interconnected with said function generator and said second monitor output terminals respectively, and said adder output terminal being connected to said digitizer input terminal.
Claim 4
Dependent Claim
14 words
The circuit according to claim 2, wherein said input device comprises a temperature sensor.
Claim 5
Dependent Claim
24 words
The circuit according to claim 2, further comprising a signal processor interconnected between said second monitor output terminal and said second adder input terminal.
Claim 6
Dependent Claim
23 words
The circuit according to claim 4, wherein said signal processor is selected from the group consisting of a function generator and a limiter.
Claim 7
Independent Claim
117 words
A method of controlling pulse delay timing of a magnetic modulator of a gas discharge laser having an initial operating stage capacitor interconnected in series with a triggered switch, comprising: sampling a voltage at a terminal of said initial operating stage capacitor, while said triggered switch is open and said initial operating stage capacitor is charged; generating a non-linear function in response to said sampled voltage; generating a timing delay; initiating a trigger signal; adding said timing delay to said trigger signal to produce a delayed trigger signal; and applying said delayed trigger signal to close said triggered switch; wherein timing of gas laser discharge pulses is compensated for voltage variations in said initial operating stage capacitors.
Claim 8
Independent Claim
117 words
A method of controlling pulse delay timing of a magnetic modulator of a gas discharge laser having an initial operating stage capacitor interconnected in series with a triggered switch, comprising: sampling a voltage at a terminal of said initial operating stage capacitor, while said triggered switch is open and said initial operating stage capacitor is charged; generating a non-linear function in response to said sampled voltage; generating a timing delay; initiating a trigger signal; adding said timing delay to said trigger signal to produce a delayed trigger signal; and applying said delayed trigger signal to close said triggered switch; wherein timing of gas laser discharge pulses is compensated for voltage variations in said initial operating stage capacitors.
Claim 9
Dependent Claim
33 words
The method according to claim 6, wherein generating said timing delay further comprises digitizing said non-linear function to produce a digitized signal, said timing delay being generated in response to said digitized signal.
Claim 10
Dependent Claim
61 words
The method according to claim 6, wherein generating said timing delay further comprises: sampling an independent variable; generating a second voltage in response to said independent variable; adding said second voltage to said non-linear function to produce a resultant voltage; and digitizing said resultant voltage to produce a digital signal, said timing delay being generated in response to said digitized signal.
Claim 11
Dependent Claim
13 words
The method according to claim 8, wherein said independent variable is a temperature.
Claim 12
Dependent Claim
23 words
The method according to claim 8, further comprising signal processing said second voltage prior to adding said second voltage to said non-linear function.
Claim 13
Dependent Claim
21 words
The method according to claim 10, wherein said signal processing is selected from the group consisting of limiting and function generating.
References Cited (Backward Citations)
US4549091A
Cited
US5177754A
Cited
US5315611A
Cited
US5138622A
Cited
US5359279A
Cited
US5142166A
Cited
US5514918A
Cited
US5319665A
Cited
US5309462A
Cited
US5313481A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-01-17 | 2003-07-19 | 2004-01-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-01-17 | 2007-07-19 | 2008-01-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-01-17 | 2011-07-19 | 2012-01-18 | $7700.00 | Window Closed / Lapsed |