US6005619A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Quantum efficiency improvements in active pixel sensors
Assignee: Aptina Imaging Corp
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Filing: 1997-10-06
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Granted: 1999-12-21
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Expires: 2017-10-06
Abstract
Abstract Quantum efficiency in an active pixel sensor improved by proper sizing and shaping of the contacts. The photodiode elements are formed of special shapes that are optimized for obtaining diffusion of charge, rather than obtaining the charge directly. Photogates are formed with a thinned polysilicon covering.
Inventors
- 👤 Eric R. Fossum
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 02:29
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/80; H10F39/802; H10F39/803; H10F39/805; H10F39/8057
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
98 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open bv the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode is in the shape of a bar extending from an edge of the pixel towards a center of the pixel.
Claim 2
Dependent Claim
98 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open bv the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode is in the shape of a bar extending from an edge of the pixel towards a center of the pixel.
Claim 3
Dependent Claim
89 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode is in the shape of only a portion of a ring.
Claim 4
Dependent Claim
89 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode is in the shape of only a portion of a ring.
Claim 5
Dependent Claim
85 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode extends along a diagonal of said pixel.
Claim 6
Dependent Claim
85 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode extends along a diagonal of said pixel.
Claim 7
Dependent Claim
85 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode is in the shape of an H.
Claim 8
Dependent Claim
85 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode is in the shape of an H.
Claim 9
Dependent Claim
85 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode is in the shape of an X.
Claim 10
Dependent Claim
85 words
An image sensor, comprising: a plurality of pixel areas, each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode is in the shape of an X.
Claim 11
Dependent Claim
118 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light, and react to said impinging light to form a changed substrate portion that can diffuse, each said pixel area including a circuitry area and a photodiode area, said circuitry area including at least a buffer transistor therein and at least one circuit other than said buffer transistor, said buffer transistor and said at least one other circuit being formed of MOS, said photodiode area including a photodiode element therein, said photodiode element having a geometrical shape which is optimized for obtaining diffusion of said changed substrate portion, rather than for obtaining the light directly.
Claim 12
Dependent Claim
118 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light, and react to said impinging light to form a changed substrate portion that can diffuse, each said pixel area including a circuitry area and a photodiode area, said circuitry area including at least a buffer transistor therein and at least one circuit other than said buffer transistor, said buffer transistor and said at least one other circuit being formed of MOS, said photodiode area including a photodiode element therein, said photodiode element having a geometrical shape which is optimized for obtaining diffusion of said changed substrate portion, rather than for obtaining the light directly.
Claim 13
Dependent Claim
24 words
An image sensor as in claim 6, wherein said photodiode takes less than an entire amount of space left open by the circuitry area.
Claim 14
Dependent Claim
34 words
A sensor as in claim 7 wherein said photodiode is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode.
Claim 15
Dependent Claim
36 words
A sensor as in claim 7 wherein said photodiode is in the shape of a bar extending from an edge of the pixel towards a center of the pixel ending near a center of said pixel.
Claim 16
Dependent Claim
20 words
A sensor as in claim 7 wherein said photodiode is in the shape of only a portion of a ring.
Claim 17
Dependent Claim
16 words
A sensor as in claim 7 wherein said photodiode extends along the diagonal of said pixel.
Claim 18
Dependent Claim
27 words
A sensor as in claim 7 wherein said photodiode is in the shape of a ring, a center of the ring being a center of the pixel.
Claim 19
Dependent Claim
16 words
A sensor as in claim 7 wherein said photodiode is in the shape of an H.
Claim 20
Dependent Claim
16 words
A sensor as in claim 7 wherein said photodiode is in the shape of an X.
Claim 21
Dependent Claim
62 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light, each said pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein said photodiode element itself formed of an opaque material that blocks light from directly reaching said photodiode element.
Claim 22
Dependent Claim
62 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light, each said pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein said photodiode element itself formed of an opaque material that blocks light from directly reaching said photodiode element.
Claim 23
Dependent Claim
12 words
A sensor as in claim 15, wherein said opaque material is polycide.
Claim 24
Dependent Claim
25 words
An image sensor as in claim 15 wherein said photodiode element takes less than an entire amount of space left open by the circuitry area.
Claim 25
Dependent Claim
34 words
A sensor as in claim 15 wherein said photodiode is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode.
Claim 26
Dependent Claim
29 words
A sensor as in claim 18 wherein said photodiode is in the shape of a bar extending from an edge of the pixel towards a center of the pixel.
Claim 27
Dependent Claim
19 words
A sensor as in claim 18 wherein said photodiode is in the shape of a portion of a ring.
Claim 28
Dependent Claim
16 words
A sensor as in claim 18 wherein said photodiode extends along the diagonal of said pixel.
Claim 29
Dependent Claim
27 words
A sensor as in claim 18 wherein said photodiode is in the shape of a ring, a center of the ring being a center of the pixel.
Claim 30
Dependent Claim
16 words
A sensor as in claim 18 wherein said photodiode is in the shape of an H.
Claim 31
Dependent Claim
85 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light and react to said impinging light to form electron hole pairs, each said pixel area including a photodiode area, said photodiode area including a photodiode element therein, said photodiode element itself being formed of an opaque polycide, said photodiode element having a shape which is optimized for obtaining diffusion of said electron hole pairs, rather than for obtaining the light directly.
Claim 32
Dependent Claim
85 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light and react to said impinging light to form electron hole pairs, each said pixel area including a photodiode area, said photodiode area including a photodiode element therein, said photodiode element itself being formed of an opaque polycide, said photodiode element having a shape which is optimized for obtaining diffusion of said electron hole pairs, rather than for obtaining the light directly.
Claim 33
Dependent Claim
57 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light, and react to said impinging light, each said pixel area including a circuitry area and a photogate area, said photogate area covered by a layer of polysilicon less than 400 Å in thickness.
Claim 34
Dependent Claim
57 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light, and react to said impinging light, each said pixel area including a circuitry area and a photogate area, said photogate area covered by a layer of polysilicon less than 400 Å in thickness.
Claim 35
Dependent Claim
86 words
An image sensor, comprising: a plurality of pixel areas each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode element is itself formed of an opaque material.
Claim 36
Dependent Claim
86 words
An image sensor, comprising: a plurality of pixel areas each pixel area including a circuitry area and a photodiode area, said photodiode area including a photodiode element therein, said photodiode element taking less than an entire amount of space left open by the circuitry area, wherein said photodiode element is located in a position on said substrate which includes a plurality of collection areas in said substrate which are substantially equidistant from said photodiode element, wherein said photodiode element is itself formed of an opaque material.
Claim 37
Dependent Claim
15 words
An image sensor as in claim 26, wherein said photodiode element is formed of polycide.
Claim 38
Dependent Claim
18 words
An image sensor as in claim 6, wherein said photodiode element is itself formed of an opaque material.
Claim 39
Dependent Claim
15 words
An image sensor as in claim 28, wherein said photodiode element is formed of polycide.
Claim 40
Dependent Claim
50 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light, each said pixel area including a light receptor therein that is itself formed of an opaque material that blocks light from directly reaching said light receptor.
Claim 41
Dependent Claim
50 words
An image sensor, comprising: a plurality of pixel areas, each pixel area formed on a substrate of a type that can receive impinging light, each said pixel area including a light receptor therein that is itself formed of an opaque material that blocks light from directly reaching said light receptor.
Claim 42
Independent Claim
132 words
A method of forming an image sensor, comprising: defining a plurality of pixel areas, each pixel area including a circuitry area for electronic circuitry including at least a buffer transistor and at least one circuit other than said buffer transistor, said buffer transistor and said at least one other circuit being formed of MOS, and an photosensitive area including a photosensitive element therein; shaping said photosensitive element such that it takes less than an entire amount of space left open by the circuitry area; forming a substrate of a type that can react to impinging radiation to form a changed substrate portion that can diffuse; shaping said photosensitive element to a geometric shape that optimizes diffusing of said changed substrate portion; and allowing said changed portion to diffuse into said photosensitive element.
Claim 43
Independent Claim
132 words
A method of forming an image sensor, comprising: defining a plurality of pixel areas, each pixel area including a circuitry area for electronic circuitry including at least a buffer transistor and at least one circuit other than said buffer transistor, said buffer transistor and said at least one other circuit being formed of MOS, and an photosensitive area including a photosensitive element therein; shaping said photosensitive element such that it takes less than an entire amount of space left open by the circuitry area; forming a substrate of a type that can react to impinging radiation to form a changed substrate portion that can diffuse; shaping said photosensitive element to a geometric shape that optimizes diffusing of said changed substrate portion; and allowing said changed portion to diffuse into said photosensitive element.
Claim 44
Dependent Claim
13 words
A method as in claim 30, wherein said photosensitive element is a photodiode.
Claim 45
Dependent Claim
40 words
A device as in claim 30, wherein said shaping comprises forming said photodiode into the shape of a bar extending from an edge of the pixel toward a center of the pixel and ending near a center of the pixel.
Claim 46
Dependent Claim
24 words
A method as in claim 30, wherein said shaping comprises shaping said photosensitive element into the portion of only a portion of a ring.
Claim 47
Dependent Claim
22 words
A method as in claim 30, further comprising shaping said photodiode to form a shaped photodiode along a diagonal of the pixel.
Claim 48
Dependent Claim
18 words
A method as in claim 30, further comprising shaping said photosensitive element into the shape of an H.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-12-20 | 2003-06-21 | 2003-12-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-12-20 | 2007-06-21 | 2007-12-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-12-20 | 2011-06-21 | 2011-12-21 | $7700.00 | Window Closed / Lapsed |