US5997653A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for washing and drying substrates
Assignee: Tokyo Electron Ltd
•
Filing: 1997-10-06
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Granted: 1999-12-07
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Expires: 2017-10-06
Abstract
Abstract A method for washing and drying a substrate includes the steps of (a) disposing a substrate on a spin chuck such that a surface to be treated faces upward, (b) applying a washing solution from a first nozzle to the surface of the substrate while rotating the substrate disposed on the spin chuck so as to cleanse the surface, and (c) blowing a gas from a second nozzle against the surface while rotating the substrate and moving the second nozzle above the substrate in a radial direction from a central portion toward a peripheral portion of the substrate, thereby drying the surface of the substrate.
Inventors
- 👤 Miyako Yamasaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:35
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/18; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; B; B08; B08B; B08B3/00; B08B3/02; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
108 words
A method for washing and drying a substrate, the steps of comprising: disposing the substrate on a spin chuck such that a surface of the substrate to be treated faces upward; applying a washing solution from a first nozzle to the surface of the substrate while the substrate disposed on the spin chuck rotates; and blowing a gas from a second nozzle to the surface while the substrate disposed on the spin chuck rotates and while the second nozzle moves above the surface in a radial direction of the substrate from a central portion toward a peripheral portion of the substrate, thereby drying the surface of said substrate.
Claim 2
Independent Claim
108 words
A method for washing and drying a substrate, the steps of comprising: disposing the substrate on a spin chuck such that a surface of the substrate to be treated faces upward; applying a washing solution from a first nozzle to the surface of the substrate while the substrate disposed on the spin chuck rotates; and blowing a gas from a second nozzle to the surface while the substrate disposed on the spin chuck rotates and while the second nozzle moves above the surface in a radial direction of the substrate from a central portion toward a peripheral portion of the substrate, thereby drying the surface of said substrate.
Claim 3
Dependent Claim
18 words
The method according to claim 1, wherein a rotational speed of the substrate increases during the blowing step.
Claim 4
Dependent Claim
28 words
The method according to claim 1, wherein the second nozzle moves in the radial direction while the substrate rotates at a substantially constant speed during the blowing step.
Claim 5
Dependent Claim
22 words
The method according to claim 1, wherein the second nozzle stops moving inside a periphery of the substrate during the blowing step.
Claim 6
Dependent Claim
42 words
The method according to claim 1, wherein a gas blowing port of the second nozzle is inclined in the radial direction with respect to the surface of the substrate while the second nozzle moves in the radial direction during the blowing step.
Claim 7
Dependent Claim
28 words
The method according to claim 1, wherein the gas comprises at least one of nitrogen gas, a carbon dioxide gas, an argon gas, a helium gas, and air.
Claim 8
Dependent Claim
23 words
The method according to claim 1, further comprising: cooling the gas to 2 to 10° C. before the second nozzle blows the gas.
Claim 9
Dependent Claim
24 words
The method according to claim 1, further comprising: forming at least one patterned film on the surface of the substrate before the disposing step.
Claim 10
Dependent Claim
38 words
The method according to claim 1, further comprising: treating the surface with a chemical solution before the disposing step; and applying a chemical mechanical polishing treatment to the surface treated with the chemical solution before the disposing step.
Claim 11
Dependent Claim
26 words
The method according to claim 1, further comprising: treating the surface with a chemical solution to etch and to wash the surface before the disposing step.
Claim 12
Dependent Claim
44 words
The method according to claim 2, wherein the rotational speed of the substrate begins to increase substantially simultaneously as the second nozzle begins to move in the radial direction, and wherein the rotational speed reaches a substantially constant speed while the second nozzle moves.
Claim 13
Dependent Claim
54 words
The method according to claim 2, wherein the rotational speed of the substrate begins to increase substantially simultaneously as the second nozzle begins to move in the radial direction, and wherein the second nozzle stops moving while the substrate rotates at a substantially constant speed after the rotational speed reaches the substantially constant speed.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-12-06 | 2003-06-07 | 2003-12-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-12-06 | 2007-06-07 | 2007-12-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-12-06 | 2011-06-07 | 2011-12-07 | $7700.00 | Window Closed / Lapsed |