US5980663A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Bonding machine
Assignee: Adeia Semiconductor Technologies LLC
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Filing: 1996-04-25
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Granted: 1999-11-09
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Expires: 2016-04-25
Abstract
Abstract This invention discloses a method of bonding a lower substrate with an upper substrate comprising applying an adhesive (56) on at least one of the lower (12) and the upper (14) substrates, and rotating the lower and the upper substrates thereby to create a centrifugal force which causes the adhesive to spread between the lower and the upper substrates with a substantially uniform thickness, while applying a pressure upon the upper substrate thereby to bond the lower and upper substrates. The invention also discloses an apparatus for bonding the lower substrate with the upper substrate.
Inventors
- 👤 Pierre Badehi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:06
CPC Classifications
B; B29; B29C; B29C65/00; B29C65/78; B29C65/7841; B29C65/7847; B29C65/48; B29C65/52; B29C65/521; B29C66/00; B29C66/40; B29C66/41; B29C66/45; B29C66/452; B29C66/80; B29C66/82; B29C66/824; B29C66/8242; B29C66/83; B29C66/832; B29C66/8322; B29C66/90; B29C66/91; B29C66/912; B29C66/9121; B29C66/91211; B29C66/91212; B29C66/91231; B29C66/914; B29C66/9141; B29C66/91421; B29C66/91431; C; C09; C09J; C09J5/00; B29C65/4805; B29C65/483; B29C65/485; B29C66/01; B29C66/05; B29C66/10; B29C66/11; B29C66/112; B29C66/1122; B29C66/91213; B29C66/92; B29C66/924; B29C66/9241; B29C66/929; B29C66/96; B29C66/961
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
115 words
A method of bonding a lower substrate with an upper substrate comprising the steps of: applying an adhesive on at least one of said lower and said upper substrates; placing said upper substrate upon said lower substrate, with said adhesive therebetween; heating at least one of said lower and said upper substrates; controlling the temperature of at least one of said lower and said upper substrates; and rotating said lower and said upper substrates thereby to create a centrifugal force which causes said adhesive to spread between said lower and said upper substrates with a substantially uniform thickness, while applying a pressure upon said upper substrate thereby to bond said lower and said upper substrates.
Claim 2
Independent Claim
115 words
A method of bonding a lower substrate with an upper substrate comprising the steps of: applying an adhesive on at least one of said lower and said upper substrates; placing said upper substrate upon said lower substrate, with said adhesive therebetween; heating at least one of said lower and said upper substrates; controlling the temperature of at least one of said lower and said upper substrates; and rotating said lower and said upper substrates thereby to create a centrifugal force which causes said adhesive to spread between said lower and said upper substrates with a substantially uniform thickness, while applying a pressure upon said upper substrate thereby to bond said lower and said upper substrates.
Claim 3
Dependent Claim
16 words
A method according to claim 1 further comprising the step of controlling application of said pressure.
Claim 4
Dependent Claim
150 words
A bonding machine comprising: a lower chuck adapted to fixedly receive a lower substrate; an upper chuck rotatably engageable with said lower chuck and operative to apply a pressure upon an upper substrate when positioned upon said lower substrate; and a rotator operative to rotate said lower chuck, thereby to create a centrifugal force which causes an adhesive applied on at least one of said lower and said upper substrates to spread therebetween with a substantially uniform thickness, wherein application of said pressure by said upper chuck upon said upper substrate causes bonding of said lower and said upper substrates; wherein at least one of said lower and said upper chucks comprises a heater, and wherein at least one of said lower and said upper chucks comprises a temperature sensor which communicates with a controller for controlling the temperature of at least one of said lower and said upper chucks.
Claim 5
Dependent Claim
150 words
A bonding machine comprising: a lower chuck adapted to fixedly receive a lower substrate; an upper chuck rotatably engageable with said lower chuck and operative to apply a pressure upon an upper substrate when positioned upon said lower substrate; and a rotator operative to rotate said lower chuck, thereby to create a centrifugal force which causes an adhesive applied on at least one of said lower and said upper substrates to spread therebetween with a substantially uniform thickness, wherein application of said pressure by said upper chuck upon said upper substrate causes bonding of said lower and said upper substrates; wherein at least one of said lower and said upper chucks comprises a heater, and wherein at least one of said lower and said upper chucks comprises a temperature sensor which communicates with a controller for controlling the temperature of at least one of said lower and said upper chucks.
Claim 6
Dependent Claim
37 words
A bonding machine according to claim 3 wherein said lower chuck comprises at least one engagement element and said upper chuck comprises at least one engagement arm for selectable engagement with said at least one engagement element.
Claim 7
Dependent Claim
73 words
A bonding machine according to claim 4 further comprising an orientation sensor operative to sense a position of said at least one engagement arm and to signal said rotator to rotate said lower chuck to a position such that said at least one engagement element is aligned with said at least one engagement arm so that said at least one engagement element and said at least one engagement arm may engage one another.
Claim 8
Dependent Claim
15 words
A bonding machine according to claim 3 wherein said rotator is a variable speed servomotor.
Claim 9
Dependent Claim
26 words
A bonding machine according to claim 3 further comprising a motion device for selectably moving said upper chuck generally vertically with respect to said lower chuck.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-11-08 | 2003-05-10 | 2003-11-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-11-08 | 2007-05-10 | 2007-11-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-11-08 | 2011-05-10 | 2011-11-09 | $7700.00 | Window Closed / Lapsed |