US5978081A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multiple field of view calibration plate for use in semiconductor manufacturing
Assignee: Cognex Corp
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Filing: 1998-06-22
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Granted: 1999-11-02
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Expires: 2018-06-22
Abstract
Abstract An article of manufacture is provided both for coordinating multiple fields of view of a plurality of cameras so as to facilitate determining the distance between features on a semiconductor wafer, each feature being disposed within a different field of view, and for correcting image distortion within each field of view. The article of the invention includes a substantially rigid dimensionally-stable substrate, such as a plate, having a plurality of image distortion calibration targets, that are each located at a known relative position. In semiconductor wafer applications, each calibration target is disposed on the substrate so the target is in the field of view of a camera positioned to include a portion of the edge of the semiconductor wafer at run-time. In a preferred embodiment, each calibration target is disposed at an orientation angle such that a first principle axis of the calibration target is perpendicular to a tangent to the perimeter of the semiconductor wafer. In semiconductor wafer applications, it is preferred that a surface of the substrate be of a size and shape such that each calibration target disposed on the substrate can be in the field of view of a camera positioned to include a portion of the edge of the semiconductor wafer at run-time. In a preferred embodiment, the substrate includes physical alignment features that facilitate coordination of the multi-camera coordinate system of the article of the invention with the coordinate system of a semiconductor manufacturing machine.
Inventors
- 👤 David Michael
- 👤 Aaron Wallack
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 02:15
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70591; G03F7/706; G01; G01B; G01B11/00; G01B11/002; G01B11/24; G01B11/245; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/8806; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
108 words
An article of manufacture both for coordinating multiple fields of view of a plurality of cameras so as to facilitate determining a distance between features of a semiconductor wafer, each feature disposed within a different field of view, and for correcting image distortion in each field of view, the article comprising: a substantially rigid dimensionally-stable substrate having a plurality of image distortion calibration targets, each of said image distortion calibration targets being for correcting image distortion within a field of view, and being disposed within a different field of view at a known relative position so as to facilitate determining the distance between features of a semiconductor wafer.
Claim 2
Dependent Claim
108 words
An article of manufacture both for coordinating multiple fields of view of a plurality of cameras so as to facilitate determining a distance between features of a semiconductor wafer, each feature disposed within a different field of view, and for correcting image distortion in each field of view, the article comprising: a substantially rigid dimensionally-stable substrate having a plurality of image distortion calibration targets, each of said image distortion calibration targets being for correcting image distortion within a field of view, and being disposed within a different field of view at a known relative position so as to facilitate determining the distance between features of a semiconductor wafer.
Claim 3
Dependent Claim
20 words
The article of claim 1, wherein each calibration target includes an element that indicates an origin of the calibration target.
Claim 4
Dependent Claim
26 words
The article of claim 1, wherein said substantially rigid dimensionally-stable substrate includes at least one planar surface, each planar surface including at least one calibration target.
Claim 5
Dependent Claim
26 words
The article of claim 1, wherein each calibration target is disposed at a position on said surface so as to facilitate direct viewing by a camera.
Claim 6
Dependent Claim
22 words
The article of claim 1, wherein said substantially rigid dimensionally-stable substrate includes a substantially planar surface having a plurality of calibration targets.
Claim 7
Dependent Claim
17 words
The article of claim 1, wherein said substrate includes a calibration target for each possible camera location.
Claim 8
Dependent Claim
34 words
The article of claim 1, wherein said substrate includes markings that communicate relative displacement information regarding at least a linear displacement of each said calibration target with respect to each other said calibration target.
Claim 9
Dependent Claim
36 words
The article of claim 1, wherein said substrate includes markings that communicate relative displacement information regarding both linear displacement and relative angular displacement of each said calibration target with respect to each other said calibration target.
Claim 10
Dependent Claim
41 words
The article of claim 1, wherein each calibration target is disposed on said substrate so said calibration target is in the field of view of a camera positioned to include a portion of the edge of the semiconductor wafer at run-time.
Claim 11
Dependent Claim
40 words
The article of claim 1, wherein each calibration target on the substrate is disposed at an orientation angle such that a first principle axis of said calibration target is perpendicular to a tangent of the perimeter of said semiconductor wafer.
Claim 12
Dependent Claim
50 words
The article of claim 1, wherein a surface of the substrate is of a size and shape such that each calibration target disposed on the substrate can be in the field of view of a camera positioned to include a portion of the edge of said semiconductor wafer at run-time.
Claim 13
Dependent Claim
54 words
The article of claim 1, wherein the surface of the substrate is of a size that is larger than the major surface of the semiconductor wafer such that each calibration target disposed on the substrate can extend across a portion of the edge of the semiconductor wafer when it is in position at run-time.
Claim 14
Dependent Claim
79 words
The article of claim 1, wherein the surface of the substrate is of a size that is larger than the major surface of the semiconductor wafer such that each calibration target disposed on the substrate can extend across a portion of the edge of the semiconductor wafer in position at run-time, and the surface of the substrate is sufficiently large and misaligned of the wafer with respect to the position of the plate of the train-time can be accommodated.
Claim 15
Dependent Claim
37 words
The article of claim 11, wherein the substrate includes physical alignment features that facilitate coordination of a multi-camera coordinate system of the article of manufacture of the invention with the coordinate system of a semiconductor manufacturing machine.
Claim 16
Dependent Claim
29 words
The article of claim 14, wherein said physical alignment features include one of a notch and a flat formed anywhere on the perimeter of a surface of the substrate.
Claim 17
Dependent Claim
57 words
The article of claim 14, wherein said physical alignment features include one of a pair of holes sized to receive a pair of pegs that project from the stage of a semiconductor processing machine, and a pair of pegs sized to be received by a pair of holes formed in the stage of a semiconductor processing machine.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-11-01 | 2003-05-03 | 2003-11-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-11-01 | 2007-05-03 | 2007-11-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-11-01 | 2011-05-03 | 2011-11-02 | $7700.00 | Window Closed / Lapsed |