US5948322A
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Source reagents for MOCVD formation of non-linear optically active metal borate films and optically active metal borate films formed therefrom
Assignee: Advanced Technology Materials Inc
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Filing: 1997-04-10
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Granted: 1999-09-07
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Expires: 2017-04-10
Abstract
Abstract An MOCVD precursor composition useful for MOCVD formation of a non-linear optically active metal borate thin film, comprising: (I) an organometallic source reagent for a metal reactively forming a non-linear optically active metal borate, and (II) an organoborate compound of the formula: B(OR) 3 , wherein each R is independently selected from H, alkyl, aryl, alkaryl, arylalkyl, alkenyl, fluoroalkyl, fluoroaryl, fluoroaralkyl, fluoroalkaryl, trialkylsilyl, and C 5 -C 8 carbocylic groups, as the aforementioned borate source reagent. Such composition may be employed for forming a non-linear optically active metal borate thin film on a substrate, via depositing by CVD on said substrate a metal from the organometallic source reagent and a borate from the organoborate compound, to react the metal with the borate and yield the non-linear optically active metal borate on the substrate. Non-linear optically active devices, such as data storage devices, laser printers, display panels, and communications devices, can be fabricated using the composition and method of the invention.
Inventors
- 👤 Thomas H. Baum
- 👤 Gregory Stauf
- 👤 Daniel B. Studebaker
- 👤 Brian A. Vaartstra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:03
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/35; G02F1/355; G02F1/3551
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
94 words
A non-sol gel MOCVD precursor composition having utility for MOCVD formation of a non-linear optically active metal borate thin film, said precursor composition comprising: (I) an organometallic source reagent for a metal reactively forming with a borate derived from a source reagent therefor a non-linear optically active metal borate thin film, and (II) an organoborate compound of the formula: B(OR).sub.3 wherein each R is independently selected from the group consisting of H, alkyl, aryl, alkaryl, arylalkyl, alkenyl, fluoroalkyl, fluoroaryl, fluoroaralkyl, fluoroalkaryl, trialkylsilyl, and C 5 -C 8 carbocyclic groups, as said borate source reagent.
Claim 2
Dependent Claim
94 words
A non-sol gel MOCVD precursor composition having utility for MOCVD formation of a non-linear optically active metal borate thin film, said precursor composition comprising: (I) an organometallic source reagent for a metal reactively forming with a borate derived from a source reagent therefor a non-linear optically active metal borate thin film, and (II) an organoborate compound of the formula: B(OR).sub.3 wherein each R is independently selected from the group consisting of H, alkyl, aryl, alkaryl, arylalkyl, alkenyl, fluoroalkyl, fluoroaryl, fluoroaralkyl, fluoroalkaryl, trialkylsilyl, and C 5 -C 8 carbocyclic groups, as said borate source reagent.
Claim 3
Dependent Claim
49 words
An MOCVD precursor composition according to claim 1, wherein said metal of said organometallic source reagent is selected from the group consisting of: barium, lithium, cesium, potassium, lead, neodymium, yttrium, aluminum, and non-linear optically active combinations thereof in which said organometallic source reagent comprises multiple organometallic source reagent compounds.
Claim 4
Dependent Claim
38 words
An MOCVD precursor composition according to claim 2, wherein said non-linear optically active metal borate is selected from the group consisting of BaB 2 O 4 , KBO, PbBaBO, NdYAlBO, LiB 3 O 5 and CsLiBO 3 .
Claim 5
Dependent Claim
34 words
An MOCVD precursor composition according to claim 1, wherein said organometallic source reagent comprises an organometallic source compound whose organo moiety is selected from the group consisting of beta-diketonates, beta-ketoimines, beta-ketoesters, alkoxides, and alkoxide-diketonates.
Claim 6
Dependent Claim
34 words
An MOCVD precursor composition according to claim 1, wherein said organometallic source reagent comprises an organometallic source compound adduct including a complexing ligand selected from the group consisting of tetraglyme, crown ethers and polyamines.
Claim 7
Dependent Claim
34 words
A composition according to claim 1, wherein each R is independently selected from the group consisting of H, aryl, alkaryl, arylalkyl, alkenyl, fluoroalkyl, fluoroaryl, fluoroaralkyl, fluoroalkaryl, trialkylsilyl, and C 5 -C 8 carbocyclic groups.
Claim 8
Dependent Claim
15 words
A composition according to claim 1, wherein the organometallic source reagent comprises a metal beta-diketonate.
Claim 9
Dependent Claim
30 words
A composition according to claim 1, wherein the organometallic source reagent comprises an organometallic source compound adduct including a complexing ligand selected from the group consisting of tetraglyme and polyamines.
Claim 10
Dependent Claim
22 words
A composition according to claim 1, wherein the organometallic source reagent comprises an organometallic source compound adduct including a tetraglyme complexing ligand.
Claim 11
Dependent Claim
22 words
A composition according to claim 1, wherein the organometallic source reagent comprises an organometallic source compound adduct including a polyamine complexing ligand.
Claim 12
Dependent Claim
25 words
A composition according to claim 1, wherein the organometallic source reagent comprises an organo moiety selected from the group consisting of beta-diketonates, beta-ketoimines, and beta-ketoesters.
Claim 13
Dependent Claim
16 words
A composition according to claim 1, wherein the organometallic source reagent comprises a beta-diketonate organo moiety.
Claim 14
Dependent Claim
17 words
A composition according to claim 1, including an organic solvent for the organometallic source reagent and organoborate.
Claim 15
Dependent Claim
34 words
A composition according to claim 13, wherein the organic solvent comprises at least one solvent component selected from the group consisting of n-butyl acetate, tetraglyme, tetrahydrofuran, triamine, isopropanol, crown ether, and crown cyclic polyether.
Claim 16
Dependent Claim
21 words
A composition according to claim 1, wherein boron is in stoichiometric excess to the metal constituent of the organometallic source reagent.
Claim 17
Dependent Claim
25 words
A composition according to claim 1, wherein the ratio of boron to the metal constituent of the organometallic source reagent is from 1 to 4.
Claim 18
Dependent Claim
129 words
A non-sol gel MOCVD precursor composition having utility for MOCVD formation of a non-linear optically active metal borate thin film, said precursor composition comprising: (I) an organometallic source reagent for a metal reactively forming a non-linear optically active metal borate with a borate derived from a source reagent therefor, said metal being selected from the group consisting of Ba, Li, Cs, K, PbBa, and NdYAl, and said organometallic source reagent comprising an organo ligand selected from the group consisting of beta-diketonates, beta-ketoimines, beta-ketoesters, alkoxides, and alkoxide-diketonates, and (II) an organoborate compound of the formula: B(OR).sub.3 wherein each R is independently selected from the -group consisting of H, alkyl, aryl, alkaryl, arylalkyl, alkenyl, fluoroalkyl, fluoroaryl, fluoroaralkyl, fluoroalkaryl, trialkylsilyl, and C 5 -C 8 carbocyclic groups, as said borate source reagent.
Claim 19
Dependent Claim
129 words
A non-sol gel MOCVD precursor composition having utility for MOCVD formation of a non-linear optically active metal borate thin film, said precursor composition comprising: (I) an organometallic source reagent for a metal reactively forming a non-linear optically active metal borate with a borate derived from a source reagent therefor, said metal being selected from the group consisting of Ba, Li, Cs, K, PbBa, and NdYAl, and said organometallic source reagent comprising an organo ligand selected from the group consisting of beta-diketonates, beta-ketoimines, beta-ketoesters, alkoxides, and alkoxide-diketonates, and (II) an organoborate compound of the formula: B(OR).sub.3 wherein each R is independently selected from the -group consisting of H, alkyl, aryl, alkaryl, arylalkyl, alkenyl, fluoroalkyl, fluoroaryl, fluoroaralkyl, fluoroalkaryl, trialkylsilyl, and C 5 -C 8 carbocyclic groups, as said borate source reagent.
Claim 20
Dependent Claim
28 words
An MOCVD precursor composition according to claim 17, wherein said organometallic source reagent comprises a complexing ligand selected from the group consisting of tetraglyme, crown ethers and polyamines.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-09-06 | 2003-03-08 | 2003-09-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-06 | 2007-03-08 | 2007-09-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-06 | 2011-03-08 | 2011-09-07 | $7700.00 | Window Closed / Lapsed |