US5945259A
Expired / Lapsed
US
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Method for lead frame etching
Assignee: Haesung DS Co Ltd
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Filing: 1998-02-18
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Granted: 1999-08-31
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Expires: 2018-02-18
Abstract
Abstract A lead frame etching method, which is used for a semiconductor device assembling process and prevents a sharp-edged portion formed on each lateral end of a lead frame material. The method includes the steps of forming a first photoresist pattern defining the actual etching region, on both surfaces of a lead frame material, forming a second photoresist pattern as an etching buffer extending from lateral ends of the first photoresist pattern, on both surfaces of the lead frame material on which the first photoresist pattern is formed, etching the lead frame material using the second photoresist pattern as an etching mask, removing the second photoresist pattern from the etched lead frame material, etching the lead frame material using the first photoresist pattern as an etching mask, and removing the first photoresist pattern from the twice-etched lead frame material.
Inventors
- 👤 Yung-joon Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 00:17
CPC Classifications
H; H10; H10W; H10W95/00; H10W70/00; H10W70/01; H10W70/04; H10W70/042; H10W72/00
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
109 words
A lead frame etching method comprising the steps of: forming a first photoresist pattern on both surfaces of a lead frame material; forming a second photoresist pattern as an etching buffer extending from lateral ends of said first photoresist pattern, on both surfaces of said lead frame material on which said first photoresist pattern is formed; etching said lead frame material using said first and second photoresist patterns as an etching mask; removing said second photoresist pattern from said first-etched lead frame material; etching said lead frame material using said first photoresist pattern as an etching mask; and removing said first photoresist pattern from said twice-etched lead frame material.
Claim 2
Dependent Claim
109 words
A lead frame etching method comprising the steps of: forming a first photoresist pattern on both surfaces of a lead frame material; forming a second photoresist pattern as an etching buffer extending from lateral ends of said first photoresist pattern, on both surfaces of said lead frame material on which said first photoresist pattern is formed; etching said lead frame material using said first and second photoresist patterns as an etching mask; removing said second photoresist pattern from said first-etched lead frame material; etching said lead frame material using said first photoresist pattern as an etching mask; and removing said first photoresist pattern from said twice-etched lead frame material.
Claim 3
Dependent Claim
22 words
The method according to claim 1, wherein said etchings are performed using an iron chloride (FeCl 3 ) solution as an etchant.
Claim 4
Dependent Claim
26 words
The method according to claim 1, wherein a sodium hydroxide (NaOH) solution is used as a peeling solution to remove said first and second photoresist patterns.
Claim 5
Dependent Claim
30 words
The method according to claim 3, wherein said sodium hydroxide (NaOH) solution for removing said first photoresist pattern has a different acidity than that for removing said second photoresist pattern.
Claim 6
Dependent Claim
35 words
The method according to claim 3, wherein each of said first and second photoresist patterns is formed of a material having a different peeling characteristic depending on the acidity of said sodium hydroxide (NaOH) solution.
Claim 7
Dependent Claim
28 words
The method according to claim 5, wherein said first and second photoresist patterns each having a different peeling characteristic is formed of a casein or a dry film.
Claim 8
Dependent Claim
27 words
The method according to claim 1, wherein the width of said second photoresist pattern is between 20 and 50% of the thickness of said lead frame material.
Claim 9
Dependent Claim
19 words
The method according to claim 1, wherein said first photoresist pattern exposes a region to be finally etched out.
Claim 10
Dependent Claim
31 words
The method according to claim 1, wherein said lead frame material is formed of at least a metal selected from the group consisting of copper (Cu), iron (Fe), and nickel (Ni).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-08-30 | 2003-03-01 | 2003-08-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-08-30 | 2007-03-01 | 2007-08-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-08-30 | 2011-03-01 | 2011-08-31 | $7700.00 | Window Closed / Lapsed |