US5935283A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
Assignee: Applied Materials Inc
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Filing: 1997-05-16
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Granted: 1999-08-10
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Expires: 2017-05-16
Abstract
Abstract A clog-resistant inlet structure for introducing a particulate solids-containing and/or solids-Forming gas stream to a gas processing system. The structure is composed of a gas-permeable wall enclosing a gas flow path, and an outer annular jacket circumscribing the gas-permeable wall to define an annular gas reservoir therebetween. The clog-resistant inlet structure is constructed, arranged, and operated so as to introduce a gas into the annular gas reservoir during the flow of the particulate solids-containing and/or solids-forming gas stream to a gas processing system through such inlet structure at a pressure sufficient to combat the deposition or formation of solids on the interior surface of the gas-permeable wall. The inlet structure may further optionally include a downstream annular section in which the wall surface bounding the gas stream is blanketed with a falling liquid film, to combat solids deposition or formation on the blanketed wall surface.
Inventors
- 👤 Joseph D. Sweeney
- 👤 Prakash V. Arya
- 👤 Mark Holst
- 👤 Scott Lane
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:42
CPC Classifications
B; B01; B01D; B01D45/00; B01D53/00; B01D53/14; B01J; B01J19/00; B01J19/0006; B01J19/002; B01J19/26; B01J8/00; B01J8/0015; B01J8/003; B01J8/18; B01J8/20; B01J8/22; C; C23; C23C; C23C16/00; C23C16/44; C23C16/4412; C30; C30B; C30B25/00; C30B25/02; C30B25/14; B01J2219/00; B01J2219/00049; B01J2219/00051; B01J2219/00054; B01J2219/00056; B01J2219/00065; B01J2219/00074; B01J2219/00087; B01J2219/00094; B01J2219/00132; B01J2219/00135; B01J2219/00164; B01J2219/00245; B01J2219/00252; B01J2219/00268
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
230 words
A clog-resistant inlet structure for introducing a gas stream to a gas processing system, said inlet structure comprising: a wall enclosing a gas flow path, including an upper wall section enclosing an upper section of the gas flow path, and a lower wall section enclosing a lower section of the gas flow path; a gas delivery tube arranged to receive the gas stream for flow therethrough, said gas delivery tube (i) being positioned within the gas flow path, (ii) extending axially into and through at least a portion of the upper section of the gas flow path enclosed by the upper wall section, and (iii) terminating in the gas flow path at an outlet end that is arranged to discharge a laminar flow of the gas stream into the lower section of the gas flow path; and means for introducing a shrouding gas in the upper section of the gas flow path, for flow of the shrouding gas from the upper section of the gas flow path to the lower section of the gas flow path in co-annular laminar flow to the gas stream flowing through the gas delivery tube and discharged at the outlet end thereof into the lower section of the gas flow path, so that a laminar axial flow of the shrouding gas shrouds the laminar flow of the gas stream discharged from the gas delivery tube.
Claim 2
Dependent Claim
230 words
A clog-resistant inlet structure for introducing a gas stream to a gas processing system, said inlet structure comprising: a wall enclosing a gas flow path, including an upper wall section enclosing an upper section of the gas flow path, and a lower wall section enclosing a lower section of the gas flow path; a gas delivery tube arranged to receive the gas stream for flow therethrough, said gas delivery tube (i) being positioned within the gas flow path, (ii) extending axially into and through at least a portion of the upper section of the gas flow path enclosed by the upper wall section, and (iii) terminating in the gas flow path at an outlet end that is arranged to discharge a laminar flow of the gas stream into the lower section of the gas flow path; and means for introducing a shrouding gas in the upper section of the gas flow path, for flow of the shrouding gas from the upper section of the gas flow path to the lower section of the gas flow path in co-annular laminar flow to the gas stream flowing through the gas delivery tube and discharged at the outlet end thereof into the lower section of the gas flow path, so that a laminar axial flow of the shrouding gas shrouds the laminar flow of the gas stream discharged from the gas delivery tube.
Claim 3
Dependent Claim
47 words
An inlet structure according to claim 1, wherein the wall is constructed and arranged with a liquid supply in feed relationship thereto, to provide a falling film of liquid on a surface of the wall, so as to avoid contact of the gas stream with the wall.
Claim 4
Dependent Claim
24 words
An inlet structure according to claim 1, wherein the gas delivery tube is arranged to receive the gas stream from a semiconductor manufacturing tool.
Claim 5
Dependent Claim
27 words
An inlet structure according to claim 1, wherein the lower section of the gas flow path is coupled in gas flow relationship with a water scrubber unit.
Claim 6
Dependent Claim
27 words
An inlet structure according to claim 3, wherein the lower section of the gas flow path is coupled in gas flow relationship with a combustion scrubber unit.
Claim 7
Dependent Claim
29 words
An inlet structure according to claim 1, further comprising means for heating the gas delivery tube to combat condensation of condensable components in the gas stream when flowed therethrough.
Claim 8
Dependent Claim
34 words
An inlet structure according to claim 1, wherein the gas delivery tube terminates in the gas flow path at an outlet end that is positioned in the lower section of the gas flow path.
Claim 9
Dependent Claim
36 words
An inlet structure according to claim 1, wherein the upper wall section comprises a gas-permeable wall arranged to receive the shrouding gas from a source thereof, for flow of the shrouding gas through the gas-permeable wall.
Claim 10
Dependent Claim
17 words
An inlet structure according to claim 1, wherein the gas-permeable wall is formed of a porous metal.
Claim 11
Dependent Claim
17 words
An inlet structure according to claim 1, wherein the gas-permeable wall is formed of a porous ceramic.
Claim 12
Dependent Claim
17 words
An inlet structure according to claim 1, wherein the gas-permeable wall is formed of a porous plastic.
Claim 13
Dependent Claim
15 words
An inlet structure according to claim 1, wherein the gas-permeable wall is of circular cross-section.
Claim 14
Dependent Claim
25 words
An inlet structure according to claim 2, wherein the surface of the wall with a falling film of liquid thereon, comprises the lower wall section.
Claim 15
Dependent Claim
17 words
An inlet structure according to claim 13, wherein the lower wall section comprises a porous wall surface.
Claim 16
Dependent Claim
21 words
An inlet structure according to claim 13, wherein the lower wall section includes a wall portion defining a liquid overflow weir.
Claim 17
Dependent Claim
21 words
An inlet structure according to claim 15, wherein the liquid overflow weir is joined in feed relationship to said liquid supply.
Claim 18
Dependent Claim
21 words
An inlet structure according to claim 1, wherein the upper wall section and lower wall section are each of cylindrical shape.
Claim 19
Dependent Claim
20 words
An inlet structure according to claim 1, wherein the upper wall section and lower wall section have a same diameter.
Claim 20
Dependent Claim
29 words
An inlet structure according to claim 1, wherein the upper wall section, gas delivery tube and lower wall section are vertically aligned and coaxial with respect to one another.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-08-09 | 2003-02-08 | 2003-08-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-08-09 | 2007-02-08 | 2007-08-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-08-09 | 2011-02-08 | 2011-08-10 | $7700.00 | Window Closed / Lapsed |