US5933729A
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US
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Reduction of ONO fence during self-aligned etch to eliminate poly stringers
Assignee: Monterey Research LLC
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Filing: 1997-12-08
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Granted: 1999-08-03
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Expires: 2017-12-08
Abstract
Abstract A method (200) of making a flash memory device without poly stringers includes forming a stacked gate region (202) on a substrate (102) and forming one or more word lines (122a, 122b, 204) in the stacked gate region. The method further includes performing a self-aligned etch (206) in regions adjacent to the one or more word lines (122a, 122b). The self-aligned etch (206) includes etching an insulating layer (110, 206a) with a relatively high insulating layer-to-polysilicon layer selectivity to thereby reduce the height of the resultant insulative fence (126). The self-aligned etch (206) then concludes with etching a polysilicon layer (106a, 106b); due to the reduced insulative fence (126), no poly stringers are formed during the etching of the polysilicon layer (106a, 106b).
Inventors
- 👤 Maria Chow Chan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:58
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/27; H10P70/273; H10B; H10B41/00; H10B41/30; H10B69/00
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
125 words
A method of preventing poly stringers in a memory device, comprising the steps of: forming a stacked gate region on a substrate, the stacked gate region including a polysilicon layer underlying an insulating layer; forming one or more word lines in the stacked gate region; etching the insulating layer in regions adjacent the one or more word lines, wherein the etching of the insulating layer exhibits a substantially high insulating layer-to-polysilicon selectivity, thereby substantially reducing the height of a resultant insulative fence without substantially impacting the polysilicon layer; and etching the polysilicon layer in regions adjacent the one or more word lines, wherein the etching of the polysilicon layer is substantially anisotropic and removes substantially all the polysilicon, resulting in the prevention of poly stringers.
Claim 2
Independent Claim
125 words
A method of preventing poly stringers in a memory device, comprising the steps of: forming a stacked gate region on a substrate, the stacked gate region including a polysilicon layer underlying an insulating layer; forming one or more word lines in the stacked gate region; etching the insulating layer in regions adjacent the one or more word lines, wherein the etching of the insulating layer exhibits a substantially high insulating layer-to-polysilicon selectivity, thereby substantially reducing the height of a resultant insulative fence without substantially impacting the polysilicon layer; and etching the polysilicon layer in regions adjacent the one or more word lines, wherein the etching of the polysilicon layer is substantially anisotropic and removes substantially all the polysilicon, resulting in the prevention of poly stringers.
Claim 3
Dependent Claim
53 words
The method of claim 1, wherein the step of forming a stacked gate region on a substrate comprises the steps of: forming a tunnel oxide; forming a first conductive region over the tunnel oxide; forming an insulative region over the first conductive region; and forming a second conductive region over the insulative region.
Claim 4
Dependent Claim
30 words
The method of claim 2, further comprising etching the first conductive region to define one or more memory cells within a word line before the forming of the insulative region.
Claim 5
Dependent Claim
27 words
The method of claim 2, wherein the step of forming a first conductive region comprises depositing a polycrystalline layer and doping the polycrystalline layer with impurity ions.
Claim 6
Dependent Claim
41 words
The method of claim 2, wherein the step of forming the insulative region comprises the steps of: forming a first oxide layer; forming a nitride layer over the first oxide layer; and forming a second oxide layer over the nitride layer.
Claim 7
Dependent Claim
27 words
The method of claim 2, wherein the step of forming the second conductive layer comprises depositing a polycrystalline layer and doping the polycrystalline layer with impurity ions.
Claim 8
Dependent Claim
48 words
The method of claim 6, wherein forming the second conductive layer further comprises: depositing a metal layer over the polycrystalline layer; and performing a thermal treatment, thereby causing the metal layer and the polycrystalline layer to react at an interface of the two layers, thereby forming a silicide.
Claim 9
Dependent Claim
38 words
The method of claim 1, wherein forming one or more word lines comprises the steps of etching a conductive layer into one or more regions, wherein the one or more regions define the one or more word lines.
Claim 10
Dependent Claim
51 words
The method of claim 1, wherein etching the insulative layer comprises overetching the insulative layer in regions adjacent to the one or more word lines, wherein the insulative region is substantially removed and one or more fences remain and wherein the fences are shorter than a thickness of the polysilicon layer.
Claim 11
Dependent Claim
18 words
The method of claim 1, wherein the substantially high insulating layer-to-polysilicon layer selectivity is at least about 3:1.
Claim 12
Dependent Claim
74 words
The method of claim 1, wherein etching the insulative layer comprises etching the insulative layer with a CF 4 CHF 3 O 2 plasma etch, wherein the flow rate of CF 4 is about 40 sccm, the flow rate of CHF 3 is about 15 sccm and the flow rate of O 2 is about 10 sccm, and wherein a chamber pressure is about 25 mTorr and an excitation power is about 170 W.
Claim 13
Independent Claim
173 words
A method of forming a flash memory device, comprising the steps of: forming a tunnel oxide on a substrate; forming a first conductive layer on the tunnel oxide; forming an insulating layer on the first conductive layer; forming a second conductive layer on the insulating layer; etching the second conductive layer, thereby defining one or more stacked gate structures; etching the insulating layer in regions adjacent to the stacked gate structures, wherein the etch exhibits a substantially high insulating layer-to-first conductive layer selectivity, thereby substantially reducing the height of a resultant insulative fence without substantially impacting the first conductive layer; etching the first conductive layer in regions adjacent to the stacked gate structures, wherein the etching of the first conductive layer is substantially anisotropic and removes substantially all the first conductive layer, resulting in the prevention of conductive remnants; and forming a source region and a drain region in the substrate, wherein the source region and the drain region are self-aligned by the stacked gate structures, thereby forming one or more memory cells.
Claim 14
Independent Claim
173 words
A method of forming a flash memory device, comprising the steps of: forming a tunnel oxide on a substrate; forming a first conductive layer on the tunnel oxide; forming an insulating layer on the first conductive layer; forming a second conductive layer on the insulating layer; etching the second conductive layer, thereby defining one or more stacked gate structures; etching the insulating layer in regions adjacent to the stacked gate structures, wherein the etch exhibits a substantially high insulating layer-to-first conductive layer selectivity, thereby substantially reducing the height of a resultant insulative fence without substantially impacting the first conductive layer; etching the first conductive layer in regions adjacent to the stacked gate structures, wherein the etching of the first conductive layer is substantially anisotropic and removes substantially all the first conductive layer, resulting in the prevention of conductive remnants; and forming a source region and a drain region in the substrate, wherein the source region and the drain region are self-aligned by the stacked gate structures, thereby forming one or more memory cells.
Claim 15
Dependent Claim
49 words
The method of claim 12, wherein the step of forming the second conductive layer further comprises the steps of: forming a metal layer over the polysilicon; converting the metal layer and the polysilicon layer into a silicide overlying the polysilicon layer; and forming an oxynitride layer over the silicide.
Claim 16
Dependent Claim
52 words
The method of claim 12, wherein etching the insulating layer comprises overetching the insulating layer in regions adjacent to the stacked gate structures, wherein the insulating layer is substantially removed and one or more insulating fences remain and wherein the insulating fences are shorter than a thickness of the first conductive layer.
Claim 17
Dependent Claim
19 words
The method of claim 12, wherein the substantially high insulating layer-to-first conductive layer selectivity is at least about 3:1.
Claim 18
Dependent Claim
74 words
The method of claim 12, wherein etching the insulating layer comprises etching the insulating layer with a CF 4 CHF 3 O 2 plasma etch, wherein the flow rate of CF 4 is about 40 sccm, the flow rate of CHF 3 is about 15 sccm and the flow rate of O 2 is about 10 sccm, and wherein a chamber pressure is about 25 mTorr and an excitation power is about 170 W.
References Cited (Backward Citations)
US5258095A
Cited
US5427967A
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