US5929441A
Expired / Lapsed
US
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Low mass optical coating for thin film detectors
Assignee: Texas Instruments Inc
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Filing: 1997-06-27
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Granted: 1999-07-27
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Expires: 2017-06-27
Abstract
Abstract A thermal detector having an optical coating comprising a porous film 64. The porous film preferably comprises a xerogel or aerogel and is greater than 80% porous. An optional optical impedance matching layer 66 may be deposited over the porous film 64. Advantages include decreased thickness of the thermal sensor, improved acuity of the image produced by the system, lower manufacturing temperatures, and the ability to use electrodes that are opaque to infrared energy.
Inventors
- 👤 Howard R. Beratan
- 👤 Chih-Chen Cho
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 20:15
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/10; G01J5/02; G01J5/0225; G01J5/023; G01J5/0235; G01J5/024; G01J5/08; G01J5/0853; G01J5/04; G01J5/046
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
78 words
A thermal detector comprising: a substrate; a support means; a first electrode above said substrate and said support means; a thermally sensitive element over said first electrode; a second electrode over said thermally sensitive element; and an optical coating comprising a porous film over said second electrode; wherein said support means provides thermal isolation and electrical connectivity between at least said first electrode, said second electrode and said substrate, wherein said thermally sensitive element comprises a self-supporting means.
Claim 2
Dependent Claim
78 words
A thermal detector comprising: a substrate; a support means; a first electrode above said substrate and said support means; a thermally sensitive element over said first electrode; a second electrode over said thermally sensitive element; and an optical coating comprising a porous film over said second electrode; wherein said support means provides thermal isolation and electrical connectivity between at least said first electrode, said second electrode and said substrate, wherein said thermally sensitive element comprises a self-supporting means.
Claim 3
Dependent Claim
37 words
The thermal detector of claim 1 wherein said support means comprises: at least two posts disposed on said substrate adjacent said first and second electrodes, wherein said support posts are attached to said first and second electrodes.
Claim 4
Dependent Claim
21 words
The detector of claim 1, wherein said porous film is a material selected from the group consisting of xerogels and aerogels.
Claim 5
Dependent Claim
11 words
The detector of claim 3, wherein said porous film comprises silicon.
Claim 6
Dependent Claim
15 words
The detector of claim 1, wherein said porous film has a porosity greater than 80%.
Claim 7
Dependent Claim
15 words
The detector of claim 5, wherein said porous film has a porosity greater than 99.9%.
Claim 8
Dependent Claim
16 words
The detector of claim 1 wherein said first and second electrodes are opaque to infrared wavelengths.
Claim 9
Dependent Claim
20 words
The detector of claim 1, wherein said thermally sensitive element is greater than zero and less than 1.0 micrometers thick.
Claim 10
Dependent Claim
69 words
The thermal detector of claim 1 wherein said first and second electrodes each comprise: a sensing electrode; a support arm comprising first and second ends, wherein said first end of said support arm is attached to said sensing electrode; and a contact pad attached to said second end of said support arm; wherein said support means is adjacent said contact pad of each of said first and second electrodes.
Claim 11
Dependent Claim
78 words
A thermal detector comprising: a substrate; a support means; a first electrode above said substrate and said support means; a thermally sensitive element over said first electrode; a second electrode over said thermally sensitive element; an optical coating comprising a porous film over said second electrode; and an optical impedance matching layer over said porous film, wherein said support means provides thermal isolation and electrical connectivity between at least said first electrode, said second electrode and said substrate.
Claim 12
Dependent Claim
78 words
A thermal detector comprising: a substrate; a support means; a first electrode above said substrate and said support means; a thermally sensitive element over said first electrode; a second electrode over said thermally sensitive element; an optical coating comprising a porous film over said second electrode; and an optical impedance matching layer over said porous film, wherein said support means provides thermal isolation and electrical connectivity between at least said first electrode, said second electrode and said substrate.
Claim 13
Independent Claim
119 words
A method for fabricating a thermal detector, comprising the steps of: providing a substrate; depositing a spacer-insulator material on said substrate; providing a support means; depositing a first conductor layer over said spacer-insulator layer and said support means; patterning said first conductor layer to form a bottom array of electrodes; depositing a thermally sensitive layer over said electrodes; patterning said thermally sensitive layer to form thermally sensitive elements; depositing a second conductor layer over said thermally sensitive elements; patterning said second conductor layer to form a top array of electrodes; depositing a precursor film on said second conductive layer; gelling said precursor film to form a porous film; and depositing an optical impedance matching layer over said porous film.
Claim 14
Independent Claim
119 words
A method for fabricating a thermal detector, comprising the steps of: providing a substrate; depositing a spacer-insulator material on said substrate; providing a support means; depositing a first conductor layer over said spacer-insulator layer and said support means; patterning said first conductor layer to form a bottom array of electrodes; depositing a thermally sensitive layer over said electrodes; patterning said thermally sensitive layer to form thermally sensitive elements; depositing a second conductor layer over said thermally sensitive elements; patterning said second conductor layer to form a top array of electrodes; depositing a precursor film on said second conductive layer; gelling said precursor film to form a porous film; and depositing an optical impedance matching layer over said porous film.
Claim 15
Dependent Claim
24 words
The method of claim 11, wherein said step of gelling said precursor film results in a porous film having a porosity greater than 80%.
Claim 16
Dependent Claim
24 words
The method of claim 12, wherein said step of gelling said precursor film results in a porous film having a porosity greater than 99.9%.
Claim 17
Dependent Claim
18 words
The method of claim 11, further comprising the step of removing said spacer-insulator material after said gelling step.
Claim 18
Independent Claim
133 words
A method for fabricating a thermal detector, comprising the steps of: providing a substrate; depositing a spacer-insulator material on said substrate; providing a support means; depositing a first conductor layer over said spacer-insulator layer and said support means; patterning said first conductor layer to form a bottom array of electrodes; depositing a first temporary filler material over said bottom array of electrodes; depositing a thermally sensitive layer over said electrodes; patterning said thermally sensitive layer to form thermally sensitive elements; depositing a second conductor layer over said thermally sensitive elements; patterning said second conductor layer to form a top array of electrodes; depositing a second temporary filler material over said top array of electrodes; depositing a precursor film on said second conductive layer; and gelling said precursor film to form a porous film.
Claim 19
Independent Claim
133 words
A method for fabricating a thermal detector, comprising the steps of: providing a substrate; depositing a spacer-insulator material on said substrate; providing a support means; depositing a first conductor layer over said spacer-insulator layer and said support means; patterning said first conductor layer to form a bottom array of electrodes; depositing a first temporary filler material over said bottom array of electrodes; depositing a thermally sensitive layer over said electrodes; patterning said thermally sensitive layer to form thermally sensitive elements; depositing a second conductor layer over said thermally sensitive elements; patterning said second conductor layer to form a top array of electrodes; depositing a second temporary filler material over said top array of electrodes; depositing a precursor film on said second conductive layer; and gelling said precursor film to form a porous film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-07-26 | 2003-01-25 | 2003-07-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-07-26 | 2007-01-25 | 2007-07-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-07-26 | 2011-01-25 | 2011-07-27 | $7700.00 | Window Closed / Lapsed |