Sealed actuator

Claim 2

A sealed actuator comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; housings to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space wherein said motor stator is disposed; wherein said bearings are a plurality of rolling bearings, said rolling bearings supporting said motor rotor at positions on said housings at both sides of a member constituting said sealing partition wall in a longitudinal direction of said motor rotor so that said housings directly receive a load applied to said bearings, wherein said displacement measuring means comprises a resolver rotor made of a mass of magnetic metal material, disposed at a side of said motor rotor, and includes a salient tooth cut from said mass of magnetic metal material; and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.

Claim 3

A sealed actuator as claimed in claim 1, wherein said resolver rotor is fixed to a member of a nonmagnetic substance.

Claim 4

A sealed actuator as claimed in claim 1, wherein said resolver stator includes a differential circuit type winding.

Claim 5

A sealed actuator as claimed in claim 1, further comprising a magnetic shield plate made of a magnetic metal material disposed between said stator magnetic pole of said motor stator and said detection coil magnetic pole of said resolver stator.

Claim 6

A sealed actuator as claimed in claim 1, wherein said resolver rotor is fixed to a member of a nonmagnetic substance; wherein said resolver rotor includes a differential circuit type winding; and wherein said actuator further comprises a magnetic shield plate made of a magnetic metal material disposed between said stator magnetic pole of said motor stator and said detection coil magnetic pole of said resolver stator.

Claim 7

A sealed actuator comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; a housing to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space wherein said motor stator is disposed; wherein said displacement measuring means comprises a resolver rotor made of a mass of magnetic metal material, disposed at a side of said motor rotor, and includes a salient tooth cut from said mass of magnetic metal material; and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.

Claim 8

A sealed actuator comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; a housing to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space wherein said motor stator is disposed; wherein said displacement measuring means comprises a resolver rotor made of a mass of magnetic metal material, disposed at a side of said motor rotor, and includes a salient tooth cut from said mass of magnetic metal material; and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.

Claim 9

A sealed actuator as claimed in claim 6, wherein said resolver rotor is fixed to a member of a nonmagnetic substance.

Claim 10

A sealed actuator as claimed in claim 6, wherein said resolver stator includes a differential circuit type winding.

Claim 11

A sealed actuator as claimed in claim 6, wherein said displacement measuring means includes a coarse resolver and a fine resolver configured such that it is unnecessary to return to an origin to detect the position of the motor rotor.

Claim 12

A sealed actuator as claimed in claim 6, wherein said motor stator and said motor rotor constitutes a variable-reluctance motor.

Claim 13

A sealed actuator as claimed in claim 6, further comprising a magnetic shield plate made of a magnetic metal material disposed between said stator magnetic pole of said motor stator and said detection coil magnetic pole of said resolver stator.

Claim 14

A sealed actuator as claimed in claim 6, wherein said resolver rotor is fixed to a member of a nonmagnetic substance; wherein said resolver rotor includes a differential circuit type winding; and wherein said actuator further comprises a magnetic shield plate made of a magnetic metal material disposed between said stator magnetic pole of said motor stator and said detection coil magnetic pole of said resolver stator.

Claim 15

A sealed actuator comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; a housing to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed; wherein said sealed actuator further comprises reinforcing means for reinforcing at least a part of said hermetically sealing partition wall, said reinforcing means being made of substantially the same nonmagnetic metal material as said partition wall.

Claim 16

A sealed actuator comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; a housing to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed; wherein said sealed actuator further comprises reinforcing means for reinforcing at least a part of said hermetically sealing partition wall, said reinforcing means being made of substantially the same nonmagnetic metal material as said partition wall.

Claim 17

A sealed actuator as claimed in claim 13, wherein said reinforcing means is at least one selected from a group consisting of a reinforcing member and a molding agent.

Claim 18

A sealed actuator comprising a plurality of unit sealed actuators connected in series to each other, each of said unit sealed actuators comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; a housing to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed; wherein said bearings are a plurality of rolling bearings, said rolling bearings supporting said motor rotor at positions on said housings at both sides of a member constituting said sealing partition wall in a longitudinal direction of said motor rotor so that said housings directly receive a load applied to said bearings; wherein said rotor magnetic pole includes a salient pole tooth of a steel material of a magnetic substance subjected to salient pole working; and wherein said displacement measuring means comprises a resolver rotor made of a magnetic metal material, disposed at a side of said motor rotor, and include a salient pole tooth; and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.

Claim 19

A sealed actuator comprising a plurality of unit sealed actuators connected in series to each other, each of said unit sealed actuators comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; a housing to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed; wherein said bearings are a plurality of rolling bearings, said rolling bearings supporting said motor rotor at positions on said housings at both sides of a member constituting said sealing partition wall in a longitudinal direction of said motor rotor so that said housings directly receive a load applied to said bearings; wherein said rotor magnetic pole includes a salient pole tooth of a steel material of a magnetic substance subjected to salient pole working; and wherein said displacement measuring means comprises a resolver rotor made of a magnetic metal material, disposed at a side of said motor rotor, and include a salient pole tooth; and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.

Claim 20

A sealed actuator comprising a plurality of unit sealed actuators connected in series to each other, each of said unit sealed actuators comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; housings to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed; wherein said bearings are a plurality of rolling bearings, said rolling bearings supporting said motor rotor at positions on said housings at both sides of a member constituting said sealing partition wall in a longitudinal direction of said motor rotor so that said housings directly receive a load applied to said bearings.

Claim 21

A sealed actuator comprising a plurality of unit sealed actuators connected in series to each other, each of said unit sealed actuators comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; housings to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed; wherein said bearings are a plurality of rolling bearings, said rolling bearings supporting said motor rotor at positions on said housings at both sides of a member constituting said sealing partition wall in a longitudinal direction of said motor rotor so that said housings directly receive a load applied to said bearings.

Claim 22

A sealed actuator comprising a plurality of unit sealed actuators connected in series to each other, each of said unit sealed actuators comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; a housing to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed; wherein said displacement measuring means comprises a resolver rotor made of a magnetic metal material, disposed at a side of said motor rotor, and including a salient tooth; and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.

Claim 23

A sealed actuator comprising a plurality of unit sealed actuators connected in series to each other, each of said unit sealed actuators comprising: a motor stator including a stator magnetic pole excited by a rotation-drive coil; a housing to which said motor stator is attached; a motor rotor including a rotor magnetic pole disposed opposite to a surface of said stator magnetic pole through a gap; bearings for rotatably supporting a rotation shaft of said motor rotor to said housing; displacement measuring means for measuring displacement of said motor rotor; and a hermetically sealing partition wall made of a nonmagnetic metal material and disposed at the gap between said stator magnetic pole and said rotor magnetic pole, a space where said motor rotor is disposed being hermetically isolated from a space where said motor stator is disposed; wherein said displacement measuring means comprises a resolver rotor made of a magnetic metal material, disposed at a side of said motor rotor, and including a salient tooth; and a resolver stator including a detection coil magnetic pole and disposed at a side of said motor stator.

Claim 24

A sealed actuator as claimed in claim 17, wherein said resolver rotor is fixed to a member of a nonmagnetic substance.

Claim 25

A sealed actuator as claimed in claim 17, wherein said resolver stator includes a differential circuit type winding.

Claim 26

A sealed actuator as claimed in claim 17, wherein said displacement measuring means includes a coarse resolver and a fine resolver.

Claim 27

A sealed actuator as claimed in claim 17, wherein said motor stator and said motor rotor constitutes a variable-reluctance motor.

Claim 28

A sealed actuator as claimed in claim 17, further comprising a magnetic shield plate made of a magnetic metal material disposed between said stator magnetic pole of said motor stator and said detection coil magnetic pole of said resolver stator.

Claim 29

A sealed actuator as claimed in claim 17, wherein said resolver rotor is fixed to a member of a nonmagnetic substance; wherein said resolver rotor includes a differential circuit type winding; and wherein said actuator further comprises a magnetic shield plate made of a magnetic metal material disposed between said stator magnetic pole of said motor stator and said detection coil magnetic pole of said resolver stator.

Claim 30

A sealed actuator as claimed in one of claims 15 to 22, wherein said rotation shaft of said motor rotor is an extension shaft fixed to said motor rotor.