US5899722A
Expired / Lapsed
US
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Method of forming dual spacer for self aligned contact integration
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1998-05-22
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Granted: 1999-05-04
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Expires: 2018-05-22
Abstract
Abstract In this invention two side wall spacers are applied to the vertical structure of a gate. The first spacer made of Si 3 N 4 provides for SAC (self aligned contact) definition and the second spacer made of SiO 2 is used for the definition of the LDD (lightly doped drain). The second spacer is the outer spacer and is anisotropically etched when the IPO (inter-poly-oxide) is etched to open a SAC contact area for second level polysilicon deposition. This allows a spacer width for the desired length of the LDD while providing a wider width for SAC contact. The SAC contact is not limited by the LDD spacer and the LDD spacer can be optimized without considering the SAC requirements. This invention is easily applied to SRAMS and DRAMS without extra masking.
Inventors
- 👤 Jenn Ming Huang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:50
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/05
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
183 words
A method of forming dual sidewall spacers for a semiconductor device, wherein some transistors have a shorter lightly doped drain, comprising the steps of: a) forming a plurality of transistor gates on a semiconductor substrate, wherein each of the gates comprises a silicon nitride insulator above a polysilicon gate electrode, b) ion implanting said semiconductor substrate using said gates as a mask to form lightly doped drain regions, c) forming silicon nitride spacers on the sidewalls of each gate, d) forming heavily doped first drain and first source regions in a non-memory region in said substrate using the silicon nitride spacer as a mask, e) forming silicon oxide spacers over said silicon nitride spacers, f) forming heavily doped second drain and second source regions in a memory region in said substrate using said silicon oxide spacers as a mask, g) depositing an interpoly oxide layer over said substrate, h) forming opening in said interpoly oxide layer in said non-memory region, exposing gate sidewall spacers, i) removing said silicon oxide spacers from within said opening j) forming a self aligned contact in said opening.
Claim 2
Independent Claim
183 words
A method of forming dual sidewall spacers for a semiconductor device, wherein some transistors have a shorter lightly doped drain, comprising the steps of: a) forming a plurality of transistor gates on a semiconductor substrate, wherein each of the gates comprises a silicon nitride insulator above a polysilicon gate electrode, b) ion implanting said semiconductor substrate using said gates as a mask to form lightly doped drain regions, c) forming silicon nitride spacers on the sidewalls of each gate, d) forming heavily doped first drain and first source regions in a non-memory region in said substrate using the silicon nitride spacer as a mask, e) forming silicon oxide spacers over said silicon nitride spacers, f) forming heavily doped second drain and second source regions in a memory region in said substrate using said silicon oxide spacers as a mask, g) depositing an interpoly oxide layer over said substrate, h) forming opening in said interpoly oxide layer in said non-memory region, exposing gate sidewall spacers, i) removing said silicon oxide spacers from within said opening j) forming a self aligned contact in said opening.
Claim 3
Dependent Claim
56 words
The method of claim 1, wherein forming said silicon nitride spacers comprises the steps of: a) depositing a layer of silicon nitride over said gates and said substrate by low pressure chemical vapor deposition to a thickness of between about 600 and 1000 Angstroms, b) anisotropically etching said silicon nitride to form said silicon nitride spacers.
Claim 4
Dependent Claim
61 words
The method of claim 1, wherein forming said silicon oxide spacers comprises the steps of: a) depositing a layer of silicon oxide over said gates and said substrate by low pressure chemical vapor deposition to a thickness of between about 600 and 1000 Angstroms, b) anisotropically etching said silicon oxide to form said silicon oxide spacers over said silicon nitride spacers.
Claim 5
Dependent Claim
37 words
The method of claim 1, wherein ion implanting forms P - lightly doped drain regions, and forming heavily doped first and second drain and source regions is done with a P + implant on an N substrate.
Claim 6
Dependent Claim
37 words
The method of claim 1, wherein ion implanting forms N - lightly doped drain regions, and forming heavily doped first and second drain and source regions is done with an N + implant on a P substrate.
Claim 7
Dependent Claim
27 words
The method of claim 1, wherein forming heavily doped source and drain regions can be done before forming said silicon oxide spacers over said silicon nitride spacers.
Claim 8
Dependent Claim
39 words
The method of claim 1, wherein forming said silicon oxide spacer protects the region and optimizes said transistor independent of the self aligned contact and forming the silicon nitride spacer optimizes said self aligned contact independent of said transistor.
References Cited (Backward Citations)
US4912061A
Cited
US5208472A
Cited
US5418392A
Cited
US5494838A
Cited
US5747373A
Cited
US5763312A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-05-03 | 2002-11-02 | 2003-05-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-05-03 | 2006-11-02 | 2007-05-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-05-03 | 2010-11-02 | 2011-05-04 | $7700.00 | Window Closed / Lapsed |