US5883387A
Expired / Lapsed
US
⏱️ 0.0 years remaining
SPM cantilever and a method for manufacturing the same
Assignee: Olympus Corp
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Filing: 1997-06-19
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Granted: 1999-03-16
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Expires: 2017-06-19
Abstract
Abstract An SPM cantilever comprises a cantilever portion shaped as a thin plate and extending between a proximal end and a free end, a supporting portion attached to one surface of the cantilever portion on a side of the proximal end, and a probe projecting from the other surface of the cantilever portion on a side of the free end of the cantilever portion the supporting member, and the cantilever portion and the probe are made of different materials.
Inventors
- 👤 Katsuhiro Matsuyama
- 👤 Michio Takayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 00:50
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/02; G01Q60/06; B; B82; B82Y; B82Y20/00; B82Y35/00; G01Q60/04; G01Q60/10; G01Q60/16; G01Q60/18; G01Q60/22; G01Q60/24; G01Q60/38; G01Q60/40; G01Q70/00; G01Q70/08; G01Q70/14; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/873
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
106 words
An SPM cantilever comprising: a probe portion; and a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever portion being made of materials having different properties, the material of the probe portion being a hard material relative to the material of the cantilever portion, and wherein said probe portion is made of silicon nitride, and said cantilever portion is made of silicon.
Claim 2
Dependent Claim
106 words
An SPM cantilever comprising: a probe portion; and a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever portion being made of materials having different properties, the material of the probe portion being a hard material relative to the material of the cantilever portion, and wherein said probe portion is made of silicon nitride, and said cantilever portion is made of silicon.
Claim 3
Dependent Claim
34 words
The SPM cantilever according to claim 1, wherein the free end portion of said cantilever includes a hole which extends to the first surface from the second surface, and said probe penetrates the hole.
Claim 4
Dependent Claim
126 words
An SPM cantilever comprising: a probe Portion; and a cantilever Portion having a Proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever portion being made of materials having different properties, the material of the Probe Portion being a hard material relative to the material of the cantilever portion, wherein said Probe portion is made of silicon nitride, and said cantilever portion is made of silicon, and wherein the silicon nitride of which said probe portion is made includes silicon and nitrogen in a ratio of 3:4.
Claim 5
Dependent Claim
126 words
An SPM cantilever comprising: a probe Portion; and a cantilever Portion having a Proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever portion being made of materials having different properties, the material of the Probe Portion being a hard material relative to the material of the cantilever portion, wherein said Probe portion is made of silicon nitride, and said cantilever portion is made of silicon, and wherein the silicon nitride of which said probe portion is made includes silicon and nitrogen in a ratio of 3:4.
Claim 6
Dependent Claim
34 words
The SPM cantilever according to claim 3, wherein the free end portion of said cantilever includes a hole which extends to the first surface from the second surface, and said probe penetrates the hole.
Claim 7
Dependent Claim
106 words
An SPM cantilever comprising: a probe portion; and a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever portion being made of materials having different properties, the material of the probe portion being a hard material relative to the material of the cantilever portion, and wherein said probe portion is made of silicon carbide, and said cantilever portion is made of silicon.
Claim 8
Dependent Claim
106 words
An SPM cantilever comprising: a probe portion; and a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever portion being made of materials having different properties, the material of the probe portion being a hard material relative to the material of the cantilever portion, and wherein said probe portion is made of silicon carbide, and said cantilever portion is made of silicon.
Claim 9
Dependent Claim
34 words
The SPM cantilever according to claim 5, wherein the free end portion of said cantilever includes a hole which extends to the first surface from the second surface, and said probe penetrates the hole.
Claim 10
Dependent Claim
127 words
An SPM cantilever comprising: a probe portion; and a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever Portion being made of materials having different properties, the material of the probe portion being a hard material relative to the material of the cantilever portion, and wherein said probe portion is made of silicon nitride including silicon and nitrogen in a ratio of 3:4, and said cantilever portion is made of silicon nitride including a larger amount of silicon relative to the probe portion.
Claim 11
Dependent Claim
127 words
An SPM cantilever comprising: a probe portion; and a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever Portion being made of materials having different properties, the material of the probe portion being a hard material relative to the material of the cantilever portion, and wherein said probe portion is made of silicon nitride including silicon and nitrogen in a ratio of 3:4, and said cantilever portion is made of silicon nitride including a larger amount of silicon relative to the probe portion.
Claim 12
Dependent Claim
133 words
An SPM cantilever comprising: a probe portion; and a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever portion being made of materials having different properties, the material of the probe portion being a hard material relative to the material of the cantilever portion, and further comprising an optical shading portion attached to a circumferential surface of the probe portion and made of material having a lower refraction index than the probe portion, and wherein said probe portion is supported on the cantilever portion by the optical shading portion.
Claim 13
Dependent Claim
133 words
An SPM cantilever comprising: a probe portion; and a cantilever portion having a proximal end portion, a free end portion, a first surface and a second surface, the probe portion extending from the first surface of the free end portion, the cantilever portion being bent according to an interaction between a sample and the probe portion, the probe portion and the cantilever portion being made of materials having different properties, the material of the probe portion being a hard material relative to the material of the cantilever portion, and further comprising an optical shading portion attached to a circumferential surface of the probe portion and made of material having a lower refraction index than the probe portion, and wherein said probe portion is supported on the cantilever portion by the optical shading portion.
Claim 14
Dependent Claim
38 words
The SPM cantilever according to claim 8, wherein: said optical shading portion and said probe portion have optically transparent properties; and said probe portion has a hollow conical shape and an opening at a proximal end portion thereof.
Claim 15
Dependent Claim
52 words
The SPM cantilever according to claim 8, wherein: said probe portion has a hollow conical shape and an opening at a proximal end portion thereof; and said optical shading portion is formed of a metal film having a surface in contact with the probe portion and which acts as a mirror surface.
Claim 16
Dependent Claim
49 words
The SPM cantilever according to claim 8, wherein: said probe portion includes a conical member made of a bulk homogeneous isotropic medium; and said optical shading portion is formed of a metal film having a surface in contact with the probe portion and which acts as a mirror surface.
Claim 17
Dependent Claim
34 words
The SPM cantilever according to claim 8, wherein said optical shading portion is made of a metal film having a surface in contact with the probe portion and which acts as a mirror surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-15 | 2002-09-14 | 2003-03-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-15 | 2006-09-14 | 2007-03-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-15 | 2010-09-14 | 2011-03-16 | $7700.00 | Window Closed / Lapsed |