US5882465A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing microfluidic devices
Assignee: Caliper Life Sciences Inc
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Filing: 1997-06-18
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Granted: 1999-03-16
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Expires: 2017-06-18
Abstract
Abstract The present invention is directed to improved methods and apparatuses for manufacturing microfabricated devices, and particularly, microfluidic devices. In general the methods and apparatuses of the invention provide improved methods of bonding substrates together by applying a vacuum to the space between the substrates during the bonding process.
Inventors
- 👤 Richard J. McReynolds
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:27
CPC Classifications
B; B32; B32B; B32B38/00; B32B38/18; B32B38/1825; B32B38/1833; B32B38/1841; B29; B29C; B29C65/00; B29C65/02; B29C65/78; B29C65/7841; B29C65/7847; B29C66/00; B29C66/40; B29C66/41; B29C66/45; B29C66/50; B29C66/51; B29C66/54; B29C66/80; B29C66/82; B29C66/826; B29C66/8266; B29C66/82661; B32B37/00; B32B37/10; B32B37/1018; B29C65/08; B29C65/10; B29C65/48; B29C65/4895; B29C66/01; B29C66/05; B29C66/10; B29C66/11; B29C66/112; B29C66/1122; B29C66/70; B29C66/71; B29L; B29L2031/00; B29L2031/756; B32B2038/1891; Y; Y10; Y10T; Y10T156/00; Y10T156/17; Y10T156/1702; Y10T156/1744; Y10T156/1798
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
143 words
A method of forming microfluidic devices comprising: providing a first substrate having at least a first planar surface, a second surface opposite the planar surface, and having a plurality of apertures disposed through the first substrate from the first surface to the second surface; applying a vacuum to the apertures; mating the first planar surface of the first substrate with a first planar surface of a second substrate, wherein at least one of the first planar surface of the first substrate and the first planar surface of the second substrate comprises at least two intersecting channels fabricated therein, each of the channels being in fluid communication with at least one of the apertures disposed through the first substrate when the first and second substrates are mated; and bonding the first surface of the first substrate to the first surface of the second substrate.
Claim 2
Independent Claim
143 words
A method of forming microfluidic devices comprising: providing a first substrate having at least a first planar surface, a second surface opposite the planar surface, and having a plurality of apertures disposed through the first substrate from the first surface to the second surface; applying a vacuum to the apertures; mating the first planar surface of the first substrate with a first planar surface of a second substrate, wherein at least one of the first planar surface of the first substrate and the first planar surface of the second substrate comprises at least two intersecting channels fabricated therein, each of the channels being in fluid communication with at least one of the apertures disposed through the first substrate when the first and second substrates are mated; and bonding the first surface of the first substrate to the first surface of the second substrate.
Claim 3
Dependent Claim
38 words
The method of claim 1, wherein the step of applying a vacuum to the apertures comprises mounting the second surface of the first substrate on a vacuum chuck whereby the vacuum chuck provides a vacuum to the apertures.
Claim 4
Dependent Claim
33 words
The method of claim 1, wherein the mating step comprises heating the first and second substrates to bond the first surface of the first substrate to the first surface of the second substrate.
Claim 5
Dependent Claim
29 words
The method of claim 3, wherein the step of heating the substrates comprises heating the first and second substrates to a temperature between about 80° C. and 200° C.
Claim 6
Dependent Claim
14 words
The method of claim 4, wherein the first and second substrates comprise polymeric substrates.
Claim 7
Dependent Claim
34 words
The method of claim 3, wherein the substrates comprise silica-based substrates, and wherein the mating step further comprises heating the first and second substrates to a temperature between about 500° C. and 1400° C.
Claim 8
Dependent Claim
51 words
The method of claim 1, wherein the substrates comprise silica-based substrates, and wherein the bonding step comprises heating the first and second substrates to between about 90° and 200° C., followed by the step of heating the first and second substrates to a temperature between about 500° C. and 1400° C.
Claim 9
Dependent Claim
38 words
The method of claim 1, further comprising the step of applying an adhesive to at least one of the first surface of the first substrate or the first surface of the second substrate prior to the mating step.
Claim 10
Dependent Claim
13 words
The method of claim 1, wherein the first and second substrates comprise glass.
Claim 11
Dependent Claim
16 words
The method of claim 1, wherein the first and second substrates are comprised of polymeric materials.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-15 | 2002-09-14 | 2003-03-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-15 | 2006-09-14 | 2007-03-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-15 | 2010-09-14 | 2011-03-16 | $7700.00 | Window Closed / Lapsed |